CN101051511A - Micro ectuator, micro ectuator suspension arm part and magnetic head folding sheet combination - Google Patents
Micro ectuator, micro ectuator suspension arm part and magnetic head folding sheet combination Download PDFInfo
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- CN101051511A CN101051511A CN 200710091683 CN200710091683A CN101051511A CN 101051511 A CN101051511 A CN 101051511A CN 200710091683 CN200710091683 CN 200710091683 CN 200710091683 A CN200710091683 A CN 200710091683A CN 101051511 A CN101051511 A CN 101051511A
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Abstract
The present invention discloses a microactuator for magnetic head assembly. It includes a supporting frame, said supporting frame and cantilever flexible component of the described magnetic head assembly are integrally formed into one body, a counterbalance and a pair of piezoelectric elements. The described supporting frame includes a bottom supporting component for supporting top supporting component of said magnetic head assembly and a pair of side arms which can be used for making the described bottom supporting component and top supporting component be connected together. The described every piezoelectric element is mounted on the above-mentioned correspondent side arm. The above-mentioned piezoelectric element can be excited, so that it can make its correspondent side arm implement selective movement.
Description
Technical field
The present invention relates to a kind of information recording disk driver element, relate more specifically to a kind of micro-actuator, micro-actuator cantilever part and magnetic head fold piece combination that is used for magnetic disk drive (head gimbal assembly, HGA) or magnetic head actuating arm combination (head stack assembly).
Background technology
A kind of common information storing device is a disk drive system, and it uses magnetic media to store data and the removable read/write head that is arranged at this magnetic media top comes optionally on the magnetic media reading of data or data are write on the magnetic media.
The consumer always wishes that the memory capacity of this class disk drive system constantly increases, and wishes that simultaneously its read or write speed is faster more accurate.Therefore disc drive manufacturers is devoted to develop the disk system with higher storage capacity always, such as increasing the density of track by reducing the track width on the disk or the mode of track pitch, and then increases the memory capacity of disk indirectly.Yet, along with the increase of track density, to the also raising accordingly of position control accuracy of read/write head, so that in compact disk, realize faster more accurate read-write operation.Along with the increase of track density, use conventional art to realize more accurate read/write head being positioned track suitable on the disk difficulty more that becomes sooner.Therefore, disc drive manufacturers is sought the mode of raising to the read/write head position control always, so that the benefit of utilizing ever-increasing track density to bring.
A kind of method that improves read/write head position control accuracy on compact disc that disc drive manufacturers is often used also is microdrive for adopting second driver.This microdrive cooperates common position control accuracy and the speed that realizes read/write head with a master driver.The disk system that comprises microdrive is called as Dual-drive system.
Once developed many Dual-drive systems that are used to improve access speed and read/write head bearing accuracy on the track of compact disk in the past.This Dual-drive system generally includes a keynote coil motor driver and a secondary microdrive, such as piezo-electric micro driver (be piezo-electric micro driver, be designated hereinafter simply as piezo-electric micro driver).This voice coil motor driver is controlled by servo-control system, and this servo-control system causes the actuating arm rotation, and the carrying read/write head is so that be positioned read/write head on the track of memory disc on this actuating arm.Piezo-electric micro driver and voice coil motor driver are used common raising access speed and realize the fine setting of read/write head in track location.Voice coil motor driver is to the position coarse adjustment of read/write head, and piezo-electric micro driver is to the accurate adjustment of read/write head with respect to the position of disk.By the cooperation of two drivers, realize data efficient and accurate read-write operation on memory disc jointly.
