CN111928592A - High-efficient drying system of slot type - Google Patents
High-efficient drying system of slot type Download PDFInfo
- Publication number
- CN111928592A CN111928592A CN202010825504.2A CN202010825504A CN111928592A CN 111928592 A CN111928592 A CN 111928592A CN 202010825504 A CN202010825504 A CN 202010825504A CN 111928592 A CN111928592 A CN 111928592A
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- CN
- China
- Prior art keywords
- air
- groove
- drying
- drying system
- uniform flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 title claims abstract description 35
- 238000010438 heat treatment Methods 0.000 claims abstract description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000002033 PVDF binder Substances 0.000 claims abstract description 6
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 5
- 230000003749 cleanliness Effects 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 abstract description 10
- 239000010703 silicon Substances 0.000 abstract description 10
- 235000012431 wafers Nutrition 0.000 description 5
- 206010010904 Convulsion Diseases 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 210000005056 cell body Anatomy 0.000 description 4
- 230000036461 convulsion Effects 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 206010024796 Logorrhoea Diseases 0.000 description 2
- 210000002421 cell wall Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
- F26B9/06—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/003—Supply-air or gas filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/06—Chambers, containers, or receptacles
- F26B25/14—Chambers, containers, receptacles of simple construction
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention discloses a groove type efficient drying system, which relates to the field of silicon wafer drying equipment, wherein a drying groove is made of PVDF (polyvinylidene fluoride), the drying groove is provided with a main groove and an auxiliary groove, the bottom of the auxiliary groove is provided with a uniform flow pipe, small holes are uniformly distributed on the inner wall of the uniform flow pipe, a heating device uniformly feeds heated air into the groove through the small holes, holes are uniformly distributed on two sides of a groove cover, so that humid air can be normally discharged, and the heating device is arranged outside the drying groove.
Description
Technical Field
The invention relates to the technical field of silicon wafer drying equipment, in particular to a groove type efficient drying system.
Background
In the preparation process of the crystalline silicon battery, the silicon wafer needs to be reacted with various chemicals in a groove type cleaning machine table and then dried, and the conventional drying system is poor in drying efficiency and easy to produce metal pollution. The prior art is that the stoving groove designs into the vice structure of operating of main tank cover, and the heating fluorescent tube is installed in both sides inside and outside groove intermediate layer, and the air forms the inner loop and heats through the fluorescent tube under the motor action, and stoving groove stainless steel spouts fluorine design, and the fluorescent tube is installed at the inslot, is close to the cell wall and uses yielding surface fluorine spraying thing also easily to drop for a long time, leads to metal contamination, and heating efficiency is low, and the energy consumption is high, inconvenient installation maintenance. Therefore, it is necessary to design an efficient drying system to solve the above problems.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and avoid pollution and influence on battery efficiency in order to improve the drying effect. The mode that the independent heating structure is arranged externally is adopted, and the air blower is combined to form a combined uniform flow plate by directly rushing air flow from bottom to top in the groove, so that the silicon wafer flower basket is fully dried.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a high-efficient drying system of slot type, including drying bath, air heater, the drying bath includes main tank, auxiliary tank, capping, the auxiliary tank sets up in the main tank, and auxiliary tank bottom is equipped with even flow tube, even flow tube inner wall evenly distributed aperture, the air after heating device will heat sends into the inslot through the aperture is even, capping both sides evenly distributed hole for humid air can normally discharge, air heater arranges the drying bath outside in.
According to the further technical scheme, the flow equalizing plate is arranged above the flow equalizing pipe, so that broken silicon wafers in the auxiliary groove are prevented from falling into the bottom of the groove, and the groove body is convenient to clean.
Further technical scheme, in the air-blower sent into air heating device from outside air suction, air-blower convulsions end, convulsions end connection high efficiency filter guaranteed the air cleanliness factor, and the filter screen is equipped with in the pump suction opening simultaneously, avoids debris such as granule to draw in the pump.
In a further technical scheme, the drying groove and the uniform flow pipe are preferably made of PVDF materials.
