CN1755799A - Micro-driver, magnetic head folding sheet combination with micro-driver and magnetic disk driver - Google Patents

Micro-driver, magnetic head folding sheet combination with micro-driver and magnetic disk driver Download PDF

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Publication number
CN1755799A
CN1755799A CN 200410079310 CN200410079310A CN1755799A CN 1755799 A CN1755799 A CN 1755799A CN 200410079310 CN200410079310 CN 200410079310 CN 200410079310 A CN200410079310 A CN 200410079310A CN 1755799 A CN1755799 A CN 1755799A
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magnetic head
microdrive
piece combination
fold piece
piezoelectric
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CN 200410079310
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CN100411015C (en
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姚明高
白石一雅
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SAE Magnetics HK Ltd
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SAE Magnetics HK Ltd
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Priority to CNB2004100793103A priority Critical patent/CN100411015C/en
Priority to JP2005279392A priority patent/JP4837350B2/en
Publication of CN1755799A publication Critical patent/CN1755799A/en
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Publication of CN100411015C publication Critical patent/CN100411015C/en
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  • Moving Of The Head To Find And Align With The Track (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)

Abstract

The invention discloses a magnetic head folding sheet combination, which comprises a magnetic head (slider); a micro-actuator (micro-ac tua tor) for horizontally rotating the magnetic head with a center portion of the magnetic head as a rotation center; and a suspension (suspension) for supporting the head and the micro-actuator; wherein the micro-actuator comprises a support frame, the support frame comprises a base part, a movable sheet and a guide column connecting the base part and the movable sheet; and at least one piezoelectric sheet connecting the base and the movable sheet; wherein the guide post comprises a pivot part for assisting the horizontal rotation of the magnetic head. The pivot portion is less wide than the guide post. The cantilever part comprises a supporting strip formed on a tongue part of the cantilever and used for abutting against the base part of the supporting frame. The invention also discloses a hard disk drive structure using the magnetic head folding sheet combination.