A kind of known being used to realizes the microdrive of read/write head fine position is included piezoelectric element.This piezo-electric micro driver has relevant electronic installation, and this electronic installation can cause the piezoelectric element on the microdrive optionally to shrink or expand.Piezo-electric micro driver has suitable structure, makes the contraction of piezoelectric element or the motion that expansion causes microdrive, and then causes the motion of read/write head.With respect to the disk system of only using voice coil motor driver, the motion of this read/write head can realize the faster more accurate adjustment in read/write head position.The exemplary piezo-electric micro driver of this class is exposed in many patents, the Jap.P. JP 2002-133803 that is called " microdrive and magnetic head fold piece combination " such as name, and name is called the Jap.P. JP 2002-074871 of " have the magnetic head fold piece combination of the driver of realizing fine position, comprise the disk system of this magnetic head fold piece combination and the manufacture method of this magnetic head fold piece combination ".
Fig. 1-2 is depicted as traditional disc drive unit, and disk 101 is installed on the Spindle Motor 102 and by its rotation.Carry magnetic head fold piece combination 100 on the voice coil motor arm 104, this magnetic head fold piece combination 100 comprises the microdrive 105 that contains magnetic head 103, on this magnetic head 103 read/write head is installed.The motion of one voice coil motor control voice coil motor arm 104, and then control head 103 moving between the lip-deep track of disk 101 finally realize read/write head data write on disk 101.
Yet because the inherent error of voice coil motor and magnetic head cantilever combination, magnetic head 103 can't be realized fast and accurate position control on the contrary, but influences the performance that read/write head is is accurately read and write data on the disk.For this reason, increase above-mentioned piezo-electric micro driver 105, so that improve the position control accuracy of magnetic head and read/write head.More particularly, with voice coil motor relatively, this piezo-electric micro driver 105 is adjusted the displacement of magnetic head 103 with littler amplitude, so as the compensation voice coil motor and (or) resonance error of magnetic head cantilever combination.This piezo-electric micro driver makes that using littler track pitch becomes possibility, and can be with the track density (TPI of disk system, the contained track quantity of per inch) improve 50%, can reduce the rail time of seeking (seeking time) and the positioning time (settling time) of magnetic head simultaneously.Therefore, piezo-electric micro driver can increase substantially the surface recording density of memory disc.
Fig. 3 has showed existing a kind of micro-actuator, and for example United States Patent (USP) the 6th, 198, No. 606 disclosed micro-actuators.Magnetic head 112 (comprising read/write head) is used for keeping predetermined flying height above magnetic disk surface.A micro-actuator can have flexible beam (flexible beams) 114, is used for bracing or strutting arrangement 116 and magnetic head accomodating unit 118 are coupled together.This structure makes described magnetic head 112 can be independent of actuating arm and moves.Electromagnetic assembly or electromagnetism/ferromagnetic assembly can be used for described magnetic head 112 is finely tuned with respect to the position of described actuating arm.
There are some defectives in the structure that Fig. 3 shows.At first, because the position of micro-actuator on magnetic head cantilever (suspension) is very little, make that manufacturing electromagnetic assembly or electromagnetism/ferromagnetic assembly are very difficult.In addition, its weight may influence the performance of magnetic head fold piece combination, and performance for example resonates.Secondly, flexible beam 114 is made difficulty, and its rigidity may greatly influence the performance of micro-actuator, for example displacement and anti-seismic performance.In addition, when service condition when for example temperature and humidity change, flexible beam 114 may produce little bits and aging problem.In addition, the assembling of flexible beam and electromagnetic assembly or electromagnetism/ferromagnetic assembly is a complete process, and this assembling process is not easy control.This cause manufacturing cost to increase and the process parameter bigger.
Therefore be necessary to provide a kind of improved system to overcome the deficiencies in the prior art.
Summary of the invention
One aspect of the present invention relates to the micro-actuator that is used for magnetic head fold piece combination.Described micro-actuator comprises the bracing frame integrally formed with the cantilever flexible element of described magnetic head fold piece combination, counterbalance weight and a pair of piezoelectric element.Support frame as described above comprises end support member, be used to support the top support member of magnetic head of described magnetic head fold piece combination and the opposite side arm that support member of the described end and top support member are connected to each other.Described limit arm vertically extends from the respective side edge of end support member and top support member.Described is installed on and is used to provide the resonance balance on the support member of the described end.On the limit arm that described each piezoelectric element is installed in the support frame as described above correspondence and the described corresponding side.Described piezoelectric element can be energized and cause the selectivity of described limit arm to be moved.
