JP4151778B2 - Groove surface shape measuring apparatus, groove surface shape measuring method and program - Google Patents

Description

【００５７】
【数２】

【００５８】
ここで、上記数式（１）と数式（２）とを加算し、スロットダイ１１の設置時に生じる傾斜成分を適宜の数値演算等によって取り除くと、下記数式（３）に示すように、駆動装置１５の駆動に係るＺ方向運動の真直度誤差ｅ（ｘ）を補正した後の溝幅変化量Ｄ（ｘ）を得ることができる。
【００５９】
【数３】

【００６０】
ここで、上述したステップＳ０１〜ステップＳ０５の処理を繰り返すことによって、Ｙ方向における所定位置ｙ_ｋに対して、Ｘ方向の複数の位置ｘ_ｎ（ｎ＝１，２，…）における溝幅変化量Ｄ（ｘ_ｎ，ｙ_ｋ）が算出され、上述したステップＳ０６〜ステップＳ１０の処理を繰り返すことによって、Ｘ方向における所定位置ｘ_ｊに対して、Ｙ方向の複数の位置ｙ_ｎ（ｎ＝１，２，…）における溝幅変化量Ｄ（ｘ_ｊ，ｙ_ｎ）が算出される。
ここで、測定位置が同等となる位置、つまり（ｘ_ｎ，ｙ_ｋ）＝（ｘ_ｊ，ｙ_ｎ）となる位置にて、溝幅変化量Ｄ（ｘ_ｎ，ｙ_ｋ）と溝幅変化量Ｄ（ｘ_ｊ，ｙ_ｎ）とが等しくなると設定して、いわばＸ方向における溝幅変化量Ｄ（ｘ_ｎ，ｙ）とＹ方向における溝幅変化量Ｄ（ｘ，ｙ_ｎ）とを較正することによって、溝部２２内のＸＹ平面内における適宜の位置（ｘ，ｙ）での溝幅変化量Ｄ（ｘ，ｙ）を算出することができる。
【００６１】
以下に、平面度を測定する処理について説明する。
先ず、図５に示すステップＳ１１においては、第１および第３変位計１２ａ，１２ｃと溝部２２との相対位置をＸＹ平面内における所定位置（ｘ_ｊ，ｙ_ｋ）に設定する。
次に、ステップＳ１２においては、スロットダイ１１を駆動装置１５によりＸ方向に移動させ、各変位計１２ａ，１２ｃにより一方の対向面２２Ａとの間の距離Ｄ_１（ｘ_ｎ，ｙ_ｋ），Ｄ_３（ｘ_ｎ，ｙ_ｋ）の検出を開始する。
次に、ステップＳ１３においては、第１変位計１２ａから出力される距離Ｄ_１（ｘ_ｎ，ｙ_ｋ）と、第１変位計１２ａからＸ方向に所定距離Ｌ_ｘだけずれた位置に配置された第３変位計１２ｃから出力される距離Ｄ_３（ｘ_ｎ，ｙ_ｋ）とに基づき、スロットダイ１１が駆動装置１５によりＸ方向に移動させられる際に、変位計固定部材２６と２つの対向面２２Ａ，２２ＢとのＺ方向における相対位置が変動することに起因して生じる誤差、つまり駆動装置１５の駆動に係るＺ方向運動の真直度誤差ｅ（ｘ_ｎ）を補正した後の真直度ｆ_Ａ（ｘ_ｎ，ｙ_ｋ）を算出する。
【００６２】
次に、ステップＳ１４においては、ステップＳ１３にて算出した真直度ｆ_Ａ（ｘ_ｎ，ｙ_ｋ）と同等のＹ方向位置ｙ_ｋでの上述したステップＳ０３にて算出した溝幅変化量Ｄ（ｘ_ｎ，ｙ_ｋ）を取得する。
次に、ステップＳ１５においては、Ｙ方向の所定位置ｙ_ｋにおけるＸ方向での、一方の対向面２２Ａに対する真直度ｆ_Ａ（ｘ_ｎ，ｙ_ｋ）と、溝幅変化量Ｄ（ｘ_ｎ，ｙ_ｋ）とに基づき、他方の対向面２２Ｂに対する真直度ｆ_Ｂ（ｘ_ｎ，ｙ_ｋ）を算出する。
そして、ステップＳ１６においては、適宜のＹ方向位置でのＸ方向における真直度ｆ_Ａ（ｘ_ｎ，ｙ），ｆ_Ｂ（ｘ_ｎ，ｙ）の測定終了が指示されているか否かを判定する。
この判定結果が「ＮＯ」の場合には、ステップＳ１７に進む。
一方、この判定結果が「ＹＥＳ」の場合には、ステップＳ１８に進む。
そして、ステップＳ１７においては、第１および第３変位計１２ａ，１２ｃと溝部２２との相対位置をＹ方向に所定位置だけ変更し、上述したステップＳ１２に戻る。
【００６３】
また、ステップＳ１８においては、第１および第４変位計１２ａ，１２ｄと溝部２２との相対位置をＸＹ平面内における所定位置（ｘ_ｊ，ｙ_ｋ）に設定する。次に、ステップＳ１９においては、スロットダイ１１を駆動装置１５によりＹ方向に移動させ、各変位計１２ａ，１２ｄにより一方の対向面２２Ａとの間の距離Ｄ_１（ｘ_ｊ，ｙ_ｎ），Ｄ_４（ｘ_ｊ，ｙ_ｎ）の検出を開始する。
次に、ステップＳ２０においては、第１変位計１２ａから出力される距離Ｄ_１（ｘ_ｊ，ｙ_ｎ）と、第１変位計１２ａからＹ方向に所定距離Ｌ_ｙだけずれた位置に配置された第４変位計１２ｄから出力される距離Ｄ_４（ｘ_ｊ，ｙ_ｎ）とに基づき、スロットダイ１１が駆動装置１５によりＹ方向に移動させられる際に、変位計固定部材２６と２つの対向面２２Ａ，２２ＢとのＺ方向における相対位置が変動することに起因して生じる誤差、つまり駆動装置１５の駆動に係るＺ方向運動の真直度誤差ｅ（ｙ_ｎ）を補正した後の真直度ｆ_Ａ（ｘ_ｊ，ｙ_ｎ）を算出する。
【００６４】
次に、ステップＳ２１においては、ステップＳ２０にて算出した真直度ｆ_Ａ（ｘ_ｊ，ｙ_ｎ）と同等のＸ方向位置ｘ_ｊでの上述したステップＳ０８にて算出した溝幅変化量Ｄ（ｘ_ｊ，ｙ_ｎ）を取得する。
次に、ステップＳ２２においては、Ｘ方向の所定位置ｘ_ｊにおけるＹ方向での、一方の対向面２２Ａに対する真直度ｆ_Ａ（ｘ_ｊ，ｙ_ｎ）と、溝幅変化量Ｄ（ｘ_ｊ，ｙ_ｎ）とに基づき、他方の対向面２２Ｂに対する真直度ｆ_Ｂ（ｘ_ｊ，ｙ_ｎ）を算出する。
そして、ステップＳ２３においては、適宜のＸ方向位置でのＹ方向における真直度ｆ_Ａ（ｘ，ｙ_ｎ），ｆ_Ｂ（ｘ，ｙ_ｎ）の測定終了が指示されているか否かを判定する。
この判定結果が「ＮＯ」の場合には、ステップＳ２４に進む。
一方、この判定結果が「ＹＥＳ」の場合には、ステップＳ２５に進む。
【００６５】
そして、ステップＳ２４においては、第１および第４変位計１２ａ，１２ｄと溝部２２との相対位置をＸ方向に所定位置だけ変更し、上述したステップＳ１９に戻る。
また、ステップＳ２５においては、適宜のＹ方向位置でのＸ方向における真直度ｆ_Ａ（ｘ_ｎ，ｙ），ｆ_Ｂ（ｘ_ｎ，ｙ）と、適宜のＸ方向位置でのＹ方向における真直度ｆ_Ａ（ｘ，ｙ_ｎ），ｆ_Ｂ（ｘ，ｙ_ｎ）とに基づき、溝部２２内のＸＹ平面内における適宜の位置（ｘ，ｙ）での各対向面２２Ａ，２２Ｂのうねり等の平面度を算出し、一連の処理を終了する。
【００６６】
すなわち、上述したステップＳ１１〜ステップＳ１７の処理においては、例えば図６に示すように、第１および第３変位計１２ａ，１２ｃから出力される各変位データにより、適宜のＹ方向位置でのＸ方向における一方の対向面２２Ａの真直度ｆ_Ａ（ｘ_ｎ，ｙ）を算出する。そして、この真直度ｆ_Ａ（ｘ_ｎ，ｙ）と、第１および第２変位計１２ａ，１２ｂから出力される各変位データに基づき算出した溝幅変化量Ｄ（ｘ_ｎ，ｙ）とを加算して、適宜のＹ方向位置でのＸ方向における他方の対向面２２Ｂの真直度ｆ_Ｂ（ｘ_ｎ，ｙ）を算出する。
【００６７】
ここで、Ｘ方向における一方の対向面２２Ａの真直度ｆ_Ａ（ｘ_ｎ，ｙ）は、例えば位相差法により算出される。なお、下記数式（４）〜数式（７）においては、ｙ座標の記載を省略する。
例えば、第１変位計１２ａから出力される距離Ｄ_１（ｘ_ｎ）は、下記数式（４）に示すように、Ｘ方向における適宜の位置ｘ_ｎでの第１変位計１２ａと一方の対向面２２Ａとの間の距離ｇ_１（ｘ_ｎ）に、スロットダイ１１がＸ方向に移動させられる際にＺ方向距離が変動することに起因して生じるＺ方向運動の真直度誤差ｅ（ｘ_ｎ）を加算して得た値として設定される。
【００６８】
【数４】

