JP4158859B2 - Dryer unit and drying device - Google Patents

Description

  The present invention relates to a dryer unit and a drying device for drying a plate-like body or a belt-like body such as a glass substrate.

Conventionally, Patent Document 1 proposes a drying method using an air knife as an apparatus for drying a glass substrate or the like. By installing a slit-like rinsing liquid shower 4 immediately before the air knife, the glass substrate surface is uniformly wetted when the air knife is dried to prevent polka dots.
JP-A-8-236498

  In the above conventional drying apparatus, 1) a large amount of high-pressure air is required and the running cost is high, and 2) air knife drying has an emphasis on blowing away moisture adhering to the surface rather than drying the moisture, Low drying efficiency 3) With air knives, scattered water droplets reattach to the material to be dried, making it difficult to dry completely, especially to the edges and edges, 4) High pressure of air Due to the high speed, the flow of air in the installation room, that is, the clean room is disturbed, so that a large cover is required and the apparatus is enlarged.

  Accordingly, an object of the present invention is to provide a dryer unit and a drying device that are low in running cost, can be uniformly dried on the entire surface of the object to be dried, and can be downsized.

  In order to solve the above-mentioned problems, the dryer unit according to claim 1 of the present invention has a large number of air ejection holes at predetermined intervals as a predetermined wall member forming an air chamber to which drying air is supplied. In addition, a support plate capable of floatingly supporting the object to be dried is used, and an air dispersion member made of a porous material is disposed on the inner surface of the support plate article on the air chamber side.

According to a second aspect of the present invention, the dryer unit is formed by forming a plurality of air guide grooves having at least one end opened on the outer peripheral edge of the support plate on the outer surface of the support plate.
According to a third aspect of the present invention, there is provided a drying apparatus according to the first or second aspect in which the dryer units are arranged in a horizontal direction or an inclined direction so that the supporting plate members are opposed to each other, and between the dryer units. To form a drying space in which the object to be dried can pass in a floating state, and respectively contact both side edges of the object to be dried that has been levitated by the lower dryer unit to guide the object to be dried in a predetermined direction. A member and a moving device that moves the object to be dried by driving the guide member are arranged.

  According to a fourth aspect of the present invention, there is provided a drying apparatus in which the dryer unit according to the first or second aspect is arranged in a vertical direction so that the left and right support plates face each other, and the object to be dried is disposed between the dryer units. A drying space that can be passed away from the supporting plate material is formed, and a guide member is brought into contact with the lower edge of the dried material that is separated from the supporting plate material by the left and right dryer units. A moving device for moving in a predetermined direction is arranged.

  The drying apparatus according to claim 5, wherein a plurality of group units each including a pair of dryer units are arranged in a moving direction of the body to be dried, and among the group units, the group unit disposed at an outlet of the body to be dried. In addition, cooling air is supplied as drying air, and heated air is supplied as drying air to the remaining set units.

  According to the dryer unit of the first aspect, drying air is ejected from a large number of air ejection holes to float the body to be dried, and moisture of the body to be dried is separated and dried. Therefore, since the drying air does not have to be at high speed and high pressure like an air knife, the running cost can be reduced, and the water droplets are hardly scattered around and the water droplets are reattached to the object to be dried. Therefore, the entire surface of the object to be dried can be uniformly and completely dried to every corner.

  According to the dryer unit of claim 2, since the air guide groove is formed on the outer surface of the support plate, the drying air accompanied by the moisture of the object to be dried is promptly guided to the outer periphery of the support plate. Then, it can be discharged and drying of the material to be dried can be promoted.

  According to the drying apparatus of claim 3, drying air is blown out from a number of air blowing holes into the drying space between the pair of upper and lower dryer units, and the object to be dried is levitated and moved by the moving device to be dried. Since the moisture of the object to be dried is separated and dried by the working air, the drying air does not have to be high speed and high pressure like an air knife, and the running cost can be reduced. Further, since the water droplets hardly scatter and the water droplets do not reattach to the object to be dried, the object to be dried can be uniformly dried to every corner. Further, when the dryer unit is inclined, the separated water droplets can be efficiently guided downward and discharged, and drying can be performed smoothly.

  According to the drying apparatus of the fourth aspect, the drying air is ejected from a large number of air ejection holes into the drying space between the pair of left and right dryer units so that the body to be dried is separated from the supporting plate material and is moved by the moving device. Since the water to be dried is separated and dried by the air for drying, the air for drying does not need to be at high speed and high pressure like an air knife, and the running cost can be reduced. Further, since water droplets hardly scatter and do not adhere again, the object to be dried can be completely dried to every corner. Furthermore, by setting the dryer unit in the vertical direction, water droplets separated from the object to be dried can be guided downward through the air guide groove by gravity and discharged, so that drying can be performed effectively. Can do.

  According to the drying apparatus of claim 5, a plurality of unit units that perform draining, drying, and cooling can effectively dry the washed object to be dried, and by drying with cooling air at the outlet, It is possible to perform a continuous operation from the drying step by sending it to the next step.

DESCRIPTION OF EMBODIMENTS Hereinafter, a dryer unit according to an embodiment of the present invention and a drying apparatus using the dryer unit will be described with reference to the drawings.
First, a dryer unit will be described. This unit is used for drying air from a support surface (or mounting surface) that supports a plate-shaped or belt-shaped body W such as a glass substrate or a silicon wafer after cleaning. Is ejected to float and dry the object to be dried W placed on the supporting surface in the air.

  As shown in FIGS. 1 to 3, the dryer unit 1 has a rectangular shape in plan view, an upper wall plate (supporting plate material) 2, a lower wall plate 3, and both wall plates 2, 3. Are arranged on the inner surface of the upper wall plate 2 on the air chamber 5 side (for example, the box-like body 6 in which an air chamber 5 having a predetermined height is formed). , Affixed) and an air supply unit (not shown, for example, a blower) for supplying drying air with a predetermined pressure from an air supply port 3a formed at the center of the lower wall plate 3 Is used). The wall plates 2 and 3 and the spacer 4 are integrated by bolts and nuts 8.

  And as said upper wall board (it is a predetermined wall surface member, more specifically, it is also a support board material) 2, it is the thickness which can exhibit the intensity | strength which can support a to-be- floated object, and small diameter [plate thickness of The air ejection holes 9 having a hole diameter of about ½ or more (if the diameter can be press-processed, can be manufactured at low cost by using press-working, for example, about 1 to 10 mm) have a predetermined interval (for example, In addition, a metal plate formed in a large number of regular lattices or in a staggered pattern is used (for example, a punching metal made of aluminum, stainless steel, or steel is used. Depending on the case, a synthetic resin such as polytetrafluoroethylene or polyamide (nylon) may be used). As the air dispersion member 7, for example, a porous (porous) resin plate having countless fine holes formed ( In one example of a porous material, such as polytetrafluoroethylene, polyvinyl alcohol, etc.) are used.

  On the outer surface of the upper wall plate 2, in addition to the air ejection holes 9, 9 ', a plurality of air guide grooves 20 for guiding moisture separated from the drying air and the body W to be dried are formed. These air guide grooves 20 are formed in parallel for each row in the width direction (left-right direction in the figure) of the air ejection holes 9 formed in a staggered pattern in the upper wall plate 2, and both end portions of the air guide grooves 20 are at the upper side. Opened at the left and right edges of the wall plate 2.

  In the above configuration, if drying air of a predetermined pressure is supplied into the air chamber 5 from the air supply port 3a, the drying air passes through the infinite number of holes formed in the air dispersion member 7, and from the entire surface. Spouts evenly and in small portions. Then, the drying air ejected from the air ejection holes 9 other than the air guide groove 20 collides with the body to be dried W to mainly give a floating force, and moisture attached to the back surface of the body to be dried W Is distributed and blown to the outer peripheral side while being separated and dried. A part is joined to the air guide groove 20. Further, the drying air ejected from the air ejection holes 9 ′ at the bottom of the air guide grooves 20 collides with the body to be dried W to give a levitation force, and is guided by the air guide grooves 20 to the left or right. By being sent to the direction, the moisture on the back surface of the object to be dried W is separated and entrained and discharged to the outside of the upper wall plate 2 so that it can be effectively dried. The to-be-dried body W that has been levitated can be easily moved, for example, manually or by another moving device.

It should be noted that air escape from the air ejection holes 9 and 9 ′ where the body to be dried W does not exist is reduced, and a sufficient amount of air is ejected from the air ejection holes 9 and 9 ′ located below the body to be dried W. For this purpose, the air resistance in the porous material is preferably large, but if it is too large, the air pressure to be supplied becomes high, so it cannot be increased without darkness. Therefore, the air resistance ΔP (equal to the difference between the air pressure P ₁ ejected from the air ejection hole 9 and the air pressure P ₀ supplied to the air chamber 5) by the air dispersion member 7 which is a porous resin plate. If an upper limit is demonstrated, if it is the range of 10 times or less of the ground-contact surface pressure of the to-be-dried body W, a problem does not arise so much efficiently.

  According to the configuration of the drying unit 1, drying air is ejected from the numerous air ejection holes 9, 9 ′ to float the body W to be dried on the upper wall plate 2, and moisture of the body W is separated and dried. To do. Therefore, since the drying air does not have to be at high speed and high pressure like an air knife, the running cost can be reduced, and water droplets are hardly scattered and are not reattached. Can be uniformly dried to every corner.

  Furthermore, since the air guide groove 20 is formed on the outer surface of the upper wall plate 2, the drying air accompanied by the moisture of the object to be dried W is quickly guided to the outer peripheral portion of the upper wall plate 2 and discharged. Drying of the body W can be promoted.

  Further, as the upper wall plate 2 on which the object to be dried W is placed, a large number of small-diameter holes are formed at predetermined intervals and a metal plate having a predetermined thickness is used, so that the object to be dried W is a glass plate or the like. Even if it is relatively heavy and has a large area (large area), it can be sufficiently supported, and therefore the flatness on the support surface (mounting surface) that supports the object to be dried W is ensured. Can do. Further, since the air dispersion member 7 made of a porous material is disposed on the inner surface of the upper wall plate 2, the drying air can be ejected uniformly and little by little over the entire upper wall plate 2, and therefore in the clean room. Thus, when the glass plate is floated and dried, there is no need to worry about dusting up as in the prior art, and air escapes through the air ejection holes 9 removed from the object to be dried W so that the floating force and drying effect are insufficient. There is no worry. In addition, since a porous material is used as the air dispersion member 7, a material that is both fine and inexpensive can be obtained as compared with a member that forms many holes.

  Further, since the air dispersion member 7 does not directly support the object to be dried W, even when a porous resin plate is used, it is not necessary to maintain the flatness of the surface with high accuracy, and the strength is also so much. Since it is not required, moreover, it is possible to manufacture not only a wide sheet but also a narrow one side by side, so that it can be manufactured inexpensively and easily.

  In addition, although the resin-made board | plate material was demonstrated as the air dispersion | distribution member 7, you may use the porous material made from ceramic, glass, and metal, for example, and also the fiber material (For example, cloth or a material which can exhibit an aeration function) Paper, etc.) may be used.

  By the way, in the said embodiment, although what sandwiched the spacer 4 between the upper wall body 2 and the lower wall body 3 was demonstrated as a box-shaped body, For example, the flange part corresponded to a spacer around an upper wall body May be integrally formed (projected).

Next, another formation pattern of the air guide groove will be described with reference to FIGS.
As shown in FIG. 4, the second pattern of the air guide grooves has front and rear ends in a row in the width direction (left and right direction in the figure) of the air ejection holes 9 and 9 ′ formed in a staggered pattern on the surface of the upper wall plate 2. 1st air guide groove 21 formed in the transverse direction for each row except for the portion, and the front edge portion formed forward from each air ejection hole 9 ″ in the second row from the front edge portion of the upper wall plate 2 A second air guide groove 22 is formed in the rear wall, and is formed rearward from each air ejection hole in the second row from the rear edge of the upper wall plate 2 and is not formed in the rear edge. The opening 2nd air guide groove is formed. While drying air injected from the air injection hole 9 '' of the bottom part of the 2nd air guide groove 22 collides with the to-be-dried body W, and gives floating force, By being guided by the second air guide groove 22 and fed forward (or rearward), water on the back surface of the body W to be dried is separated and accompanied by the upper wall plate. Drain out of 2 and dry effectively.

  Therefore, the water to be dried W containing a large amount of water after washing can be effectively discharged from the front portion (inlet) [and the rear portion (outlet)] of the upper wall plate 2, and the material to be dried W Can be further satisfactorily dried.

  As shown in FIG. 5, the third pattern of the air guide grooves is the third air along the width direction at the intermediate position of the front and rear air ejection holes 9 formed in a regular lattice pattern on the surface of the upper wall plate 2. Guide grooves 23 are formed, and both end portions of the third air guide grooves 23 are opened at the left and right side edges of the upper wall plate 2, respectively.

  Therefore, the drying air ejected from the air ejection holes 9 collides with the body to be dried W and mainly gives a levitation force, and most of the air for drying accompanied by moisture adhering to the back surface of the body to be dried W. Flows into the third air guide groove 23 and is quickly discharged. This promotes drying.

  As shown in FIG. 6, the fourth pattern of the air guide grooves has three rows in the width direction (left and right direction in the figure) of the air ejection holes 9 and 9 ′ formed in a regular lattice shape on the surface of the upper wall plate 2. For each three rows of the fourth air guide groove 24 in the width direction crossing over the air ejection holes 9 and the width direction (left and right direction in the figure) of the air ejection holes 9 and 9 ′, the air ejection holes 9 and A fifth air guide groove 25 formed in the transverse direction is formed at an intermediate position between 9 ', and both end portions of the fourth and fifth air guide grooves 24, 25 are the left and right side edges of the upper wall plate 2, respectively. Each part has an opening.

  Therefore, the drying air ejected from the air ejection hole 9 ′ through the fourth air guide groove 24 collides with the object to be dried W to give a floating force and also removes moisture adhering to the back surface of the object to be dried W. The drying air that has been separated and dried and entrained with moisture is quickly discharged to the outside of the upper wall plate 5 along the fourth air guide groove 24. Further, the drying air ejected from the air ejection hole 9 collides with the object to be dried W to give a levitation force, separates and dries the moisture adhering to the back surface of the object to be dried W, and the drying air entrained with moisture. Is quickly discharged to the outside of the upper wall plate 5 along the fifth air guide groove 25. This promotes drying.

  As shown in FIG. 7, the fifth pattern of the air guide grooves is the middle of the row in the width direction (the left-right direction in the figure) of the air ejection holes 9 formed at the regular lattice positions at a constant pitch on the surface of the upper wall plate 2. At a position, a transverse air guide groove 26 in the transverse direction and a longitudinal air guide groove 27 in the longitudinal direction at an intermediate position in the front-rear direction (vertical direction in the figure) are formed in a lattice shape surrounding the air ejection holes 9. . Then, both end portions of the horizontal air guide groove 26 and the vertical air guide groove 27 are opened at the outer peripheral side edge portion of the upper wall plate 2.

  Therefore, the drying air ejected from the air ejection hole 9 collides with the object to be dried W to give a floating force, and separates and dries the moisture adhering to the back surface of the object to be dried W, thereby drying accompanied by moisture. The working air is quickly discharged out of the upper wall plate 5 along the horizontal air guide groove 26 and the vertical air guide groove 27. This promotes drying.

  As shown in FIG. 8, the sixth pattern of the air guide grooves has one diagonal row and an intermediate position of the diagonal rows of air ejection holes 9 formed in a staggered pattern on the surface of the upper wall plate 2. Parallel inclined air guide grooves 28 are formed, and both end portions of the inclined air guide grooves 28 are opened to the outer peripheral side edges of the upper wall plate 2.

  Therefore, the drying air ejected from the air ejection holes 9 impinges on the object to be dried W and gives a floating force, and separates and dries the moisture adhering to the back surface of the object to be dried W, and is accompanied by moisture. Most of the air is quickly discharged out of the upper wall plate 5 along the inclined air guide groove 28. This promotes drying.

  As shown in FIG. 9, the seventh pattern of the air guide grooves is provided for each row in the diagonal direction (from the upper left to the lower right in the drawing) of the air ejection holes 9 formed in a staggered pattern on the surface of the upper wall plate 2. The first inclined air guide groove 31 formed at the intermediate position and the second inclined vertical air guide groove 32 formed at the intermediate position for each row in the diagonal direction (upper right to lower left in the figure) 9 is formed in a rhombus pattern surrounding 9. Then, both end portions of the first inclined air guide groove 31 and the second inclined vertical air guide groove 32 are respectively opened at the outer peripheral side edge portion of the upper wall plate 2.

  Therefore, the drying air ejected from the air ejection holes 9 impinges on the object to be dried W and gives a floating force, and separates and dries the moisture adhering to the back surface of the object to be dried W, and is accompanied by moisture. Air is quickly discharged out of the upper wall plate 5 along the first inclined air guide groove 31 and the second inclined vertical air guide groove 32. This promotes drying.

Next, an embodiment of the drying apparatus will be described with reference to FIGS.
As shown in the figure, this drying apparatus includes a plurality of (in the figure, the drying units 1A and 1B having a pair of upper and lower pairs as a unit unit 10 with a drying space 11 spaced apart in the moving direction of the body W to be dried. 3 sets) A set of units 10A, 10B, and 10C is disposed, and a moving device 12 that moves the object to be dried W floated by the drying air of the lower drying unit 1A along the drying space 11 is provided. .

  The assembly units 10A, 10B, and 10C are configured from the inlet side to a draining assembly unit (water draining unit) 10A, a drying assembly unit (drying unit) 10B, and a cooling assembly unit (cooling unit) 10C. Heating air is supplied from the air supply port 3a as drying air to the assembly unit 10B, and cooling air is supplied from the air supply port 3a as drying air to the cooling assembly unit 10C. In addition, on the outer surface of the upper wall plate 2 in each set unit 10A, 10B, 10C, the air guide grooves 20 to 28, 31, 32 of the plurality of patterns are selected and formed in accordance with the purpose. .

  In addition, the left and right side portions of the drying space 11 are connected to each other by the connecting spacer tube 13 via fastening bolts and nuts 14 and the exhaust ports are formed on the left and right side portions of the set units 10A, 10B, and 10C.

  The moving device 12 is a flanged taper roller type that is urged upward by an elastic support 12c and comes into contact with the left and right edges of the levitated body W from below, and a pair of left and right lower rollers (guide members) 12a. And an upper roller 12b that is disposed on the lower roller 12a so as to oppose the upper side of the body to be dried W and is in contact with the left and right edges of the body to be dried W by the elastic support 12d from above. 12a or the upper roller 12b is configured as a rotational drive roller. These rotary drive rollers may be an internal drive type in which a motor is incorporated in the roller, or may be an external drive type in which the roller is rotationally driven by an external motor via a drive shaft.

  In the above configuration, when the object to be dried W made of, for example, a glass plate after being transported is transported by the moving device 12 and first moved to the drying space 11 of the draining unit 10A, the air ejection hole 9 of the lower drying unit 1A. And / or 9 ′, the drying target W is levitated by the drying air (warm air) ejected from the air and the drying air ejected from the air ejection holes 9 and / or 9 ′ of the upper and lower drying units 1A and 1B. Water (heated air) separates water droplets on the upper and lower surfaces of the object to be dried W, and is quickly discharged from the air guide groove (any one of 20 to 28, 31, 32) to effectively drain water.

  Next, when the object to be dried W is moved to the drying space 11 of the drying unit 10B, the object to be dried is dried by the drying air (heated air) ejected from the air ejection holes 9, 9 ′, 9 ″ of the lower drying unit 1A. As the body W floats, water droplets on the upper and lower surfaces of the body W to be dried are separated by the drying air (warm air) ejected from the air ejection holes 9 and / or 9 ′ of the upper and lower drying units 1A and 1B. Thus, the air is quickly discharged from the air guide groove (any one of 20 to 28, 31, 32) to be effectively dried.

  Further, when the object to be dried W is carried into the drying space 11 of the cooling assembly unit 10B, the object to be dried is heated by the drying air (heated air) ejected from the air ejection holes 9, 9′9 ″ of the lower drying unit 1A. As W rises, the moisture in the object to be dried W is dried by the drying air (cooling air) ejected from the air ejection holes 9, 9'9 "of the upper and lower drying units 1A, 1B, and the air guide groove From any one of 20 to 28, 31, 32, it is quickly discharged to the outside, effectively dried and cooled, and discharged to the next step.

  According to the embodiment of the drying apparatus, the pair of upper and lower dryer units 1A and 1B form the unit units 10A to 10C, and the drying space 11 is used for drying from the large number of air ejection holes 9, 9'9 ". Since the air W is blown out to float the object to be dried W, and the moving device 12 moves the drying space 11 of the assembly units 10A to 10C, and the moisture of the object to be dried W is separated and dried by the drying air. The air for drying does not need to be at high speed and high pressure like an air knife, and the running cost can be reduced, and since water droplets hardly scatter and reattach, It can be completely dried, and a cover for preventing splashing of water droplets is unnecessary, so that the whole can be made compact. By a unit 10B and a cooling assembly unit 10C, the washed object dried body W to effectively drying and cooling can be fed to the next step.

  FIG. 13 shows a pair of upper and lower dryer units 1A and 1B, which are inclined by a predetermined angle in the vertical direction along the width direction (left and right direction). Water droplets can be effectively guided downward along the air guide groove (any one of 20 to 28, 31, 32), and drying can be performed more smoothly. In addition, the drive roller of the moving apparatus 12 is comprised by the lower roller 12a arrange | positioned so that the lower edge part of the to-be-dried body W which inclines can be supported.

  FIG. 14 shows an assembly unit 10D composed of a pair of left and right dryer units 1A and 1B arranged in a vertical direction. Drying air is ejected into a drying space 11 from a number of air ejection holes 9 and 9 ′. The dry body W is moved away from the upper wall plate 3 and dried. In addition, the drive roller of the moving device 12 is configured by a lower roller 12a with a hook disposed so as to be able to support the lower edge portion of the inclined body W to be dried.

  According to the said structure, the to-be-dried body W is arrange | positioned to the orthogonal | vertical direction, and the drying air does not need to be high-speed and high pressure like an air knife by moving the drying space 11, A running cost can be reduced. In addition, since water droplets hardly scatter and do not adhere again, the object to be dried W can be completely dried to every corner. Water droplets can be effectively guided and discharged downward along the air guide groove (any one of 20 to 28, 31, 32), and drying can be performed more smoothly.

It is a cross-sectional view which shows schematic structure of the unit for dryers concerning embodiment of this invention. It is a whole top view which shows schematic structure of the unit for the said dryer. It is a partial top view explaining the movement state of the air for drying of the unit for the said dryer. It is a partial top view which shows the 2nd pattern of the air guide groove formed in the surface of the upper wall board of the unit for the said dryer. It is a fragmentary top view which shows the 3rd pattern of the air guide groove. It is a fragmentary top view which shows the 4th pattern of the air guide groove. It is a fragmentary top view which shows the 5th pattern of the air guide groove. It is a fragmentary top view which shows the 6th pattern of the air guide groove. It is a fragmentary top view which shows the 7th pattern of the air guide groove. 1 is an overall plan view showing an embodiment of a drying apparatus according to the present invention. It is a perspective view of the drying device. It is a cross-sectional view which shows the group unit of the drying apparatus. It is a cross-sectional view of the assembly unit which shows other embodiment of a drying apparatus. It is a cross-sectional view of a set unit showing still another embodiment of the drying device.

Explanation of symbols

W Dried object 1 Dryer unit 2 Upper wall plate 3 Lower wall plate 3a Air supply port 4 Spacer 5 Air chamber 6 Box-like body 7 Air dispersion member 8 Bolt / nut 9, 9 ', 9 "Air ejection hole 10A Drainage Assembly unit 10B Dry assembly unit 10C Cooling assembly unit 11 Drying space 12 Moving device 20 Air guide groove 21 First air guide groove 22 Second air guide groove 23 Third air guide groove 24 Fourth air guide groove 25 Fifth air guide groove 26 Horizontal air guide groove 27 Vertical air guide groove 28 Inclined air guide groove 31 First inclined air guide groove 32 Second inclined air guide groove

Claims (5)

  As a predetermined wall surface member forming an air chamber to which drying air is supplied, a support plate material in which a large number of air ejection holes are formed at a predetermined interval and which can support the object to be dried is used, and this support plate material An air dispersion member made of a porous material is disposed on the air chamber side inner surface of the dryer unit. 2. The dryer unit according to claim 1, wherein a plurality of air guide grooves having at least one end opened to the outer peripheral edge of the support plate are formed on the outer surface of the support plate. The dryer unit according to claim 1 or 2 is arranged in a horizontal direction or an inclined direction so that a pair of upper and lower support plates are opposed to each other, and an object to be dried passes between the dryer units in a floating state. Form a possible drying space,
A guide member that guides the object to be dried in a predetermined direction by coming into contact with both side edges of the object to be dried levitated by the lower dryer unit, and a movement that drives the guide member to move the object to be dried. A drying apparatus characterized by comprising an apparatus. 3. The dryer unit according to claim 1 or 2 is arranged in a vertical direction so that the left and right pair of support plates are opposed to each other, and an object to be dried can pass between the dryer units while being separated from the support plate. Form a dry space,
A drying device characterized in that a moving device that moves the object to be dried in a predetermined direction by bringing the guide member into contact with the lower edge of the object to be dried separated from the supporting plate by the left and right dryer units is provided. apparatus. In the moving direction of the body to be dried, a plurality of unit units each including a pair of dryer units are arranged,
Among the set units, cooling air is supplied as drying air to a set unit arranged at the outlet of the body to be dried, and heated air is supplied as drying air to the remaining set units. The drying apparatus according to claim 3 or 4, characterized in that:

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