The present invention relates to magnetic head fold piece combination on the other hand, the cantilever part that it comprises micro-actuator, magnetic head and supports described micro-actuator and magnetic head.Described micro-actuator comprises the bracing frame integrally formed with the cantilever flexible element of described magnetic head fold piece combination, counterbalance weight and a pair of piezoelectric element.Support frame as described above comprises end support member, be used to support the top support member of magnetic head of described magnetic head fold piece combination and the opposite side arm that support member of the described end and top support member are connected to each other.Described limit arm vertically extends from the respective side edge of end support member and top support member.Described is installed on and is used to provide the resonance balance on the support member of the described end.On the limit arm that described each piezoelectric element is installed in the support frame as described above correspondence and the described corresponding side.Described piezoelectric element can be energized and cause the selectivity of described limit arm to be moved.
The present invention relates to disc driver on the other hand, and this disc driver comprises magnetic head fold piece combination, the actuating arm, the disk that link to each other with described magnetic head fold piece combination and drives the Spindle Motor of described disk rotation.Described magnetic head fold piece combination comprises micro-actuator, magnetic head and supports the cantilever part of described micro-actuator and magnetic head.Described micro-actuator comprises the bracing frame integrally formed with the cantilever flexible element of described magnetic head fold piece combination, counterbalance weight and a pair of piezoelectric element.Support frame as described above comprises end support member, be used to support the top support member of magnetic head of described magnetic head fold piece combination and the opposite side arm that support member of the described end and top support member are connected to each other.Described limit arm vertically extends from the respective side edge of end support member and top support member.Described is installed on and is used to provide the resonance balance on the support member of the described end.On the limit arm that described each piezoelectric element is installed in the support frame as described above correspondence and the described corresponding side.Described piezoelectric element can be energized and cause the selectivity of described limit arm to be moved.
The present invention relates to the manufacture method of piezoelectric micro-actuator on the other hand.This method comprises the cantilever flexible element of micro-actuator bracing frame and cantilever part integrally formed; The resonance counterbalance weight is installed to the end support member of described micro-actuator bracing frame; Piezoelectric unit is installed on the described micro-actuator bracing frame, described each piezoelectric element is extended along the corresponding sides arm of described micro-actuator bracing frame and the respective side of described resonance counterbalance weight; Magnetic head is installed on the top support member of described micro-actuator bracing frame; The cantilever lead of described piezoelectric unit and magnetic head and described cantilever part is electrically connected; And visual inspection.
By following description also in conjunction with the accompanying drawings, it is more clear that the present invention will become, and these accompanying drawings are used to explain embodiments of the invention.
Description of drawings
Fig. 1 is the stereographic map of traditional magnetic disk driver element.
Fig. 2 is the partial perspective view of traditional magnetic disk driver element shown in Figure 1.
Fig. 3 is the plan view of micro-actuator in the prior art.
Fig. 4 is the described stereographic map that contains the magnetic head fold piece combination of piezoelectric micro-actuator of one embodiment of the invention.
Fig. 5 is the partial perspective view of magnetic head fold piece combination shown in Figure 4 from observing previously.
The partial perspective view that Fig. 6 observes from behind for magnetic head fold piece combination shown in Figure 4.
Fig. 7 is the partial side view of magnetic head fold piece combination shown in Figure 4.
Fig. 8 removes partial perspective view behind the magnetic head in the piezoelectric micro-actuator for magnetic head fold piece combination shown in Figure 4.
Fig. 9 is the exploded view of magnetic head fold piece combination shown in Figure 4.
Figure 10 is the stereographic map after piezoelectric micro-actuator shown in Figure 4 removes counterbalance weight.
Figure 11 is the stereographic map after piezoelectric micro-actuator shown in Figure 4 is installed counterbalance weight.