【００６９】
また、第３変位計１２ｃから出力される距離Ｄ_３（ｘ_ｎ）は、例えば下記数式（５）に示すように、Ｘ方向における適宜の位置ｘ_ｎでの第３変位計１２ｃと一方の対向面２２Ａとの間の距離ｇ_３（ｘ_ｎ）に、スロットダイ１１がＸ方向に移動させられる際にＺ方向距離が変動することに起因して生じるＺ方向運動の真直度誤差ｅ（ｘ_ｎ）を加算して得た値として設定され、さらに、第１変位計１２ａおよび第３変位計１２ｃがＸ方向に沿って配置されていることから、距離ｇ_３（ｘ_ｎ）は、Ｘ方向における適宜の位置ｘ_ｎから所定距離Ｌ_ｘだけ減算して得た位置での第１変位計１２ａと一方の対向面２２Ａとの間の距離ｇ_１（ｘ_ｎ―Ｌ_ｘ）と同等である。
【００７０】
【数５】

【００７１】
ここで、上記数式（４）と、上記数式（５）との差分においては、運動の真直度誤差ｅ（ｘ_ｎ）を除去することができ、下記数式（６）に示すように、この差分を所定距離Ｌ_ｘで除して得た差分変化ΔＤ_Ａ（ｘ_ｎ）は、Ｚ方向運動の真直度誤差ｅ（ｘ_ｎ）を補正した後の第１変位計１２ａと一方の対向面２２Ａとの間の距離、つまり真直度ｆ_Ａ（ｘ_ｎ）の１回微分として近似することができる。
【００７２】
【数６】

【００７３】
従って、上記数式（６）を順次積分することによって、下記数式（７）に示すように、駆動装置１５の駆動に係る誤差を取り除いた真直度ｆ_Ａ（ｘ_ｎ）を算出することができる。
なお、溝部２２のＸ方向における適宜の位置ｘ_ｎ（ｎは任意の自然数）は、各変位データが検出された位置を示すものであり、例えば今回の検出での位置ｘ_ｎに対して、位置ｘ_ｎ−１は前回の検出での位置となる。
【００７４】
【数７】

【００７５】
同様にして、上述したステップＳ１８〜ステップＳ２４の処理においては、例えば図７に示すように、第１および第４変位計１２ａ，１２ｄから出力される各変位データにより、適宜のＸ方向位置でのＹ方向における一方の対向面２２Ａの真直度ｆ_Ａ（ｘ，ｙ_ｎ）を算出する。そして、この真直度ｆ_Ａ（ｘ，ｙ_ｎ）と、第１および第２変位計１２ａ，１２ｂから出力される各変位データに基づき算出した溝幅変化量Ｄ（ｘ，ｙ_ｎ）とを加算して、適宜のＸ方向位置でのＹ方向における他方の対向面２２Ｂの真直度ｆ_Ｂ（ｘ，ｙ_ｎ）を算出する。
【００７６】
この場合、Ｘ方向での処理と同様にして、例えば位相差法によれば、下記数式（８）に示すように、一方の対向面２２Ａに対するＹ方向の差分変化ΔＤ_Ａ（ｙ_ｎ）は、Ｙ方向における適宜の位置ｙ_ｎでの第１変位計１２ａと一方の対向面２２Ａとの間の距離ｇ_１（ｙ_ｎ）と、Ｙ方向における適宜の位置ｙ_ｎでの第４変位計１２ｄと一方の対向面２２Ａとの間の距離ｇ_４（ｙ_ｎ）、つまりＹ方向における適宜の位置ｙ_ｎから所定距離Ｌ_ｙだけ減算して得た位置での第１変位計１２ａと一方の対向面２２Ａとの間の距離ｇ_１（ｙ_ｎ―Ｌ_ｙ）との差分を、所定距離Ｌ_ｙで除して得た値となる。
【００７７】
【数８】

【００７８】
そして、上記数式（８）を順次積分することによって、下記数式（９）に示すように、駆動装置１５の駆動に係る誤差を取り除いた真直度ｆ_Ａ（ｙ_ｎ）を算出することができる。
なお、上記数式（８）および下記数式（９）において、ｘ座標の記載を省略した。また、溝部２２のＹ方向における適宜の位置ｙ_ｎ（ｎは任意の自然数）は、各変位データが検出された位置を示すものであり、例えば今回の検出での位置ｙ_ｎに対して、位置ｙ_ｎ−１は前回の検出での位置となる。
【００７９】
【数９】

【００８０】
そして、上述したステップＳ１１〜ステップＳ１７及びの処理を繰り返すことによって、Ｙ方向における所定位置ｙ_ｋに対して、Ｘ方向の複数の位置ｘ_ｎ（ｎ＝１，２，…）における２つの対向面２２Ａ，２２Ｂの各真直度ｆ_Ａ（ｘ_ｎ，ｙ_ｋ），ｆ_Ｂ（ｘ_ｎ，ｙ_ｋ）が算出され、上述したステップＳ１８〜ステップＳ２４の処理を繰り返すことによって、Ｘ方向における所定位置ｘ_ｊに対して、Ｙ方向の複数の位置ｙ_ｎ（ｎ＝１，２，…）における２つの対向面２２Ａ，２２Ｂの各真直度ｆ_Ａ（ｘ_ｊ，ｙ_ｎ），ｆ_Ｂ（ｘ_ｊ，ｙ_ｎ）が算出される。
ここで、例えば図８に示すように、測定位置が同等となる位置、つまり（ｘ_ｎ，ｙ_ｋ）＝（ｘ_ｊ，ｙ_ｎ）となる位置にて、真直度ｆ_Ａ（ｘ_ｎ，ｙ_ｋ）と真直度ｆ_Ａ（ｘ_ｊ，ｙ_ｎ）、および、真直度ｆ_Ｂ（ｘ_ｎ，ｙ_ｋ）と真直度ｆ_Ｂ（ｘ_ｊ，ｙ_ｎ）が等しくなると設定して、いわばＸ方向における各真直度ｆ_Ａ（ｘ_ｎ，ｙ_ｋ），ｆ_Ｂ（ｘ_ｎ，ｙ_ｋ）とＹ方向における各真直度ｆ_Ａ（ｘ_ｊ，ｙ_ｎ），ｆ_Ｂ（ｘ_ｊ，ｙ_ｎ）とを較正することによって、溝部２２内のＸＹ平面内における適宜の位置（ｘ，ｙ）での各真直度ｆ_Ａ（ｘ，ｙ），ｆ_Ｂ（ｘ，ｙ）を算出することができる。
そして、これらの適宜の位置（ｘ，ｙ）での各真直度ｆ_Ａ（ｘ，ｙ），ｆ_Ｂ（ｘ，ｙ）により、各対向面２２Ａ，２２Ｂのうねり等の平面度を算出することができる。
【００８１】
また、スロットダイ１１が駆動装置１５により移動させられる際に、変位計固定部材２６が対向面２２Ａ，２２Ｂに対して傾斜した場合には、この傾斜成分を、例えばオートコリメータ（図示略）等により測定し、この測定結果を考慮して真直度を算出する。
例えば図９に示すように、変位計固定部材２６が第１変位計１２ａを支点として適宜の傾斜角ｅ_ｐ（ｘ_ｎ）だけ対向面２２Ａ，２２Ｂに対して傾斜した場合には、第１変位計１２ａから出力される距離Ｄ_１｀（ｘ）および第３変位計１２ｃから出力される距離Ｄ_３｀（ｘ）は、例えば下記数式（１０）及び下記数式（１１）に示すように記述される。なお、Ｃは任意の定数である。また、下記数式（１０）〜数式（１３）においては、ｙ座標の記載を省略する。
【００８２】
【数１０】

【００８３】
【数１１】

【００８４】
傾斜角ｅ_ｐ（ｘ_ｎ）が無視できるほど十分に小さい場合、あるいはオートコリメータ等で測定することによって上記数式（１１）における距離Ｄ_３｀（ｘ）から傾斜角ｅ_ｐ（ｘ_ｎ）に係る項を消去した場合、下記数式（１２）に示すように、上記数式（１０）と上記数式（１１）との差分を所定距離Ｌ_ｘで除して得た差分変化ΔＤ_Ａ｀（ｘ_ｎ）は、真直度ｆ_Ａ（ｘ_ｎ）の１回微分として近似することができ、下記数式（１２）を順次積分することによって、下記数式（１３）に示すように、駆動装置１５の駆動に係る運動の真直度誤差および運動の傾斜成分を取り除いたＸ方向における真直度ｆ_Ａ（ｘ_ｎ）を算出することができる。
【００８５】
【数１２】

【００８６】
【数１３】

【００８７】
また、Ｘ方向での処理と同様にして、例えば下記数式（１４）に示すＹ方向の差分変化ΔＤ_Ａ｀（ｙ_ｎ）を順次積分することによって、下記数式（１５）に示すように、駆動装置１５の駆動に係る運動の真直度誤差および運動の傾斜成分を取り除いたＹ方向における真直度ｆ_Ａ（ｙ_ｎ）を算出することができる。なお、下記数式（１４）および下記数式（１５）において、ｘ座標の記載を省略した。
【００８８】
【数１４】

【００８９】
【数１５】

【００９０】
以上説明したように、本実施の形態に係る溝面形状測定装置１０および溝面形状測定方法によれば、駆動装置１５によりスロットダイ１１を各変位計１２ａ，…，１２ｄに対してＸ方向またはＹ方向に一度だけ相対移動させるだけで、駆動装置１５の駆動に係るＺ方向運動の真直度誤差ｅを補正した後の、Ｘ方向またはＹ方向における溝幅変化量Ｄと共に、一方の対向面２２Ａに対するＸ方向またはＹ方向の真直度ｆ_Ａを容易かつ精度良く測定することができる。
さらに、Ｘ方向またはＹ方向における溝幅変化量Ｄと、一方の対向面２２Ａに対するＸ方向またはＹ方向の真直度ｆ_Ａとに基づき、駆動装置１５の駆動に係るＺ方向運動の真直度誤差ｅを補正した後の、他方の対向面２２Ｂに対するＸ方向またはＹ方向の真直度ｆ_Ｂを容易かつ精度良く算出することができる。
さらに、駆動装置１５により、スロットダイ１１と各変位計１２ａ，…，１２ｄとの相対移動を、Ｘ方向またはＹ方向の複数の異なる位置で実行することによって、溝部２２内のＸＹ平面内における適宜の位置（ｘ，ｙ）での各真直度ｆ_Ａ（ｘ，ｙ），ｆ_Ｂ（ｘ，ｙ）を算出することができ、各対向面２２Ａ，２２Ｂのうねり等の平面度を容易かつ精度良く算出することができる。
【００９１】
なお、上述した本実施の形態においては、駆動装置１５によってスロットダイ１１を移動させるとしたが、これに限定されず、各変位計１２ａ，…，１２ｄをＸ方向およびＹ方向に移動させてもよい。
【００９２】
なお、上述した本実施の形態においては、適宜のＸ方向位置でのＹ方向における真直度ｆ_Ａ（ｘ，ｙ_ｎ）を測定する際に、第１変位計１２ａと、第１変位計１２ａからＹ方向に所定距離Ｌ_ｙだけずれた位置に配置された第４変位計１２ｄとから出力される変位データに基づき、駆動装置１５の駆動に係るＺ方向運動の真直度誤差ｅ（ｙ_ｎ）を補正した後の真直度ｆ_Ａ（ｘ，ｙ_ｎ）を算出するとしたが、これに限定されず、例えば反転法により、第１変位計１２ａと、第２変位計１２ｂとから出力される変位データに基づき、駆動装置１５の駆動に係るＺ方向運動の真直度誤差ｅ（ｙ_ｎ）を補正した後の真直度ｆ_Ａ（ｘ，ｙ_ｎ）を算出してもよい。
【００９３】
この反転法では、例えば図１０に示すように、先ず、第１の測定として、例えば第１変位計１２ａとスロットダイ１１の一方の対向面２２Ａとが対向配置された状態にて、Ｘ方向の所定位置ｘ_ｊにおいてスロットダイ１１を駆動装置１５によりＹ方向に移動させ、第１変位計１２ａにより、Ｙ方向の適宜の位置ｙにおける第１変位計１２ａと一方の対向面２２Ａとの間の距離Ｄ_１（ｙ）を検出する。ここで、第１変位計１２ａから出力される距離Ｄ_１（ｘ）は、例えば下記数式（１６）に示すように、Ｙ方向における適宜の位置ｙでの第１変位計１２ａと一方の対向面２２Ａとの間の距離ｇ_１（ｙ）に、スロットダイ１１がＹ方向に移動させられる際にＺ方向距離が変動することに起因して生じるＺ方向運動の真直度誤差ｅ（ｙ）とを加算して得た値として設定されている。
【００９４】
【数１６】

【００９５】
次に、第２の測定として、変位計固定部材２６および各変位計１２，１２ｂの位置は不変とし、例えば第２変位計１２ｂとスロットダイ１１の一方の対向面２２Ａとが対向配置されるように、例えば駆動装置１５等によりスロットダイ１１をＸＺ平面内にて反転移動させ、Ｘ方向の所定位置ｘ_ｊにおいてスロットダイ１１を駆動装置１５によりＹ方向に移動させ、第２変位計１２ｂにより、Ｙ方向の適宜の位置ｙにおける第２変位計１２ｂと一方の対向面２２Ａとの間の距離Ｄ_２（ｙ）を検出する。
なお、スロットダイ１１の反転移動の前後において、第１の測定での第１変位計１２ａと一方の対向面２２Ａとの間の距離ｇ_１（ｙ）と、第２変位計１２ｂと一方の対向面２２Ａとの間の距離ｇ_２（ｙ）とが同等になるように設定する。
ここで、第１の測定に比べて、第２変位計１２ｂと一方の対向面２２Ａとの間の距離ｇ_２（ｙ）に対するＺ方向運動の真直度誤差ｅ（ｙ）の寄与は逆方向となるため、第２変位計１２ｂから出力される距離Ｄ_２（ｘ）は、下記数式（１７）に示すように、Ｙ方向における適宜の位置ｙでの第２変位計１２ｂと一方の対向面２２Ａとの間の距離ｇ_２（ｙ）から、スロットダイ１１がＹ方向に移動させられる際にＺ方向距離が変動することに起因して生じるＺ方向運動の真直度誤差ｅ（ｙ）を減算して得た値として設定される。
【００９６】
【数１７】

【００９７】
従って、上記数式（１６）と上記数式（１７）とを加算することによって、例えば下記数式（１８）に示すように、駆動装置１５の駆動に係るＺ方向運動の真直度誤差ｅ（ｙ）を消去することができる。
そして、この数式（１８）から、下記数式（１９）に示すように、Ｚ方向運動の真直度誤差ｅ（ｙ）を補正した後の第１変位計１２ａと一方の対向面２２Ａとの間の距離ｇ_１（ｙ）、つまり一方の対向面２２Ａに対するＹ方向の真直度ｆ_Ａ（ｙ）を得ることができる。
この場合、Ｙ方向に所定距離Ｌ_ｙだけ離間させて複数の変位計１２ａ，１２ｄを配置させる必要がないため、駆動装置１５によるスロットダイ１１のＹ方向への移動距離、つまり各変位計１２ａ，１２ｂによるＹ方向の測定範囲を拡大させることができる。また、溝部２２の開口端、つまりエッジ部に対する測定が可能となる。
【００９８】
【数１８】

