JP4182002B2 - Process and apparatus for forming ceramic coatings on metals and alloys, and coatings produced by this process - Google Patents

Process and apparatus for forming ceramic coatings on metals and alloys, and coatings produced by this process Download PDF

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JP4182002B2
JP4182002B2 JP2003580609A JP2003580609A JP4182002B2 JP 4182002 B2 JP4182002 B2 JP 4182002B2 JP 2003580609 A JP2003580609 A JP 2003580609A JP 2003580609 A JP2003580609 A JP 2003580609A JP 4182002 B2 JP4182002 B2 JP 4182002B2
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シャトロフ,アレクサンデル・セルゲーヴィッチ
サムソノフ,ヴィクトル・ヨシフォヴィッチ
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/615Microstructure of the layers, e.g. mixed structure
    • C25D5/617Crystalline layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18Electroplating using modulated, pulsed or reversing current
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/005Apparatus specially adapted for electrolytic conversion coating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/024Anodisation under pulsed or modulated current or potential
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/026Anodisation with spark discharge
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/20Electroplating using ultrasonics, vibrations
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • C25D5/611Smooth layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance

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Description

本発明は保護被膜を施す分野に関し、特に金属および合金から成る物品のプラズマ放電被覆、例えば、プラズマ電解酸化被覆に関する。このプロセスはこれらの物品の表面に耐摩耗性、耐食性、耐熱性、誘電性、および均一着色性を有するセラミック被膜を迅速かつ効率的に形成することができる。   The present invention relates to the field of applying protective coatings, and more particularly to plasma discharge coatings, such as plasma electrolytic oxidation coatings, on articles made of metals and alloys. This process can quickly and efficiently form a ceramic coating having wear resistance, corrosion resistance, heat resistance, dielectric properties, and uniform color on the surface of these articles.

これらの被膜は厚みの均一性が高いこと、表面粗さが低いこと、および従来の被覆プロセスでは除去するのに通常多大のコストを必要とする多孔性外層が殆ど存在しないことによって特徴付けられる。   These coatings are characterized by high thickness uniformity, low surface roughness, and the absence of a porous outer layer that usually requires significant costs to remove in conventional coating processes.

本願に記載される被膜を生成するプロセスおよびそのプロセスを実施するための装置は工業技術、具体的には、航空機および自動車工業、石油化学および織物工業、電子工学、医薬、および家庭用品の製造に用いることができる。   The processes for producing the coatings described herein and the apparatus for performing the processes are in industrial technology, specifically in the manufacture of aircraft and automotive industries, petrochemical and textile industries, electronics, pharmaceuticals, and household products. Can be used.

工業的周波数である50−60Hzの電流を用いてセラミック被膜を生成するプロセスが国際公開第99/31303号パンフレットによって知られている。このプロセスは200μmに至る厚みを有し、かつ基板に十分に結合される硬質被膜をアルミニウム合金から成る物品の表面に形成させることができる。   A process for producing ceramic coatings using an industrial frequency of 50-60 Hz is known from WO 99/31303. This process can form a hard coating on the surface of an article made of an aluminum alloy having a thickness up to 200 μm and sufficiently bonded to the substrate.

このプロセスの主要な問題は低微小硬度でかつ無数の微視的および巨視的欠陥(微細孔、微細亀裂、薄片状断片)を含むかなり厚い多孔性外層を形成する点にある。欠陥層の厚みは、処理される合金の化学組成および電解方式に依存するが、セラミック被膜の全厚みの25−55%に達する。   The main problem with this process is that it forms a very thick porous outer layer with low microhardness and countless microscopic and macroscopic defects (micropores, microcracks, flaky fragments). The thickness of the defect layer depends on the chemical composition of the alloy to be treated and the electrolysis scheme, but reaches 25-55% of the total thickness of the ceramic coating.

上記の多孔層を除去するのに、高価な精密機器が用いられる。もし物品が研磨剤およびダイヤモンド工具を到達させるのが困難な表面の複雑な形状を有している場合、欠陥層を除去する課題を解決するのは困難である。これはプロセスの応用範囲を制限する。   Expensive precision equipment is used to remove the porous layer. If the article has a complex shape of the surface that is difficult to reach the abrasive and diamond tool, the problem of removing the defective layer is difficult to solve. This limits the application range of the process.

上記の公知のプロセスの他の問題は、被膜の形成速度が比較的低く、エネルギー消費が大きい点にある。電流密度を20A/dm2よりも高めることによって、酸化プロセスの生産性を単純に増すことはできない。何故なら、プロセスはスパークプロセスというよりもむしろアークプロセスになり、強い局所的溶落ち放電が出現するために被膜の全体が極めて多孔状かつ薄片状になり、基板への付着性が劣化するからである。 Another problem with the known process is that the film formation rate is relatively low and energy consumption is high. By raising the current density above 20 A / dm 2 , the productivity of the oxidation process cannot simply be increased. This is because the process is an arc process rather than a spark process, and a strong local burn-off discharge appears, which makes the entire coating extremely porous and flaky, which degrades adhesion to the substrate. is there.

酸化プロセスを強化し、セラミック被膜の特性を改善する目的で、多くの研究者らが電解パルス方式を改善する試みを行い、電流パルスまたは電圧パルスの種々の形状および持続時間を提案している。   In order to enhance the oxidation process and improve the properties of the ceramic coating, many researchers have attempted to improve the electrolytic pulse regime and have proposed various shapes and durations of current or voltage pulses.

電流が改変された正弦波形を有するセラミック被膜を形成するプロセスが米国特許第5,616,229号明細書によって知られている。この電流波形はセラミック層を形成中の熱応力を低減し、300μmに至る厚みの被膜を施すことを可能とする。しかし、このプロセスでは、工業的な周波数電流が用いられているので、高い表面粗さの比較的厚い多孔性外層の形成をもたらし、また比較的高いエネルギーコストを必要とする。   A process for forming a ceramic coating having a sinusoidal waveform with a modified current is known from US Pat. No. 5,616,229. This current waveform reduces the thermal stress during the formation of the ceramic layer and makes it possible to apply a coating having a thickness of up to 300 μm. However, this process uses industrial frequency currents, resulting in the formation of a relatively thick porous outer layer with high surface roughness and requires relatively high energy costs.

特定の複雑な形状の正パルスと負パルスを交番させるパルス化アノードーカソード方式によってバルブ金属および合金を酸化させるための他のプロセスが知られている(ロシア特許第2077612号明細書)。パルスの持続時間および正パルスと負パルス間の休止の時間は100−130μ秒であり、継続周波数は50Hzである。最初の5−7μ秒の間に、電流はその最大値(800A/dm2)に達し、その後、25−50μ秒の間一定に保たれる。この場合、より短いパルスと極めて大きなパルスのパワーが放電着火時間を著しく短縮させるので、欠陥外層が形成される主要な原因がなくなる。しかし、強力なパルスの対を不当に長い休止を伴って交番するので、被膜形成速度を低下させる。 Other processes are known (Russian Patent No. 2077612) for oxidizing valve metals and alloys by a pulsed anode-cathode system that alternates positive and negative pulses of a particular complex shape. The duration of the pulse and the pause between the positive and negative pulses is 100-130 μsec, and the duration frequency is 50 Hz. During the first 5-7 μs, the current reaches its maximum value (800 A / dm 2 ) and then remains constant for 25-50 μs. In this case, the shorter pulse and the power of the very large pulse significantly shorten the discharge ignition time, thus eliminating the main cause of the formation of the defect outer layer. However, as the strong pulse pairs alternate with unduly long pauses, the film formation rate is reduced.

また、振幅100−1000Vの電圧の正パルスを用いてアルカリ電解液中で酸化被膜を生成するプロセスが知られている(旧ソ連特許第1767043号明細書)。これらのパルスは2段階の形状を有している。最初、1−3μ秒の間に電圧は最大値まで上昇し、次いで、最大値の約10分の1まで下降し、10−20μ秒の間一定のレベルで継続する。しかし、正パルスのみを用いているので、高い微小硬度と耐磨耗性を有する良好な品質の被膜を生成することができない。   In addition, a process for generating an oxide film in an alkaline electrolyte using a positive pulse with a voltage of 100 to 1000 V is known (former Soviet Patent No. 1767043). These pulses have a two-stage shape. Initially, during 1-3 microseconds, the voltage rises to a maximum value, then falls to about one-tenth of the maximum value, and continues at a constant level for 10-20 microseconds. However, since only positive pulses are used, it is not possible to produce a good quality coating having high microhardness and wear resistance.

提案する本発明に最も近い技術はロシア特許第2070942号明細書に記載されるプロセスである。このプロセスは振幅100−500Vおよび持続時間1−10μ秒の電圧の正パルスと負パルスを交番させ、その交番中に、アノード側の半分の持続時間の各々において、振幅600−1000Vおよび持続時間0.1−1μ秒の高電圧正パルスを印加することによって酸化させる。パルスが印加されるとき、その瞬間における全電流が上昇し、放電に好ましい状態を生成する。このプロセスの問題は極めて短い高電圧正パルスを用いるので、十分なパワーの放電を生成することができない点にある。これはプロセスの生産性を低下させ、提案されたプロセスを工業的な目的のために技術的に実現するのを極めて困難にする。   The closest technique to the proposed invention is the process described in Russian Patent No. 2070942. This process alternates between positive and negative pulses with an amplitude of 100-500V and a voltage of duration 1-10 μs, during which the amplitude 600-1000V and duration 0 at each of the half durations on the anode side. Oxidize by applying a high voltage positive pulse of 1-1 μs. When a pulse is applied, the total current at that moment rises, creating a favorable state for discharge. The problem with this process is that a very short high voltage positive pulse is used, so that a discharge with sufficient power cannot be generated. This reduces process productivity and makes it extremely difficult to technically implement the proposed process for industrial purposes.

[本発明の概要]
本発明の第1態様によれば、第1電極が取り付けられ、かつ水性アルカリ電解液で満たされる電解槽であって、他の電極が接続された物品が浸漬された電解槽内において、金属および合金にセラミック被膜を形成するプロセスであって、前記プロセスがプラズマ放電方式でなされるようにパルス電流が前記電極間に供給されるプロセスにおいて、前記電極に予め定められた周波数範囲を有する高周波の二極性電流パルスを供給し、同時に、予め定められた音波周波数範囲の音響振動を前記電解液中に生成させる工程であって、前記音響振動の周波数範囲は前記電流パルスの周波数範囲と重なるような工程を備え、前記電流パルスは500から10,000Hzの範囲内にあるパルス継続周波数を有するプロセスが提供される。
[Outline of the present invention]
According to the first aspect of the present invention, in the electrolytic cell to which the first electrode is attached and which is filled with the aqueous alkaline electrolyte, the electrolytic cell in which the article to which the other electrode is connected is immersed, the metal and A process for forming a ceramic coating on an alloy, wherein a pulse current is supplied between the electrodes so that the process is performed by a plasma discharge method. supplying a polarity current pulses, at the same time, a step of generating acoustic vibrations of sonic frequency range predetermined in the electrolyte, such as the frequency range of the acoustic vibrations overlaps with the frequency range of the current pulse step wherein the current pulses are provided processes having pulse duration frequency which is within the range of 500 to 10,000 Hz.

本発明の第2態様によれば、金属および合金にセラミック被膜を形成する装置であって、電極を有する電解槽と、パルス電流を前記電極に送る供給源と、少なくとも1つの音響振動発生器を備える装置において、前記供給源は前記電極に予め定められた周波数範囲の高周波の二極性電流パルスを供給するのに適応するようにされ、前記少なくとも1つの音響振動発生器は前記槽内に含まれる電解液内への前記二極性電流パルスの供給と同時に、音響振動を生成させるのに適応するようにされ、前記音響振動は前記電流パルスの周波数範囲と重なる予め定められた音波周波数範囲を有し、 前記電流パルスは500から10,000Hzの範囲内にあるパルス継続周波数を有する装置が提供される。 According to a second aspect of the present invention, there is provided an apparatus for forming a ceramic coating on metals and alloys, comprising an electrolytic cell having an electrode, a source for sending a pulsed current to the electrode, and at least one acoustic vibration generator. in equipped device, said source being adapted to adapted to supply a bipolar current pulses of the high frequency of a predetermined frequency range to said electrode, wherein said at least one acoustic vibration generator is included in said tank At the same time as the supply of the bipolar current pulse into the electrolyte , the acoustic vibration has a predetermined acoustic frequency range that overlaps the current pulse frequency range. A device having a pulse duration in which the current pulse is in the range of 500 to 10,000 Hz is provided.

本発明の第3態様によれば、本発明の第1態様または第2態様のプロセスまたは装置によって形成されるセラミック被膜が提供される。   According to a third aspect of the invention, there is provided a ceramic coating formed by the process or apparatus of the first or second aspect of the invention.

本発明の第4態様によれば、プラズマ放電プロセスによって金属または合金に形成されるセラミック被膜であって、全被膜厚みの14%よりも大きくない多孔性外層を有するセラミック被膜が提供される。   According to a fourth aspect of the present invention, there is provided a ceramic coating formed on a metal or alloy by a plasma discharge process and having a porous outer layer not greater than 14% of the total coating thickness.

本発明の第5態様によれば、プラズマ放電プロセスによって金属または合金に形成されるセラミック被膜であって、0.6から2.1μmの低い粗さ(Ra)の表面を有するセラミック被膜が提供される。   According to a fifth aspect of the present invention, there is provided a ceramic coating formed on a metal or alloy by a plasma discharge process having a low roughness (Ra) surface of 0.6 to 2.1 μm. The

二極性電流パルスは交番パルスであってもよいし、または、例えば、2つの一極の後に1つの逆極が続くようなパルスの組として供給されてもよい。   Bipolar current pulses may be alternating pulses, or may be provided as a set of pulses, for example, two unipolar followed by one reverse pole.

本発明の実施形態は、セラミック被膜の物理的、機械的特性を改善することによって、セラミック被膜の磨耗、腐食、熱に対する耐性および絶縁耐力のような有用な特性を改善することを意図している。また、本発明の実施形態は基板への良好な付着性を有する硬質な微細結晶質セラミック被膜を生成するという技術的な課題を解決する。   Embodiments of the present invention are intended to improve useful properties such as wear, corrosion, heat resistance and dielectric strength of ceramic coatings by improving the physical and mechanical properties of the ceramic coatings. . Embodiments of the present invention also solve the technical problem of producing a hard microcrystalline ceramic coating that has good adhesion to the substrate.

また、本発明の実施形態はセラミック被膜を施すのに必要な時間およびその被膜の仕上処理に必要な時間を著しく低減させることによって、セラミック被膜を形成するプロセスの技術的な煩雑さを改善することを意図している。酸化プロセスの生産性を高めるのみならず、比電力コストも著しく低減させる。   Also, embodiments of the present invention improve the technical complexity of the process of forming the ceramic coating by significantly reducing the time required to apply the ceramic coating and the time required to finish the coating. Is intended. Not only will the productivity of the oxidation process be increased, but also the specific power cost will be significantly reduced.

さらに、本発明の実施形態によれば、耐火性の無機化合物を電解液に導入することによって、所定の特性を有する被膜を意図的に形成する。   Furthermore, according to the embodiment of the present invention, a film having predetermined characteristics is intentionally formed by introducing a refractory inorganic compound into the electrolytic solution.

また、本発明の実施形態は電解液の安定性を向上させ、その有効寿命を延ばすようにしてもよい。   In addition, the embodiment of the present invention may improve the stability of the electrolyte and extend its useful life.

本発明の装置の実施形態は改善された信頼性、汎用性、および自動化製造ラインへの架設の容易さをもたらすことを意図している。   Embodiments of the apparatus of the present invention are intended to provide improved reliability, versatility, and ease of installation on automated production lines.

有利には、被覆される物品は電極に接続され、他の電極を有してアルカリ電解液で満たされた電解槽内に配置される。これらの電極にプラズマ放電方式、好ましくは、プラズマ電解酸化方式で所要の厚みの被膜を形成するようにパルス電流が印加されるとよい。500Hz以上、好ましくは、1000から10,000Hzのパルス継続周波数および20から1,000μ秒の好ましいパルス持続時間を有する電流パルスが槽内に生成されるとよい。各電流パルスは有利には急勾配の最前部を有し、電流は全パルス持続時間の10%よりも大きくない時間内に最大振幅に達し、次いで、急激に降下し、その後、最大値の50%以下まで徐々に減少する。電流密度は好ましくは3から200A/dm2、さらに好ましくは、10から60A/dm2である。 Advantageously, the article to be coated is connected to an electrode and placed in an electrolytic cell having another electrode and filled with an alkaline electrolyte. A pulse current may be applied to these electrodes so as to form a film having a required thickness by a plasma discharge method, preferably a plasma electrolytic oxidation method. Current pulses having a pulse duration of 500 Hz or more, preferably 1000 to 10,000 Hz and a preferred pulse duration of 20 to 1,000 μsec may be generated in the cell. Each current pulse preferably has a steep front, and the current reaches a maximum amplitude in a time not greater than 10% of the total pulse duration, then drops sharply and then reaches a maximum value of 50. Gradually decreases to less than%. The current density is preferably 3 to 200 A / dm 2 , more preferably 10 to 60 A / dm 2 .

音響振動は空気水力学的発生器によって電解液中に生成させるとよい。発生器は電流パルス周波数範囲と重なる音波周波数範囲の音響振動を槽内に生成する。   Acoustic vibrations may be generated in the electrolyte by an aerohydrodynamic generator. The generator generates acoustic vibrations in the sonic frequency range that overlap the current pulse frequency range in the vessel.

金属の酸化物、硼化物、炭化物、窒化物、珪化物、または硫化物から成る0.5μmよりも大きくない粒子径を有する超分散粉体(ナノパウダー)を電解液に加えて、安定水性ゾルを音響振動によって形成させるとよい。   An ultra-dispersed powder (nano powder) consisting of metal oxides, borides, carbides, nitrides, silicides, or sulfides having a particle size not larger than 0.5 μm is added to the electrolyte solution to form a stable aqueous sol May be formed by acoustic vibration.

電流パルスを比較的短くすることによって、放電スパーク時間を短縮し、3から200A/dm2の高電流密度で酸化を行なうことができる。 By making the current pulse relatively short, the discharge spark time can be shortened and oxidation can be performed at a high current density of 3 to 200 A / dm 2 .

高電流値の短パルスは被膜内に形成されるプラズマ放電経路に低周波数方式の場合よりも著しく高いパワーでスパークを生成させることができる。プラズマ放電経路の温度がより高く、かつ微小体積部が小さいことによって溶融基板がより急速に冷却および固化されるので、高温酸化物の固相を多量に含む緻密な微細結晶質のセラミック被膜が形成される。被膜の微小硬度は500から2100HVに達し、多孔性外層の厚みは好ましくは被膜の全厚みの14%を超えない。   A short pulse with a high current value can generate a spark with a significantly higher power in the plasma discharge path formed in the film than in the case of the low frequency system. The molten substrate is cooled and solidified more rapidly due to the higher temperature of the plasma discharge path and the smaller microvolume, resulting in the formation of a dense microcrystalline ceramic coating containing a large amount of high-temperature oxide solid phase. Is done. The microhardness of the coating reaches 500 to 2100 HV and the thickness of the porous outer layer preferably does not exceed 14% of the total thickness of the coating.

500Hzよりも高い継続周波数および1,000μ秒よりも短い持続時間の電流パルスを用いることによって、被膜を薄片状および多孔状とするアーク放電の進展を制限するのを促進し、同時に被膜を形成する比エネルギー損失を低減させるのを促進する。しかし、パルス周波数がさらに大きくなるにつれて、比エネルギー損失は低下するが、表面効果および容量性効果による損失が上昇し始める。これらの損失は10,000Hzよりも大きいパルス周波数で著しくなる。さらに、10,000Hzよりも大きい周波数および20μ秒よりも短い持続時間の電流パルスを用いると、良好な品質の被膜を生成するのに極めて高いパワーのパルスを必要とする。これは工業的な目的を達成するための技術的な実施を極めて複雑にし、かつコストが掛かる。   By using a current pulse with a duration higher than 500 Hz and a duration shorter than 1,000 μsec, it helps to limit the progress of the arc discharge, making the coating flaky and porous, and at the same time forms the coating Helps reduce specific energy loss. However, as the pulse frequency is further increased, the specific energy loss decreases, but the loss due to surface and capacitive effects begins to increase. These losses become significant at pulse frequencies greater than 10,000 Hz. In addition, using current pulses with a frequency greater than 10,000 Hz and durations shorter than 20 μs requires extremely high power pulses to produce a good quality coating. This makes the technical implementation to achieve industrial objectives extremely complex and costly.

高周波パルス方式によるプラズマ放電自身の特性は従来の工業的周波数(50または60Hz)でなされる酸化のための放電の特性と異なっている。光沢の向上とスパークの大きさの減少が肉眼によって観察可能である。酸化される表面の全体にわたってスパークが移動するのに代わって、無数のスパークが表面の全体にわたって同時に放電しているのがわかる。   The characteristics of the plasma discharge itself by the high frequency pulse method are different from those of the discharge for oxidation performed at a conventional industrial frequency (50 or 60 Hz). An improvement in gloss and a reduction in the size of the spark can be observed with the naked eye. Instead of the spark moving across the surface to be oxidized, it can be seen that a myriad of sparks are discharging simultaneously across the surface.

電流パルスの好ましい形状(図1)によって、プラズマ放電の均一な開始と保持を物品の表面の全体にわたって容易に達成することができる。プラズマ放電プロセスは一定の高電流値を維持する必要はない。パルスの急勾配の最前部、すなわち、パルスの最大値に至る急速な立上りによって、放電開始時間を著しく低減させることができる。また、電流を最大値の50%以下に減少させることによって、放電プロセスを効率的に維持することができる。   Due to the preferred shape of the current pulse (FIG. 1), uniform initiation and retention of the plasma discharge can be easily achieved across the surface of the article. The plasma discharge process does not need to maintain a constant high current value. The forefront of the steep pulse, that is, the rapid rise to the maximum value of the pulse, can significantly reduce the discharge start time. Further, the discharge process can be efficiently maintained by reducing the current to 50% or less of the maximum value.

さらに、正パルスおよび負パルスの急勾配の最前部によって、電極系(槽−電解液−物品)および酸化される物品の表面の2重電気層(電解液−酸化−金属)の両方によって生成される容量性負荷を急速に充電および放電させることができる。   In addition, the forefront of the positive and negative pulse steep slopes are generated by both the electrode system (bath-electrolyte-article) and the double electrical layer (electrolyte-oxidation-metal) on the surface of the article to be oxidized. Capacitive loads can be charged and discharged rapidly.

実施する上で、機械的なミキサーおよび通気装置を用いて、電解液を酸化中に攪拌することも考えられる。通気装置は電解液内に空気または酸素を泡立てることによって、電解液を攪拌する。これらの機械は所定の液体流れを生成することによって、電解液の濃度と温度を巨視的レベルで平均化する。しかし、この種の混合において、物品の表面の周囲に生じる流れのないゾーンや強い流れのゾーンをなくすことは困難である。電解液を噴射する混合ノズルを有する最新システムは、これらのゾーンをより効率的に混合し、高い乱流を確実に生じさせる。振動および脈流攪拌が用いられてもよい。   In practice, it is also conceivable to stir the electrolyte during oxidation using a mechanical mixer and a vent. The venting device agitates the electrolyte by bubbling air or oxygen into the electrolyte. These machines average a macroscopic level of electrolyte concentration and temperature by producing a predetermined liquid flow. However, in this type of mixing, it is difficult to eliminate the no-flow and strong-flow zones that occur around the surface of the article. Modern systems with a mixing nozzle that injects electrolyte will mix these zones more efficiently and ensure high turbulence. Vibration and pulsating agitation may be used.

非鉄合金を陽極酸化するためのプロセスが知られている(欧州特許第1042178号明細書)。このプロセスにおいて、電解液の振動攪拌は振動モータと回転翼によってなされる。電極が振動および揺動され、圧縮空気の供給分が10から400μmの微細孔径を有する多孔性セラミックチューブ内を通って供給される。これによって、陽極酸化プロセスを10から15A/dm2の比較的高い電流密度で行ない、著しく陽極酸化の時間を短縮することができる。しかし、このプロセスはプラズマ酸化に対しては十分ではない。何故なら、電解液内における比較的大きい気泡の生成速度および電解液内における振動の周波数が低いからである。また、電解液の攪拌および電極領域における反応剤の供給と除去が巨視的レベルで生じる。さらに、このプロセスを工業的に実現させるのは、設計の観点から困難である。 A process for anodizing non-ferrous alloys is known (EP 1042178). In this process, the electrolytic solution is agitated by a vibration motor and a rotor blade. The electrode is vibrated and oscillated, and the supply of compressed air is supplied through a porous ceramic tube having a fine pore diameter of 10 to 400 μm. As a result, the anodization process can be performed at a relatively high current density of 10 to 15 A / dm 2 , and the anodization time can be significantly shortened. However, this process is not sufficient for plasma oxidation. This is because the generation rate of relatively large bubbles in the electrolytic solution and the frequency of vibration in the electrolytic solution are low. Also, the stirring of the electrolyte and the supply and removal of the reactants in the electrode region occur at a macroscopic level. Furthermore, it is difficult to realize this process industrially from the viewpoint of design.

プラズマ電解酸化のような高エネルギー消費プロセスの場合、処理される表面のごく近傍における微視的レベルでの熱と物質の伝達率および攪拌液の流動状態が最も重要な役割をなす。電解液への音響作用はこの種の攪拌を生成するのを促進する。   In the case of high energy consumption processes such as plasma electrolytic oxidation, the heat and mass transfer rates and the flow state of the stirring liquid at the microscopic level in the immediate vicinity of the surface to be treated play the most important role. The acoustic effect on the electrolyte helps to create this type of agitation.

国際公開第96/38603号パンフレットは超音波振動を電解液に作用させるスパーク酸化のプロセスを記載している。これらの振動は放電ゾーンにおける電解液の集中的循環を容易にする。しかし、液体内での超音波振動は脱ガスと気泡の結合を生じさせ、結合した気泡は表面に浮遊する。溶解したガスの60%までが早々に液体から分離する。さらに、超音波振動の高いパワーはキャビテーションによる表面侵食をもたらし、セラミック表面を破壊させ、キャビテーション気泡の破裂などの流体衝撃によって微細な亀裂および微細孔の数を増加させる。   WO 96/38603 describes a spark oxidation process in which ultrasonic vibrations act on the electrolyte. These vibrations facilitate the concentrated circulation of the electrolyte in the discharge zone. However, the ultrasonic vibration in the liquid causes degassing and bubble coupling, and the coupled bubbles float on the surface. Up to 60% of the dissolved gas quickly separates from the liquid. In addition, the high power of ultrasonic vibrations causes surface erosion due to cavitation, destroying the ceramic surface, and increasing the number of microcracks and micropores due to fluid impact such as cavitation bubble rupture.

対照的に、本発明の実施形態は音波(すなわち、超音波ではない)周波数範囲内の音響振動の領域、好ましくは、振動の大きさが1W/cm2を超えない音響振動の領域を用いてアルカリ電解液中のセラミック被膜を形成する技術に関する。 In contrast, embodiments of the present invention employ a region of acoustic vibration within the acoustic (ie, not ultrasonic) frequency range, preferably a region of acoustic vibration where the magnitude of the vibration does not exceed 1 W / cm 2. The present invention relates to a technique for forming a ceramic coating in an alkaline electrolyte.

音響振動は少なくとも1つの空気水力学的発生器によって生成されるとよい。この空気水力学的発生器は液体と空気の噴流の運動エネルギーを音響振動エネルギーに変換する機器である。このような発生器は簡潔性、信頼性、および経済性によって特徴付けられ、流体入口と共鳴チャンバを備えている。音響振動は電解液が発生器の流体入口から発生器内を通過するときに発生器の共鳴チャンバ内に誘発され、その後、電解液の放電がなされ、その結果、大気からの空気が特定の通路を介して発生器に引込まれ、電解液と混合し、かつ分散する。   The acoustic vibration may be generated by at least one aerohydraulic generator. This aero-hydraulic generator is a device that converts the kinetic energy of a liquid and air jet into acoustic vibration energy. Such a generator is characterized by simplicity, reliability, and economy and includes a fluid inlet and a resonance chamber. Acoustic vibration is induced in the generator's resonant chamber as the electrolyte passes through the generator through the fluid inlet of the generator, followed by a discharge of the electrolyte, so that air from the atmosphere is passed through a specific path. Through the generator, mixed with the electrolyte and dispersed.

空気からなる多数の微細気泡が流れ内に捕捉され、槽の全容積を満たす。空気は電解液に強制的に溶解し、電解液を酸素で飽和させる。電解液のガス飽和は20−30%まで増加する。   A number of fine bubbles of air are trapped in the flow and fill the entire volume of the tank. Air is forcibly dissolved in the electrolyte and saturates the electrolyte with oxygen. The gas saturation of the electrolyte increases to 20-30%.

音響振動の周波数で振動する気泡は電解液内において微視的に流動し、電解液の攪拌処理を著しく促進し、酸化される表面の近傍において攪拌が激減するのを防止する。プラズマ放電によって生成する熱を効率的に除去し、局部的な過熱をなくし、均一な厚みを有する良好な品質のセラミック被膜を確実に形成させる。電解液中に酸素含有量のより高い新しい部分が生じることによって、放電ゾーンのプラズマ化学反応が強められ、被膜形成プロセスを促進する。   Bubbles that vibrate at the frequency of the acoustic vibration flow microscopically in the electrolyte, significantly accelerate the agitation process of the electrolyte, and prevent agitation from being drastically reduced near the surface to be oxidized. The heat generated by the plasma discharge is efficiently removed, local overheating is eliminated, and a good quality ceramic coating having a uniform thickness is reliably formed. The formation of a new part with a higher oxygen content in the electrolyte enhances the plasma chemical reaction in the discharge zone and accelerates the film formation process.

プラズマ酸化に用いられる水性アルカリ電解液はコロイド溶液、すなわち、水性ゾルからなる。他のコロイド溶液と同様に、このような電解液は凝固、凝集、および沈降を生じる傾向にある。電解液があるレベルの凝固、凝集、および沈降に達すると、その電解液は無効になり、被膜の品質は急激に劣化する。従って、コロイド粒子の数と形状を制御することによって、電解液の有効性が決定されるとよい。   The aqueous alkaline electrolyte used for plasma oxidation is a colloidal solution, that is, an aqueous sol. Like other colloidal solutions, such electrolytes tend to cause solidification, aggregation, and sedimentation. When the electrolyte reaches a certain level of solidification, agglomeration, and settling, the electrolyte becomes ineffective and the quality of the coating deteriorates rapidly. Therefore, the effectiveness of the electrolyte may be determined by controlling the number and shape of the colloidal particles.

本発明の実施形態によれば、電解液内に生成し得る大きな粒子を連続的に破壊することによって、電解液を長期にわたって安定的かつ効率的に維持することができる。音響振動発生器によって生成された音響領域の影響下において、コロイド粒子の移動する比率は大きくなり、粒子同士および粒子と槽の壁や酸化される物品の表面との活発な衝突の回数が増え、粒子の分散を引き起こす。   According to the embodiment of the present invention, the electrolytic solution can be stably and efficiently maintained over a long period of time by continuously breaking large particles that can be generated in the electrolytic solution. Under the influence of the acoustic region generated by the acoustic vibration generator, the rate of movement of the colloidal particles increases, increasing the number of active collisions between particles and between the particles and the walls of the vessel and the surface of the article being oxidized, Causes dispersion of particles.

予め定められた機能的特性(磨耗、光、腐食、および熱に対する耐性、誘電性、厚みの全体にわたる均一な着色)を有するセラミック被膜を生成するために、好ましくは、0.5μmよりも大きくない粒子径、いくつかの実施形態においては、0.3μmよりも大きくない粒子径および0.1から5g/Lの好ましい濃度を有する超分散不溶解性粉体(ナノパウダー)が電解液に添加されるとよい。   To produce a ceramic coating with predetermined functional properties (wear, light, corrosion, and resistance to heat, dielectric properties, uniform color throughout thickness), preferably not greater than 0.5 μm A superdispersed insoluble powder (nanopowder) having a particle size, in some embodiments, a particle size not greater than 0.3 μm and a preferred concentration of 0.1 to 5 g / L is added to the electrolyte. Good.

電解スパーク酸化に固体分散粉体を用いるプロセスが知られている(英国特許第2237030号明細書、国際公開第97/03231号パンフレット、米国特許第5,616,229号明細書、ロシア特許第2038428号明細書、およびロシア特許第2077612号明細書)。これらの全てのプロセスにおいて、用いられる粉体は1から10μmの比較的大きな粒子径を有し、2から100g/Lの比較的高濃度で用いられている。このような粒子は急速に沈降し、懸濁状態を保つために、槽内の電解液の循環速度または泡立てるための空気の供給を増大させねばならない。このように行なう場合、粒子を電解液の容積内、従って、被膜内に均一に分配するのは実質的に困難である。さらに、酸化層内に入った大きな粒子は融解する時間がなく、その結果として、脆弱な薄片ケーキ状の被膜が形成される。   Processes using solid dispersion powders for electrolytic spark oxidation are known (UK 2237030, WO 97/03231, US Pat. No. 5,616,229, Russian patent 2038428). And Russian Patent No. 2077612). In all these processes, the powder used has a relatively large particle size of 1 to 10 μm and is used at a relatively high concentration of 2 to 100 g / L. In order for such particles to settle quickly and remain suspended, the circulation rate of the electrolyte in the bath or the supply of air for foaming must be increased. When done in this way, it is substantially difficult to distribute the particles evenly in the volume of the electrolyte and thus in the coating. Furthermore, the large particles that have entered the oxide layer do not have time to melt, resulting in the formation of a brittle flake cake-like film.

本発明は、好ましくは0.5μmまでの粒子径、いくつかの実施形態では0.3μmまでの粒子径および(10m2/gよりも小さくない)展開比表面積を有し、高エネルギー状態によって特徴付けられるナノパウダーの使用を提案する。粉体を音響振動によって導入させた電解液は高分散安定水性ゾルの状態になる。 The present invention preferably has a particle size of up to 0.5 μm, in some embodiments a particle size of up to 0.3 μm and a developed specific surface area (not less than 10 m 2 / g), characterized by high energy conditions. Propose the use of attached nanopowder. The electrolyte into which the powder is introduced by acoustic vibration is in a highly dispersed and stable aqueous sol state.