Figure 12 has showed the partial perspective view that counterbalance weight shown in Figure 4 aligns with the limit arm of piezoelectric micro-actuator.
Figure 13 has showed piezoelectric element has been installed to sectional perspective view on counterbalance weight shown in Figure 4 and the piezoelectric micro-actuator limit arm.
Figure 14-15 has showed the typical process that forms piezoelectric micro-actuator shown in Figure 4 limit arm.
Figure 16 shows described manufacturing of one embodiment of the invention and assembly method process flow diagram.
Figure 17 a-17c is a series of views, has showed the flow process of manufacturing shown in Figure 16 and assembly method.
Figure 18 has showed the resonance test data of piezoelectric micro-actuator shown in Figure 4.
Figure 19-20 is the stereographic map of the described piezoelectric micro-actuator of another embodiment of the present invention.
Figure 21-22 is the stereographic map of the described piezoelectric micro-actuator of another embodiment of the present invention.
Embodiment
With reference to description of drawings various embodiment of the present invention, wherein, identical similar parts of digitized representation among the different figure.When the present invention is intended to accurately to drive magnetic head with micro-actuator, improve the resonance performance of magnetic head fold piece combination.By the resonance performance of raising magnetic head fold piece combination, thereby improve its operating characteristic.
Several embodiment of magnetic head fold piece combination are described now.It should be noted that: micro-actuator can use in any suitable disk drive that contains micro-actuator improving its resonance performance, and the magnetic head fold piece combination ad hoc structure that is not limited to illustrate in the accompanying drawing.That is to say that the present invention can be used in the appropriate device that contains micro-actuator in any industry.
Fig. 4-17c has showed the described magnetic head fold piece combination 210 that contains piezoelectric micro-actuator 212 of one embodiment of the invention.Described magnetic head fold piece combination 210 comprises micro-actuator 212, magnetic head 214 and is used to carry or hang the cantilever part 216 of described piezoelectric micro-actuator 212 and magnetic head 214.
Shown in Fig. 4-9, cantilever part 216 comprises substrate 218, load beam 220, articulated part 222, flexible element 224 and is positioned at inside and outside cantilever lead 226,227 on the described flexible element 224.Described articulated part 222 is installed on described substrate 218 and the load beam 220 by the mode such as laser bonding.All be provided with hole 228 on described substrate 218 and the articulated part 222, be used for the actuating arm of cantilever part 216 with the voice coil motor of disc driver coupled together.Described substrate 218 by relatively harder material or rigid material for example metal make so that stably described cantilever part 216 is supported on the actuating arm of described voice coil motor.Also all be provided with the other hole that is used for weight reduction 230 on described substrate 218 and the articulated part 222.In addition, articulated part 222 also comprises a fixing bar 232 that is used for supporting load beam 220.
Form on this load beam 220 and be used for the salient point 234 of supporting cantilever tongue piece 238 (with reference to figure 7).Also can have the sheet of recommending (lift tab) 236 on the described load beam 220, when disk stopped the rotation, this was recommended sheet 236 magnetic head fold piece combination 210 is separated on disk.
Described flexible element 224 is installed on described articulated part 222 and the load beam 220 by for example laser bonding mode.Described cantilever tongue piece 238 is installed on the flexible element 224 by for example mechanical welding manner.Described cantilever tongue piece 238 is with piezoelectric micro-actuator 212 and cantilever part 216 link together (with reference to figure 7).Outside the ratio, described cantilever lead 226,227 is formed at described flexible element 224, so that the piezoelectric element on plural connecting terminal 240 (it is connected with external control system) and magnetic head 214 and the piezoelectric micro-actuator 212 242,243 is electrically connected.
Shown in Figure 10-11, described piezoelectric micro-actuator 212 comprises micro-actuator bracing frame 252, be installed in the counterbalance weight 260 on this micro-actuator bracing frame 252 and be installed in piezoelectric element 242,243 on this micro-actuator bracing frame 252 and the counterbalance weight 260.
