JP4166228B2 - Bump inspection method and equipment after leveling - Google Patents

Description

  The present invention relates to a method and an apparatus for inspecting a bump after being formed and leveled on a pad which is an electrode of an IC chip.

  Various bonders that electrically connect pads (electrode portions) of an IC chip and package conductor portions by wire bonding technology are known (see, for example, Non-Patent Document 1). Even with this type of conventional bonder for wire bonding, bumps for electrical connection can be formed on the pads of the IC chip depending on how they are used (see, for example, Patent Document 1).

When bumps are formed on an IC chip using the bump bonder, as a pre-process, first, as shown in FIG. 18A, a wafer 91 on which a large number of IC chips are formed is diced on an expanding sheet 92. The expanded wafer 94 is divided into each IC chip 93 by dividing it into each IC chip 93 and then expanded, and then, as shown in FIG. 18B, this expanded wafer 94 is supplied to a device called a die picker. The IC chip 93 is transferred to the tray 95, and then the IC chip 93 is sequentially taken out from the tray 95 by supplying the tray 95 to the bump bonder as shown in FIG. The formed and bumped IC chip 93 is accommodated in the tray 96 and supplied to the subsequent process.
"Semiconductor Handbook (2nd edition)" published by Ohm Co., Ltd. Japanese Patent Laid-Open No. 10-98065

  By the way, referring to FIG. 15 showing the present embodiment, when a bump as shown in FIG. 15A is pressed, the wire portion 14b is pressed and deformed and leveled to the same height. As shown in FIG. 15B, the bump 3 is formed in which the small-diameter head portion 3b protrudes from the pedestal portion 3a. The shape of the bump 3 in which the top portion 3b protrudes on the pedestal portion 3a is a shape suitable for bonding the IC chip 2 to the substrate using an adhesive.

Accordingly, an object of the present invention is to provide an inspection method and apparatus for bumps after leveling which can perform a pass / fail inspection by recognizing the position and shape of the bumps having the pedestal and the top.

The method for inspecting bumps after leveling according to the first aspect of the present invention is the IC in which the bumps of the IC chip having the pedestal and the top portion are leveled by pressing the upper end of the bump and placed on the mounting table. It is characterized by recognizing in the middle of the movement path of the mounting table between the leveling portion for leveling the upper end of the bump of the chip and the transfer position to which the IC chip is transferred, and checking the suitability.

  The bump inspection method after leveling according to the invention of claim 2 is characterized in that, in addition to the invention of claim 1, the recognition of the shape includes a plurality of diameters of the pedestal or the top of the bump. To do.

According to a third aspect of the present invention, there is provided a method for inspecting a bump after leveling, wherein the bump is mounted on a mounting table and pressed to press the upper end of the bump to be leveled to have an IC chip having a pedestal and a top or a bump pedestal. A leveling portion for leveling the upper end of the bump of the IC chip mounted on the mounting table, the diameter, the diameter of the top portion, or the positional deviation amount between the electrode center position of the IC and the bump center position ; In the middle of the movement path of the mounting table between the IC chip and the transfer position, it is recognized by the recognition unit and it is determined whether or not it is within a preset allowable range.

According to a fourth aspect of the present invention, there is provided an inspection apparatus for bumps after leveling, in which the upper end of the bump is pressed to place an IC chip having a pedestal and a top, and the bump of the IC chip is leveled. A mounting table that can move between the ring unit and the transfer position to which the IC chip is transferred, and the position and shape of the bumps of the IC chip mounted on the mounting table in the middle of the moving path of the mounting table And a determination unit that determines whether or not the position and shape of the bumps of the IC chip recognized by the recognition unit are within a preset allowable range. .

According to the present invention, the position and shape of bumps of an IC chip mounted and mounted on a mounting table are recognized, or the presence or absence of bumps, the diameter of the base of the bump, the diameter of the top, the center position of the electrode of the IC Between the leveling portion for leveling the upper end of the bump of the IC chip mounted on the mounting table and the transfer position at which the IC chip is transferred. A good product and a defective product can be determined by recognizing in the middle of the movement path of the mounting table and determining whether or not they are within an allowable range.

  Hereinafter, an embodiment of the bump bonder of the present invention will be described with reference to FIGS.