Compared with the prior art, the invention has the beneficial effects that:
the stoving groove adopts the PVDF material, air heating device arranges the stoving groove outside in, vice tank bottoms portion is equipped with even flow tube, even flow tube inner wall evenly distributed aperture, heating device sends into the inslot through the aperture is even after with the air after the heating, capping both sides evenly distributed hole, make humid air can normally discharge, even flow tube top is equipped with even flow plate, prevent that the garrulous silicon chip of vice inslot from falling into tank bottoms portion, the cell body clearance of being convenient for, above-mentioned design has improved traditional stoving groove and has adopted the stainless steel to spout fluorine design, the heating fluorescent tube is installed at the inslot, it also easily drops to be close to the easy deformation surface fluorine thing of cell wall long-time use, lead to metal pollution energy consumption height, the technical problem of inconvenient installation and maintenance.
Drawings
FIG. 1 is a schematic structural diagram of a slot-type efficient drying system according to the present invention;
fig. 2 is a schematic diagram of an internal structure of a slot-type efficient drying system provided by the invention.
In the figure: 1 groove cover, 2 flower baskets, 3 main grooves, 4 blowers, 5 air heating devices, 6 groove covers, 7 inner groove blowing holes, 8 uniform flow pipes, 10 auxiliary grooves and 11 uniform flow plates.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1;
referring to fig. 1-2, a high-efficient drying system of slot type, including drying bath, air heater, the drying bath includes main trough 3, auxiliary tank 10, capping 1, and the preferred PVDF material cell body that adopts of drying bath, air heater 5 is for being independent of the outside heating structure of cell body, and air-blower 4 takes in the air from the outside, send into in air heater 5, 4 convulsions ends of air-blower, convulsions trailing end connection filter guarantee the air cleanliness factor, and the pump suction inlet is equipped with a filter screen simultaneously, avoids debris suction pumps such as granule in the pump. Air-blower 4 sends the air after the heating into the inslot through even flow tube 8, the hollow tube of the preferred adoption PVDF material of even flow tube 8, hollow tube lateral wall evenly distributed aperture, aperture size are in 1~5mm within range, and the hole interval control is in 1~20mm within range, and the aperture is used for evenly sending the air after the heating into the inslot, and high-speed high temperature air current can be with the flower basket in the inslot and the water droplet on the silicon chip weathered fast. Holes are uniformly distributed on two sides of the drying groove cover 1, so that moist air can be normally discharged, and the whole drying system has a good drying effect on the flower basket and the silicon wafer;
even flow tube 8 top is equipped with even flow plate 11, even flow plate 11 is used for guaranteeing the even logical inslot of the hot-blast of effluvium on the one hand, and on the other hand has the filtering action and avoids garrulous silicon chip to fall into the tank bottom portion, has avoided the stoving in-process, and the hot-blast piece of effluvium is beaten the piece to silicon chip in the stoving, causes further piece, the cell body clearance of also being convenient for.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (4)
1. The utility model provides a high-efficient drying system of slot type, its characterized in that, including drying bath, air heater, the drying bath includes main tank, auxiliary tank, capping, the auxiliary tank sets up in the main tank, and auxiliary tank bottom is equipped with the uniform flow pipe, uniform flow pipe inner wall evenly distributed aperture, capping both sides evenly distributed hole for humid air can normally discharge, air heater arranges the drying bath outside in.
2. The groove type efficient drying system as claimed in claim 1, wherein a flow equalizing plate is arranged above the flow equalizing pipe to prevent broken silicon chips in the auxiliary groove from falling into the bottom of the groove, so that the groove body is convenient to clean.
3. The trough type efficient drying system of claim 1, wherein the air blower draws air from the outside and sends the air into the air heating device, the air suction end and the air suction tail end of the air blower are connected with the efficient filter to ensure air cleanliness, and meanwhile, the air suction opening of the air blower is provided with a filter screen to prevent particles from being sucked into the air suction pump.