Described micro-actuator bracing frame 252 and described flexible element 224 are integrally formed or be integrated in it.Described micro-actuator bracing frame 252 comprises top support member 254, end support member 256 and the limit arm 258,259 that described top support member 254 and end support member 256 are connected with each other.Described micro-actuator bracing frame 252 can with hard relatively material for example metal make.
Form a plurality of connecting terminals 244 on the support member of the described end 256, for example on each limit, form two contacts 244.Described connecting terminal 244 directly is connected with described interior cantilever lead 226, so that with cantilever lead in described 226 and the connecting terminal of being located on the described piezoelectric element 242,243 246, for example, two connecting terminals on each piezoelectric element 242,243 246 electrically connect.Also be provided with connecting terminal 248 on the described top support member 254, for example four connecting terminals 248.Described connecting terminal 248 directly is connected with described outer cantilever lead 227, so that with the connecting terminal 250 on described outer cantilever lead 227 and the described magnetic head 214, for example four connecting terminals 250 electrically connect.
Described limit arm 258,259 is vertically formed from the respective side edge of described top support member and end support member 254,256.In one embodiment, as shown in figure 14, described limit arm 258,259 just has been initially located in fully smooth state, is vertically formed operable position then, as shown in figure 15.As shown in the figure, described top support member 254, end support member 256, and form interior otch or space (notchesor spaces) 257, for example four otch between the corresponding limit arm 258,259.This structure will allow described limit arm 258,259 more freely to move.
Described counterbalance weight 260 is installed on the end support member 256 of described micro-actuator bracing frame 252 by for example welding manner.This counterbalance weight 260 is used to the balance that resonates.As Figure 11, shown in Figure 12, described counterbalance weight 260 is installed on the end support member 256, thereby makes the side 262 of counterbalance weight 260 fully flatly align with the outside surface 264 of corresponding sides arm 258,259.This structure is convenient to the installation of piezoelectric element 242,243.
Each piezoelectric element 242,243 is installed on the corresponding side surface of corresponding limit arm 258,259 and counterbalance weight 260.Specifically, shown in Fig. 8,13, described piezoelectric element 242,243 is installed in respectively on the side 262 of the outside surface 264 of corresponding side arms 258,259 and counterbalance weight 260 correspondences.Described each piezoelectric element 242,243 all is provided with connecting terminal 246, two connecting terminals for example, be used for described piezoelectric element 242,243 and in being directly connected in the connecting terminal 244 of cantilever lead 226 electrically connect.
As shown in Figure 9, described cantilever tongue piece 238 is independent of flexible element 224 and forms, and comprises 270 and two arm element of zone line (middle region) (arm members) 272.By with described two arm element 272 by being installed on the side area 225 of flexible element 224 correspondences such as the laser bonding mode, thereby described cantilever tongue piece 238 is installed together with flexible element 224.As shown in Figure 6, described load beam 220 is provided with a limited part (limiter) 268 that is used to limit cantilever tongue piece 238 motions.
Shown in Fig. 7-8, support member of the described end 256 is installed on the cantilever tongue piece 238.In this embodiment, end support member 256 is installed on the cantilever tongue piece 238 by epoxide-resin glue (epoxy) 274.Yet support member of the described end 256 also can pass through other suitable mode, for example is installed to cantilever tongue piece 238 by anisotropic conductive film (ACF) or laser bonding mode.
In addition, be formed at piezoelectricity connecting terminal 246 two connecting terminals for example on the corresponding piezoelectric element 242,243, receive by being electrically connected (gold goal welding or tin ball bonding meet GBB or SBB) 276 and with support member 256 of the described end on corresponding connecting terminal 244 electric connections get up.Thereby allow power supply to be applied to described piezoelectric element 242,243 by cantilever lead 226 in described.
