CN103367510A

CN103367510A - Cooling plate

Info

Publication number: CN103367510A
Application number: CN2012101024983A
Authority: CN
Inventors: 黄世壬; 曾昭隆; 廖科峰; 陈官璧; 陈君健
Original assignee: SHENGYANG NEW MATERIAL TECHNOLOGY Co Ltd
Current assignee: SHENGYANG NEW MATERIAL TECHNOLOGY Co Ltd
Priority date: 2012-03-30
Filing date: 2012-03-30
Publication date: 2013-10-23

Abstract

Disclosed is a cooling plate including a casing, wherein a division board is arranged in the casing and divides the casing into an upper chamber and a lower chamber beneath the upper chamber and a casing wall , at a lower part of the lower chamber is defined as a lower board; and at least a casing wall at one side of the upper chamber is provided with a gas-inlet hole for an external gas to enter the upper chamber; the division board is provided with a plurality of through holes and diameters of the through holes which are closer to the gas-inlet hole are smaller and diameters of the through holes which are further from the gas-inlet hole are larger, and the through holes communicate the upper chamber with the lower chamber; and the lower board is provided with a plurality of gas-outlet holes so that the lower chamber is communicated with the outside world. Diameters of the gas-outlet holes are identical and the gas-outlet holes are arrayed in a matrix. Therefore, effects of uniform gas outlet and even cooling are achieved.

Description

Coldplate

Technical field

The present invention is relevant with the technology that makes the object cooling, refers to especially a kind of evenly coldplate of cooling of plate object that makes.

Background technology

Photovoltaic module now, one deck molybdenum layer (Mo layer) normally is set above a glass substrate, and on this molybdenum layer, carry out the manufacturing of light absorbing zone (for example CIGS (Copper Indium Gallium Selenide) layer, CIS (copper indium diselenide) layer), and when light absorbing zone is made, temperature must be increased to more than 500 degree Celsius, and make it to form on this molybdenum layer in the mode of sputter, evaporation, plating or ink-jet (ink-jet).

Yet, above-mentioned light absorbing zone manufacturing finish and need the cooling, or when the demand that other need to lower the temperature is arranged on the processing procedure, can not directly this glass substrate be placed under the room temperature environment, otherwise can cause because variations in temperature is too violent the problem of distortion or fragmentation.Because the temperature difference of the upper and lower surface of glass can not be greater than 150 ℃, and the temperature difference on same surface can not greater than 25 ℃, therefore need to be come to this glass substrate cooling, so as to fast and uniformly temperature being fallen, in order to follow-up process operations with a cooling process.

The known type of cooling is with a coldplate (cooling plate) glass substrate to be blown at present, utilizes cold air to reach the effect of cooling.As shown in figure 11, traditional coldplate 80 is to connect a gas source 99 with the input refrigerating gas in a side, and in lower plate 82 several ventholes 821 are set gas is blown out, so as to glass substrate is cooled off action; Yet, because gas source 99 is positioned at a side, therefore this gas source 99 is when providing gas, the gas pressure of the venthole 821 of close this gas source 99 is given vent to anger more greatly, it is less to give vent to anger away from the gas pressure of the venthole 821 of this gas source 99 is then less, and this can cause the inhomogeneous situation of giving vent to anger, and is therefore even to the inhomogeneous cooling of glass substrate, be easy to cause same lip-deep temperature difference to cause distortion or fragmentation greater than 25 ℃, this problem has to be solved.

Summary of the invention

Main purpose of the present invention is to provide a kind of coldplate, and it can reach the effect of even cooling.

Another object of the present invention is to provide a kind of coldplate, the gas ejection situation that it can control lower plate plate face is able to evenly gas output.

In order to reach aforementioned purpose, according to a kind of coldplate provided by the present invention, include: a housing; Wherein, separate with a dividing plate in this housing and form a upper chamber and a lower chambers, this lower chambers is positioned at this upper chamber below, and the shell wall side of this lower chambers below is defined as lower plate; The shell wall side of at least one side of this upper chamber arranges an air admission hole, uses for ambient atmos and enters this upper chamber; This dividing plate is provided with several perforation, and more the piercing aperture near this air admission hole is less, and more the piercing aperture away from this air admission hole is larger, and those perforation are communicated with this upper chamber and this lower chambers; This lower plate is provided with several ventholes and this lower chambers is in communication with the outside, and the aperture of those ventholes is all identical, and those ventholes are the matrix arrangement.Can reach whereby the effect of giving vent to anger evenly, evenly cooling off.

Description of drawings

Fig. 1 is the stereogram of the present invention's the first preferred embodiment.

Fig. 2 is the stereogram of the present invention's the first preferred embodiment, and state is looked at the demonstration end.

Fig. 3 is the cutaway view along 3-3 hatching line among Fig. 1.

Fig. 4 is the cutaway view along 4-4 hatching line among Fig. 3, shows the state that perforation is set on the dividing plate.

Fig. 5 is the use view of the present invention's the first preferred embodiment.

Fig. 6 is the cross-sectional schematic of the present invention's the second preferred embodiment.

Fig. 7 is the cross-sectional schematic of the present invention's the 3rd preferred embodiment.

Fig. 8 is the schematic diagram of the present invention's the 3rd preferred embodiment, shows the state that perforation is set on the dividing plate.

Fig. 9 is the stereogram of the present invention's the 4th preferred embodiment, shows the state that the end is looked.

Figure 10 is the cross-sectional schematic of the present invention's the 4th preferred embodiment.

Figure 11 is the cross-sectional schematic of existing coldplate.

Embodiment

In order to describe structure of the present invention and characteristics place in detail, hereby lift following preferred embodiment and cooperate graphic explanation as after, wherein:

To shown in Figure 5, a kind of coldplate 10 that the present invention's the first preferred embodiment provides mainly has such as Fig. 1:

One housing 11.

Separate with a dividing plate 12 in this housing 11 and form a upper chamber 14 and a lower chambers 16, this lower chambers 16 is positioned at this upper chamber 14 belows, and the shell wall side of these lower chambers 16 belows is defined as lower plate 18.

The shell wall side of these upper chamber's 14 at least one sides arranges an air admission hole 141, uses for ambient atmos and enters this upper chamber 14.In present embodiment, this air admission hole 141 can connect the gas source 99 (being shown in Fig. 5) of an outside and input gas.

This dividing plate 12 is provided with several perforation 121, and less near perforation 121 apertures of this air admission hole 141, and larger away from perforation 121 apertures of this air admission hole 141, this this perforation 121 is communicated with this upper chamber 14 and this lower chambers 16.In present embodiment, those perforation 121 are categorized as four A of group, B according to the aperture, C, D, the same A of group, B, perforation 121 apertures in the C, D are identical, the different A of group, B, C, perforation 121 apertures between D are different, the piercing aperture of the perforation 121 aperture minimums of A group and D group is maximum, and in addition, those perforation 121 are matrix and arrange.

This lower plate 18 is provided with several ventholes 181 and this lower chambers 16 is in communication with the outside, and the aperture of those ventholes 181 is all identical, and those ventholes 181 are the matrix arrangement.

Whereby, as shown in Figures 3 and 4, after this gas source 99 provides gas to enter this upper chamber 14 via this air admission hole 141, enter this lower chambers 16 via those perforation 121 again, those ventholes 181 by this lower plate 18 blow out at last.Wherein, since less near perforation 121 apertures of this air admission hole 141, and again because gas pressure herein is larger, therefore gas output can be modified to the moderate gas output; And since larger away from perforation 121 apertures of this air admission hole 141, and again because gas pressure herein is less, therefore also gas output can be modified to the moderate gas output.So, can be so that the gas output convergence of the position of these lower chambers 16 corresponding each ventholes 181 be identical, that is, the gas pressure of each position in this lower chambers 16 levels off to identical, and then, can so that the gases in this lower chambers 16 level off to via the amount of those ventholes 181 ejections more identical, in other words, gas output namely is able to evenly also can reach the effect of even cooling when cooling off.

When reality is used, for example make in the light absorbing zone processing procedure at glass substrate, when wish is lowered the temperature to glass substrate, as shown in Figure 5, can use two coldplates 10 of the present invention to be arranged at respectively top and the below of glass baseplate conveying device 71, and be connected to a gas source 99, and come top and the below of glass substrate 72 are lowered the temperature in the mode of even ejection gas, reach uniform decrease in temperature to avoid the effect of fragmentation or distortion.

Please consult Fig. 6, a kind of coldplate 20 that the present invention's the second preferred embodiment provides is taken off the first embodiment before mainly generally being same as again, and difference is:

The shell wall side of the left and right sides of this upper chamber 24 arranges respectively an air admission hole 241, and this two air admission hole 241 is relative.

This two air admission hole 241 that present embodiment arranges, owing to relatively (also can be front and back relatively) about the position is, therefore the mode that diverse location is set according to different pore size of those perforation 221 can be from front to take off the first embodiment different, with Fig. 6, the aperture of those perforation 221 presents the left and right sides little (near air admission hole) and the relation of central authorities' large (away from air admission hole) as can be known.

Take off the first embodiment before all the other structures of this second embodiment and the effect that can reach all generally are same as, hold and do not give unnecessary details.

Please consult Fig. 7 and Fig. 8, a kind of coldplate 30 that the present invention's the 3rd preferred embodiment provides is taken off the first embodiment before mainly generally being same as again, and difference is:

The shell wall side central authorities of these upper chamber 34 tops arrange an air admission hole 341.Because these air admission hole 341 positions are positioned at central authorities, therefore the mode that diverse location is set according to different pore size of those perforation 321 can be from front to take off the first embodiment different, with Fig. 8, those perforation apertures of 321 present central authorities' little (near air admission hole) and by central authorities' relation of large (away from air admission hole) gradually outward as can be known.

Take off the first embodiment before all the other structures of this 3rd embodiment and the effect that can reach all generally are same as, hold and do not give unnecessary details.

Please consult Fig. 9 to Figure 10, a kind of coldplate 40 that the present invention's the 4th preferred embodiment provides is taken off the first embodiment before mainly generally being same as again, and difference is:

More include an oil cooling pipe 49, in present embodiment for injecting oil metal tube capable of circulation, by passing this housing 41 and curved prolonging in this upper chamber 44 passes this housing 41 by the another location again in the outside.This oil cooling pipe 49 is curved the prolonging of reciprocal S shape.

When operation, this oil cooling pipe 49 passes into oil and it is circulated, so as to the heat energy of the gas in this upper chamber 44 is taken out of, and then so that the gases in this upper chamber 44 lowered the temperature in advance, and can spray the more gas of low temperature by this lower plate 48, to reach better cooling effect.

Take off the first embodiment before all the other structures of this 4th embodiment and the effect that can reach all generally are same as, hold and do not give unnecessary details.

As from the foregoing, the present invention can control the gas ejection situation of lower plate plate face, and gas output is able to evenly.In addition, even by gas output, and then can reach the effect of even cooling.

Claims

1. a coldplate is characterized in that, includes:

One housing; Wherein,

Separate with a dividing plate in this housing and form a upper chamber and a lower chambers, this lower chambers is positioned at this upper chamber below, and the shell wall side of this lower chambers below is defined as lower plate;

The shell wall side of this at least one side of upper chamber arranges an air admission hole, uses for ambient atmos and enters this upper chamber;

This dividing plate is provided with several perforation, and more the piercing aperture near this air admission hole is less, and more the piercing aperture away from this air admission hole is larger, and those perforation are communicated with this upper chamber and this lower chambers;

This lower plate is provided with several ventholes and this lower chambers is in communication with the outside, and the aperture of those ventholes is all identical, and those ventholes are the matrix arrangement.

2. according to Patent right requirement 1 described coldplate, it is characterized in that: those perforation are categorized as several groups according to the aperture, and the piercing aperture in the same group is identical, and the piercing aperture between different groups is different.

3. according to Patent right requirement 1 described coldplate, it is characterized in that: the shell wall side of the left and right sides of this upper chamber or both sides, front and back arranges respectively an air admission hole, and this two air admission hole is relative.

4. according to Patent right requirement 1 described coldplate, it is characterized in that: this air admission hole is not positioned at the shell wall side of at least one side of this upper chamber, and is positioned at the shell wall side of this upper chamber's top center.

5. according to Patent right requirement 1 described coldplate, it is characterized in that: more include an oil cooling pipe, by passing this housing and curved prolonging in this upper chamber passes this housing by the another location again in the outside.

6. according to Patent right requirement 5 described coldplates, it is characterized in that: this oil cooling pipe is curved the prolonging of reciprocal S shape.

7. according to Patent right requirement 5 described coldplates, it is characterized in that: this oil cooling pipe is for injecting oil metal tube capable of circulation.

8. according to Patent right requirement 1 described coldplate, it is characterized in that: those perforation are matrix and arrange.