【００９９】
【数１９】

【０１００】
なお、上述した反転法においては、第１の測定において、第１変位計１２ａと一方の対向面２２Ａとの間の距離Ｄ_１（ｙ）を検出するとしたが、これに限定されず、例えば、第１の測定において、第１変位計１２ａと一方の対向面２２Ａとの間の距離Ｄ_１（ｙ）に加えて、第２変位計１２ｂと他方の対向面２２Ｂとの間の距離Ｄ_２（ｙ）を検出してもよい。
この場合、第１の測定の実行後にスロットダイ１１をＸＺ平面内にて反転移動させる際には、第２変位計１２ｂとスロットダイ１１の一方の対向面２２Ａとが対向配置されるようにすると共に、第１変位計１２ｃとスロットダイ１１の他方の対向面２２Ｂとが対向配置されるように設定する。
そして、第２の測定において、第２変位計１２ｂと一方の対向面２２Ａとの間の距離Ｄ_２（ｙ）に加えて、第１変位計１２ａと他方の対向面２２Ｂとの間の距離Ｄ_１（ｙ）を検出する。
これにより、１回の反転移動により、一方の対向面２２Ａの真直度ｆ_Ａ（ｘ，ｙ_ｎ）と他方の対向面２２Ｂの真直度ｆ_Ｂ（ｘ，ｙ_ｎ）とを測定することができる。しかも、第１変位計１２ａと第２変位計１２ｂとの出力から溝幅変化量Ｄ（ｘ，ｙ_ｎ）を算出することができる。
なお、Ｙ方向と同様にして、反転法によりＸ方向の真直度ｆ_Ａ（ｘ_ｎ，ｙ），ｆ_Ｂ（ｘ_ｎ，ｙ）と溝幅変化量Ｄ（ｘ_ｎ，ｙ）とを測定してもよい。
【０１０１】
なお、上述した本実施の形態においては、第１変位計１２ａと第２変位計１２ｂとから出力される変位データに基づき、溝部２２の溝幅変化量Ｄおよび溝幅ｈを測定するとしたが、これに限定されず、例えば図１１および図１２に示すように、単一の差動干渉計等により溝幅変化量Ｄおよび溝幅ｈを測定してもよい。
以下に、本実施形態の変形例に係る溝面形状測定装置４０および溝面形状測定方法について説明する。
この変形例に係る溝面形状測定装置４０は、例えば図１１および図１２に示すように、テーブル２５上に載置された、光源４１と、ビームスプリッタ４２と、第１反射鏡４３と、受光部４４と、偏光ビームスプリッタ４５と、第１〜第３の１／４波長板４６ａ，４６ｂ，４６ｃと、第２反射鏡４７とを備えて構成され、例えばＸ方向に沿って、順次、光源４１と、ビームスプリッタ４２と、偏光ビームスプリッタ４５と、第２反射鏡４７とが配置され、さらに、Ｚ方向においてビームスプリッタ４２を両側から挟み込むようにして第１反射鏡４３と、受光部４４とが配置されている。
【０１０２】
ここで、受光部４４は、光源４１から出射され、第１反射鏡４３にて反射された第１反射光Ｌ１と、第２反射鏡４７にて反射された第２反射光Ｌ２との干渉を検出し、この光路差に応じた検出結果を処理装置１３等を出力する。そして、処理装置１３では、検出された干渉に基づき、溝幅変化量Ｄおよび溝幅ｈが算出される。
例えば図１１に示すように、第１反射光Ｌ１は、光源４１からＸ方向に出射されたレーザ光のうち、ビームスプリッタ４２によってＺ方向に取り出され、第１反射鏡４３にて反射された後に、受光部４４へ入射されるものである。
一方、第２反射光Ｌ２は、例えば図１２に示すように、光源４１からＸ方向に出射され、ビームスプリッタ４２を通過した後に、偏光ビームスプリッタ４５によってＺ方向に取り出され、第１の１／４波長板４６ａを介してスロットダイ１１の一方の対向面２２Ａにて反射された後に、第２の１／４波長板４６ｂを介してスロットダイ１１の他方の対向面２２Ｂにて反射された後に、偏光ビームスプリッタ４５によってＸ方向に取り出され、第３の１／４波長板４６ｃを介して第２反射鏡４７にてＸ方向に光源４１へ向かって反射された後に、ビームスプリッタ４２によってＺ方向に取り出され、受光部４４へ入射されるものである。
ここで、溝部２２の溝幅ｈが変化しても、第１反射光Ｌ１の光路は不変であるが、第２反射光Ｌ２の光路は変化するため、受光部４４にて検出される第１反射光Ｌ１と第２反射光Ｌ２との干渉の変化に応じて、溝幅変化量Ｄおよび溝幅ｈが算出される。
【０１０３】
なお、本発明の一実施形態に係る溝面形状測定方法を実現する溝面形状測定装置１０，４０は、専用のハードウェアにより実現されるものであっても良く、また、メモリおよびＣＰＵを備えて構成され、溝面形状測定装置１０，４０の処理装置１３および制御装置１４の機能を実現するためのプログラムをメモリにロードして実行することによりその機能を実現するものであっても良い。
【０１０４】
また、上述した本発明に係る溝面形状測定方法を実現するためのプログラムをコンピュータ読みとり可能な記録媒体に記録して、この記録媒体に記録されたプログラムをコンピュータシステムに読み込ませ、実行することにより結晶形状の測定を行っても良い。なお、ここで言うコンピュータシステムとはＯＳや周辺機器等のハードウェアを含むものであっても良い。
【０１０５】
また、コンピュータ読みとり可能な記録媒体とは、フレキシブルディスク、光磁気ディスク、ＲＯＭ、ＣＤ−ＲＯＭ等の可搬媒体、コンピュータシステムに内蔵されるハードディスク等の記憶装置のことを言う。さらに、コンピュータ読みとり可能な記録媒体とは、インターネット等のネットワークや電話回線等の通信回線を介してプログラムを送信する場合の通信線のように短時間の間、動的にプログラムを保持するもの、その場合のサーバやクライアントとなるコンピュータシステム内部の揮発性メモリのように、一定時間プログラムを保持しているものも含むものとする。
また上記プログラムは、前述した機能の一部を実現するためのものであっても良く、さらに、前述した機能をコンピュータシステムにすでに記憶されているプログラムとの組み合わせで実現できるものであっても良い。
【０１０６】
【発明の効果】
以上説明したように、請求項１記載の本発明の溝面形状測定装置によれば、変位計と溝部との相対移動によって、溝部の適宜の位置における溝幅および溝幅の偏差と、何れか一方の対向面の相対移動の方向における真直度とを、容易かつ精度良く算出することができる。
さらに、請求項２記載の本発明の溝面形状測定装置によれば、何れか一方の対向面の真直度と溝幅の偏差とによって、何れか他方の対向面の相対移動の方向における真直度を、容易かつ精度良く算出することができる。
さらに、請求項３記載の本発明の溝面形状測定装置によれば、複数の異なる相対移動の方向における対向面の真直度により溝部内の適宜の位置での対向面の真直度を算出することができ、これらの真直度により、対向面の平面度を、容易かつ精度良く算出することができる。
さらに、請求項４記載の本発明の溝面形状測定装置によれば、相対移動に係る誤差を、相対移動の方向に所定距離だけ離間するように配置された隣り合う変位計同士から出力される検出値と、所定距離の値とに基づき、いわゆる位相差法によって相殺することができ、相対移動に係る誤差を補正した後の溝幅および溝幅の偏差と対向面の相対移動の方向における真直度とを、容易かつ精度良く算出することができる。
【０１０８】
また、請求項５記載の本発明の溝面形状測定方法によれば、変位計と溝部との相対移動によって、溝部の適宜の位置における溝幅および溝幅の偏差と、何れか一方の対向面の相対移動の方向における真直度とを、容易かつ精度良く算出することができる。
さらに、請求項６記載の本発明の溝面形状測定方法によれば、何れか一方の対向面の真直度と溝幅の偏差とによって、何れか他方の対向面の相対移動の方向における真直度を、容易かつ精度良く算出することができる。
さらに、請求項７記載の本発明の溝面形状測定方法によれば、複数の異なる相対移動の方向における対向面の真直度により溝部内の適宜の位置での対向面の真直度を算出することができ、これらの真直度により、対向面の平面度を、容易かつ精度良く算出することができる。
さらに、請求項８記載の本発明の溝面形状測定方法によれば、相対移動に係る誤差を、相対移動の方向に所定距離だけ離間するように配置された隣り合う変位計同士から出力される検出値と、所定距離の値とに基づき、いわゆる位相差法によって相殺することができ、相対移動に係る誤差を補正した後の溝幅および溝幅の偏差と対向面の相対移動の方向における真直度とを、容易かつ精度良く算出することができる。
【０１１０】
また、請求項９記載の本発明のプログラムによれば、変位計と溝部との相対移動によって、溝部の適宜の位置における溝幅および溝幅の偏差と、何れか一方の対向面の相対移動の方向における真直度とを、容易かつ精度良く算出することができる。
さらに、請求項１０記載の本発明のプログラムによれば、何れか一方の対向面の真直度と溝幅の偏差とによって、何れか他方の対向面の相対移動の方向における真直度を、容易かつ精度良く算出することができる。
さらに、請求項１１記載の本発明のプログラムによれば、複数の異なる相対移動の方向における対向面の真直度により溝部内の適宜の位置での対向面の真直度を算出することができ、これらの真直度により、対向面の平面度を、容易かつ精度良く算出することができる。
さらに、請求項１２記載の本発明のプログラムによれば、相対移動に係る誤差を、相対移動の方向に所定距離だけ離間するように配置された隣り合う変位計同士から出力される検出値と、所定距離の値とに基づき、いわゆる位相差法によって相殺することができ、相対移動に係る誤差を補正した後の溝幅および溝幅の偏差と対向面の相対移動の方向における真直度とを、容易かつ精度良く算出することができる。
【図面の簡単な説明】
【図１】 本発明の一実施形態に係わる溝面形状測定装置を示す構成図である。
【図２】 図１に示す溝面形状測定装置において、スロットダイの移動方向を示す斜視図である。
【図３】 図１に示す溝面形状測定装置の要部を溝部の深さ方向（Ｙ方向）に沿って見た図である。
【図４】 溝幅変化量を測定する処理の詳細について示すフローチャートである。
【図５】 平面度を測定する処理の詳細について示すフローチャートである。
【図６】 図５に示すステップＳ１１〜ステップＳ１７の処理に係る各変位計の配置を示す斜視図である。
【図７】 図５に示すステップＳ１８〜ステップＳ２４の処理に係る各変位計の配置を示す斜視図である。
【図８】 Ｘ方向およびＹ方向の複数の位置における各真直度の測定結果の一例を示す図である。
【図９】 各変位計が対向面に対して傾斜した状態の一例を示す図である。
【図１０】 スロットダイの反転移動の前後における各変位計とスロットダイとの相対位置の変化を示す図である。
【図１１】 本実施形態の変形例に係る溝面形状測定装置における第１反射光Ｌ１の光路を示す図である。
【図１２】 本実施形態の変形例に係る溝面形状測定装置における第２反射光Ｌ２の光路を示す図である。
【図１３】 従来技術の一例によるスロットダイの溝部の溝幅測定におけるスロットダイと隙間ゲージとの配置状態を示す断面図である。
【図１４】 従来技術の一例によるスロットダイの溝部の溝面の平面度の測定におけるスロットダイと接触式変位プローブとの配置状態を示す図である。
【符号の説明】
１０ スリット形状測定装置
１１ スロットダイ
１２ａ 第１変位計（変位計）
１２ｂ 第２変位計（変位計）
１２ｃ 第３変位計（変位計）
１２ｄ 第４変位計（変位計）
１５ 駆動装置（移動手段、反転移動手段）
２２ 溝部
２２Ａ 対向面
２２Ｂ 対向面
３２ 溝幅変化量算出部（溝幅算出手段）
３３ａ Ｘ方向真直度算出部（真直度算出手段）
３３ｂ Ｙ方向真直度算出部（真直度算出手段）
３４ 平面度算出部（平面度算出手段）
４１ 光源
４２ ビームスプリッタ（第１分岐手段）
４３ 第１反射鏡（第１分岐手段、第２分岐手段）
４４ 受光部（受光手段）
４５ 偏光ビームスプリッタ（第２分岐手段）
４６ａ 第１の１／４波長板（第２分岐手段）
４６ｂ 第２の１／４波長板（第２分岐手段）
４６ｃ 第３の１／４波長板（第２分岐手段）[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a groove surface shape measuring device, a groove surface shape measuring method, and a program.
[0002]
[Prior art]
Conventionally, as shown in FIG. 13, for example, a slot die 1 used when applying a coating solution to a flexible belt-like support that travels in one direction has a manifold 2 in which a coating solution is stored. And the coating liquid is continuously applied to the substrate moving on the coating surface 1A of the die head by discharging the coating liquid from the groove 3 extending in the coating width direction leading from the manifold 2. In particular, in order to form a coating surface having a uniform coating thickness on a long base material, the groove width of the groove portion 3 from which the coating liquid is discharged and two opposing surfaces (groove surfaces) 3A forming the groove portion 3; The groove surface shape such as 3B flatness needs to be formed with high accuracy.
Accordingly, for example, the groove 3 having a relatively small groove width (for example, several hundred μm) as compared with the length (for example, several m) of the groove 3 extending in the coating width direction is compared with that of the groove 3. It is necessary to accurately measure the groove surface shape such as the groove width and the flatness of the groove surfaces 3A and 3B of the groove part 3.
[0003]
Conventionally, in the measurement of the groove width of the groove portion 3 of the slot die 1, for example, as shown in FIG.
Conventionally, in the measurement of the flatness of the groove surfaces 3A and 3B of the groove portion 3 of the slot die 1, for example, as shown in FIG. 14, a method of measuring using a contact displacement probe 6 such as an electric micrometer is known. In this method, a single contact displacement probe 6 is scanned in parallel with the groove surface 3A or groove surface 3B along the coating width direction, and the output of the contact displacement probe 6 is recorded. Yes.
[0004]
[Problems to be solved by the invention]
By the way, in the groove width measurement by the gap gauge 5 according to an example of the above-described prior art, only the groove width at the opening end of the groove portion 3, that is, the edge portion 3a of the groove portion 3, can be measured. There is a problem that it is difficult to measure the groove width at the position.
Further, in the measurement of flatness by the contact-type displacement probe 6 according to an example of the above-described prior art, if a motion straightness error occurs in the scanning mechanism that scans the contact-type displacement probe 6, the motion straightness error is included in the measurement result. This causes a problem that the measurement accuracy decreases.
The present invention has been made in view of the above circumstances, and a groove capable of easily and accurately measuring a groove surface shape such as a groove width and a flatness of a groove surface inside a groove portion provided in a detection target object. It is an object to provide a surface shape measuring device, a groove surface shape measuring method, and a program.
[0005]
[Means for Solving the Problems]
In order to solve the above problems and achieve the object, the groove surface shape measuring apparatus of the present invention according to claim 1 comprises two opposing surfaces (for example, opposing surfaces 22A and 22B in the embodiment). A groove surface shape measuring apparatus for measuring a groove surface shape of a groove portion (for example, the groove portion 22 in the embodiment), which is disposed to face each of the facing surfaces, and a distance and a distance from each of the facing surfaces. A pair of displacement meters (for example, the first and second displacement meters 12a and 12b in the embodiment) and any one of the two facing surfaces (for example, in the embodiment) A plurality of displacement meters (for example, the first and third displacement meters 12a in the embodiment) that are arranged to face the facing surface 22A) and detect the distance between the facing surfaces and the deviation of the distance. , 12c, first and fourth displacement meters 12a, 12d), A moving means (for example, the driving device 15 in the embodiment) that relatively moves the displacement meter and the groove portion in a direction parallel to the facing surface, and is output from the pair of displacement meters when the moving means is operated. Based on the detected value, the error related to the relative movement (for example, straightness error e (x, y) of the Z-direction motion in the embodiment) after correcting the groove width (for example, in the embodiment) Groove width calculating means (for example, groove width change amount calculation unit 32 in the embodiment) for calculating a groove width h) and a deviation of the groove width (for example, groove width change amount D (x, y) in the embodiment). ) And time-series data based on detection values output from the plurality of displacement meters arranged in the movement direction of the relative movement at the time of operation of the moving means, any of the above after correcting the error related to the relative movement Calculate straightness in the direction of relative movement of one opposing surface That straightness calculating means (e.g., X-direction straightness calculating unit 33a and the Y-direction straightness calculator 33b in the embodiment) and includes a The straightness calculation means uses the straightness of the other facing surface as a detection target in addition to the straightness of the one facing surface, and based on the straightness of the one facing surface, Calculate the straightness of the other facing surface It is characterized by that.
[0006]
According to the groove surface shape measuring apparatus having the above configuration, the displacement by the moving means is detected by detecting the distance between each facing surface and the deviation of the distance with a pair of displacement meters arranged between the two facing surfaces. The straightness error of the movement in the relative movement between the gauge and the groove, that is, the error due to the change in the relative position between the displacement gauge and the opposed surface is canceled out, and the groove width and the groove width deviation are calculated at the appropriate position of the groove. be able to.