Described top support member 254 has appropriate configuration makes described micro-actuator bracing frame 252 couple together with magnetic head 214.Specifically, described magnetic head 214 has and the corresponding connecting terminal 250 of magnetic head connecting terminal 248 on the described top support member 254 at the one end, for example four connecting terminals.Described top support member 254 supports magnetic head 214 thereon, and described magnetic head connecting terminal 248 receives 278 and electrically connect with corresponding connecting terminal 250 on being located at magnetic head 214 by for example being electrically connected.Thereby described top support member 254 and magnetic head 214 are coupled together, and magnetic head 214 and read/write element thereof are electrically connected with outer cantilever lead 227.
As shown in Figure 7, described micro-actuator bracing frame 252 is installed on the cantilever tongue piece 238 abreast, and forms gap 280 between the two.This structure allows micro-actuator bracing frame 252 can successfully reach motion freely in use.
In addition, an end of described cantilever tongue piece 238 is supported by the salient point on the described load beam 220 234, and this salient point is positioned at the below at described magnetic head 214 centers.The other end of described cantilever tongue piece 238 is installed on the side area 225 of described flexible element 224 by the mode of for example welding.This structure allows to keep ledge structure (mechanical step), and supports described cantilever tongue piece 238 in the mode parallel with described load beam 220, thereby makes cantilever part 216 keep good static attitude.
Figure 16 and Figure 17 a-17c have showed the manufacturing of the described piezoelectric micro-actuator 212 of one embodiment of the invention and the key step of assemble flow.After flow process begins (step 1) among Figure 16, shown in Figure 17 a, with piezoelectric element 242,243 and counterbalance weight 260 be installed to the integrally formed micro-actuator bracing frame 252 of cantilever flexible element 224 on (step 2 among Figure 16); Next, shown in Figure 17 b, magnetic head 214 is installed to the (step 3) among Figure 16 on the micro-actuator bracing frame 252; Then, shown in Figure 17 c, piezoelectric element 242,243 and cantilever lead 226 are electrically connected the (step 4) among Figure 16; Described magnetic head 214 and cantilever lead 227 are electrically connected the (step 5) among Figure 16; Visual inspection (step 6) among Figure 16, thus this manufacturing and the assembling process (step 7) among Figure 16 finished.
Figure 18 has showed the resonance test data that counterbalance weight 260 is installed to described micro-actuator bracing frame 252 front and back.Specifically, curve 290 has shown the resonance performance before counterbalance weight 260 installations, and curve 292 has shown the resonance performance after the counterbalance weight installation.As shown in the figure, after counterbalance weight 260 was installed to micro-actuator bracing frame 252, resonant frequency and gain characteristic all were improved.
Figure 19-20 has showed the described piezoelectric micro-actuator 312 of another embodiment of the present invention.In this embodiment, resonance balance by two independently parts 385 provide.Described each parts 385 comprise first and second crooked at 90 degrees to each other arm 387,389.As shown in figure 20, described parts 385 are installed on the end support member 256 of described micro-actuator bracing frame 252, thereby the arm 387 of parts 385 is alignd fully with the outside surface 264 of corresponding side arms 258,259.All the other structures of described piezoelectric micro-actuator 312 are fully similar to described piezoelectric micro-actuator 212, and represent with similar label.
Figure 21-22 has showed the described piezoelectric micro-actuator 412 of another embodiment of the present invention.In this embodiment, the resonance balance is provided by parts 485.Described parts 485 comprise end arm 486 and first, second crooked at 90 degrees to each other side arm 487,489.As shown in figure 22, described parts 485 are installed on the micro-actuator bracing frame 252, thereby make two side arms 487,489 of parts 485 align fully with the outside surface 264 of corresponding side arms 258,259 respectively.All the other ingredients of described piezoelectric micro-actuator 412 are fully similar to piezoelectric micro-actuator 212, and represent with similar label.
According to embodiments of the invention, the magnetic head fold piece combination 210 that contains micro-actuator 212,312 or 412 can be used in disc driver (HDD).Described disc driver can be the type in conjunction with Fig. 1 and Fig. 2 description.Because structure, operation and the assemble flow of disc driver are familiar with by the industry those of ordinary skill, are not described in detail in this.Piezoelectric micro-actuator of the present invention can be used for any suitable disc driver with micro-actuator, or any other devices with micro-actuator.