  First, the overall arrangement configuration of the bump bonder of this embodiment will be described with reference to FIGS. Carrying in a carrier 101 containing a plurality of wafers (expanded wafers abbreviated as an expanded wafer in this specification) 1 diced and expanded in a stacked state, the expanded wafers 1 are sequentially fed to the receiving unit 5 one by one. And a bonding part 6 in which bonding heads 11 for forming bumps 3 are formed on the pads of the IC chip 2 transferred one by one from the expanded wafer 1 of the receiving part 5 onto the bonding stage 10. The leveling part 7 for leveling by pressing the upper ends of the bumps 3, the IC chip storage part 8 in which the tape-like holder 27 or tray for storing the IC chip 2 whose leveling has been completed, and the receiving part 5 to the IC chip 2 The IC chip 2 is sequentially transferred to the bonding stage 10, the leveling unit 7, and the IC chip storage unit 8. And a transfer means 9 for. Further, a discard unit 19 for discarding the IC chip 2 with a bad mark and the defective IC chip 2 is disposed at an appropriate position on the moving path of the transfer means 9.

  The carry-in unit 4 supports the carrier 101 and moves up and down to position the expander wafer 1 at a position where the expander wafer 1 is sent to the receiving unit 5, and a sending unit (not shown) for sending the expanded wafer 1 to the receiving unit 5. Is provided.

  The receiving unit 5 includes a moving table 29 that holds the expanded wafer 1 and can move in the Y direction, and a recognition camera 31 installed at the tip of a movable arm 30 that can move in the X direction. The IC chip 2 of the expanded wafer 1 is recognized and its exact position is detected, and a bad mark attached to the IC chip 2 is detected. By detecting the exact position of the IC chip 2, when the IC chip 2 is sucked and held by the transfer means 9, the IC chip 2 can be reliably and properly held even when the IC chip 2 is very small. Further, the bad mark is given to the defective IC chip 2 at the time of the IC inspection in the previous process, and the waste of forming bumps 3 on the defective IC chip 2 can be eliminated by detecting the bad mark.

  As shown in FIG. 3, the transfer means 9 for the IC chip 2 includes an X-direction moving table 32 that can move between the receiving portion 5 and the IC chip storage portion 8 in the X direction, and a Y that is installed at the upper end thereof. A Y-direction slider 33 that is movable in the direction and a suction head 34 that is mounted on the Y-direction slider 33 are provided. As shown in FIG. 4, the suction head 34 is provided with a pair of suction nozzles 35 arranged in parallel in the X direction so that various transfers of the IC chip 2 can be performed rationally. The X-direction moving table 32 is guided by the X-direction guide 36 and reciprocated in the X direction by forward and reverse rotation of the ball screw 37 by the servo motor 38. The Y-direction slider 33 is guided by a Y-direction guide 39, is connected to a timing belt (not shown) that is rotated by forward and reverse rotation of the servo motor 40, and is reciprocated in the Y direction.

  In the suction head 34, as shown in FIG. 4, the suction nozzle 35 is attached to the lower end of the hollow nozzle rod 41, and the suction air hose 42 is connected to the upper end of the nozzle rod 41. An engaging portion 43 that protrudes in the horizontal direction is provided at the upper end portion of the nozzle rod 41, and an engaging roller 45 at the distal end of the swing lever 44 that is pivotally supported on the lower surface of the engaging portion 43 is engaged. Has been. A cam roller 46 is provided at an intermediate portion of the swing lever 44 and is engaged with an upper end portion of a cam 47 that can be driven forward and reverse by a servo motor 48. Further, a spring 49 that biases the nozzle rod 41 downward is provided. Thus, one of the suction nozzles 35 is selected and moved up and down by forward and reverse rotation of the pair of cams 47 by the servo motor 48. Further, the lower end position of each suction nozzle 35 can be varied according to the forward / reverse rotation range of the servo motor 48.

  The bonding part 6 is provided with a bonding stage 10 composed of a heat stage for bonding by ultrasonic thermocompression bonding, and a bonding head 11 is mounted on the rear part on an XY table 12 movable in the X direction and the Y direction. Arranged. Bonding stage 10 is provided with bonding positions 10a and 10b for positioning and fixing IC chip 2 and bonding in parallel at an appropriate interval in the X direction, while the bump is formed at one bonding position. The IC chip 2 is transferred to the bonding position to improve the production efficiency.

