CN208998451U - A kind of drying unit - Google Patents
A kind of drying unit Download PDFInfo
- Publication number
- CN208998451U CN208998451U CN201821762913.7U CN201821762913U CN208998451U CN 208998451 U CN208998451 U CN 208998451U CN 201821762913 U CN201821762913 U CN 201821762913U CN 208998451 U CN208998451 U CN 208998451U
- Authority
- CN
- China
- Prior art keywords
- hollow plate
- groove body
- silicon wafer
- drying unit
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001035 drying Methods 0.000 title claims abstract description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 40
- 239000010703 silicon Substances 0.000 claims abstract description 40
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000002360 preparation method Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 2
- 235000008216 herbs Nutrition 0.000 description 7
- 210000002268 wool Anatomy 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model belongs to solar cell preparation technology, discloses a kind of for drying the drying unit of silicon wafer, comprising: groove body, the groove body have the accommodating chamber for accommodating silicon wafer to be dried；At least one hollow plate, the hollow plate are set to bottom in the groove body and can be connected to the blower outside the groove body, and the hollow plate is equipped with multiple horn-like air exhausting structures being connected to its inside；Multiple brackets, each bracket are set on the outlet air surface of the hollow plate, are used to support the gaily decorated basket, the gaily decorated basket is for placing silicon wafer to be dried, and the height of the bracket is higher than the height of the air exhausting structure.Air enters in groove body through the hollow plate of plate, and the outlet air surface of hollow plate can greatly promote the utilization rate into the intracorporal hot wind of slot, dries most of hot wind directly effectively to silicon wafer；Compared to the air outlet of circular hole, horn-like air exhausting structure can greatly promote the area of outlet air, be oven-dried silicon wafer in a short time, shorten the baking needed time.
Description
Technical field
The utility model relates to solar cell preparation technology more particularly to a kind of drying dresses for drying silicon wafer
It sets.
Background technique
Currently, the silicon wafer for making silicon solar cell has monocrystalline silicon and polysilicon, the preparation process of solar battery
In, silicon wafer needs successively by processes such as making herbs into wool, diffusion, etching, plated film and printings, and the first step for making battery is by silicon wafer
Making herbs into wool.Monocrystalline silicon substantially uses NaOH/KOH solution making herbs into wool, and the equipment of making herbs into wool is groove type machine；Polysilicon is currently to use HF/
HNO3Mixed solution making herbs into wool, using the equipment of groove type machine.It is well known that the next process of making herbs into wool is diffusion, i.e. PN
Preparation section is tied, and the silicon wafer for entering diffusing procedure must be finished off water stain, dry silicon wafer so the equipment of making herbs into wool need to have
Dry ability.
Using the equipment of groove type machine, it is provided with drying tank, for drying silicon wafer.Generally, as shown in Figure 1, drying
The bottom groove body 1' of slot is passed through three hot air pipe 2', is provided with small sircle hole 3' on hot air pipe 2', the gaily decorated basket equipped with silicon wafer is placed on branch
On frame 4', hot wind is entered in groove body 1' by circular hole 3', so that the silicon wafer in groove body 1' be made to be oven-dried within a certain period of time.The baking
The shortcomings that dry slot is that hot air pipe 2' is tubular structure, causes the hot wind directly blown on the silicon wafer in the gaily decorated basket few, blows into slot
Hot wind cannot be effectively used, and cause one basket silicon wafer of drying to take a long time, influence output.
Therefore, in the case where guaranteeing that silicon wafer is oven-dried, shorten drying time as far as possible, be industrialization to improve yield
Trend.
In view of the above shortcomings, the designer, is actively subject to research and innovation, to found a kind of new structural drying
Device makes it with more the utility value in industry.
Utility model content
The purpose of this utility model is that proposing a kind of drying unit, silicon wafer can be made to be oven-dried in a short time, significantly
Shorten the baking needed time, effectively promotion yield.
For this purpose, the utility model uses following technical scheme:
A kind of drying unit, comprising:
Groove body, the groove body have the accommodating chamber for accommodating silicon wafer to be dried；
At least one hollow plate, the hollow plate be set to the intracorporal bottom of the slot and can with outside the groove body
Blower connection, and the hollow plate is equipped with multiple horn-like air exhausting structures being connected to its inside；
Multiple brackets, each bracket are set on the outlet air surface of the hollow plate, are used to support the gaily decorated basket, and the gaily decorated basket is used
In placement silicon wafer to be dried, and the height of the bracket is higher than the height of the air exhausting structure.
Further, the heating member of heating air is equipped in the hollow plate.
Further, the hollow plate, which is connected with, passes through the groove body with its internal connecting tube being connected to, the connecting tube
Side wall connect with the air exhausting structure of the blower.
Further, the bracket is detachably connected with the hollow plate.
Further, the bracket includes connecting with the interconnecting piece of hollow plate threaded connection, with the interconnecting piece
Support portion.
Further, the end of the support portion is equipped with the step groove at gaily decorated basket edge described in clamping.
Further, the top of the groove body is equipped with the opening for being put into silicon wafer, and the opening is provided with cover board.
Further, the cover board is pivotally connected with the groove body.
Further, the groove body is equipped at least one exhaust outlet.
Further, bottom is equipped with the positioning groove for positioning the hollow plate in the groove body.
The utility model has the following beneficial effects: air enters in groove body through the hollow plate of plate, the outlet air surface of hollow plate can
The utilization rate into the intracorporal hot wind of slot is greatly promoted, dries most of hot wind directly effectively to silicon wafer；In addition, phase
Than the air outlet of circular hole, horn-like air exhausting structure can greatly promote the area of outlet air, increase the hot wind area being blown out, make
The hot wind acted on silicon wafer is more, so that silicon wafer be made to be oven-dried in a short time, greatly shortens the baking needed time, effectively mentions
Rise yield.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of drying unit in the prior art；
Fig. 2 is the structural schematic diagram for the drying unit that specific embodiment of the present invention provides；
Fig. 3 is the structural schematic diagram of the hollow plate in the drying unit that specific embodiment of the present invention provides；
Fig. 4 is the structural schematic diagram of the bracket in the drying unit that specific embodiment of the present invention provides.
In figure:
1'- groove body, 2'- hot air pipe, 3'- circular hole, 4'- bracket；
1- groove body, 11- cover board, 12- exhaust outlet, 2- hollow plate, 21- air exhausting structure, 3- bracket, 31- interconnecting piece, 32- branch
Support part, 33- step groove, 4- connecting tube.
Specific embodiment
Further illustrate the technical solution of the utility model below with reference to the accompanying drawings and specific embodiments.
As shown in Fig. 2 to 3, the drying unit of the utility model includes groove body 1, at least one hollow plate 2 and multiple brackets
3.Wherein, groove body 1 has the accommodating chamber for accommodating silicon wafer to be dried；Hollow plate 2 is set to the bottom in groove body 1 and can be with groove body
Blower connection outside 1, and hollow plate 2 is equipped with multiple horn-like air exhausting structures 21 being connected to its inside, air exhausting structure 21
Angle of dehiscing can be for 100 °~170 °；Each bracket 3 is set on the outlet air surface of hollow plate 2, is used to support the gaily decorated basket, and the gaily decorated basket is used for
Silicon wafer to be dried is placed, and the height of bracket 3 is higher than the height of air exhausting structure 21.In the present embodiment, bottom is equipped in groove body 1
The positioning groove of hollow plate 2 is positioned, to fix hollow plate 2, and bottom placed two hollow plates 2 in groove body 1, can
The silicon wafer in two gailys decorated basket is dried simultaneously, can be reduced groove body 1 in the case where matching the process for etching time, be saved cost.
In order to improve drying efficiency, the utility model is equipped with the heating member of heating air in hollow plate 2.Utilize heating member
The air entered in hollow plate 2 is heated, so as to be dried using hot wind to silicon wafer.Alternatively, it is also possible to not
Heating member is set in hollow plate 2, air is heated in outside and is blown into hollow plate 2 again.External hot wind enters hollow plate 2
In interior process, there can be heat exchange, the temperature of hot wind can reduce.Therefore, preferably, heating member is arranged
In hollow plate 2 preferably.
The utility model uses 2 outlet air of hollow plate, and the outlet air surface of hollow plate 2 can be greatly promoted into the hot wind in groove body 1
Utilization rate, dry most of hot wind directly effectively to silicon wafer；In addition, the air outlet of circular hole is compared, it is horn-like
Air exhausting structure 21 can greatly promote the area of outlet air, increase the hot wind area being blown out, make to act on hot wind on silicon wafer more
It is more, so that silicon wafer be made to be oven-dried in a short time, the baking needed time is greatly shortened, effectively promotion yield.
Specifically, in order to blow air into hollow plate 2, the connection of hollow plate 2 one is connected to by the utility model with its inside
Connecting tube 4, connecting tube 4 pass through groove body 1 side wall and blower air exhausting structure connect.
Bracket 3 in the utility model is for supporting the gaily decorated basket, and in order to facilitate the installation of bracket 3, the utility model will
Bracket 3 is detachably connected with hollow plate 2.Specifically, bracket 3 includes the interconnecting piece 31 and interconnecting piece being threadedly coupled with hollow plate 2
The support portion 32 of 31 connections.
In order to enable bracket 3 steadily to support the gaily decorated basket, the utility model is equipped with the clamping gaily decorated basket in the end of support portion 32
The step groove 33 at edge.The bottom of the gaily decorated basket is stuck on each step groove 33, the gaily decorated basket is can avoid and shakes, convenient for the silicon wafer in the gaily decorated basket
Effectively it is dried.
The top of the groove body 1 of the utility model is equipped with the opening for being put into silicon wafer, and opening is provided with cover board 11.It is equipped with
The gaily decorated basket of silicon wafer enters inside groove body 1 from opening, and cover board 11 is covered, and accommodates so as to form a sealing inside groove body 1
Chamber.In order to facilitate opening cover board 11 or closing cover board 11, cover board 11 and groove body 1 are pivotally connected by the utility model.
Since when drying silicon wafer, cover board 11 closes, for the hot-air that circulates, the utility model is set on groove body 1
There is at least one exhaust outlet 12, and exhaust outlet 12 is close to the top of groove body 1, so that hot wind flows out from bottom to top.
To sum up, the drying unit of the utility model can be such that silicon wafer is oven-dried in a short time, substantially reduce drying institute
It takes time, effectively improves yield.
Technical principle of the utility model has been described above with reference to specific embodiments.These descriptions are intended merely to explain this reality
With novel principle, and it cannot be construed to the limitation to scope of protection of the utility model in any way.Based on the explanation herein,
Those skilled in the art, which does not need to pay for creative labor, can associate with other specific implementation modes of this utility model,
These modes are fallen within the protection scope of the utility model.
Claims (10)
1. a kind of drying unit characterized by comprising
Groove body (1), the groove body (1) have the accommodating chamber for accommodating silicon wafer to be dried；
At least one hollow plate (2), the hollow plate (2) are set to the interior bottom of the groove body (1) and can be with the groove body (1)
External blower connection, and the hollow plate (2) is equipped with multiple horn-like air exhausting structures (21) being connected to its inside；
Multiple brackets (3), each bracket (3) is set on the outlet air surface of the hollow plate (2), described to be used to support the gaily decorated basket,
The gaily decorated basket is for placing silicon wafer to be dried, and the height of the bracket (3) is higher than the height of the air exhausting structure (21).
2. drying unit according to claim 1, which is characterized in that be equipped with adding for heating air in the hollow plate (2)
Warmware.
3. drying unit according to claim 1 or 2, which is characterized in that the hollow plate (2) is connected with to be connected with inside it
Logical connecting tube (4), the side wall that the connecting tube (4) passes through the groove body (1) are connect with the air exhausting structure of the blower.
4. drying unit according to claim 1, which is characterized in that the bracket (3) and the hollow plate (2) are detachable
Connection.
5. drying unit according to claim 4, which is characterized in that the bracket (3) includes and the hollow plate (2) spiral shell
The interconnecting piece (31) of line connection, the support portion (32) being connect with the interconnecting piece (31).
6. drying unit according to claim 5, which is characterized in that the end of the support portion (32) is equipped with described in clamping
The step groove (33) at gaily decorated basket edge.
7. drying unit according to claim 1, which is characterized in that the top of the groove body (1) is equipped with for being put into silicon
The opening of piece, the opening are provided with cover board (11).
8. drying unit according to claim 7, which is characterized in that the cover board (11) and the groove body (1) pivot and connects
It connects.
9. drying unit according to claim 7, which is characterized in that the groove body (1) is equipped at least one exhaust outlet
(12)。
10. drying unit according to claim 1, which is characterized in that the interior bottom of the groove body (1), which is equipped with, to be positioned in described
The positioning groove of hollow plate (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821762913.7U CN208998451U (en) | 2018-10-29 | 2018-10-29 | A kind of drying unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821762913.7U CN208998451U (en) | 2018-10-29 | 2018-10-29 | A kind of drying unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208998451U true CN208998451U (en) | 2019-06-18 |
Family
ID=66805710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821762913.7U Expired - Fee Related CN208998451U (en) | 2018-10-29 | 2018-10-29 | A kind of drying unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208998451U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111928592A (en) * | 2020-08-17 | 2020-11-13 | 无锡琨圣科技有限公司 | High-efficient drying system of slot type |
| CN112657809A (en) * | 2020-12-18 | 2021-04-16 | 喜临门酒店家具有限公司 | Wooden furniture coating method considering environmental protection and economy |
-
2018
- 2018-10-29 CN CN201821762913.7U patent/CN208998451U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111928592A (en) * | 2020-08-17 | 2020-11-13 | 无锡琨圣科技有限公司 | High-efficient drying system of slot type |
| CN112657809A (en) * | 2020-12-18 | 2021-04-16 | 喜临门酒店家具有限公司 | Wooden furniture coating method considering environmental protection and economy |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee after: CSI Cells Co.,Ltd. Patentee after: Atlas sunshine Power Group Co.,Ltd. Address before: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee before: CSI Cells Co.,Ltd. Patentee before: CSI SOLAR POWER GROUP Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190618 Termination date: 20211029 |