Above invention has been described in conjunction with most preferred embodiment, but the present invention is not limited to the embodiment of above announcement, and should contain various modification, equivalent combinations of carrying out according to essence of the present invention.
Claims (20)
1. micro-actuator that is used for magnetic head fold piece combination comprises:
The bracing frame integrally formed with the cantilever flexible element of described magnetic head fold piece combination, support frame as described above comprises: end support member; Be used to support the top support member of the magnetic head of described magnetic head fold piece combination; And the opposite side arm that support member of the described end and top support member are connected to each other; Wherein said limit arm vertically extends from the respective side edge of end support member and top support member;
Be installed in the piece that is used to provide the resonance balance on the support member of the described end; And
On the limit arm that a pair of piezoelectric element, each piezoelectric element are installed in the support frame as described above correspondence and the described corresponding side, wherein said piezoelectric element can be energized and cause the selectivity motion of described limit arm.
2. micro-actuator according to claim 1, it is characterized in that: support frame as described above is formed by metal material.
3. micro-actuator according to claim 1 is characterized in that: support member of the described end comprises the connecting terminal that links to each other with the cantilever lead of described cantilever flexible element, and described connecting terminal electrically connects with the corresponding connecting terminal of described piezoelectric element.
4. micro-actuator according to claim 1 is characterized in that: described top support member comprises the connecting terminal that links to each other with the cantilever lead of described cantilever flexible element, and described connecting terminal electrically connects with the corresponding connecting terminal of described magnetic head.
5. micro-actuator according to claim 1 is characterized in that: described has and the surperficial aligned with each other side of corresponding side arms towards the outside.
6. magnetic head fold piece combination, it comprises:
Micro-actuator;
Magnetic head; And
Support the cantilever part of described micro-actuator and magnetic head,
Wherein, described micro-actuator comprises:
The bracing frame integrally formed with the cantilever flexible element of described magnetic head fold piece combination, support frame as described above comprises: end support member; Be used to support the top support member of the magnetic head of described magnetic head fold piece combination; And the opposite side arm that support member of the described end and top support member are connected to each other; Wherein, described limit arm vertically extends from the respective side edge of end support member and top support member;
Be installed in the piece that is used to provide the resonance balance on the support member of the described end; And
On the limit arm that a pair of piezoelectric element, each piezoelectric element are installed in the support frame as described above correspondence and the described corresponding side, wherein said piezoelectric element can be energized and cause the selectivity motion of described limit arm.
7. magnetic head fold piece combination according to claim 6 is characterized in that: support member of the described end is installed on the cantilever tongue piece of described cantilever part.
8. magnetic head fold piece combination according to claim 7 is characterized in that: described cantilever tongue piece comprises zone line and two arm element, and described two arm element are installed in the side area of described cantilever flexible element correspondence.
9. magnetic head fold piece combination according to claim 7 is characterized in that: support member of the described end is installed on the described cantilever tongue piece by epoxide-resin glue, anisotropic conductive film or laser bonding mode.
10. magnetic head fold piece combination according to claim 7 is characterized in that: described cantilever tongue piece is supported on the side area of the salient point of load beam of described cantilever part and described cantilever flexible element.
11. magnetic head fold piece combination according to claim 7 is characterized in that: described cantilever tongue piece has the step that supports described micro-actuator.
12. magnetic head fold piece combination according to claim 6 is characterized in that: support frame as described above is made by metal material.
13. magnetic head fold piece combination according to claim 6 is characterized in that: support member of the described end comprises the connecting terminal that links to each other with the cantilever lead of described cantilever flexible element, and described connecting terminal electrically connects with the corresponding connecting terminal of described piezoelectric element.