  As shown in FIG. 5, the bonding head 11 has a wire reel 13 and a bonding work mechanism 15 for bonding the IC chip 2 on the bonding stage 10 through the wire 14 from the wire reel 13 from above. In between, a wire tensioner 17 that blows the wire 14 from the wire reel 13 toward the bonding work mechanism 15 in an upward curved state with air 16 to apply tension to the wire 14, and a wire guide for the clamper 18 in the bonding work mechanism 15. A wire tensioner 21 is disposed directly above 18a to blow up the wire 14 to the air 20 so as to apply an upward tension to the wire 14. Keep the supply path and tension And it is configured to supply reasonably the bonding working mechanism 15 while floating supported.

  As shown in FIGS. 5 and 6, the bonding work mechanism 15 applies ultrasonic vibration to a ball 14 a formed with a clamper 18 that holds the wire 14 and a capillary 22 a through which the wire 14 is inserted. A horn 22 and a discharge torch 23 are provided. In addition, a recognition camera 24 for visually recognizing the state of the bonding work is disposed on the upper part, displays a recognition image on a recognition monitor (not shown), and inputs a recognition signal to a data processing device (not shown). It is configured to process data. Further, an up-and-down electromagnetic drive unit 25 that moves the tip portion up and down by reciprocatingly rotating the bonding work mechanism 15 around a fulcrum shaft (not shown) and an open-close electromagnetic drive unit 26 that opens and closes the clamper 8 are provided.

The bonding operation will be described with reference to FIG. 7. The wire 14 is fed out through the capillary 22a, and each time the capillary 22a of the bonding head 11 moves to a position facing a predetermined pad (electrode part) 2a of the IC chip 2. The tip portion is melted by the spark current from the torch 23, and a ball 14a as shown in FIG. 7A is formed. The position of the wire 14 facing the pads 2a is controlled with high accuracy based on the visual recognition of the recognition camera 24. The formed ball 14a is bonded onto the pad 2a of the IC chip 2 by thermocompression bonding and ultrasonic vibration as shown in FIG. Pressing force at this time is preferably about 30G～50g, ultrasonic vibration is applied horizontally, amplitude 0.5 [mu] m, is to be about (63.5KH _Z Specific examples) frequency 60～70KH _Z Is preferred. Next, as shown in FIG. 7C, the wire 14 is cut by the upward movement of the clamper 18 and the capillary 22a holding the wire 14, and the ball portion 14a is formed on the pad 2a, and 30 μm to 30 μm from the ball portion 14a A bump 3 having a protruding length of about 60 μm is formed, which includes a wire portion 14 b protruding to a height of about 40 μm. A wire 14 having a high Young's modulus and a low thermal conductivity is used so that the above-described cutting is reliably performed at a predetermined position.

  When the bumps 3 are formed on the pads 2a of the IC chip 2 as described above by the bonding head 11, all the recognition cameras 24 are sequentially turned on based on the bonding coordinate data stored in the control unit. As shown in FIG. 8, an actual IC at the time of bonding is detected by recognizing each pad 2a and detecting the displacements d1 and d2 between the center position 50 and the center position 51 of the recognition camera 24, as shown in FIG. The position of the accurate pad 2a of the chip 2 is detected, and the bonding coordinate data is corrected based on the detected position. Reference numeral 52 denotes a field of view of the recognition camera 24. As described above, by correcting the position data of the pad 2a prior to the bonding operation, when the bonding coordinate data is input visually or created from the CAD data, the error at the time of data input or the CAD data at room temperature is corrected. Even if an error due to thermal expansion at 200 to 300 ° C. during bonding occurs, the bonding position is automatically corrected when actually bonding, so that bumps can be formed with high positional accuracy. The correction of the bonding coordinate data is preferably performed for each appropriate number of IC chips 2 at the start of production and thereafter.

  The center position of the recognition camera 24 and the position of the pad 2a are changed depending on the period when the temperature of the bonding stage 10 changes when the capillary 22a is replaced, at the start of production, and further with the aging of each mechanism part of the bonding head 11. Even if the center positions coincide with each other, as shown in FIG. 9, the center position 53 of the formed bump 3 may be displaced from the center position 50 of the pad 2a. 3 is formed, the bump 3 is recognized by the recognition camera 24 and its center position 53 is detected, and the amount of positional deviation from the center position 50 of the pad 2a or the center position 51 of the recognition camera 24 is detected to obtain bonding coordinates. It is configured to correct the data. The correction of the bonding coordinate data is performed at an appropriate time interval when the capillary 22a is replaced or when the bonding stage 10 is in the temperature changing process, and thereafter, for each appropriate number of IC chips or an appropriate number of bumps 3 as required. It is preferable to carry out each time.

