CN1618094A - Head gimbal assembly with precise positioning actuator for head element and disk drive apparatus with head gimbal assembly - Google Patents
Head gimbal assembly with precise positioning actuator for head element and disk drive apparatus with head gimbal assembly Download PDFInfo
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- CN1618094A CN1618094A CN02827677.9A CN02827677A CN1618094A CN 1618094 A CN1618094 A CN 1618094A CN 02827677 A CN02827677 A CN 02827677A CN 1618094 A CN1618094 A CN 1618094A
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- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
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- 229910052726 zirconium Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
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- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
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- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/4853—Constructional details of the electrical connection between head and arm
Landscapes
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Moving Of The Head To Find And Align With The Track (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Moving Of Heads (AREA)
Abstract
An HGA includes a head slider with at least one head element, a support and a precise positioning actuator fixed with the head slider and with the support for precisely positioning the at least one head element. The actuator includes a pair of movable arms capable of displacing in response to a drive signal applied to the actuator, for catching the head slider in a space between the movable arms. Each of the movable arms includes an arm member being made of an elastic sintered ceramic such as ZrO2 and having substantially the same cross sectional shape from a root thereof to a top end there, and a piezoelectric element formed on a side surface of the arm member. A spacing between base ends of the arm members is larger than a spacing between top ends of the arm members.
Description
Technical field
The present invention relates to have the magnetic gimbal element (HGA) of the magnetic head element of accurate location driver, this magnetic head element for example is thin film magnetic head element or optical head element, the invention still further relates to the disk drive with this HGA.
Background technology
In disk drive, be used for magnetic information is write disk and/or generally is formed on disc head slider from the thin film magnetic head element that disk is read magnetic information flight on spinning disk during this sliding part work.This sliding part is bearing in the head portion of the suspender of HGA respectively.
In recent years, in modern disk drive, along the radial direction of disk or along the record of disk track Width with reappear density (track density) and sharply increase, to satisfy the requirement that improves constantly data storing capacity and density.For the raising of track density, only use voice coil motor (VCM) that magnetic head element is carried out position control with respect to magnetic track in the disk and will never obtain enough accuracy.
In order to address this problem, loading onto extra gear train than the position of the more close disc head slider of VCM, to reach only with the inaccessiable precision positioning accurately of VCM.In for example United States Patent (USP) NO.5745319 and Japanese patent laid-open publication gazette NO.08180623A, illustrated and reached the pinpoint method of magnetic head.
As the example of this additional actuator, the driver of piggy-back structure is arranged.This piggy-back structure actuator is formed by the PZT piezoelectric, and it is shaped as the I font, and the one end is fixed in suspender, and the other end is fixed in disc head slider, and the cylindricality lever arm is connected between this two end portions.Driver and disc head slider step overlap on the suspender, and promptly driver is clipped between suspender and the sliding part, form overlapping cantilever design.
Yet the HGA with this piggy-back structure actuator has following variety of issue:
(1),, added the thickness of driver so near the HGA gross thickness disc head slider increases because be the overlay structure of step;
(2) driver is done as a wholely to be made of piezoelectric, for example be made of the PZT hard brittle material, and driver and disc head slider is overlapping, forms cantilever design.Therefore be subjected to the impact of torque easily, vibration resistance is also very poor;
(3) depend on the size of disc head slider, during accurate positioning action, the stroke of magnetic head element changes.Therefore be difficult to obtain fully big stroke;
(4) because driver has three-dimensional structure, and have the complex installation structure,, and can not adopt the HGA mounting equipment of routine to assemble, cause throughput rate very poor so when assembling HGA, operate very difficultly;
(5) in order not disturb the motion of driver, must be keeping a gap between driver and the disc head slider and between driver and suspender, so that assembling.Yet form this gap and will further reduce vibration resistance, and be difficult to this gap is remained unchanged.Particularly, because be difficult to make suspender, driver and disc head slider to keep accurately parallel, so the characteristic of magnetic head reduces.
In order to address the above problem, the present application people has proposed a kind of driver of structure, and in this driver, disc head slider is clipped in the space between a pair of lever arm, and this lever arm can respond the drive signal of superimposed and be subjected to displacement.When proposing the application, this structure also is not well-known.
Fig. 1 is a planimetric map, schematically illustrates this driver structure that has proposed.
As shown in the figure, driver 10 has the flat shape of U-shaped substantially, by base 11 that is fixed in suspender and the vertical a pair of lever arm 12 and 13 that stretches out from these base 11 both side ends.
On the head portion of this lever arm 12 and 13, form the sliding part fixed part 15 and 16 that is fixed in disc head slider 14 side surfaces respectively.These sliding part fixed parts 15 and 16 are inwardly outstanding, promptly outstanding to disc head slider 14, make and to have only these parts 15 and 16 to be fixed on the side surface of disc head slider 14, and between the side surface of the remainder of lever arm 12 and 13 and disc head slider 14, form the clearance.
This lever arm 12 and 13 by arm member 12a and 13a and be respectively formed at this arm member 12a and the 13a side surface on piezoelectric element 12b and 13b constitute.The flexible ceramic of employing sintering is ZrO for example
2Whole base 11 and arm member 12a and the 13a that forms driver.
Driver according to this configuration, even load onto driver, the thickness of the HGA disc head slider near can not increase yet.In addition, because driver and disc head slider 14 do not overlap to form cantilever design, can improve vibration resistance.Because disc head slider 14 is clipped between lever arm 12 and 13, so even the change in size of disc head slider 14 also can provide constant stroke to sliding part.
Yet according to this driver, because adopt for example ZrO of identical sintered ceramic
2The sliding part fixed part 15 that forms and 16 is inwardly given prominence to from the surface of lever arm 12 and 13, so the stress that is produced by impulsive force concentrates on the corner angle 15a and 16a of teat bottom, like this, just makes these corner angle be damaged easily.Therefore, be difficult to improve greatly the vibration resistance of driver.
Brief summary of the invention
Therefore the purpose of this invention is to provide a kind of HGA of the magnetic head element with accurate location driver and a kind of disk drive with this HGA is provided, can improve vibration resistance greatly thus.
Another object of the present invention provides a kind of HGA of the magnetic head element with accurate location driver and a kind of disk drive with this HGA is provided, and can improve the quality of HGA thus greatly.
According to the present invention, HGA comprises disc head slider, the supporting member with at least a magnetic head element and accurately locatees driver that this driver is fixed in disc head slider and this supporting member, is used for accurately locating this at least one magnetic head element.This driver comprises a pair of lever arm, and this lever arm can respond and be added in the drive signal on this driver and be subjected to displacement, and this driver is used for disc head slider is clipped in space between the lever arm.Each lever arm in the lever arm comprises arm member, and this arm member is by the flexible ceramic of sintering ZrO for example
2Form, and have identical substantially shape of cross section from its root to its top ends, each lever arm also is included on this arm member side surface and forms piezoelectric element.At the interval between the arm member bottom greater than the interval between the arm member top ends.
Though the arm member of lever arm forms with the pottery of sintering, each arm member has substantially the same shape of cross section from its root to its top ends, and in other words, each arm member is a flat pattern, does not have the thickness difference.Therefore, when impact force action was on driver, stress was not concentrated on the specific part of arm member, thereby can significantly improve the vibration resistance of driver.Particularly, according to the present invention, the interval between the arm member bottom is greater than the interval between the arm member top.Therefore, there is the clearance outside the bonding region except arm member and disc head slider between the side surface of arm member and disc head slider, thereby makes that the motion of driver is more free.
In addition, because driver fixed head sliding part, sliding part is clipped in the space between a pair of lever arm, so near the thickness of HGA disc head slider can not increase even load onto driver yet.Therefore, can not make the size of disk drive that any variation takes place because loading onto driver.In addition, because disc head slider is clipped between the lever arm, so in fact displacement movement is sent to the top ends that the head portion of the arm member of sliding part always is positioned at sliding part.Therefore, stable even the size of disc head slider changes the stroke also can make sliding part, thereby when accurate positioning action, always magnetic head can obtain fully big stroke.
This driver preferably also comprises the base that is fixed in supporting member.This lever arm substantially perpendicularly stretches out from this base.
This base had better be with the flexible ceramic of sintering ZrO for example
2Form.
This driver preferably has the flat shape of U-shaped substantially.
This at least one magnetic head element is at least one thin film magnetic head element preferably.
According to the present invention, the disk driver comprises at least one above-mentioned HGA.
Describe the preferred embodiments of the present invention as shown in drawings below in detail, can obviously find out other purpose of the present invention and advantage thus.
Brief description of drawings
Fig. 1 illustrates in the above, is planimetric map, the inventor is shown in the driver structure that proposes to propose before the application;
Fig. 2 is an oblique view, schematically illustrates the chief component of preferred embodiment of the present invention disk drive;
Fig. 3 is an oblique view, and the total of middle HGA embodiment illustrated in fig. 2 is shown;
Fig. 4 is an oblique view, and the head portion of middle HGA embodiment illustrated in fig. 2 is shown;
Fig. 5 is an oblique view, and the head portion of HGA among Fig. 2 embodiment is shown, and its view direction is different with Fig. 4 direction;
Fig. 6 is a planimetric map, and the structure of driver among Fig. 2 embodiment is shown;
Fig. 7 is a cross-sectional view, and the structure of the piezoelectric element part of driver shown in Figure 6 is shown;
Fig. 8 is illustrated in the stress of each arm member teat bottom of driver and teat is inwardly given prominence to the analog feature curve of length;
Fig. 9 is illustrated in the stress of each arm member teat bottom of driver and teat is inwardly given prominence to the analog feature curve of length.
Implement best mode of the present invention
Fig. 2 illustrates the chief component of preferred embodiment of the present invention disc unit, and Fig. 3 illustrates the total of HGA in this embodiment, and Figure 4 and 5 illustrate the head portion of HGA among this embodiment, and these figure look from different directions from each other.
In Fig. 2, many hard discs that Ref. No. 20 expression is rotated around axis 21,22 expressions are used for each magnetic head element is positioned at combined bracket device on each disk track.This combined bracket device 22 mainly is made of carriage 24 and main transmission device 25, and the former can rotate around axis 23, and the latter is for example for driving the VCM that this carriage 24 rotates.
Be positioned at along the bottom branch of an end of the many actuating arms 26 of axis 23 overlapping placements and be connected in carriage 24, on the top portion of each arm 26 the other end, one or two HGA27 are housed.Each HGA27 has the sliding part that is contained in its head portion, makes sliding part face toward a surface (writing down and read the surface) of each disk 20.
Shown in Fig. 3～5, the precision tracking driver 32 of accurate positioning head element is fixed on the head portion of suspender 30, assemble HGA thus.This driver 32 fixedly has the side surface of the disc head slider 31 of thin film magnetic head element, makes sliding part 31 be clipped in the space between its lever arm.
Main transmission device shown in Figure 2 or stroke driver VCM25 are used to rotate the actuating arm 26 of fixing this HGA27 on it, thereby make whole motion assembly motion.The effect of driver 32 is Fine Mapping HGA, and this location can not be regulated by main transmission device 25 or stroke driver.
Shown in Fig. 3～5, suspender 30 basically by first and second load beam 33 and 34, be connected in this first and second load beam 33 and 34 the two elastic hinge 35, be fixed on the resilient flexibility part 36 on second actuating arm 34 and the articulated elements 35 and the circular bottom plate 37 that is formed on first load beam, the 33 coupling part 33a forms.
This flexible element 36 has the 36a of resilient tongue portion that divides formation in one end thereof, and this pecker is dented by the indenture (not shown) that is formed on second load beam 34.The insulation course 36b that the base part 32a of driver 32 does by for example polyimide is fixed on this pecker 36a.This flexible element 36 has elasticity, so that utilize this pecker 36a by driver 32 elastic bearing magnetic head supporting spares 31.In this embodiment, these flexible element 36 usefulness corrosion resistant plates (for example SUS304TA) are made, and its thickness is about 20 microns.This flexible element 36 is fixed in second load beam 34 and articulated elements 35 many with means of spot welds.