超分散粒子はそれら自身が凝固と沈降に対してより大きい耐性を有する。しかも、音響振動を用いることによって、これらの粒子を電解液内にさらに分散させ、それらを電解液の容積内に均一に分布させることができる。   Superdispersed particles themselves have greater resistance to coagulation and settling. Moreover, by using acoustic vibration, these particles can be further dispersed in the electrolytic solution and distributed uniformly in the volume of the electrolytic solution.

音響効果は粒子の混合を強め、それらに付加的なエネルギーを与える。微小粒子によって運ばれる付加的な電荷(電解液のイオンによって帯電される電荷)によって、プラズマ/化学反応は放電ゾーン内で活性化される。プラズマ放電ゾーン内に入る超分散粒子の一部は昇華され、他の一部は成長する酸化層内において完全に溶解する。被膜を形成するプロセスも加速され、基板の材料に依存するが、1分間に2から10μmに達する。生成される被膜は高い構造安定性と厚みの均一性によって特徴付けられる。   The acoustic effect enhances the mixing of the particles and gives them additional energy. The additional charge carried by the microparticles (charge charged by electrolyte ions) activates the plasma / chemical reaction in the discharge zone. Some of the ultra-dispersed particles that enter the plasma discharge zone are sublimated and the other part is completely dissolved in the growing oxide layer. The process of forming the coating is also accelerated, reaching 2 to 10 μm per minute, depending on the substrate material. The resulting coating is characterized by high structural stability and thickness uniformity.

以下の耐火性物質、すなわち、酸化物(Al23、ZrO2、CeO2、CrO3、MgO、SiO2、TiO2、Fe23、Y23、またはそれらの混合物、複合酸化物、またはスピネル)、硼化物(ZrB2、TiB2、CrB2、LaB2)、窒化物(Si34、TiN、AlN、BN)、炭化物(B4C、SiC、Cr32、TlC、ZrC、TaC、VC、WC)、硫化物(MoS2、WS2、ZnS、CoS)、珪化物(WSi2、MoSi2)、およびその他が電解液に添加される超分散粉体(ナノパウダー)として用いられる。種々の化学組成を有するこのような耐火性物質の粒子を電解液に添加することによって、被膜の構造、微小硬度、多孔度、強度、および色彩のような物理的、機械的特性を根本的に変更することができる。従って、特定の用途に対して最適の特性を有する被膜を生成することができる。 The following refractory materials: oxides (Al 2 O 3 , ZrO 2 , CeO 2 , CrO 3 , MgO, SiO 2 , TiO 2 , Fe 2 O 3 , Y 2 O 3 , or mixtures thereof, complex oxidation Or spinel), boride (ZrB 2 , TiB 2 , CrB 2 , LaB 2 ), nitride (Si 3 N 4 , TiN, AlN, BN), carbide (B 4 C, SiC, Cr 3 C 2 , TlC, ZrC, TaC, VC, WC), sulfides (MoS 2 , WS 2 , ZnS, CoS), silicides (WSi 2 , MoSi 2 ), and other ultra-dispersed powders (nano Used as a powder). By adding particles of such refractory substances with various chemical compositions to the electrolyte, the physical and mechanical properties such as coating structure, microhardness, porosity, strength, and color are fundamentally changed. Can be changed. Accordingly, it is possible to produce a film having optimal characteristics for a specific application.

ナノパウダーを用いることによって、0.1から5g/L、好ましくは、0.5−3g/Lの比較的低い濃度で高品質の被膜を得ることができる。0.5μmよりも大きい粒子径のより高い濃度の粉体を用いた場合、著しい効果が得られない。   By using nanopowder, a high quality film can be obtained at a relatively low concentration of 0.1 to 5 g / L, preferably 0.5-3 g / L. When a higher concentration powder having a particle diameter larger than 0.5 μm is used, a remarkable effect cannot be obtained.

本願出願人によって見出された本発明の1つの特徴は、酸化プロセスを高周波電気パルスと電解液内での音波周波数範囲内の音響振動の生成を組合せて用いることによって、良好な品質のセラミック被膜の形成を著しく促進する点にある。音響振動は電流周波数範囲と重なっていなければならない。この被膜の形成率の増大は電気的消耗を著しく増大させずに達成される。   One feature of the present invention found by the applicant is that a good quality ceramic coating is obtained by using an oxidation process in combination with high frequency electrical pulses and the generation of acoustic vibrations in the sonic frequency range within the electrolyte. Is to remarkably promote the formation of. The acoustic vibration must overlap the current frequency range. This increase in film formation is achieved without significantly increasing electrical wear.

上記の効果、すなわち、音響場のない電解液内に印加される特定の形状のパルスの周波数を大きくする効果および工業的周波数パルスを用いて電解液内に音響振動を生成させる効果は、各々、酸化プロセスの生産性を向上させる。しかし、両方の効果を同時に利用すると、得られる効果は2つの効果の単純な和を著しく上回る。   The above effects, that is, the effect of increasing the frequency of a pulse of a specific shape applied in an electrolyte without an acoustic field and the effect of generating acoustic vibrations in the electrolyte using an industrial frequency pulse, respectively, Improve the productivity of the oxidation process. However, if both effects are used simultaneously, the resulting effect is significantly greater than the simple sum of the two effects.

この場合、電解液と酸化される表面との間の境界区域にエネルギーが付加的に集中し、酸化中の拡散プロセス、熱プロセス、およびプラズマプロセスを促進すると考えられる。   In this case, it is believed that energy is additionally concentrated in the boundary area between the electrolyte and the surface to be oxidized, facilitating diffusion processes, thermal processes, and plasma processes during oxidation.

金属および合金にセラミック被膜を形成する本発明の装置は供給源と電解槽を備えている(図2)。   The apparatus of the present invention for forming ceramic coatings on metals and alloys includes a source and an electrolytic cell (FIG. 2).

供給源は極性が交互に代わる電気パルスを生成し、それらの電気パルスを電極に供給する。電流の正パルスと負パルスを交互に、すなわち、次々に供給してもよいし、あるいは多数パルスからなる多数の組を交互に供給してもよい。一連のパルスの順序および周波数、それらの持続時間、および電流と電圧の振幅は電解プロセスを制御するマイクロプロセッサによって調整されるとよい。   The source generates electrical pulses of alternating polarity and supplies those electrical pulses to the electrodes. The positive and negative pulses of the current may be supplied alternately, i.e. one after the other, or multiple sets of multiple pulses may be supplied alternately. The sequence and frequency of the series of pulses, their duration, and current and voltage amplitudes may be adjusted by a microprocessor that controls the electrolysis process.

電解槽は1つの電極として機能する、例えば、ステンレス鋼から成る槽自身と、酸化物被覆される物品が接続される第2電極と、電解液用の冷却システムと、音響振動を生成するためのシステムからなる。槽はpHが8.5から13.5のアルカリ電解液によって満たされるとよい。   The electrolytic cell functions as one electrode, for example, a stainless steel bath itself, a second electrode to which an oxide-coated article is connected, a cooling system for the electrolyte, and for generating acoustic vibrations. It consists of a system. The bath may be filled with an alkaline electrolyte having a pH of 8.5 to 13.5.

電解液冷却システムは電解液を汲み上げるポンプと、10μmよりも大きい粒子を捕捉する粗洗浄フィルタと、冷却器からなるとよい。電解液の温度は好ましくは酸化中に15から55℃の範囲内に維持される。   The electrolyte cooling system may comprise a pump that pumps the electrolyte, a coarse cleaning filter that captures particles larger than 10 μm, and a cooler. The temperature of the electrolyte is preferably maintained within the range of 15 to 55 ° C. during oxidation.

電解液中に音響振動を生成させるシステムは槽に取り付けられる1つ(またはいくつかの)空気水力学的発生器と、圧力ゲージと、発生器への電解液と空気の供給量を調整する弁からなるとよい。電解液内の音響領域のパラメータは空気水力学的発生器の投入部における電解液の流れの圧力を変化させることによって調節される。発生器は実質的に追加的なエネルギーを必要とせず、ポンプによって駆動される電解液の噴流の圧力によって操作され、この圧力は3から7バールであるとよい。   A system for generating acoustic vibrations in the electrolyte includes one (or several) aero-hydraulic generator attached to the tank, a pressure gauge, and a valve that regulates the supply of electrolyte and air to the generator. It is good to consist of. The parameters of the acoustic region in the electrolyte are adjusted by changing the pressure of the electrolyte flow at the input of the aerohydrodynamic generator. The generator requires substantially no additional energy and is operated by the pressure of the electrolyte jet driven by the pump, which should be between 3 and 7 bar.

