CN111928592A - A trough type high-efficiency drying system - Google Patents

Abstract

The invention discloses a trough-type high-efficiency drying system, which relates to the field of silicon wafer drying equipment. The drying tank is made of PVDF material, the drying tank is provided with a main tank and an auxiliary tank, and the Small holes are evenly distributed on the inner wall of the flow pipe. The heating device sends the heated air into the tank evenly through the small holes. The holes are evenly distributed on both sides of the tank cover, so that the moist air can be discharged normally. The heating device is placed outside the drying tank. The design improves the traditional drying tank wall deformation due to long-term proximity to high-temperature lamps, and metal pollution caused by fluorine spray falling off. The drying system of the present invention has higher efficiency, lower energy consumption, convenient installation and maintenance, and better drying effect. Well, it can further shorten the drying time and increase the production capacity.

Description

A trough type high-efficiency drying system

technical field

The invention relates to the technical field of silicon wafer drying equipment, in particular to a trough-type high-efficiency drying system.

Background technique

In the preparation process of crystalline silicon cells, silicon wafers need to be reacted with various chemicals in a tank cleaning machine, and then dried. The current drying system has poor drying efficiency and is prone to metal pollution. The existing technology is that the drying tank is designed as the main tank and the auxiliary operation structure, the heating lamp tube is installed in the interlayer of the inner and outer tanks on both sides, the air forms an internal circulation under the action of the motor and is heated by the lamp tube, and the stainless steel of the drying tank is sprayed with fluorine. Design, the lamp tube is installed in the groove, and the fluorine spray on the easily deformed surface is easy to fall off when it is used near the groove wall for a long time, resulting in metal pollution, low heating efficiency, high energy consumption, and inconvenient installation and maintenance. Therefore, it is urgent to design an efficient drying system for the above problems.

SUMMARY OF THE INVENTION

The purpose of the present invention is to solve the shortcomings existing in the prior art, in order to improve the drying effect to avoid pollution and affect the battery efficiency. The independent heating structure is externally installed, and the blower is combined to form a downward-to-up airflow in the tank combined with a uniform flow plate, so as to fully dry the silicon wafer flower basket.

In order to achieve the above object, the present invention adopts the following technical solutions:

A tank-type high-efficiency drying system includes a drying tank and an air heating device. The drying tank includes a main tank, an auxiliary tank and a tank cover. The auxiliary tank is arranged in the main tank, and the bottom of the auxiliary tank is provided with a uniform Flow pipe, the inner wall of the equalizing pipe is evenly distributed with small holes, the heating device evenly sends the heated air into the groove through the small holes, and the holes are evenly distributed on both sides of the groove cover, so that the moist air can be discharged normally, The air heating device is placed outside the drying tank.

According to a further technical solution, a uniform flow plate is installed above the uniform flow pipe to prevent the broken silicon chips in the auxiliary tank from falling into the bottom of the tank, so as to facilitate the cleaning of the tank body.

In a further technical solution, the blower draws air from the outside and feeds it into the air heating device, and the exhaust end and exhaust end of the blower are connected to high-efficiency filters to ensure air cleanliness. into the pump.

In a further technical solution, the drying tank and the equalizing pipe are preferably made of PVDF material.

Compared with the prior art, the beneficial effects of the present invention:

The drying tank is made of PVDF material. The air heating device is placed outside the drying tank. The bottom of the auxiliary tank is provided with a flow pipe. The inner wall of the flow pipe is evenly distributed with small holes. The heating device sends the heated air into the tank evenly through the small holes. Inside, the holes are evenly distributed on both sides of the tank cover, so that the moist air can be discharged normally. The top of the flow pipe is equipped with a flow plate to prevent the broken silicon chips in the auxiliary tank from falling into the bottom of the tank, which is convenient for cleaning the tank body. The above design improves the traditional The drying tank is designed with stainless steel sprayed with fluorine, and the heating lamp is installed in the tank. The fluorine sprayed on the easily deformed surface near the tank wall for a long time is also easy to fall off, resulting in high metal pollution and high energy consumption, which is inconvenient for installation and maintenance.

Description of drawings

Fig. 1 is a kind of trough type high-efficiency drying system structure schematic diagram proposed by the present invention;

FIG. 2 is a schematic diagram of the internal structure of a trough-type high-efficiency drying system proposed by the present invention.

In the picture: 1 slot cover, 2 flower baskets, 3 main slot, 4 blower, 5 air heating device, 6 slot cover, 7 inner slot blowing holes, 8 equalizing pipes, 10 auxiliary tanks, 11 equalizing plates.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments.

Embodiment 1;

1-2, a tank-type high-efficiency drying system includes a drying tank and an air heating device. The drying tank includes a main tank 3, an auxiliary tank 10, and a tank cover 1. The drying tank preferably adopts PVDF The material tank body, the air heating device 5 is a heating structure independent of the outside of the tank body, the blower 4 draws air from the outside, and sends it into the air heating device 5, and the exhaust end and the exhaust end of the blower 4 are connected to the filter, To ensure air cleanliness, at the same time, a filter screen is installed at the air outlet of the pump to prevent particles and other debris from being drawn into the pump. The blower 4 sends the heated air into the groove through the equalizing pipe 8. The equalizing pipe 8 preferably adopts a hollow pipe made of PVDF material. The side walls of the hollow pipe are evenly distributed with small holes, and the size of the small holes is 1 to 5 mm. The hole spacing is controlled within the range of 1~20mm, the small holes are used to evenly send the heated air into the tank, and the high-speed and high-temperature airflow can quickly dry the flower baskets in the tank and the water droplets on the silicon wafer. Holes are evenly distributed on both sides of the drying tank cover 1, so that the moist air can be discharged normally, so that the entire drying system has a good drying effect on flower baskets and silicon wafers;

The equalizing plate 11 is installed above the equalizing pipe 8. On the one hand, the equalizing plate 11 is used to ensure that the bulged hot air is evenly passed into the tank, and on the other hand, it has a filtering effect to prevent the broken silicon chips from falling into the bottom of the tank, avoiding the During the drying process, the bulging hot air blows the debris to the silicon wafer in drying, causing further debris and facilitating the cleaning of the tank.

The above description is only a preferred embodiment of the present invention, but the protection scope of the present invention is not limited to this. The equivalent replacement or change of the inventive concept thereof shall be included within the protection scope of the present invention.

Claims (4)

1. a groove type high-efficiency drying system, is characterized in that, comprises drying groove, air heating device, and described drying groove comprises main groove, auxiliary groove, groove cover, and described auxiliary groove is arranged in main groove, The bottom of the auxiliary tank is provided with an equalizing pipe, the inner wall of the equalizing pipe is evenly distributed with small holes, and the two sides of the tank cover are evenly distributed with holes, so that the humid air can be discharged normally, and the air heating device is placed outside the drying tank. 2. A trough type high-efficiency drying system according to claim 1, characterized in that, a screed plate is installed above the screed pipe to prevent the broken silicon chips in the auxiliary tank from falling into the bottom of the trough, which is convenient for the trough body clean up. 3. A kind of trough type high-efficiency drying system according to claim 1 is characterized in that, the blower draws air from the outside and sends it into the air heating device, and the blower exhaust end and the exhaust end are connected to a high-efficiency filter to ensure air cleanliness , At the same time, the pump air outlet is equipped with a filter to prevent particulate matter from being drawn into the pump. 4. A trough-type high-efficiency drying system according to claim 1, characterized in that, the drying trough and the equalizing pipe are preferably made of PVDF material.

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