Description

Microdrive, the magnetic head fold piece combination that is provided with this microdrive and disc driver
Technical field
The present invention relates to disc driver, the magnetic head fold piece combination that is meant microdrive especially and uses this microdrive.
Background technology
Disc driver is a kind of information-storing device that uses the magnetic medium storage data.With reference to figure 1a, existing typical disc driver (Disk Drive) comprises that a disk and one are used to drive magnetic head fold piece combination 277 (Head Gimbal Assembly, actuating arm HGA) (magnetic head fold piece combination 277 is provided with a cantilever part (indicating) that magnetic head 203 is housed).Wherein, disk is contained in one in order on the Spindle Motor that drives the disk rotation, a voice coil motor (Voice-Coil Motor, VCM) be used for the motion of controlling and driving arm, thereby control head 203 moves to next track from a track on magnetic disk surface, and then reads or write data from disk.
Yet, in the stroke of magnetic head 203 and since voice coil motor (VCM) and cantilever part intrinsic tolerance (Tolerance), magnetic head 203 can not carry out good position control, thereby influences magnetic head 203 read or write data from disk.
In order to address the above problem, piezo-electric micro driver (piezoelectric (PZT) micro-actuator) is used to adjust the displacement (displacement) of magnetic head 203.That is, thereby piezo-electric micro driver is adjusted the displacement compensation voice coil motor (VCM) of magnetic head 203 and the tolerance of cantilever part with a less amplitude.Like this, can make the track width become littler, can increase the TPI value (' tracks per inch ' value) (promptly having increased its surface recording density) of 50% disc driver.
With reference to figure 1b, traditional piezo-electric micro driver 205 is provided with the ceramic frame 297 of a U-shaped.This U-shaped ceramic frame 297 comprises two ceramic arms 207, and wherein each ceramic arm 207 is provided with a piezoelectric patches (not shown) in the one side.With reference to figure 1a and 1b, piezo-electric micro driver 205 links to each other with cantilever part 213 physics, wherein, in each ceramic arm 207 1 side, three 209 (gold goal welding (gold ball bonding that receive that are electrically connected are arranged, GBB) or the tin ball bonding meet (solder bump bonding, SBB)) microdrive 205 be connected on the cable 210 of magnetic head fold piece combination.In addition, also have four 208 (GBB or SBB) that receive of being electrically connected to be used to realize being electrically connected between magnetic head 203 and the cantilever part 213.Fig. 1 c has then showed the detailed process of magnetic head 203 being inserted microdrive 205.Wherein, magnetic head 203 2: 206 bonding by on epoxy glue point 212 and two the ceramic arms 207, thus make the motion of magnetic head 203 depend on the ceramic arm 207 of microdrive 205.
When electric current puts on the microdrive 205 by cantilever part cable 210, thereby the piezoelectric patches of microdrive 205 will expand or shrink ceramic arms 207 distortion of two of causing U-shaped ceramic frame 297 and magnetic head 203 is moved on the track of disk.Like this, a good head position adjustment (head positionadjustment) just can realize.
Yet, because described piezo-electric micro driver 205 and magnetic head 203 are installed on the cantilevered tab (not indicating), when piezo-electric micro driver 205 is excited, because the restriction of the U-shaped ceramic frame 297 of microdrive 205, it will be done simple translation and magnetic head 203 is waved, and will produce the resonance of the cantilever part of the frequency identical with the vibrations that excite the cantilever part substrate to cause like this.This will limit the raising of the servo bandwidth and the capacity of disc driver.As shown in Figure 2, the resonance curve when label 201 representatives excite the cantilever part substrate, the resonance curve when label 202 representatives excite microdrive 205, this figure clearly shows the problems referred to above.
In addition, because microdrive 205 comprises an extra block, thus its static properties not only influenced, and influence the dynamic property of cantilever part 213, the performance that for example resonates (resonance performance), thus reduce the resonant frequency of cantilever part 213 and increased its gain.
Simultaneously, because the U-shaped ceramic frame of microdrive 205 2,970 minutes is frangible, so its anti-seismic performance also is a problem.
Therefore, providing a kind of microdrive, magnetic head fold piece combination, disc driver is necessity to address the above problem real.
Summary of the invention
Based on the deficiencies in the prior art, fundamental purpose of the present invention is to provide a kind of microdrive and magnetic head fold piece combination, can realize good head position adjustment, and when exciting microdrive, have good resonance performance (resonance performance).
Another object of the present invention is to provide a kind of disc driver with big servo bandwidth and capacity.
In order to achieve the above object, the present invention has disclosed a kind of magnetic head fold piece combination (head gimbalassembly) and having comprised: magnetic head (slider); With the magnetic head core is the microdrive (micro-actuator) that rotation center horizontally rotates magnetic head; And be used to support the cantilever part (suspension) of described magnetic head and microdrive.Wherein, described microdrive comprises carriage, and this carriage comprises the post that draws of base portion, movable plate, connection base portion and movable plate; And at least one piezoelectric patches of connection base portion and movable plate; Describedly draw the hinge portion that post comprises that a cue head horizontally rotates.It is little that described in the present invention hinge portion ratio draws the post width.In one embodiment, described cantilever part comprises the bracing or strutting arrangement that is formed at the cantilever tongue, is used to support the carriage base portion.Described at least one piezoelectric patches is held between the carriage of described cantilever tongue and microdrive, and a slice anisotropic conductive film (ACF) is with described at least one piezoelectric patches and cantilever part physics and be electrical connected.
In one embodiment of the invention, described head portion is installed on the movable plate of carriage, and described bracing or strutting arrangement and cantilever part are one-body molded or be attached thereto and connect.Wherein, described bracing or strutting arrangement is made by polymkeric substance or metal.In one embodiment, described cantilever part comprises a load beam that is provided with kick, and described kick is used to support described cantilever tongue, and described hinge portion is formed on the correspondence position of described kick.Simultaneously, between carriage and cantilever tongue, form a parallel clearance.In the present invention, described at least one piezoelectric patches is film piezo-electric sheet or piezoelectric ceramics sheet.Described at least one piezoelectric patches is single layer structure or comprises basic unit and the sandwich construction of piezoelectric layer.Described piezoelectric layer is individual layer piezoelectric structure or multi-layer piezoelectric structure, and described basic unit is made by metal, pottery or polymkeric substance (polymer).
In one embodiment of the invention, described base portion and movable plate are by drawing post parallel connection in the precalculated position, and described base portion and movable plate are rectangular parallelepiped.The two ends of each piezoelectric patches are connected with movable plate with base portion respectively, are equipped with plural electrode contacts on each piezoelectric patches.
A kind of hard disk drive of the present invention, the actuating arm, the disk that comprise magnetic head fold piece combination, be connected with described magnetic head fold piece combination; And in order to rotate the Spindle Motor of described disk.Wherein, described magnetic head fold piece combination comprises magnetic head (slider), is the rotation center microdrive (micro-actuator) that horizontally rotates magnetic head and the cantilever part (suspension) that is used to support described magnetic head and microdrive with the magnetic head core.Wherein said microdrive comprises carriage, and this carriage comprises the post that draws of base portion, movable plate, connection base portion and movable plate; And at least one piezoelectric patches of connection base portion and movable plate; Wherein, describedly draw the hinge portion that post comprises that a cue head horizontally rotates.
Compared with prior art, microdrive of the present invention utilizes piezoelectric patches to rotate the movable plate of carriage, and head portion be installed on the movable plate, thereby can rotating magnetic head.Simultaneously, be provided with drawing post and can stoping the magnetic head transverse movement of hinge portion, and only allow it to rotate around the hinge portion.Because the hinge portion is corresponding with the center line of magnetic head, so magnetic head can be worked under the situation that does not make the magnetic head fold piece combination swing.That is, hinder marginal part of magnetic head (trailing side) and exterior region (leading side) thus can simultaneously make magnetic head obtain bigger mobile range to the different directions rotation.Because magnetic head is along its center rotation, so can obtain a bigger position stroke adjustment capability and wideer servo bandwidth.Usually, the work efficiency of adjusting the microdrive