In addition to this, by detecting a distance and a deviation of the distance between any one of the two opposing surfaces with a plurality of displacement meters arranged opposite to the one opposing surface, For example, the phase difference method or the like cancels the straightness error of the movement in the relative movement between the displacement meter and the groove by the moving means, that is, the error due to the change in the relative position between the displacement meter and the opposed surface, and The straightness in the direction of relative movement of the surface can be calculated.
That is, by the relative movement of the displacement meter and the groove portion by the moving means, the groove width at the appropriate position of the groove portion and the deviation of the groove width and the straightness in the direction of relative movement of one of the opposing surfaces can be easily and accurately determined. It can be calculated well.
[0007]
Furthermore, in the groove surface shape measuring apparatus according to the second aspect of the present invention, the straightness calculation means includes the straightness of any one of the opposing surfaces and the groove width calculated by the groove width calculation means. The straightness in the direction of the relative movement of either one of the two opposing surfaces (for example, the opposing surface 22B in the embodiment) is calculated based on the deviation of the distance.
[0008]
According to the groove surface shape measuring apparatus having the above-described configuration, for example, by adding the straightness of any one of the opposing surfaces and the deviation of the groove width at the same position relative to the relative position of the displacement meter and the groove portion, either The straightness in the direction of relative movement of the other facing surface can be calculated easily and accurately.
[0009]
Furthermore, the groove surface shape measuring apparatus according to the third aspect of the present invention is based on the straightness of the facing surface in a plurality of different relative movement directions calculated by the straightness calculating means. The flatness calculating means (for example, the flatness calculating unit 34 in the embodiment) is provided.
[0010]
According to the groove surface shape measuring apparatus having the above-described configuration, for example, with respect to the straightness of the opposing surface in a plurality of different relative movement directions, for example, set the straightness to be equal to each other at a position where the measurement position is equivalent, In other words, by calibrating each straightness, the straightness of the opposing surface at an appropriate position in the groove can be calculated, and the flatness such as the undulation of the opposing surface can be easily and accurately calculated by these straightnesses. Can be calculated.
[0011]
Furthermore, in the groove surface shape measuring apparatus according to the fourth aspect of the present invention, the plurality of displacement gauges may be configured such that adjacent displacement gauges have a predetermined distance in the relative movement direction (for example, the predetermined distance L in the embodiment). _x , Predetermined distance L _y ) And a correction unit (for example, step S13 in the embodiment) that corrects an error related to the relative movement based on the detection value output from the adjacent displacement meters and the predetermined distance. Step S20).
[0012]
According to the groove surface shape measuring apparatus having the above-described configuration, an error relating to relative movement by the moving unit is detected from the displacement values arranged adjacent to each other in a direction of relative movement by a predetermined distance; and Based on the value of the predetermined distance, it can be canceled by a so-called phase difference method, the groove width after correcting the error related to the relative movement and the deviation of the groove width and the straightness in the direction of the relative movement of the opposing surface, It can be calculated easily and accurately.
[0017]
Further, the groove surface shape measuring method of the present invention according to claim 5 is a groove surface shape measuring method for measuring the groove surface shape of a groove portion composed of two opposing surfaces, and is arranged to face each of the opposing surfaces. A pair of displacement gauges for detecting a distance between each of the opposing surfaces and a deviation of the distance, and the groove portion are moved relative to each other in a direction parallel to the opposing surfaces, and the detection is output from the pair of displacement meters. A groove width calculating step (for example, step S01 to step S10 in the embodiment) for calculating the groove width of the groove portion and the deviation of the groove width after correcting the error relating to the relative movement, and the two A plurality of displacement meters that are arranged to face any one of the facing surfaces and detect a distance and a deviation of the distance from any one of the facing surfaces, and the groove portion are parallel to the facing surface. Move relative to each other, move relative movement From the time-series data based on the detection values output from the plurality of displacement meters arranged in the direction, the straightness in the direction of the relative movement of the one of the opposing surfaces after correcting the error related to the relative movement is calculated. Straightness calculation step (for example, step S11 to step S24 in the embodiment) to be calculated In the straightness calculation step, in addition to the straightness of any one of the facing surfaces, the straightness of the other facing surface is detected, and based on the straightness of any one of the facing surfaces, Calculate the straightness of one of the other facing surfaces It is characterized by that.