This articulated elements 35 has elasticity, so that apply the power of disc head slider 31 being pressed to magnetic disk surface by driver 32 to second load beam 34 in operation.This articulated elements 35 is about 40 microns corrosion resistant plate making in this embodiment with thickness.
In this embodiment, first load beam, 33 usefulness thickness are about 100 microns corrosion resistant plate making, and this load beam supports the surface of whole articulated elements 35.First load beam 33 is welded on the articulated elements 35 with means of spot welds many.In this embodiment, second load beam 34 also is about 100 microns corrosion resistant plate with thickness makes, and in its back-end partial fixing in this articulated elements 35.Also with means of spot welds second load beam 34 is fixed in articulated elements 35 many.Top in second load beam 34 forms lift plate 34a, so that when not working, HGA and magnetic disk surface is separated.
Be connected in the base plate 37 of actuating arm 26 shown in Figure 2, in this embodiment, be about 150 microns corrosion resistant plate or iron plate is made with thickness.These base plate 37 usefulness welding methods are welded in the fixed part 33a of first load beam 33.
Form on flexible element 36 or configuration flexible circuit conductor parts 38, these parts comprise the many thin wires that are made of a plurality of thin layer patterns.These wire guiding member 38 usefulness known methods form, and this method is similar to and forms for example flexible printed circuit board (FPC) method of patterning of printed circuit board (PCB) on metal sheet.For example wire guiding member 38 is formed on the flexible element 36 by following method, be sequential aggradation by resin first insulating material that constitutes of polyimide for example, deposit thickness is about 5 microns, patterned then copper layer (thin wire layer), deposit thickness is about 4 microns, deposit then by resin second insulation course that constitutes of polyimide for example, deposit thickness is about 5 microns.Be formed for connecting in the connection gasket zone of driver, magnetic head element and external circuit, deposited gold layer on the copper layer, and on the gold layer, no longer form second insulation material layer.
In this embodiment, wire guiding member 38 is made of the first wire guiding member 38a and the second wire guiding member 38b, the former has two thin wires that are connected in magnetic head element a side, therefore, always have four thin wires in both sides, and the latter has the thin wire that is connected in driver 32 in a side, therefore has two thin wires in both sides.
One end of the first wire guiding member 38a thin wire is electrically connected on magnetic head element connection gasket 39, and this connection gasket is formed on the free movable part 36c that separates separately of flexible element 36.These connection gasket 39 usefulness gold solder connections, wire bonds method or wandering sequence ball bonding are on the termination electrode 31a of disc head slider 31.The other end of the first wire guiding member 38a thin wire is electrically connected on external circuit connection gasket 40, and this connection gasket is used to connect external circuit.
One end of the thin wire of the second wire guiding member 38b is electrically connected on driver connection gasket 34, and this connection gasket is formed on the insulation course 36b of flexible element 36 pecker 36a.This connection gasket 41 is connected to A channel terminal and B channel terminal 32b and the 32c that forms on driver 32 base 32a.The other end of the thin wire of the second wire guiding member 38b is electrically connected on external circuit connection gasket 40.
The structure of HGA of the present invention is not limited to said structure.In addition, though not shown, magnetic head drive integrated circult sheet can be contained in the middle part of suspender 30.
Fig. 6 illustrates the structure of driver 32 among Fig. 2 embodiment, and Fig. 7 illustrates the structure of the piezoelectric element part of driver 32.
As can be seen from Figure 6, driver 32 has horseshoe clamp face shape substantially, is made of the base 60 (32a) and a pair of lever arm 61 and 62 that are fixed on the suspender, and this vertically stretches out two side ends of lever arm from base 60.This lever arm 61 and 62 respectively by arm member 61a and 62a and be respectively formed at this arm member 61a and the 62a side surface on piezoelectric element 61b and 62b constitute.
The pedestal 60 of driver 62 and arm member 61a and 62a are by the flexible ceramic of sintering ZrO for example
2Form whole.Because the major part of driver is by the flexible ceramic of the big sintering of bending strength ZrO for example
2Form, so can strengthen the vibration resistance of driver self.
In this embodiment, importantly, the shape of each arm member 61a and 62a is flat, there is not the thickness difference from its root that is connected in base 60 to its top ends, so have substantially the same xsect, and at the spacing b between the bottom of arm member 61a and 62a greater than the spacing a between arm member 61a and the 62a top ends.
Disc head slider 31 is clipped between the head portion of these flat arm members 61a and 62a, and is fixed in this flat arm member with bonding agent 63.As mentioned above, be defined as (b＞a) in its value of the spacing b between the bottom of arm member 61a and 62a greater than the spacing a between arm member 61a and the 62a top ends.Because arm member 61a and 62a are flat pattern, and b＞a,, make that the interval between them diminishes in its top ends so when disc head slider 31 is installed, do not need to make arm member 61a and 62a that deformation takes place.Therefore, have only the head portion of arm member 61a and 62a to be bonded on the side surface of disc head slider 31, between the side surface of the remainder of arm member 61a and 62a and disc head slider 31, have the clearance.As a result, during operation, except bonding region 63 and outer, lever arm 61 and 62 can contact magnetic head sliding part 31 and the motion of restriction driver 32.
Its value of the thickness of driver 32 is defined as being equal to or less than the thickness of nipped disc head slider, and making not to increase the gross thickness of HGA because loading onto driver.On the contrary, the thickness that the thickness of driver 32 is increased to nipped disc head slider can increase the intensity of driver itself, and does not increase the gross thickness of HGA.
As shown in Figure 7, piezoelectric element 61b and 62b have by piezoelectric material layer 70, signal electrode layer 71 and ground connection (public) electrode layer 72 and replace overlapping sandwich construction.When being added in voltage on signal electrode layer 71 and ground connection (public) layer 72, this electrode material layer 70 will expand and shrink.Constitute by the material that causes expansion and contraction by inverse piezoelectric effect or electrostrictive effect at piezoelectric material layer 70.This signal electrode layer 71 is electrically connected on A channel terminal 32b or B channel terminal 32c, and ground connection (public) electrode layer 72 is electrically connected on ground connection (public) terminal 32d or 32e, shown in Figure 4 and 5.
At piezoelectric material layer 70 by piezoelectric PZT[Pb (Zr, Ti) O for example
3] under the situation about forming, this piezoelectric material layer is generally with polarized, thereby improve its displacement performance.Polarised direction is the laminated direction of piezoelectric material layer 70.When voltage is added on the electrode layer, and the direction of an electric field that produces is when identical with polarised direction, and the piezoelectric material layer between electrode layer will be in its laminated direction (longitudinal piezoelectric effect) expansion, and direction will shrink (piezo-electric traverse effect) in its plane.In contrast, when the direction of an electric field that produces is opposite with polarised direction, then the piezoelectric material layer between the electrode layer will shrink (longitudinal piezoelectric effect) in its laminated direction, and direction expands (piezo-electric traverse effect) in its plane.
If will cause when the voltage of contraction or expansion polarity is added on piezoelectric element 61b or the 62b, this piezoelectric element will respond added polarity of voltage, shrink or expand, thereby lever arm 61 or 62 will bend along S shape, cause the horizontal linear displacement of head portion of lever arm 61 or 62.Thereby horizontal linear displacement also will take place in the disc head slider 31 that is fixed on the driver 32.Because sliding part only carries out linear displacement, promptly carry out linear movement, and swing or rotation do not take place, so be expected positioning head element more accurately.
The voltage that causes reverse motions can be added on piezoelectric element 61b and the 62b respectively simultaneously.In other words, alternating voltage can be added on piezoelectric element 61b and the 62b simultaneously, make a piezoelectric element expand, and another piezoelectric element shrink, vice versa.When not having voltage to be added on the piezoelectric element, the position of lever arm is placed in the middle.In this case, the twice of the stroke of lever arm stroke when to be that identical voltage is staggered be added in piezoelectric element 61b and 62b and go up.Yet one of them piezoelectric element expands, so the direction of driving voltage is opposite with the polarised direction of piezoelectric material layer.Therefore,, perhaps add voltage continuously, the polarization decay of piezoelectric material layer then may take place if added voltage is very high.Therefore, need and additionally to be added in the Constant Direct Current bias voltage of polarised direction equidirectional on the alternating voltage,, make the direction of driving voltage never in contrast to the polarised direction of piezoelectric material layer to form driving voltage.When having only bias voltage to be added on the piezoelectric element, the vibration of this lever arm is placed in the middle.
In this explanation, piezoelectric is that especially inverse piezoelectric effect or electrostrictive effect cause the material that expands or shrink.Can adopt any piezoelectric that can be used for the driver piezoelectric element.Yet, preferably adopt for example PZT[Pb (Zr, Ti) O of piezoelectric ceramics material for more solid
3], PT (PbTiO
3), PLZT ((Pb, La) (Zr, Ti) O
3) or barium titanate (BaTiO
3).
As mentioned above, because driver in this embodiment 32 has the arm member 61a and the 62a of lever arm 61 and 62, this arm member is flat, does not have the thickness difference, so when impact force action was on HGA, stress was not concentrated on the specific part of arm member.Therefore, can significantly improve the vibration resistance of driver and HGA.
Fig. 8 illustrates, at the impact force action of 1G on driver shown in Figure 1, when promptly not being driven, the stress that produces in the teat bottom that each arm member head portion of driver forms is with respect to the various inwardly outstanding length of teat, perhaps stretch to the analog feature curve of all lengths of disc head slider with respect to teat, Fig. 9 illustrates, when driver shown in Figure 1 was driven by driving voltage, the stress that produces on the teat bottom that each arm member head portion of driver forms was with respect to the analog feature curve of the various inside extension elongations of teat.
Can find out obviously that from these figure the stress that produces in the teat bottom that the arm member top ends forms is minimum, therefore, if the outstanding length of teat is zero, in other words, if the shape of arm member is flat, do not have the thickness difference, then arm member can be damaged hardly.
In addition, because in this embodiment, the side surface of driver 32 fixed head sliding parts 31 makes sliding part 31 be clipped in the space between lever arm 61 and 62, so even load onto driver 32, also can not increase near the HGA thickness the disc head slider.Thereby can not change the size of disk drive because loading onto driver.In addition, because driver 32 and disc head slider 31 do not overlap to form cantilever design, further improved vibration resistance.And, because disc head slider is sandwiched between lever arm 61 and 62, so in fact displacement movement is sent to the lever arm 61 of sliding part 31 and the head portion that 62 head portion always is positioned at sliding part 31.Therefore,, also can provide constant stroke, thereby accurately during positioning action, magnetic head always can obtain enough strokes to sliding part even the size of disc head slider 31 changes.
The accurate location driver and the HGA with this driver of thin film magnetic head element have been described in the above-described embodiments.Yet can obviously find out, the present invention except that the driver that is applicable to this thin film magnetic head element and, also be applicable to the accurate location driver of optical head element, and be applicable to HGA with this driver.
Can form a lot of embodiment very inequality of the present invention, and not exceed the spirit and scope of the present invention.Should be understood that the specific embodiment that the invention is not restricted to explanation in this explanation, only appended claims is determined.
Claims (12)
1. magnetic gimbal element, comprise disc head slider with at least one magnetic head element, supporting member and accurate location driver, this driver is fixed in said head sliding part and above-mentioned supporting member, be used for accurately locating above-mentioned at least one magnetic head element, above-mentioned driver comprises a pair of lever arm, this lever arm can respond and be added in the drive signal on the above-mentioned driver and be subjected to displacement, this driver is used for the said head sliding part is clipped in space between the above-mentioned lever arm, each arm in the above-mentioned lever arm comprises arm member and the piezoelectric element that is formed on the above-mentioned arm member side surface, this arm member is formed by the flexible ceramic of sintering, have substantially the same shape of cross section from its root to its top ends, in the spacing between the above-mentioned arm member bottom greater than the spacing between the above-mentioned arm member top ends.
2. magnetic gimbal element as claimed in claim 1 is characterized in that above-mentioned driver also comprises the base that is fixed in above-mentioned supporting member, and above-mentioned lever arm substantially perpendicularly stretches out from above-mentioned base.
3. magnetic gimbal element as claimed in claim 2 is characterized in that above-mentioned base is formed by the flexible ceramic of sintering.
4. magnetic gimbal element as claimed in claim 3 is characterized in that the flexible ceramic of above-mentioned sintering is ZrO
2
5. magnetic gimbal element as claimed in claim 1 is characterized in that, above-mentioned driver has the flat shape of U-shaped substantially.
6. magnetic gimbal element as claimed in claim 1 is characterized in that, above-mentioned at least one magnetic head element is at least one thin film magnetic head element.
7. disk drive, this device has at least one magnetic gimbal element, this assembly comprises the disc head slider with at least one magnetic head element, supporting member and accurate location driver, this driver is fixed in said head sliding part and above-mentioned supporting member, be used for accurately locating above-mentioned at least one magnetic head element, above-mentioned driver comprises a pair of lever arm, this lever arm can respond and be added in the drive signal on the above-mentioned driver and produce displacement, this driver is used for the said head sliding part is clipped in space between the above-mentioned lever arm, each arm comprises arm member and the piezoelectric element that is formed on the above-mentioned arm member side surface in the above-mentioned lever arm, this arm member is made of the flexible ceramic of sintering, have substantially the same shape of cross section from its root to its top ends, in spacing between the above-mentioned arm member bottom greater than the spacing between the above-mentioned arm member top ends.
8. disk driver as claimed in claim 7 is characterized in that above-mentioned driver also comprises the base that is fixed in above-mentioned supporting member, and above-mentioned lever arm substantially perpendicularly stretches out from above-mentioned base.
9. disk driver as claimed in claim 8 is characterized in that above-mentioned base is formed by the flexible ceramic of sintering.
10. disk driver as claimed in claim 9 is characterized in that the pottery of above-mentioned sintering is ZrO
2
11. disk driver as claimed in claim 7 is characterized in that, above-mentioned driver has the flat shape of U-shaped substantially.
12. disk driver as claimed in claim 7 is characterized in that, above-mentioned at least one magnetic head element is at least one thin film magnetic head element.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2002/000053 WO2003067575A1 (en) | 2002-02-02 | 2002-02-02 | Head gimbal assembly with precise positioning actuator for head element and disk drive apparatus with the head gimbal assembly |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1618094A true CN1618094A (en) | 2005-05-18 |
| CN1273959C CN1273959C (en) | 2006-09-06 |
Family
ID=27626711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN02827677.9A Expired - Fee Related CN1273959C (en) | 2002-02-02 | 2002-02-02 | Head gimbal assembly with precise positioning actuator for head element and disk drive apparatus with head gimbal assembly |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6891701B2 (en) |
| JP (1) | JP4075475B2 (en) |
| CN (1) | CN1273959C (en) |
| WO (1) | WO2003067575A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101051495B (en) * | 2006-04-05 | 2010-05-12 | 广明光电股份有限公司 | Driving device of optical disc driver |
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-
2002
- 2002-02-02 WO PCT/CN2002/000053 patent/WO2003067575A1/en active Application Filing
- 2002-02-02 CN CN02827677.9A patent/CN1273959C/en not_active Expired - Fee Related
- 2002-06-11 JP JP2002170044A patent/JP4075475B2/en not_active Expired - Fee Related
- 2002-06-24 US US10/177,671 patent/US6891701B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101051495B (en) * | 2006-04-05 | 2010-05-12 | 广明光电股份有限公司 | Driving device of optical disc driver |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1273959C (en) | 2006-09-06 |
| US6891701B2 (en) | 2005-05-10 |
| JP4075475B2 (en) | 2008-04-16 |
| US20030147181A1 (en) | 2003-08-07 |
| WO2003067575A1 (en) | 2003-08-14 |
| JP2003228929A (en) | 2003-08-15 |
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