JP4171917B2 - ナノチューブまたはナノワイヤの少なくとも1つの電気特性を変更するための方法およびそれを含むトランジスタ - Google Patents
ナノチューブまたはナノワイヤの少なくとも1つの電気特性を変更するための方法およびそれを含むトランジスタ Download PDFInfo
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- JP4171917B2 JP4171917B2 JP2004571031A JP2004571031A JP4171917B2 JP 4171917 B2 JP4171917 B2 JP 4171917B2 JP 2004571031 A JP2004571031 A JP 2004571031A JP 2004571031 A JP2004571031 A JP 2004571031A JP 4171917 B2 JP4171917 B2 JP 4171917B2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 19
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- WROMPOXWARCANT-UHFFFAOYSA-N tfa trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F.OC(=O)C(F)(F)F WROMPOXWARCANT-UHFFFAOYSA-N 0.000 description 3
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- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
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Description
a)ドーピング
トランジスタを形成するために接続されるカーボンナノチューブを考慮して、以下が可能である:
−それをNO 2 (またはNH 3 )へ暴露することによって、制御された様式で、それをp型(またはn型)にドープする(J. KONG et al. “Natotube Molecular Wires as Chemical Sensors” Science n°287, 28 Jan. 2000, pages 622 - 625を参照のこと)。
−上記で引用された文献“Nanotube Molecular Wires as Chemical Sensors” by J. KONG et al. pages 622 - 625, Science vol. 287 - Jan. 2000).
−文献“Toward Large Arrays of Multiplex Functionalized Carbon Nanotube Sensors for Highly Sensitive and Selective Molecular Detection”, 2003年発行, P. QIら(Nano Letters 3(3), 347-351).
−US 6 528 020 (DAI) “Carbon nanotube devices”, 2003年3月4日特許付与。
を有する酸へ暴露することを包含する、方法によって満たされる。
p型ナノチューブまたはナノワイヤに関する。該ナノチューブまたはナノワイヤの少なくとも一部は、ソース電極、ドレイン電極および少なくとも1つの絶縁されたゲート電極を有する電界効果トランジスタのチャネル領域であり得る。
Claims (23)
- R1=Fである、請求項1に記載の方法。
- R1=R2=Fである、請求項2に記載の方法。
- R1=R2=R3=Fである、請求項3に記載の方法。
- 前記ナノチューブまたはナノワイヤの少なくとも一部が、電界効果トランジスタのチャネル領域である、前記請求項1〜4のいずれか1項に記載の方法。
- 前記ナノチューブまたはナノワイヤが、前記トランジスタが形成された後に、前記暴露へ供される、請求項5に記載の方法。
- 前記トランジスタにおいてトランスコンダクタンス及び閾下スロープの少なくとも1つの特性を測定することによって、前記ナノチューブまたはナノワイヤの少なくとも電気特性の変更をモニターする、請求項6に記載の方法。
- 前記トランジスタが、前記酸への暴露をモニターするために使用されるバックゲート電極を有する、請求項7に記載の方法。
- 前記暴露の完了後に、誘電体層が、前記ナノチューブまたはナノワイヤの少なくとも一部上にもたらされる、請求項8に記載の方法。
- 少なくとも1つのトップゲート電極が、前記誘電体層上にもたらされる、請求項9に記載の方法。
- 前記誘電体層が、前記ナノチューブまたはナノワイヤの全表面を被覆する、請求項9に記載の方法。
- 前記暴露後に、前記ナノチューブまたはナノワイヤが、誘電体層によって被覆される、請求項6に記載の方法。
- 前記誘電体層が樹脂層である、請求項12に記載の方法。
- 前記トランジスタが、各々がその上にゲート電極を有するいくつかのゲート絶縁層領域を有し、そして該絶縁層領域間の前記ナノチューブまたはナノワイヤの領域が、前記酸への暴露へ供される、請求項6に記載の方法。
- 前記ナノチューブまたはナノワイヤが、前記暴露へ供される前に、ドープされていない条件にある、請求項14に記載の方法。
- R1=Fである、請求項16に記載のナノチューブまたはナノワイヤ。
- R1=R2=Fである、請求項17に記載のナノチューブ。
- R1=R2=R3=Fである、請求項18に記載のナノチューブまたはナノワイヤ。
- 少なくとも一部が、ソース電極、ドレイン電極および少なくとも1つの絶縁されたゲート電極を有する電界効果トランジスタのチャネル領域に使用される、請求項16〜19のいずれか1項に記載のナノチューブまたはナノワイヤ。
- 前記トンジスタが前記酸を検出するためのセンサーであって、当該センサーに使用される、請求項20に記載のナノチューブまたはナノワイヤ。
- 少なくとも1つの絶縁されたゲート電極の下に配置される、請求項20に記載のナノチューブまたはナノワイヤ。
- 前記酸が吸収されていない領域上に配置され、そして前記酸が吸収されている領域によって隔離されている、複数の絶縁されたゲート電極を備える、マルチゲートナノチューブトランジスタに使用される請求項22に記載のナノチューブまたはナノワイヤ。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2003/008827 WO2004094308A1 (en) | 2003-04-22 | 2003-04-22 | A process for modifying at least one electrical property of a nanotube or a nanowire and a transistor incorporating it. |
Publications (2)
Publication Number | Publication Date |
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JP2006524172A JP2006524172A (ja) | 2006-10-26 |
JP4171917B2 true JP4171917B2 (ja) | 2008-10-29 |
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Application Number | Title | Priority Date | Filing Date |
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JP2004571031A Expired - Fee Related JP4171917B2 (ja) | 2003-04-22 | 2003-04-22 | ナノチューブまたはナノワイヤの少なくとも1つの電気特性を変更するための方法およびそれを含むトランジスタ |
Country Status (5)
Country | Link |
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US (1) | US7439562B2 (ja) |
EP (1) | EP1620358A1 (ja) |
JP (1) | JP4171917B2 (ja) |
AU (1) | AU2003250225A1 (ja) |
WO (1) | WO2004094308A1 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4669213B2 (ja) * | 2003-08-29 | 2011-04-13 | 独立行政法人科学技術振興機構 | 電界効果トランジスタ及び単一電子トランジスタ並びにそれを用いたセンサ |
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US6346189B1 (en) * | 1998-08-14 | 2002-02-12 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube structures made using catalyst islands |
AU6044599A (en) * | 1998-09-18 | 2000-04-10 | William Marsh Rice University | Chemical derivatization of single-wall carbon nanotubes to facilitate solvation thereof; and use of derivatized nanotubes |
EP1164108A1 (en) * | 2000-06-13 | 2001-12-19 | Toda Kogyo Corporation | Hollow carbon particles and process for producing the same |
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WO2002048701A2 (en) * | 2000-12-11 | 2002-06-20 | President And Fellows Of Harvard College | Nanosensors |
US6872681B2 (en) * | 2001-05-18 | 2005-03-29 | Hyperion Catalysis International, Inc. | Modification of nanotubes oxidation with peroxygen compounds |
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2003
- 2003-04-22 EP EP03816668A patent/EP1620358A1/en not_active Withdrawn
- 2003-04-22 JP JP2004571031A patent/JP4171917B2/ja not_active Expired - Fee Related
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WO2004094308A1 (en) | 2004-11-04 |
US20070056063A1 (en) | 2007-03-08 |
JP2006524172A (ja) | 2006-10-26 |
AU2003250225A1 (en) | 2004-11-19 |
US7439562B2 (en) | 2008-10-21 |
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