of magnetic head by rotation mode is 3 times of the microdrive (for example prior art) of adjusting magnetic head by the translation mode.Microdrive of the present invention is adjusted magnetic head so can obtain being equivalent to the work efficiency of 3 times of prior aries by rotation mode.In addition, need provide the driving voltage of 40V to be used for the piezoelectricity operation with respect to prior art, the present invention only needs the driving voltage of 10V is provided because omitted the swing mode (sway mode) of microdrive, and accordingly, it has been saved the energy and can obtain better performance.In addition, because on cantilevered tab, form the base portion that a bracing or strutting arrangement is used to support carriage, thereby between cantilevered tab and carriage, form a parallel clearance, like this, when microdrive is excited, movable plate will be more freely motion and at rotating magnetic head on a large scale.In addition, the cantilever resonance effect can not occur in low-frequency range, and only has simple microdrive resonance effect to occur in high band, and this will increase the servo bandwidth and the disc driver capacity of disc driver.At last, contrast existing U type ceramic frame, the structure of microdrive of the present invention will obtain better anti-seismic performance.
For making the present invention easier to understand, further set forth the specific embodiment of microdrive of the present invention, magnetic head fold piece combination, hard disk drive below in conjunction with accompanying drawing.
Description of drawings
Fig. 1 a is the stereographic map of existing magnetic head fold piece combination (HGA);
Fig. 1 b is the enlarged partial view of Fig. 1 a;
Fig. 1 c has showed magnetic head has been inserted detailed process in the microdrive of magnetic head fold piece combination among Fig. 1 a (HGA);
Fig. 2 has showed the resonance curve (resonance curve) of magnetic head fold piece combination among Fig. 1 a;
The stereographic map of Fig. 3 magnetic head fold piece combination of the present invention (HGA) first embodiment;
Fig. 4 is the partial enlarged drawing of magnetic head fold piece combination among Fig. 3;
Fig. 5 is the three-dimensional exploded view of magnetic head fold piece combination among Fig. 3;
Fig. 6 be among Fig. 4 magnetic head fold piece combination along the partial sectional view of A-A line;
Fig. 7 has showed the original state when microdrive of the present invention is not applied to voltage;
Fig. 8 and 9 has showed the two kind different working methods of the microdrive among Fig. 7 when being excited;
Figure 10 a has showed the electrical connection between two piezoelectric patches of microdrive shown in Figure 7, and according to one embodiment of the invention, described two piezoelectric patches have identical polarised direction;
Figure 10 b has showed the electrical connection between two piezoelectric patches of microdrive shown in Figure 7, and according to a further embodiment of the invention, described two piezoelectric patches have opposite polarised direction;
Figure 10 c has showed the oscillogram that is added in shown in Figure 10 a two voltages on two piezoelectric patches respectively;
Figure 10 d has showed the oscillogram that is added in shown in Figure 10 b the voltage on two piezoelectric patches respectively;
Figure 11 has showed the resonance curve of magnetic head fold piece combination among Fig. 3; And
Figure 12 is the stereographic map of an embodiment of disc driver of the present invention.
Embodiment
With reference to figure 3, a kind of magnetic head fold piece combination 3 of the present invention comprises magnetic head 31, microdrive 32 and is used to carry the cantilever part 8 of described magnetic head 31 and microdrive 32.
Please refer to Fig. 3 equally, cantilever part 8 comprises load beam (load beam) 17, flexible element (flexure) 13, articulated part (hinge) 15 and substrate (base plate) 11.Load beam 17 is provided with plural kick 329 (ginseng Fig. 6).Be provided with plural electrode contacts 308 on flexible element 13, plural electrode contacts 308 1 ends link to each other with control system (not shown), and the other end and plural cable 309,311 link to each other.With reference to figure 4 and 5, described flexible element 13 also comprises a cantilever tongue piece (suspension tongue) 328, described cantilever tongue piece 328 is used to support microdrive 32 and magnetic head 31, and makes bearing capacity always put on the central area of magnetic head 31 by the kick on the load beam 17 329.Described cantilever tongue piece 328 is provided with plural electrode contacts 113 and 328a.Magnetic head 31 1 ends are provided with plural electrode contacts 204 corresponding to cantilever tongue piece 328 top electrode contacts 113.
With reference to figure 4-5, according to one embodiment of the invention, microdrive 32 comprises carriage 320 and two piezoelectric patches 321,322.Counter electrode contact 328a is provided with plural electrode contacts (for example, piezoelectric patches 321 is provided with two electrode contacts 321a, and piezoelectric patches 322 is provided with two electrode contacts 322a) on each piezoelectric patches 321,322.Described carriage 320 can be made by metal (for example, stainless steel), pottery or polymkeric substance.It comprises end arm 392, top arm 390, and at the bottom of the parallel connection in precalculated position arm 392 and top arm 390 draw post 393.In one embodiment, end arm 392 and top arm 390 are rectangular parallelepiped.Described drawing is formed with hinge portion 394 on the post 393, it is little that the width ratio of this hinge portion 394 draws post 393.Arm of the described end 392 comprises two free end 392a, 392b, and described top arm 390 comprises two free end 390a, 390b.With reference to figure 6, in one embodiment, hinge portion 394 forms corresponding to the position of small embossment 329 on the load beam 17.Like this, carriage 320 just has identical rotation center with cantilevered tab 328, and a parallel clearance 400 is formed between carriage 320 and the cantilevered tab 328 simultaneously.In the present invention, piezoelectric patches 321 is by linking to each other its two ends and couple together with carriage 320 in two free end 392b of carriage 320 with 390b.Similar, piezoelectric patches 322 is by linking to each other its two ends and couple together with carriage 320 in two free end 392a of carriage 320 with 390a.Wherein, the connected mode of described piezoelectric patches 321,322 and carriage 320 can be traditional connected mode, and for example epoxy glue connects, anisotropic conductive film connects.
In the present invention, described piezoelectric patches 321,322 is preferably made by thin films of piezoelectric material, and this piezoelectric patches 321,322 can be individual layer piezoelectric element or multilayer piezoelectric element.In one embodiment, the sandwich construction of basic unit and outer piezoelectric layer in described piezoelectric patches 321,322 all can be and comprises.Basic unit can be made by pottery, polymkeric substance or metal in described, and outer piezoelectric layer can be individual layer piezoelectric element or multilayer piezoelectric element.
Be formed at reference to figure 5 and 6, one support bars 300 and be used for supported frame 320 on the described cantilevered tab 328.In the present invention, described support bar 300 can be one-body molded with cantilevered tab 328, or be attached thereto by laser bonding and connect.In one embodiment, the thickness of described support bar 300 is more than or equal to 30 μ m, and this support bar 300 is made (as stainless steel) by polymkeric substance or metal.
With reference to figure 4-6, in one embodiment of the invention, described two piezoelectric patches 321,322 and carriage 320 connect together and form microdrive 32; Then, magnetic head 31 and microdrive 32 is bonding; Then, magnetic head 31 and microdrive 32 are installed on the cantilever part 8 and form magnetic head fold piece combination 3.
In the present invention, magnetic head 31 is installed on the carriage 32 by epoxy glue or ACF 40 parts.Preferably, magnetic head 31 parts are installed on the top arm 390.Microdrive 32 is by linking to each other two piezoelectric patches 321,322 on it with ACF and being contained on the cantilever part 8 with cantilevered tab 328.Accordingly, electrode contacts 321a on two piezoelectric patches 321,322 and the electrode contacts 328a on 322a and the cantilevered tab 328 electrically connect, thereby microdrive 32 and two cables 311 on the cantilever part 8 are electrically connected.At this moment, support bar 300 is crushed on the end arm 392 that carriage is used to support carriage 320 for 320 times.In one embodiment, described support bar 300 1 ends are near hinge portion 394.In the present invention, plural Metal Ball 405 is used to electrically connect the electrode contacts 204 and electrode contacts 113 on the magnetic head 31, thereby magnetic head 31 and cable 309 are electrically connected.By described cable 309,311, described electrode contacts 308 is with magnetic head 31 and microdrive 32 and control system be electrical connected (not shown).Obviously, magnetic head fold piece combination 3 also can be assembled like this: at first microdrive 32 is connected with cantilever part 8, then magnetic head 31 is contained on the microdrive 32.
Fig. 7-9,10a, 10c have showed first kind of working method of microdrive 32 realization head positions adjustment functions.In this embodiment, described two piezoelectric patches 321,322 have identical polarised direction (polarization direction), shown in Figure 10 a, one end 404 of these two piezoelectric patches 321,322 is by common ground, and other end 401a and 401b are applied two voltages (shown in Figure 10 c) with two different wave 406,408 respectively.Fig. 7 has showed the original state of microdrive 32, the state when promptly not having voltage to put on the piezoelectric patches 321,322 on the microdrive 32.When the voltage with waveform 406,408 puts on two piezoelectric patches 321,322, in first half period, variation along with driving voltage, piezoelectric patches 321 is retracted to a position the shortest gradually, and piezoelectric patches 322 expand into a position the longest (corresponding to the displaced position of maximum) gradually simultaneously; Be returned to its initial position then again gradually.In the present invention, the free end 392a of piezoelectric patches 322 and carriage 320 links to each other with 390a because the free end 392b of piezoelectric patches 321 and carriage 320 links to each other with 390b.In above-mentioned half period, along with the variation of driving voltage 406,408, top arm 390 will be that rotation center rotates to the left side with hinge portion 394 by piezoelectric patches 321,322, return its initial position then again.Because being formed on, hinge portion 394 draws on the post 393.When driving voltage 406,408 enters second half period (opposite with the phase place of first half period), piezoelectric patches 322 is retracted to a position the shortest gradually, and piezoelectric patches 321 expand into a position the longest gradually simultaneously; Be returned to its initial position then again gradually.In the present invention, because the width of hinge portion 394 is littler than the width that draws post 393, horizontally rotate so hinge portion 394 can cue head 31, that is, draw post 393 and be easy to be bent, thereby make magnetic head 31 can obtain bigger rotation at 394 places, little width hinge portion.In addition, because described support bar 300 supports the end arm 392 of carriage 320, thereby form a parallel clearance at top arm 390 and 328 of cantilevered tab, like this, top arm 390 can more freely rotate when being driven by piezoelectric patches 321,322.
Fig. 7-9,10b, 10d have showed the another kind of working method of two piezoelectric patches 321,322 realization head positions adjustment functions.In this embodiment, described two piezoelectric patches 321,322 have opposite polarised direction, shown in Figure 10 b.One end 404 of these two piezoelectric patches 321,322 is by common ground, and other end 401a and 401b are applied the voltage (ginseng Figure 10 d) with same sinusoidal waveform 407 respectively.Under above-mentioned driven, in identical half period, piezoelectric patches 321 will shrink gradually and simultaneously piezoelectric patches 322 will expand gradually, thereby the top arm 390 of carriage 320 is rotated to the left side; When voltage enters down half period, piezoelectric patches 321 will expand and piezoelectric patches 322 contractions simultaneously, thereby top arm 390 is rotated to the right side.
In the present invention because magnetic head 31 partly is installed on the top arm 390 of carriage 320, so described magnetic head 31 will be rotation center with its core (corresponding to hinge portion 394), along with top arm 390 rotates.Thereby can obtain a good head position adjustment.
Compared with prior art, microdrive 32 of the present invention can magnetic head 31 core be rotation center rotating magnetic head 31, thereby the exterior region (leading side) of magnetic head 31 and hinder marginal part (trailingside) can be moved toward different directions, yet existing microdrive only can be swung the hinder marginal part (because its exterior region is fixed) of magnetic head. like this, because the exterior region of magnetic head and hinder marginal part are all removable, so the present invention can make magnetic head obtain by a larger margin swing.Accordingly, just can improve the position adjustment capability (headposition adjustment capacity) of magnetic head.
Figure 11 has showed the test result of magnetic head fold piece combination of the present invention resonance performance, and wherein, 701 represent the substrate excitation resonance curve of cantilever part, and 702 represent microdrive excitation resonance curve.Can find out from this figure, when exciting microdrive 32, cantilever resonance does not occur in low-frequency range, and only have simple microdrive resonance to occur in high band, to increase the servo bandwidth of disc driver like this and improve its capacity, reduce the search and the positioning time (seeking and settling time) of magnetic head simultaneously.
In the present invention, with reference to Figure 12, magnetic head fold piece combination of the present invention 3 assembled with disc driver housing 108, disk 101, Spindle Motor 102, voice coil motor 107 etc. can form a disc driver.Because the assembling process of disc driver of the present invention and structure are known by the industry those of ordinary skill, be not described in detail in this.

Claims (20)

1. a magnetic head fold piece combination (head gimbal assembly) is characterized in that comprising:
Magnetic head (slider);
With the magnetic head core is the microdrive (micro-actuator) that rotation center horizontally rotates magnetic head; And
Be used to support the cantilever part (suspension) of described magnetic head and microdrive; Wherein said microdrive comprises carriage, and this carriage comprises the post that draws of base portion, movable plate, connection base portion and movable plate; And
At least one piezoelectric patches that connects base portion and movable plate;
Wherein, describedly draw the hinge portion that post comprises that a cue head horizontally rotates.
2. magnetic head fold piece combination as claimed in claim 1 is characterized in that: it is little that described hinge portion ratio draws the post width.
3. magnetic head fold piece combination as claimed in claim 1 is characterized in that: described cantilever part comprises the bracing or strutting arrangement that is formed at the cantilever tongue, is used to support the carriage base portion.
4. magnetic head fold piece combination as claimed in claim 3, it is characterized in that: described at least one piezoelectric patches is held between the carriage of described cantilever tongue and microdrive, and a slice anisotropic conductive film (ACF) is with described at least one piezoelectric patches and cantilever part physics and be electrical connected.
5. magnetic head fold piece combination as claimed in claim 1 is characterized in that: described head portion is installed on the movable plate of carriage.
6. magnetic head fold piece combination as claimed in claim 3 is characterized in that: described bracing or strutting arrangement and cantilever part are one-body molded or be attached thereto and connect.
7. magnetic head fold piece combination as claimed in claim 3 is characterized in that: described bracing or strutting arrangement is made by polymkeric substance or metal.
8. magnetic head fold piece combination as claimed in claim 3 is characterized in that: described cantilever part comprises a load beam that is provided with kick, and described kick is used to support described cantilever tongue, and described hinge portion is formed on the correspondence position of described kick.
9. magnetic head fold piece combination as claimed in claim 3 is characterized in that: form a parallel clearance between carriage and cantilever tongue.
10. magnetic head fold piece combination as claimed in claim 1 is characterized in that: described at least one piezoelectric patches is film piezo-electric sheet or piezoelectric ceramics sheet.
11. magnetic head fold piece combination as claimed in claim 1 is characterized in that: described at least one piezoelectric patches is single layer structure or comprises basic unit and the sandwich construction of piezoelectric layer.
12. magnetic head fold piece combination as claimed in claim 11 is characterized in that: described piezoelectric layer is individual layer piezoelectric structure or multi-layer piezoelectric structure, and described basic unit is made by metal, pottery or polymkeric substance (polymer).
13. a microdrive comprises:
Carriage, this carriage comprise the post that draws of base portion, movable plate, connection base portion and movable plate; And
At least one piezoelectric patches that connects base portion and movable plate; Wherein,
Describedly draw the hinge portion that post comprises that a special operations sheet horizontally rotates.。
14. microdrive as claimed in claim 13 is characterized in that: it is little that described hinge portion ratio draws the post width.
15. microdrive as claimed in claim 13 is characterized in that: described base portion and movable plate are by drawing post parallel connection in the precalculated position, and wherein each is rectangular parallelepiped.
16. microdrive as claimed in claim 13 is characterized in that: the two ends of each piezoelectric patches are connected with movable plate with base portion respectively, are equipped with plural electrode contacts on each piezoelectric patches.
17. microdrive as claimed in claim 13 is characterized in that: described at least one piezoelectric patches is film piezo-electric sheet or piezoelectric ceramics sheet.
18. magnetic head fold piece combination as claimed in claim 13 is characterized in that: described at least one piezoelectric patches is single layer structure or comprises basic unit and the sandwich construction of piezoelectric layer.
19. magnetic head fold piece combination as claimed in claim 18 is characterized in that: described piezoelectric layer is individual layer piezoelectric structure or multi-layer piezoelectric structure, and described basic unit is made by metal, pottery or polymkeric substance (polymer).
20. a hard disk drive comprises:
Magnetic head fold piece combination;
The actuating arm that is connected with described magnetic head fold piece combination;
Disk; And
In order to rotate the Spindle Motor of described disk; It is characterized in that: described magnetic head fold piece combination comprises magnetic head (slider), be the rotation center microdrive (micro-actuator) that horizontally rotates magnetic head and the cantilever part (suspension) that is used to support described magnetic head and microdrive with the magnetic head core; Wherein said microdrive comprises:
Carriage, this carriage comprise the post that draws of base portion, movable plate, connection base portion and movable plate; And
At least one piezoelectric patches that connects base portion and movable plate;
Wherein, describedly draw the hinge portion that post comprises that a cue head horizontally rotates.
CNB2004100793103A 2004-09-28 2004-09-28 Micro-driver, magnetic head folding sheet combination with micro-driver and magnetic disk driver Expired - Fee Related CN100411015C (en)

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CNB2004100793103A CN100411015C (en) 2004-09-28 2004-09-28 Micro-driver, magnetic head folding sheet combination with micro-driver and magnetic disk driver
JP2005279392A JP4837350B2 (en) 2004-09-28 2005-09-27 Microactuator, head gimbal assembly and disk drive using the same

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Application Number Priority Date Filing Date Title
CNB2004100793103A CN100411015C (en) 2004-09-28 2004-09-28 Micro-driver, magnetic head folding sheet combination with micro-driver and magnetic disk driver

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CN100411015C CN100411015C (en) 2008-08-13

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CN101290776B (en) * 2007-04-17 2012-05-23 新科实业有限公司 Cantilever part, combination of tabs of magnetic head, manufacturing method thereof, and hard disk driving unit

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