  The bonding stage 10 is provided with position regulation means 55 as shown in FIG. 10 in order to position and fix the IC chip 2 at the bonding positions 10a and 10b. The position setting means 55 is configured to sandwich and position the IC chip 2 between the fixing block 56 and a setting claw 57 that can move in the perspective direction with respect to the fixing block 56. Positioning corners 55a and 55b that engage with corners of the IC chip 2 are formed at the left and right sides of the tip of the setting claw 57, and the IC chip 2 is positioned at bonding positions 10a and 10b, respectively. Further, the regulation claw 57 includes a claw body 58 and a regulation piece 59 which is mounted on the tip of the claw body 58 so as to be vertically displaceable and abuts against the IC chip 2. A suction hole 60 for vacuum-sucking the piece 59 is provided. Further, the setting claw 57 is urged toward the fixed block 56 by a spring 61 with a predetermined urging force while the IC chip 2 is held.

  In the position correcting means 55 having the above configuration, the IC chip 2 is clamped and fixed between the fixing block 56 and the setting claw 57. Therefore, even when the IC chip 2 is very small, it can be fixed securely. Is composed of a regulating piece 59 that is vacuum-adsorbed to the nail body 58 and adheres to the upper surface of the bonding stage 10 so that the IC chip 2 is sandwiched between the fixed block 56 and the regulating piece 59. Even in the case of an extremely thin IC chip 2, such as the IC chip 2 of FIG.

  In the case of a bump bonder to which the IC chip 2 that is not very thin is applied, as shown in FIG. 11, it is possible that the position adjusting means 55 is constituted by a fixed block 56 and a single setting claw 57. Needless to say.

  FIG. 12 shows a regulation drive mechanism 62 that causes the regulation claw 57 to perform a position regulation operation. The setting drive mechanism 62 is configured such that the moving table 65 can be moved in two directions, the X direction and the Y direction, by the X direction moving mechanism 63 and the Y direction moving mechanism 64, and the slide guide 66 is placed on the moving table 65. A setting claw mounting leg 67 is supported so as to be movable in the Y direction, and a setting claw 57 is fixed to the upper end of the setting claw mounting leg 67. The spring 61 for moving and biasing the setting claw 57 toward the fixed block 56 is interposed between the base end of the slide guide 66 and the setting claw mounting leg 67. Each of the X-direction moving mechanism 63 and the Y-direction moving mechanism 64 is configured to reciprocate by driving the ball screw 69 forward and backward by a servo motor 68.

  As shown in FIG. 13, the leveling unit 7 includes a leveling unit 70, a movable cradle 71 that moves in the Y direction while holding the IC chip 2 between the leveling unit 70 and the transfer position by the transfer means 9. And a recognition camera 72 for bump inspection disposed in the middle of the movement path of the movable cradle 71.

  As shown in FIG. 14, the leveling unit 70 includes a lower leveling plate 73 on the movable pedestal 71 on which the IC chip 2 is installed, an upper leveling plate 74 that abuts against the upper end of the bump 3 and pressurizes and deforms, and an additional leveling plate 74. A pressure plate 75 for applying pressure; a load cell 76 interposed between the pressure plate 75 and the upper leveling plate 74; and a pressure mechanism 77 for driving the pressure plate 75 downward in the Z direction. The load cell 76 detects the applied pressure and can be loaded with an arbitrary applied pressure. As a result, the wire portion 14b of the bump 3 formed at the bonding portion 6 as shown in FIG. 15A is pressure-deformed and leveled to the same height, as shown in FIG. 15B. A bump 3 is formed in which a small-diameter head portion 3b protrudes from the pedestal portion 3a. The shape of the bump 3 in which the top portion 3b protrudes on the pedestal portion 3a is a shape suitable for bonding the IC chip 2 to the substrate using an adhesive.

  The movable pedestal 71 is movably supported by a slide guide 78 and can be moved in the Y direction and positioned at an arbitrary position by rotating a ball screw 80 forward and backward by a servo motor 79. The recognition camera 72 is mounted on a movable table 81 movable in the X direction. The movable table 81 is movably supported by a slide guide 82 and a ball screw 84 is moved forward and backward by a servo motor 83. By rotating it, it can be moved in the X direction and positioned at an arbitrary position. Thereby, each bump 3 of the IC chip 2 on the movable pedestal 71 can be sequentially recognized by the recognition camera 72 and the position and shape of the bump 3 can be inspected.

  As shown in FIG. 16, the inspection of the bump 3 by the recognition camera 72 includes the presence or absence of the bump 3, the diameters D1 and D2 of the base 3a of the bump 3, the diameters D3 and D4 of the top 3b, and the center position 50 of the pad 2a. The positional deviation amounts d3 and d4 of the center position 53 of the bump 3 with respect to are detected, and it is determined whether or not each is within a preset allowable range. As a result of the inspection, if it is within the allowable range, it is transferred as a non-defective product to the IC chip storage portion 8 by the transfer means 9 and stored in the tape-shaped holding body 27 or tray. On the other hand, when it is out of the range, it is transferred and stored in the disposal unit 19 by the transfer means 9 as a defective product.

  Further, the leveling unit 70 is configured such that the pressure can be arbitrarily selected and set. Thus, from the shape of the bump 3 formed by the bonding part 6 shown in FIG. In the case of leveling into a bump shape as shown in FIG. 17 (b) from which the top portion 3b protrudes, and as shown in FIG. 17 (c), the top portion 3b is completely compressed and deformed to form a columnar shape consisting only of the pedestal portion 3b. It is possible to select whether to level the bump shape. When the cylindrical bump 3 is formed by leveling, the IC chip 2 is bonded by bonding the gold bump 3 of the IC chip 2 to the gold electrode 87 of the substrate 86 with the ultrasonic wave 88 as shown in FIG. When mounted on the substrate 86, it is preferable because a high bonding strength can be obtained due to the large bonding area.

  In the above configuration, when the carrier 101 containing the expanded wafer 1 is loaded into the loading unit 4, the expanded wafer 1 is sequentially sent to the receiving unit 5. When the expanded wafer 1 is installed in the receiving unit 5, the moving table 29 and the movable arm 30 move, and the recognition camera 31 is positioned on the position where each IC chip 2 is arranged on the expanded wafer 1. The IC chip 2 to which the position is detected and the bad mark is attached is detected.

  Next, the IC chip 2 of the receiving unit 5 is sequentially transferred onto the bonding stage 10 of the bonding unit 6 by the transfer unit 9, positioned and fixed at a predetermined position by the position adjusting unit 55, and the pad is bonded by the bonding head 11. Bumps 3 are formed on 2a.

  At that time, as necessary, the bonding position data is corrected prior to bonding as described above. Since the bonding stage 10 is provided with two bonding positions 10a and 10b, the IC chip 2 is transferred to the other bonding position while performing the bonding operation at one bonding position as described above. Operation is performed. Further, the IC chip 2 with the bad mark is discarded by the transfer unit 9 to the discarding unit 19 at an appropriate time.

  The IC chip 2 on which the formation of the bumps 3 has been completed is transferred onto the movable pedestal 71 of the leveling unit 7 by the transfer means 9 and moved to the leveling unit 70 to level the bumps 3. The IC chip 2 that has been leveled is positioned below the recognition camera 72, and each bump 3 is moved by the recognition camera 72 by the movement of the movable pedestal 71 in the Y direction and the movement of the movable pedestal 81 on which the recognition camera 72 is mounted in the X direction. It is recognized and checked for suitability. Thereafter, the movable cradle 71 returns to the origin position, and the IC chip 2 in which all the bumps 3 are appropriate is transferred to the tape-like holding body 27 or tray transferred to the IC chip storage portion 8 by the transfer means 9. The IC chip 2 accommodated and having the defective bump 3 is discarded by the transfer means 9 to the discarding unit 19.

  As described above, according to the bump bonder of the present embodiment, the expanded wafer 1 is carried into the carry-in unit 4 while being accommodated in the carrier 101, whereby the IC chip 2 on which the bumps 3 are formed is tape-shaped holding body 27 or It can be obtained in a state accommodated in a tray, and can be supplied as it is to the mounting device for the IC chip 2.

  INDUSTRIAL APPLICABILITY The present invention can be practically used for producing an IC chip in which bumps for electrical connection and bonding to electrodes are formed, and the quality of the bumps after the bumps are leveled can be determined.

It is a perspective view showing the whole bump bonder composition of one embodiment of the present invention. It is a top view which shows the whole arrangement configuration of the bump bonder of the embodiment. It is a perspective view of the transfer means of the same embodiment. It is a perspective view of the adsorption head in the transfer means of the embodiment. It is a perspective view of the wire supply mechanism in the bonding head of the embodiment. It is the perspective view which abbreviate | omitted the wire supply mechanism and showed the bonding head of the same embodiment. The bonding work process of the embodiment is shown, (a) is a sectional view of the ball forming process, (b) is a sectional view of the process of bonding the ball to the electrode, (c) is a process of forming a bump by cutting the wire FIG. It is explanatory drawing of position shift correction of the pad of the IC chip and the recognition camera in the same embodiment. It is explanatory drawing of position shift correction of the recognition camera and bonding horn in the embodiment. The IC chip position regulating means on the bonding stage in the embodiment is shown, (a) is a plan view, (b) is a longitudinal side view. It is a vertical side view of the other structural example of the position setting means in the embodiment. It is a whole perspective view of the position adjustment means in the embodiment. It is a whole perspective view of the leveling part in the embodiment. It is a schematic block diagram of the principal part of the leveling part in the embodiment. The leveling operation | movement in the embodiment is shown, (a) is a perspective view of the bump before leveling, (b) is a perspective view of the bump which leveled. It is explanatory drawing of the test | inspection of the bump after the leveling in the embodiment. It is explanatory drawing of the leveling operation | movement of the cylindrical bump in the same embodiment, and the joining operation | movement to a board | substrate. The process which forms a bump in the IC chip in a prior art example is shown, (a) is an explanatory view of the process of dicing and expanding a wafer, (b) is the explanatory view of the process of accommodating an IC chip in a tray with a die picker, (C) is explanatory drawing of the process of forming a bump in an IC chip with a bump bonder.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Expand wafer 2 IC chip 2a Pad 3 Bump 4 Carry-in part 5 Receiving part 6 Bonding part 7 Leveling part 8 IC chip storage part 9 Transfer means 10 Bonding stage 11 Bonding head 19 Discarding part 22 Horn 24 Recognition camera 31 Recognition camera 35 Adsorption Nozzle 44 Oscillating lever 47 Cam 48 Servo motor 50 Pad center position 51 Recognition camera center position 53 Bump center position 55 Position adjusting means 56 Fixed block 57 Setting claw 58 Claw body 59 Setting piece 60 Suction hole 70 Leveling unit 72 Recognition camera

Claims (4)

The position and shape of the bumps of the IC chip mounted on the mounting table and pressed on the upper end of the bump and leveled by pressing the upper end of the bump, and the top and bottom of the IC chip mounted on the mounting table are leveled. A method for inspecting bumps after leveling, characterized by recognizing in the middle of a moving path of a mounting table between a leveling unit to be ringed and a transfer position to which an IC chip is transferred, and checking the suitability.   2. The bump inspection method after leveling according to claim 1, wherein the recognition of the shape includes a plurality of diameters of a pedestal or a top of the bump. Whether there is a bump on an IC chip having a pedestal and a top part, which is leveled by pressing the upper end of the bump and placed on the mounting base, the diameter of the base of the bump, the diameter of the top part, or the center position of the electrode of the IC The amount of positional deviation from the bump center position is set between the leveling portion for leveling the upper end of the bump of the IC chip mounted on the mounting table and the transfer position where the IC chip is transferred. A method for inspecting bumps after leveling, characterized in that, in the middle of a moving path of a pedestal , it is determined whether or not a recognition unit recognizes and is within a preset allowable range. An IC chip that is leveled by pressing the upper end of the bump and has a pedestal and a crown is placed, and a leveling part that leveles the bump of the IC chip and a transfer position where the IC chip is transferred and mounting table movable between, recognizes the position and shape of the bumps of the mounting placed on the IC chip to stand, a recognition unit disposed in the middle path of movement of the mounting table, is recognized by the recognition unit An inspection apparatus for bumps after leveling, comprising: a determination unit that determines whether or not the position and shape of the bumps of the IC chip are within a preset allowable range.

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