本発明の実施形態のプロセスの著しい利点は、150μmに達する厚み、好ましくは、2から150μmの厚みと500から2100HVの微小硬度を有する緻密な微細結晶質セラミック被膜を比較的短時間(数分から1時間)の間に金属に生成することができるという事実である。   A significant advantage of the process of embodiments of the present invention is that a dense microcrystalline ceramic coating having a thickness of up to 150 μm, preferably 2 to 150 μm and a microhardness of 500 to 2100 HV, can be obtained in a relatively short time (from a few minutes to 1 Is the fact that it can be produced on the metal during

被膜はRa0.6−2.1μmの低い粗さを有し、かつ被膜の全厚みの14%よりも大きくない非常に薄い多孔性外層を有している。これは後続の煩雑な表面仕上げの必要性をなくするかまたは著しく低減させる(図3)。   The coating has a low roughness of Ra 0.6-2.1 μm and has a very thin porous outer layer not greater than 14% of the total thickness of the coating. This eliminates or significantly reduces the need for subsequent cumbersome surface finishes (FIG. 3).

被膜は複雑な形状の物品であっても厚みの高均一性を維持することができる点によって特徴付けられる。   The coating is characterized by the ability to maintain high thickness uniformity even for complex shaped articles.

高分散多結晶性セラミック被膜は互いに強固に結合した数μm以下の大きさの溶融球からなる。この構造は被膜に磨耗および腐食に対する耐性と絶縁耐力のような物理的/機械的特性を与える。さらに、特定の化学組成を有する固体のナノパウダーを電解液に加えることによって被膜の構造、微小硬度、強度および色彩を意図的に変化させ、特定用途に対する被膜の特性を最適化する。   The highly dispersed polycrystalline ceramic coating is composed of molten spheres having a size of several μm or less that are firmly bonded to each other. This structure provides the coating with physical / mechanical properties such as resistance to wear and corrosion and dielectric strength. In addition, solid nanopowder with a specific chemical composition is added to the electrolyte to intentionally change the structure, microhardness, strength and color of the coating to optimize the properties of the coating for a specific application.

本発明の実施形態はセラミック被膜が2から10μm/分の形成率で形成されることを可能にする。この形成率は公知の従来プロセスによる硬質被膜の形成率を著しく超えている。   Embodiments of the present invention allow a ceramic coating to be formed at a rate of formation of 2 to 10 μm / min. This formation rate significantly exceeds the formation rate of hard coatings by known conventional processes.

本発明の一層の理解を得て、かつ本発明がどのように実施されるかを把握するのに、添付の図面を例として参照するとよい。   To gain a better understanding of the present invention and to understand how the present invention is implemented, reference may be made to the accompanying drawings as an example.

[好適な実施形態の詳細な説明]
図1は供給源と電解槽との間の回路を通過する電流パルス(正パルスと負パルス)の形状の時間依存性の好ましい形態を示している。各電流パルスは急勾配の最前部を有し、電流は全パルス持続時間の10%よりも大きくない時間内に最大振幅に達し、次いで、電流は急激に降下し、その後、最大値の50%以下まで徐々に減少する。
[Detailed Description of Preferred Embodiments]
FIG. 1 shows a preferred form of time dependence of the shape of current pulses (positive and negative pulses) passing through the circuit between the source and the electrolyzer. Each current pulse has a steep front, the current reaches a maximum amplitude in a time not greater than 10% of the total pulse duration, then the current drops rapidly and then 50% of the maximum value. Gradually decreases to:

図2から分かるように、この装置は2つの部分、具体的には、電気バスバー(15、16)によって互いに接続されている電解槽(1)と供給源(12)からなる。   As can be seen from FIG. 2, this device consists of two parts, specifically an electrolytic cell (1) and a supply source (12) connected to each other by means of electrical bus bars (15, 16).

電解槽(1)はアルカリ電解液(3)とその電解液内に浸漬されている少なくとも1つの物品(4)を含むステンレス鋼から成る槽(2)からなる。槽には移送ポンプ(5)と電解液を粗洗浄するためのフィルター(6)が取り付けられている。   The electrolytic cell (1) comprises an alkaline electrolyte (3) and a cell (2) made of stainless steel containing at least one article (4) immersed in the electrolyte. The tank is provided with a transfer pump (5) and a filter (6) for roughly washing the electrolyte.

空気水力学的発生器(7)が槽(2)の下部内に取り付けられている。電解液(3)の圧力、従って、音響振動の周波数を調整するための弁(8)が設けられている。調整弁(8)と圧力ゲージ(9)は発生器(7)の投入部に取り付けられている。発生器(7)に向かって流れる空気の流量を調整する弁(10)が設けられている。電解液循環システムは酸化過程中の電解液(3)の必要な温度を維持するための熱交換器または冷却器(11)を備えている。   An aero-hydraulic generator (7) is mounted in the lower part of the tank (2). A valve (8) is provided for adjusting the pressure of the electrolyte (3) and thus the frequency of the acoustic vibration. The regulating valve (8) and the pressure gauge (9) are attached to the input part of the generator (7). A valve (10) is provided for adjusting the flow rate of the air flowing toward the generator (7). The electrolyte circulation system comprises a heat exchanger or cooler (11) for maintaining the required temperature of the electrolyte (3) during the oxidation process.

供給源(12)は酸化プロセスの電気的パラメータを制御するマイクロプロセッサ(14)が取り付けられた3相パルス発生器(13)からなる。   The source (12) consists of a three-phase pulse generator (13) fitted with a microprocessor (14) that controls the electrical parameters of the oxidation process.

図3は金属基板(100)に形成されたセラミック被膜の断面を示している。セラミック被膜は硬質機能層(200)と(全被膜厚みの14%よりも小さい)薄い多孔性外層(300)からなる。セラミック被膜の表面は低い粗さ(Ra:0.6−2.1μm)を有している。
[実施例]
FIG. 3 shows a cross section of the ceramic coating formed on the metal substrate (100). The ceramic coating consists of a hard functional layer (200) and a thin porous outer layer (300) (less than 14% of the total coating thickness). The surface of the ceramic coating has a low roughness (Ra: 0.6-2.1 μm).
[Example]

プロセスの実施例によって、本発明を明らかにする。全ての実施例において、被覆される試料の形状は40mmの直径および6mmの厚みを有するディスク状とした。これらの試料を酸化前に脱脂した。酸化の後、試料を脱イオンした水内で洗浄し、100℃で20分乾燥した。プロセスの電気的パラメータをオシロスコープによって記録した。被膜の特性パラメータ(厚み、微小硬度、および多孔度)を微細横断部から測定した。   The present invention is clarified by process examples. In all examples, the shape of the sample to be coated was a disk having a diameter of 40 mm and a thickness of 6 mm. These samples were degreased before oxidation. After oxidation, the sample was washed in deionized water and dried at 100 ° C. for 20 minutes. The electrical parameters of the process were recorded with an oscilloscope. The characteristic parameters (thickness, microhardness, and porosity) of the coating were measured from the fine cross section.

アルミニウム合金2014の試料を40℃の温度に保たれたpH11の燐酸塩ー珪酸塩電解液内で35分間酸化した。周波数2500Hzの二極性交番電気パルスを槽に供給した。電流密度を35A/dm2とし、最終電圧(振幅)はアノードを900V、カソードを400Vとした。音響振動を空気水力学的発生器によって槽内に生成させた。発生器の投入部における電解液の圧力は4.5バールとした。14μmの厚みの多孔性外層を含む全厚みが130±3μmの暗灰色の緻密な被膜を得た。酸化物で被覆された表面の粗さはRa2.1μmで、微小硬度は1900HVで、硬質機能層(多孔性外層ではない)の多孔度は4%であった。 A sample of aluminum alloy 2014 was oxidized for 35 minutes in a pH 11 phosphate-silicate electrolyte maintained at a temperature of 40 ° C. A bipolar alternating electrical pulse with a frequency of 2500 Hz was supplied to the bath. The current density was 35 A / dm 2 , and the final voltage (amplitude) was 900 V for the anode and 400 V for the cathode. Acoustic vibrations were generated in the tank by an aerohydrodynamic generator. The electrolyte pressure at the generator input was 4.5 bar. A dark gray dense film having a total thickness of 130 ± 3 μm including a porous outer layer of 14 μm thickness was obtained. The roughness of the surface coated with the oxide was Ra 2.1 μm, the microhardness was 1900 HV, and the porosity of the hard functional layer (not the porous outer layer) was 4%.

マグネシウム合金AZ91の試料を2g/Lの粒子径0.2μmの超分散Al23粉体が添加された燐酸塩ーアルミン酸塩の電解液中で2分間酸化した。電解液の温度は25℃で、pHは12.5とした。周波数10,000Hzの二極性交番電気パルスを槽に供給した。電流密度は10A/dm2とし、最終電圧(振幅)はアノードを520V、カソードを240Vとした。音響振動を空気水力学的発生器によって槽内に生成させた。発生器の投入部における電解液の圧力は4.8バールとした。得られた被膜は緻密で、白色を呈し、全厚みは20±1μmで、2μmの厚みの多孔性外層を含んでいた。酸化された表面の粗さはRa0.8μmで、被膜の微小硬度は600HVで、硬質機能層の多孔度は6%であった。 A sample of the magnesium alloy AZ91 was oxidized for 2 minutes in a phosphate-aluminate electrolyte containing 2 g / L of superdispersed Al 2 O 3 powder having a particle size of 0.2 μm. The temperature of the electrolytic solution was 25 ° C. and the pH was 12.5. A bipolar alternating electrical pulse with a frequency of 10,000 Hz was supplied to the bath. The current density was 10 A / dm 2 , and the final voltage (amplitude) was 520 V for the anode and 240 V for the cathode. Acoustic vibrations were generated in the tank by an aerohydrodynamic generator. The electrolyte pressure at the generator inlet was 4.8 bar. The resulting coating was dense, white, and had a total thickness of 20 ± 1 μm, including a porous outer layer having a thickness of 2 μm. The roughness of the oxidized surface was 0.8 μm Ra, the microhardness of the coating was 600 HV, and the porosity of the hard functional layer was 6%.

チタニウム合金TiA16V4の試料を2g/Lの粒子径0.2μmの超分散Al23が添加された燐酸塩ー硼酸塩電解液内で7分間酸化させた。電解液の温度は20℃で、pHは9とした。周波数1,000Hzの二極性交番電気パルスを槽に供給した。電流密度は60A/dm2とし、最終電圧(振幅)はアノードを500V、カソードを180Vとした。音響振動を空気水力学的発生器を用いて槽内に生成させた。発生器の投入部における電解液の圧力は4.0バールとした。得られた被膜は緻密で、灰青色を呈し、全厚みは15±1μmで、2μmの厚みを有する多孔性外層を含んでいた。酸化された表面の粗さはRa0.7μmで、被膜の微小硬度は750HVで、機能層の多孔度は2%であった。 A sample of the titanium alloy TiA16V4 was oxidized for 7 minutes in a phosphate-borate electrolyte containing 2 g / L of ultradispersed Al 2 O 3 with a particle size of 0.2 μm. The temperature of the electrolyte was 20 ° C. and the pH was 9. A bipolar alternating electrical pulse with a frequency of 1,000 Hz was supplied to the bath. The current density was 60 A / dm 2 , and the final voltage (amplitude) was 500 V for the anode and 180 V for the cathode. Acoustic vibration was generated in the tank using an aerohydrodynamic generator. The electrolyte pressure at the generator input was 4.0 bar. The resulting coating was dense, grayish blue, had a total thickness of 15 ± 1 μm and included a porous outer layer having a thickness of 2 μm. The roughness of the oxidized surface was 0.7 μm Ra, the microhardness of the coating was 750 HV, and the porosity of the functional layer was 2%.

38%アルミニウムと62%ベリリウムを含むAlBeメット(AlBemet)合金の試料を30℃に保たれたpH9の燐酸塩ー珪酸塩電解液内で20分間酸化させた。周波数3,000Hzの二極性電気パルスを槽に供給した。電流密度は35A/dm2とし、最終電圧(振幅)はアノードを850V、カソードを350Vとした。音響振動を空気水力学的発生器を用いて槽内に生成させた。発生器の投入部における電解液の圧力は4.5バールとした。得られた被膜は緻密で、薄灰色を呈し、全厚みは65±2μmで、8μmの厚みを有する多孔性外層を含んでいた。酸化された表面の粗さはRa1.2μmで、被膜の微小硬度は900HVで、機能層の多孔度は5%であった。 A sample of AlBemet alloy containing 38% aluminum and 62% beryllium was oxidized in a pH 9 phosphate-silicate electrolyte kept at 30 ° C. for 20 minutes. A bipolar electric pulse with a frequency of 3,000 Hz was supplied to the bath. The current density was 35 A / dm 2 , and the final voltage (amplitude) was 850 V for the anode and 350 V for the cathode. Acoustic vibrations were generated in the tank using an aerohydrodynamic generator. The electrolyte pressure at the generator input was 4.5 bar. The resulting coating was dense, light gray and had a total thickness of 65 ± 2 μm, including a porous outer layer having a thickness of 8 μm. The roughness of the oxidized surface was Ra 1.2 μm, the microhardness of the coating was 900 HV, and the porosity of the functional layer was 5%.

50%チタニウムと50%アルミニウムを含む金属間化合物合金の試料を20℃の温度に保たれたpH10の燐酸塩ー珪酸塩電解液内で10分間酸化させた。周波数2,000Hzの二極性電気パルス(1つの正パルスと2つの負パルス)を槽に供給した。電流密度は40A/dm2とし、最終電圧(振幅)はアノードを650V、カソードを300Vとした。音響振動を空気水力学的発生器を用いて槽内に生成させた。発生器の投入部における電解液の圧力は4.0バールとした。得られた被膜は緻密で、暗灰色を呈し、全厚みは25±1μmで、2.5μmの厚みを有する多孔性外層を含んでいた。酸化された表面の粗さはRa1.0μmで、被膜の微小硬度は850HVで、機能層の多孔度は5%であった。 A sample of an intermetallic alloy containing 50% titanium and 50% aluminum was oxidized for 10 minutes in a phosphate-silicate electrolyte having a pH of 10 maintained at a temperature of 20 ° C. Bipolar electric pulses (one positive pulse and two negative pulses) with a frequency of 2,000 Hz were supplied to the bath. The current density was 40 A / dm 2 , and the final voltage (amplitude) was 650 V for the anode and 300 V for the cathode. Acoustic vibrations were generated in the tank using an aerohydrodynamic generator. The electrolyte pressure at the generator input was 4.0 bar. The resulting coating was dense, dark gray, had a total thickness of 25 ± 1 μm and contained a porous outer layer having a thickness of 2.5 μm. The roughness of the oxidized surface was Ra 1.0 μm, the microhardness of the coating was 850 HV, and the porosity of the functional layer was 5%.

95%Ni3Alを含む金属間合金の試料を25℃に保たれたpH9.5の燐酸塩ー硼酸塩電解液内で10分間酸化させた。周波数1,500Hzの二極性電気パルス(1つの正パルスと2つの負パルス)を槽に供給した。電流密度は50A/dm2とし、最終電圧(振幅)はアノードを630V、カソードを260Vとした。音響振動を空気水力学的発生器を用いて槽内に生成させた。発生器の投入部における電解液の圧力は6.8バールとした。得られた被膜は緻密で、白色を呈し、全厚みは30±1μmで、3μmの厚みを有する多孔性外層を含んでいた。酸化された表面の粗さはRa0.9μmで、被膜の微小硬度は700HVで、機能層の多孔度は3%であった。 A sample of an intermetallic alloy containing 95% Ni 3 Al was oxidized for 10 minutes in a phosphate-borate electrolyte at pH 9.5 maintained at 25 ° C. Bipolar electrical pulses with a frequency of 1500 Hz (one positive pulse and two negative pulses) were supplied to the bath. The current density was 50 A / dm 2 , and the final voltage (amplitude) was 630 V for the anode and 260 V for the cathode. Acoustic vibrations were generated in the tank using an aerohydrodynamic generator. The electrolyte pressure at the generator input was 6.8 bar. The resulting coating was dense, white and had a total thickness of 30 ± 1 μm, including a porous outer layer having a thickness of 3 μm. The roughness of the oxidized surface was Ra 0.9 μm, the microhardness of the coating was 700 HV, and the porosity of the functional layer was 3%.

実施例において記載された試験の結果を表1に示す。比較のために、表1は工業的周波数電流を用いる公知の酸化プロセスによるデータも含む。   The results of the tests described in the examples are shown in Table 1. For comparison, Table 1 also includes data from known oxidation processes using industrial frequency currents.

Figure 0004182002
Figure 0004182002

本発明の好ましい特徴は本発明の全ての態様に適用可能であり、どのように組合せて用いられてもよい。   The preferred features of the invention are applicable to all aspects of the invention and may be used in any combination.

本明細書の説明および特許請求の範囲を通じて、「備える(comprise)」および「含む(contain)」という用語およびそれらの用語の変形、例えば、「備えている(comprising)」および「備える(comprises)」は「包含するが限定はされない」ことを意味し、他の構成部分、完全体、部分体、添加物、または工程を排除することを意図していない(すなわち、排除するものではない)。   Throughout the description and claims, the terms “comprise” and “contain” and variations of those terms, eg, “comprising” and “comprises” "Means" including but not limited to "and is not intended to exclude (ie, not exclude) other components, whole bodies, parts, additives, or steps.

供給源と電解槽との間の回路を通過する電流パルス(正パルスおよび負パルス)の形状の時間依存性の好ましい形態を示すグラフである。It is a graph which shows the preferable form of the time dependence of the shape of the electric current pulse (positive pulse and negative pulse) which passes through the circuit between a supply source and an electrolytic cell. 本発明の装置の実施形態を示す概念図である。It is a conceptual diagram which shows embodiment of the apparatus of this invention. 本発明のプロセスによって形成されたセラミック被膜の断面を示す断面図である。It is sectional drawing which shows the cross section of the ceramic film formed by the process of this invention.

Claims (21)

第1電極が取り付けられ、かつ水性アルカリ電解液で満たされる電解槽であって、他の電極が接続された物品が浸漬された電解槽内において、金属および合金にセラミック被膜を形成するプロセスであって、前記プロセスがプラズマ放電方式でなされるようにパルス電流が前記電極間に供給されるプロセスにおいて、
前記電極に予め定められた周波数範囲を有する高周波の二極性電流パルスを供給し、同時に、予め定められた音波周波数範囲の音響振動を前記電解液中に生成させる工程であって、前記音響振動の周波数範囲は前記電流パルスの周波数範囲と重なるような工程を備え、
前記電流パルスは500から10,000Hzの範囲内にあるパルス継続周波数を有するプロセス。
A process for forming a ceramic film on a metal and an alloy in an electrolytic cell in which a first electrode is attached and is filled with an aqueous alkaline electrolyte, in which an article to which another electrode is connected is immersed. In a process in which a pulse current is supplied between the electrodes so that the process is performed by a plasma discharge method,
Supplying a high-frequency bipolar current pulse having a predetermined frequency range to the electrode, and simultaneously generating acoustic vibration in a predetermined acoustic frequency range in the electrolyte solution, the acoustic vibration The frequency range includes a process that overlaps the frequency range of the current pulse,
The process wherein the current pulse has a pulse duration that is in the range of 500 to 10,000 Hz.
前記被膜はMg、Al、Ti、Nb、Ta、Zr、Hfといった金属もしくはそれらの合金、またはAl−Be、Ti−Al、Ni−Ti、Ni−Al、Ti−Nb、Al−Zn、Al−Al23,Mg−Al23といった化合物もしくは複合物に形成される請求項1に記載のプロセス。The coating is made of a metal such as Mg, Al, Ti, Nb, Ta, Zr, or Hf or an alloy thereof, or Al—Be, Ti—Al, Ni—Ti, Ni—Al, Ti—Nb, Al—Zn, Al—. Al 2 O 3, the process of claim 1, such as Mg-Al 2 O 3 is formed on the compound or complex. 各電流パルスはそのパルスの全持続時間の10%よりも大きくない時間内に最大値に至る電流の初期急勾配増大部分とそれに続く電流が最初は急速に減少してその後最大値の50%以下まで徐々に減少する部分を含む形状を有している請求項1または2に記載のプロセス。  Each current pulse has an initial steeply increasing portion of the current that reaches its maximum value in a time not greater than 10% of the total duration of the pulse, and the subsequent current first decreases rapidly, and then less than 50% of the maximum value The process according to claim 1 or 2, wherein the process has a shape including a portion that gradually decreases until. 超分散固体粒子を前記電解液内に導き、前記音響振動によって安定した水性ゾルを生成する工程をさらに備える請求項1乃至3のいずれかに記載のプロセス。  The process according to any one of claims 1 to 3, further comprising the step of introducing ultra-dispersed solid particles into the electrolytic solution to generate a stable aqueous sol by the acoustic vibration. 前記固体粒子は0.5μmよりも大きくない粒子径を有している請求項4に記載のプロセス。  The process of claim 4, wherein the solid particles have a particle size not greater than 0.5 μm. 前記固体粒子は金属の酸化物、硼化物、炭化物、窒化物、珪化物、または硫化物の形態の化合物から構成される請求項4または5に記載のプロセス。  The process according to claim 4 or 5, wherein the solid particles are composed of a compound in the form of a metal oxide, boride, carbide, nitride, silicide, or sulfide. 前記プラズマ放電方式はプラズマ電解酸化方式である請求項1乃至6のいずれかに記載のプロセス。  The process according to claim 1, wherein the plasma discharge method is a plasma electrolytic oxidation method. 前記セラミック被膜は2から10μm/分の速度で形成される請求項1乃至7のいずれかに記載のプロセス。  The process according to any one of claims 1 to 7, wherein the ceramic coating is formed at a rate of 2 to 10 m / min. 前記物品に印加される電流は3から200A/dm2の電流密度を有する請求項1乃至8のいずれかに記載のプロセス。Process according to any one of claims 1 to 8 current applied to the article has a current density from 3 200A / dm 2. 前記物品に印加される電流は10から60A/dm2の電流密度を有する請求項9に記載のプロセス。The process of claim 9 current having a current density of 60A / dm 2 to 10 to be applied to the article. 金属および合金にセラミック被膜を形成する装置であって、電極を有する電解槽と、パルス電流を前記電極に送る供給源と、少なくとも1つの音響振動発生器を備える装置において、
前記供給源は前記電極に予め定められた周波数範囲の高周波の二極性電流パルスを供給するのに適応するようにされ、前記少なくとも1つの音響振動発生器は前記槽内に含まれる電解液内への前記二極性電流パルスの供給と同時に、音響振動を生成させるのに適応するようにされ、前記音響振動は前記電流パルスの周波数範囲と重なる予め定められた音波周波数範囲を有し、
前記電流パルスは500から10,000Hzの範囲内にあるパルス継続周波数を有する装置。
An apparatus for forming a ceramic coating on metals and alloys comprising an electrolytic cell having electrodes, a source for sending pulsed current to the electrodes, and at least one acoustic vibration generator.
The source is adapted to supply a high frequency bipolar current pulse in a predetermined frequency range to the electrode, and the at least one acoustic vibration generator is in an electrolyte contained in the bath Simultaneously with the supply of the bipolar current pulse to the acoustic wave, adapted to generate acoustic vibrations , the acoustic vibrations having a predetermined acoustic frequency range that overlaps the frequency range of the current pulses;
The device wherein the current pulse has a pulse duration in the range of 500 to 10,000 Hz.
前記供給源は各電流パルスがそのパルスの全持続時間の10%よりも大きくない時間内に最大値に至る電流の初期急勾配増大部分とそれに続く電流が最初は急速に減少してその後最大値の50%以下まで徐々に減少する部分を含む形状を有するのに適応するようにされている請求項11に記載の装置。  The source has an initial steeply increasing portion of current where each current pulse reaches a maximum value within a time period not greater than 10% of the total duration of the pulse, and the subsequent current initially decreases rapidly and then reaches a maximum value. 12. The apparatus of claim 11, wherein the apparatus is adapted to have a shape including a portion that gradually decreases to less than 50%. 請求項1ないし10のいずれか1つに記載のプロセスによって金属または合金に形成されるセラミック被膜。  A ceramic coating formed on a metal or alloy by the process of any one of claims 1-10. 請求項11または12のいずれか1つに記載の装置を用いて金属または合金に形成されるセラミック被膜。A ceramic coating formed on a metal or alloy using the apparatus according to claim 11 . 前記被膜は全被膜厚みの14%よりも大きくない厚みの多孔性外層を有する請求項13または14に記載のセラミック被膜。  15. A ceramic coating according to claim 13 or 14, wherein the coating has a porous outer layer with a thickness not greater than 14% of the total coating thickness. 前記多孔性外層は全被膜厚みの10%よりも大きくない厚みを備える請求項15に記載のセラミック被膜。  The ceramic coating according to claim 15, wherein the porous outer layer has a thickness not greater than 10% of the total coating thickness. 前記多孔性外層は全被膜厚みの8%よりも大きくない厚みを備える請求項16に記載のセラミック被膜。  The ceramic coating according to claim 16, wherein the porous outer layer comprises a thickness not greater than 8% of the total coating thickness. 前記被膜は0.6から2.1μmの低い粗さ(Ra)の表面を有する請求項13ないし17のいずれか1つに記載のセラミック被膜。  18. The ceramic coating according to claim 13, wherein the coating has a low roughness (Ra) surface of 0.6 to 2.1 [mu] m. 請求項1ないし10のいずれか1つに記載のプロセスによって金属または合金にプラズマ放電プロセスによって形成されるセラミック被膜であって、0.6から2.1μmの低い粗さ(Ra)の表面を有するセラミック被膜。  11. A ceramic coating formed by a plasma discharge process on a metal or alloy by a process according to any one of claims 1 to 10, having a low roughness (Ra) surface of 0.6 to 2.1 μm. Ceramic coating. 前記被膜は500から2100HVの微小硬度を有する緻密な微細多結晶性構造を有する請求項13ないし19のいずれか1つに記載のセラミック被膜。  The ceramic coating according to any one of claims 13 to 19, wherein the coating has a dense fine polycrystalline structure having a microhardness of 500 to 2100HV. 2から150μmの全厚みを有する請求項13ないし20のいずれか1つに記載のセラミック被膜。  21. A ceramic coating as claimed in any one of claims 13 to 20 having a total thickness of 2 to 150 [mu] m.
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