14. magnetic head fold piece combination according to claim 6 is characterized in that: described top support member comprises the connecting terminal that links to each other with the cantilever lead of described cantilever flexible element, and described connecting terminal electrically connects with the corresponding connecting terminal of described magnetic head.
15. magnetic head fold piece combination according to claim 6 is characterized in that: described has and the surperficial aligned with each other side of corresponding side arms towards the outside.
16. a magnetic disk drive comprises:
The magnetic head fold piece combination that constitutes by the cantilever part of described micro-actuator of micro-actuator, magnetic head and support and magnetic head;
The horse district swing arm that is connected with described magnetic head fold piece combination;
Disk; And
Drive the Spindle Motor of described disk rotation,
Wherein, described micro-actuator comprises:
The bracing frame integrally formed with the cantilever flexible element of described magnetic head fold piece combination, support frame as described above comprises: end support member; Be used to support the top support member of the magnetic head of described magnetic head fold piece combination; And the opposite side arm that support member of the described end and top support member are connected to each other; Described limit arm vertically extends from the respective side edge of end support member and top support member;
Be installed in the piece that is used to provide the resonance balance on the support member of the described end; And
On the limit arm that a pair of piezoelectric element, each piezoelectric element are installed in the support frame as described above correspondence and the described corresponding side, wherein said piezoelectric element can be energized and cause the selectivity motion of described limit arm.
17. the manufacture method of a piezoelectric micro-actuator comprises:
The cantilever flexible element of micro-actuator bracing frame and cantilever part is integrally formed;
The resonance counterbalance weight is installed to the end support member of described micro-actuator bracing frame;
Piezoelectric unit is installed on the described micro-actuator bracing frame, described each piezoelectric element is extended along the corresponding sides arm of described micro-actuator bracing frame and the respective side of described resonance counterbalance weight;
Magnetic head is installed on the top support member of described micro-actuator bracing frame;
The cantilever lead of described piezoelectric unit and magnetic head and described cantilever part is electrically connected; And
Visual inspection.
18. method according to claim 17 is characterized in that also comprising: cantilever tongue piece is installed on the described cantilever flexible element; The end support member that reaches described micro-actuator bracing frame is installed on the described cantilever tongue piece.
19. method according to claim 18 is characterized in that: described cantilever tongue piece is supported on the salient point of load beam of described cantilever part.
20. method according to claim 18 is characterized in that: described cantilever tongue piece is installed comprises that two arm element with described cantilever tongue piece are installed on the respective side edge zone of described cantilever flexible element.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710091683 CN101051511A (en) | 2006-03-31 | 2007-03-27 | Micro ectuator, micro ectuator suspension arm part and magnetic head folding sheet combination |
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| Application Number | Priority Date | Filing Date | Title |
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| CN200610075071.3 | 2006-03-31 | ||
| CN200610075071 | 2006-03-31 | ||
| CN 200710091683 CN101051511A (en) | 2006-03-31 | 2007-03-27 | Micro ectuator, micro ectuator suspension arm part and magnetic head folding sheet combination |
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| CN101051511A true CN101051511A (en) | 2007-10-10 |
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|---|---|
| CN (1) | CN101051511A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102148037A (en) * | 2010-02-10 | 2011-08-10 | 新科实业有限公司 | Magnetic head, magnetic head gimbal assembly and disk driving unit |
| JP2019046517A (en) * | 2017-08-31 | 2019-03-22 | 日本発條株式会社 | Flexure of hard disk device |
-
2007
- 2007-03-27 CN CN 200710091683 patent/CN101051511A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102148037A (en) * | 2010-02-10 | 2011-08-10 | 新科实业有限公司 | Magnetic head, magnetic head gimbal assembly and disk driving unit |
| CN102148037B (en) * | 2010-02-10 | 2015-07-08 | 新科实业有限公司 | Magnetic head, magnetic head gimbal assembly and disk driving unit |
| JP2019046517A (en) * | 2017-08-31 | 2019-03-22 | 日本発條株式会社 | Flexure of hard disk device |
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