4. The trough-type efficient drying system according to claim 1, wherein the drying trough and the uniform flow pipe are preferably made of PVDF.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010825504.2A CN111928592A (en) | 2020-08-17 | 2020-08-17 | High-efficient drying system of slot type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010825504.2A CN111928592A (en) | 2020-08-17 | 2020-08-17 | High-efficient drying system of slot type |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111928592A true CN111928592A (en) | 2020-11-13 |
Family
ID=73311111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010825504.2A Pending CN111928592A (en) | 2020-08-17 | 2020-08-17 | High-efficient drying system of slot type |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111928592A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114152040A (en) * | 2021-10-28 | 2022-03-08 | 苏州普伊特自动化系统有限公司 | Plastic inner container drying groove |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005241153A (en) * | 2004-02-27 | 2005-09-08 | Hitachi Zosen Corp | Unit for dryer and drying device |
| CN201607096U (en) * | 2010-01-15 | 2010-10-13 | 常州捷佳创精密机械有限公司 | Drying tank |
| CN206637959U (en) * | 2017-03-20 | 2017-11-14 | 东方日升（洛阳）新能源有限公司 | A kind of groove type etching drying unit for adjusting support plate lifting |
| US20180130676A1 (en) * | 2016-03-23 | 2018-05-10 | Changzhou S.C Exact Equipment Co., Ltd. | Groove-type drying structure |
| CN207456038U (en) * | 2017-09-08 | 2018-06-05 | 常州市杰洋精密机械有限公司 | Drying unit and its equipment of application |
| CN108955138A (en) * | 2018-07-25 | 2018-12-07 | 广汉市旭朗机械有限公司 | A kind of Chinese medicinal material drying equipment for drying |
| CN208998451U (en) * | 2018-10-29 | 2019-06-18 | 苏州阿特斯阳光电力科技有限公司 | A kind of drying unit |
| CN209379377U (en) * | 2018-10-12 | 2019-09-13 | 什邡市硝酸钾厂 | A kind of charging device of the recyclable waste material of Production of Potassium Nitrate |
| CN209386738U (en) * | 2018-11-19 | 2019-09-13 | 黄贵佳 | A kind of Internal Medicine-Oncology utensil automatic drier |
| CN209981186U (en) * | 2019-07-30 | 2020-01-21 | 江苏顺风新能源科技有限公司 | Universal turnover flower basket for solar cell silicon wafers |
| CN210952133U (en) * | 2019-11-20 | 2020-07-07 | 常州捷佳创精密机械有限公司 | Silicon wafer drying groove |
| CN212512168U (en) * | 2020-08-17 | 2021-02-09 | 无锡琨圣科技有限公司 | High-efficient drying system of slot type |
-
2020
- 2020-08-17 CN CN202010825504.2A patent/CN111928592A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005241153A (en) * | 2004-02-27 | 2005-09-08 | Hitachi Zosen Corp | Unit for dryer and drying device |
| CN201607096U (en) * | 2010-01-15 | 2010-10-13 | 常州捷佳创精密机械有限公司 | Drying tank |
| US20180130676A1 (en) * | 2016-03-23 | 2018-05-10 | Changzhou S.C Exact Equipment Co., Ltd. | Groove-type drying structure |
| CN206637959U (en) * | 2017-03-20 | 2017-11-14 | 东方日升（洛阳）新能源有限公司 | A kind of groove type etching drying unit for adjusting support plate lifting |
| CN207456038U (en) * | 2017-09-08 | 2018-06-05 | 常州市杰洋精密机械有限公司 | Drying unit and its equipment of application |
| CN108955138A (en) * | 2018-07-25 | 2018-12-07 | 广汉市旭朗机械有限公司 | A kind of Chinese medicinal material drying equipment for drying |
| CN209379377U (en) * | 2018-10-12 | 2019-09-13 | 什邡市硝酸钾厂 | A kind of charging device of the recyclable waste material of Production of Potassium Nitrate |
| CN208998451U (en) * | 2018-10-29 | 2019-06-18 | 苏州阿特斯阳光电力科技有限公司 | A kind of drying unit |
| CN209386738U (en) * | 2018-11-19 | 2019-09-13 | 黄贵佳 | A kind of Internal Medicine-Oncology utensil automatic drier |
| CN209981186U (en) * | 2019-07-30 | 2020-01-21 | 江苏顺风新能源科技有限公司 | Universal turnover flower basket for solar cell silicon wafers |
| CN210952133U (en) * | 2019-11-20 | 2020-07-07 | 常州捷佳创精密机械有限公司 | Silicon wafer drying groove |
| CN212512168U (en) * | 2020-08-17 | 2021-02-09 | 无锡琨圣科技有限公司 | High-efficient drying system of slot type |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114152040A (en) * | 2021-10-28 | 2022-03-08 | 苏州普伊特自动化系统有限公司 | Plastic inner container drying groove |
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| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| CB02 | Change of applicant information |
Address after: No.106 Xixian Road, Xinwu District, Wuxi City, Jiangsu Province Applicant after: Wuxi kunsheng Intelligent Equipment Co., Ltd Address before: No.106 Xixian Road, Xinwu District, Wuxi City, Jiangsu Province Applicant before: WUXI KUNSHENG TECHNOLOGY Co.,Ltd. |
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| CB02 | Change of applicant information | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |