CN108315719B - Five-tube PECVD graphite boat cache frame - Google Patents
Five-tube PECVD graphite boat cache frame Download PDFInfo
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- CN108315719B CN108315719B CN201711385255.4A CN201711385255A CN108315719B CN 108315719 B CN108315719 B CN 108315719B CN 201711385255 A CN201711385255 A CN 201711385255A CN 108315719 B CN108315719 B CN 108315719B
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- fan
- graphite boat
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 41
- 239000010439 graphite Substances 0.000 title claims abstract description 41
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 22
- 238000009413 insulation Methods 0.000 claims description 17
- 238000007664 blowing Methods 0.000 claims description 8
- 230000017525 heat dissipation Effects 0.000 abstract description 15
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000001816 cooling Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
The invention discloses a graphite boat cache frame for a five-tube PECVD (plasma enhanced chemical vapor deposition), which is provided with a plurality of cache positions, wherein the cache positions are arranged at intervals from bottom to top, a fan assembly is arranged on the cache position with the odd number in the cache positions, the fan assembly comprises a fan plate and a plurality of fans, the fans are arranged on the fan plate, the fan ports of the fans face upwards, and the fan plate is arranged on the corresponding cache position. The invention has the advantages that the cold graphite boat is preheated by the hot graphite boat, the heat is fully utilized, and the heat dissipation capability of the cache frame is improved.
Description
Technical Field
The invention relates to PECVD equipment in the field of photovoltaic manufacturing, in particular to a graphite boat buffer frame for five-tube PECVD.
Background
PECVD is indispensable equipment in the field of photovoltaic manufacturing, and in recent years, with the rapid development of the photovoltaic industry in China, the equipment productivity and technical requirements are higher and higher. The PECVD is developed from two tubes at first to five tubes at present, the number of single tube process pieces is developed from 240 to 416, the capacity of single equipment is continuously increased, and the current single five-tube PECVD equipment can completely meet the requirement of a 100MW battery production line. With the increase of the capacity of the equipment, the size of the equipment is inevitably increased, which brings new problems, wherein the most prominent problem is the heat dissipation problem, and the heat dissipation of the cache rack is one of the important problems to be solved.
The heat boat after the PECVD process is carried out is placed on the cache frame through the mechanical arm to dissipate heat, the heat of the graphite boat is too large, boat detection components on the cache frame can be affected, and the boat collision phenomenon can be caused, so that the heat of the graphite boat needs to be discharged in time. The main heat dissipation mode of the existing cache rack is to take away heat in a purification table through airflow formed by a bottom axial flow fan and a top axial flow fan, so that the effect of cooling the cache rack is achieved. However, the conventional five-tube PECVD equipment is designed with seven buffer positions for buffering with the graphite boat. When two graphite boats (high temperature, hereinafter referred to as hot boats) are placed at the upper and lower positions of the buffer storage rack after the coating process is finished, heat dissipation can be restricted with each other, the heat dissipated by the lower hot boat can heat the upper hot boat, and the upper hot boat can block the heat dissipation of the lower hot boat. Therefore, the existing cache frame lacks an air cooling device, the heat dissipation is slow, and the whole process time is long; the buffer bit is not allocated reasonably, and the influence among the hot boats is ignored.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a five-tube PECVD graphite boat buffer frame which preheats a cold graphite boat by using a hot graphite boat, fully utilizes heat and improves the heat dissipation capacity of the buffer frame.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a five pipe PECVD's graphite boat buffer memory framves, the buffer memory is put up and is equipped with a plurality of buffer memory positions, supreme interval setting is down followed to a plurality of buffer memory positions, be equipped with fan assembly on the buffer memory position that the sequence number is the odd among a plurality of buffer memory positions, fan assembly includes fan board and a plurality of fan, a plurality of fans are located on the fan board and the fan mouth of each fan up, the fan board is located on the buffer memory position that corresponds.
As a further improvement of the above technical solution:
an included angle α is formed between a fan port of the fan and the horizontal plane, and α is more than or equal to-5 degrees and less than or equal to 5 degrees.
The fan assembly further comprises a heat insulation plate, the fan plate is arranged on the heat insulation plate, and the heat insulation plate is fixed on the buffer position.
The fan board is arranged above the heat insulation board and forms a fan containing cavity with the heat insulation board, the fan board is provided with a fan mounting hole, the fan is arranged in the fan containing cavity, and the fan opening is located in the fan mounting hole.
The fans are distributed in two rows and multiple columns.
The lower part of the lowest buffer position is provided with a fan set blowing upwards, and the upper part of the uppermost buffer position is provided with a fan set blowing downwards.
Compared with the prior art, the invention has the advantages that:
according to the five-tube PECVD graphite boat buffer frame, the fan blowing upwards is arranged on the buffer position, the hot graphite boat is used for preheating the cold graphite boat, the heat is fully utilized, the process effect is improved, the fan accelerates the heat dissipation of the hot graphite boat, the heat dissipation capacity of the buffer frame is improved, the cooling effect of the hot graphite boat on the buffer frame is obviously improved, and the buffer frame and other electronic components are prevented from being damaged.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic structural view of a fan assembly according to the present invention.
Fig. 3 is a schematic view of the installation position of the fan in the present invention.
FIG. 4 is a schematic diagram of the partitions of the cache shelf of the present invention.
The reference numerals in the figures denote:
1. a cache shelf; 2. a cache bit; 3. a fan assembly; 4. a fan plate; 41. a fan mounting hole; 5. a fan; 6. a heat insulation plate; 7. a fan accommodating cavity; 8. a fan unit; 9. graphite boat.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples of the specification.
As shown in fig. 1 to 4, the graphite boat buffer frame of five-tube PECVD of this embodiment, buffer frame 1 are equipped with a plurality of buffer positions 2, and a plurality of buffer positions 2 set up from supreme interval down, are equipped with fan assembly 3 on the buffer position 2 that the sequence number is the odd number in a plurality of buffer positions 2, and fan assembly 3 includes fan board 4 and a plurality of fan 5, and a plurality of fans 5 are located on fan board 4 and the fan mouth of each fan 5 up, and fan board 4 is located on the buffer position 2 that corresponds.
The graphite boat 9 without the process is at normal temperature before entering the furnace body, and after being placed in the furnace body, the stability of the temperature in the furnace body and the process effect are influenced to a certain extent, so that the graphite boat 9 needs to be preheated before the process is carried out.
The conventional cache rack 1 for the five-tube PECVD has seven cache bits 2 at most. In this embodiment, the example in which the cache rack 1 has seven cache bits 2 is taken. Seven cache bits 2 set up along cache frame 1 interval from bottom to top, and the cache bit 2 of the bottommost is No. 1 cache bit 2, and the cache bit 2 of the top is No. 7 cache bit 2. The buffer positions 2 with the sequence numbers of 1, 3, 5 and 7 are provided with fan plates 4, and the fan plates 4 are provided with fans 5 blowing upwards. The heated graphite boat 9 (hereinafter referred to as a hot boat) is placed on the cache positions 2 with serial numbers 1, 3, 5 and 7, the cold graphite boat 9 (hereinafter referred to as a cold boat) to be preheated is placed on the cache positions 2 with serial numbers 2, 4 and 6, and the hot boat below the cold boat blows heat upwards through the fan 5, so that the cold boat above the cold boat is preheated. According to the invention, the hot graphite boat 9 is used for preheating the cold graphite boat 9, so that the heat is fully utilized, the process effect is improved, the fan 5 accelerates the heat dissipation of the hot graphite boat 9, the heat dissipation capability of the cache frame 1 is improved, the cooling effect of the hot graphite boat 9 on the cache frame 1 is obviously improved, and the cache frame 1 and other electronic components are prevented from being damaged.
In this embodiment, the fan assembly 3 further includes a heat insulation board 6, the fan board 4 is disposed on the heat insulation board 6, and the heat insulation board 6 is fixed on the buffer position 2. The thermal shield 6 is mainly used to prevent the mutual influence of heat dissipation between a group of hot boats and a region formed by a cold boat.
In this embodiment, the fan board 4 is disposed above the thermal insulation board 6 and forms a fan accommodating cavity 7 with the thermal insulation board 6, a fan mounting hole 41 is disposed on the fan board 4, the fan 5 is disposed in the fan accommodating cavity 7 and the fan port is located in the fan mounting hole 41, an included angle α is formed between the fan port of the fan 5 and the horizontal plane, in this embodiment, α is 5 °, that is, the fan 5 rotates clockwise 5 ° relative to the horizontal plane, as shown in fig. 3, the fan 5 does not blow directly against the heat boat but at a certain angle, which is more beneficial to heat discharge, and the angle α of the fan 5 can be adjusted from-5 ° to 5 °.
In this embodiment, a fan group 8 blowing upward is provided below the lowermost buffer position 2, and a fan group 8 blowing downward is provided above the uppermost buffer position 2. All set up fan unit 8 about buffer memory frame 1, and upper and lower fan unit 8 all upwards bloies, distributes away the heat in the whole space, and a direction is bloied, has avoided the air current disorder.
As shown in fig. 4, the seven cache bits 2 divide the cache rack 1 into 4 regions through the heat insulation board 6, wherein the region one, the region two, the region three and the region four are respectively composed of two cache bits 2, and the region four is a region independently composed of the 7 th cache bit 2, so that mutual influence of heat extraction among the regions is avoided. The lower buffer position 2 of each region stores the hot boats, namely, the number 1, 3, 5 and 7 buffer positions 2 are hot boat buffer positions, and the priority order of storing the hot boats on the buffer rack 1 is 1, 3, 5 and 7. Deposit cold boat on the last buffer position 2 in every region, 2, 4, 6 are cold boat buffer positions promptly, and the priority order that cold boat deposited on buffer frame 1 is 2, 4, 6, and such buffer mode has not only improved the heat dissipation, also make full use of heat, has preheated the cold boat of not doing the technology to a certain extent, has practiced thrift the energy, has improved technological effect simultaneously.
In this embodiment, 16 fans 5 are arranged in two rows and a plurality of columns. Each fan plate 4 is provided with 16 fans 5, and the air quantity of each fan 5 is 1.33m3Min, total exhaust air volume per minute 21.33m3And/min, the ventilation of one cache region is completed within 2s probably without considering wind resistance, and the requirement of heat dissipation is met.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.
Claims (6)
1. The utility model provides a five pipe PECVD's graphite boat buffer memory frame which characterized in that: the cache rack (1) is provided with a plurality of cache positions (2), the cache positions (2) are arranged at intervals from bottom to top, a fan component (3) is arranged on the cache position (2) with the odd serial number in the plurality of cache positions (2), the fan assembly (3) comprises a fan plate (4) and a plurality of fans (5), the fans (5) are arranged on the fan plate (4) and the fan ports of the fans (5) are upward, the fan plate (4) is arranged on the corresponding buffer position (2), the odd-numbered buffer positions (2) are used for placing the heated graphite boat (9), the even number of the buffer positions (2) in the plurality of buffer positions (2) is used for placing a cold graphite boat (9) to be preheated, and the hot graphite boat (9) below the cold graphite boat (9) blows heat upwards through a fan (5), so that the cold graphite boat (9) above the hot graphite boat is preheated.
2. The graphite boat buffer frame for the five-tube PECVD as recited in claim 1, wherein an included angle between a fan port of the fan (5) and a horizontal plane is α degrees, α degrees is more than or equal to-5 degrees and less than or equal to 5 degrees.
3. The five-tube PECVD graphite boat buffer rack according to claim 1, wherein: the fan assembly (3) further comprises a heat insulation plate (6), the fan plate (4) is arranged on the heat insulation plate (6), and the heat insulation plate (6) is fixed on the cache position (2).
4. The five-tube PECVD graphite boat buffer rack according to claim 3, wherein: the fan is characterized in that the fan plate (4) is arranged above the heat insulation plate (6) and forms a fan containing cavity (7) with the heat insulation plate (6), a fan mounting hole (41) is formed in the fan plate (4), the fan (5) is arranged in the fan containing cavity (7), and a fan opening is located in the fan mounting hole (41).
5. The five-tube PECVD graphite boat buffer rack according to any one of claims 1 to 4, wherein: the fans (5) are distributed in two rows and multiple columns.
6. The five-tube PECVD graphite boat buffer rack according to any one of claims 1 to 4, wherein: the lower part of the lowest buffer position (2) is provided with a fan group (8) blowing upwards, and the upper part of the highest buffer position (2) is provided with a fan group (8) blowing downwards.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711385255.4A CN108315719B (en) | 2017-12-20 | 2017-12-20 | Five-tube PECVD graphite boat cache frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711385255.4A CN108315719B (en) | 2017-12-20 | 2017-12-20 | Five-tube PECVD graphite boat cache frame |
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| Publication Number | Publication Date |
|---|---|
| CN108315719A CN108315719A (en) | 2018-07-24 |
| CN108315719B true CN108315719B (en) | 2020-05-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711385255.4A Active CN108315719B (en) | 2017-12-20 | 2017-12-20 | Five-tube PECVD graphite boat cache frame |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108950514B (en) * | 2018-08-28 | 2020-05-12 | 洛阳尚德太阳能电力有限公司 | Tubular PECVD preheating boat storage device of crystalline silicon solar cell and film coating method |
| CN109659401B (en) * | 2019-01-09 | 2020-07-10 | 湖南红太阳光电科技有限公司 | Clean bench of high temperature equipment |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202196805U (en) * | 2011-09-08 | 2012-04-18 | 无锡德鑫太阳能电力有限公司 | Cart for bearing graphite boat in PECVD (plasma enhanced chemical vapor deposition) process |
| CN205784628U (en) * | 2016-05-17 | 2016-12-07 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of diffusion furnace working area chiller |
-
2017
- 2017-12-20 CN CN201711385255.4A patent/CN108315719B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202196805U (en) * | 2011-09-08 | 2012-04-18 | 无锡德鑫太阳能电力有限公司 | Cart for bearing graphite boat in PECVD (plasma enhanced chemical vapor deposition) process |
| CN205784628U (en) * | 2016-05-17 | 2016-12-07 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of diffusion furnace working area chiller |
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| CN108315719A (en) | 2018-07-24 |
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