[0018]
According to the above groove surface shape measuring method, by detecting a distance between each facing surface and a deviation of the distance by a pair of displacement meters arranged between the two facing surfaces, The straightness error of the movement in the relative movement, that is, the error due to the change in the relative position between the displacement meter and the opposed surface can be canceled out, and the groove width and the groove width deviation can be calculated at the appropriate position of the groove portion.
In addition to this, by detecting a distance and a deviation of the distance between any one of the two opposing surfaces with a plurality of displacement meters arranged opposite to the one opposing surface, For example, the phase difference method cancels the straightness error of the movement in the relative movement between the displacement meter and the groove, that is, the error due to the change in the relative position between the displacement meter and the opposite surface, and The straightness in the direction of movement can be calculated.
That is, by the relative movement of the displacement meter and the groove portion, the groove width and the deviation of the groove width at an appropriate position of the groove portion and the straightness in the direction of relative movement of one of the opposing surfaces are calculated easily and accurately. be able to.
[0019]
further, Claim 6 In the groove surface shape measuring method of the present invention described in the above, the straightness calculation step is based on the straightness of any one of the facing surfaces and the deviation of the groove width calculated in the groove width calculation step. The straightness in the direction of the relative movement of either one of the two opposing surfaces is calculated.
[0020]
According to the above groove surface shape measuring method, for example, at the same position relative to the relative position between the displacement meter and the groove portion, by adding the straightness of any one of the opposing surfaces and the deviation of the groove width, The straightness in the direction of relative movement of the opposite surfaces can be calculated easily and accurately.
[0021]
further, Claim 7 In the groove surface shape measuring method according to the present invention described in the above, the flatness for calculating the flatness of the facing surface based on the straightness of the facing surface in the plurality of different relative movement directions calculated by the straightness calculating step. It is characterized by including a calculation step (for example, step S25 in the embodiment).
[0022]
According to the above groove surface shape measuring method, the straightness of the opposing surfaces in a plurality of different relative movement directions is set, for example, so that the straightness is equal to each other at a position where the measurement positions are equal. By calibrating each straightness, the straightness of the opposing surface at an appropriate position in the groove can be calculated, and flatness such as undulation of the opposing surface can be calculated easily and accurately based on these straightnesses. can do.
[0023]
further, Claim 8 The groove surface shape measuring method of the present invention described in the above, a detection value output from adjacent displacement meters arranged so as to be separated from each other by a predetermined distance in the direction of relative movement among the plurality of displacement meters, A correction step (for example, step S13 and step S20 in the embodiment) for correcting an error related to the relative movement based on the predetermined distance is included.
[0024]
According to the above groove surface shape measuring method, the detection value output from the adjacent displacement meters arranged so as to separate the error related to the relative movement by a predetermined distance in the direction of the relative movement, and the value of the predetermined distance Based on the above, the so-called phase difference method can be canceled out, and the groove width and the deviation of the groove width after correcting the error related to the relative movement and the straightness in the direction of the relative movement of the opposing surface can be easily and accurately obtained. Can be calculated.
[0029]
The program of the present invention according to claim 9 is a program for causing a computer to function as a means for measuring a groove surface shape of a groove portion composed of two opposed surfaces, which is opposed to each of the opposed surfaces. A pair of displacement gauges that are arranged to detect a distance between each of the opposing surfaces and a deviation of the distance, and the groove portion are relatively moved in a direction parallel to the opposing surfaces, and output from the pair of displacement meters. Groove width calculating means (for example, step S01 to step S10 in the embodiment) for calculating the groove width and the deviation of the groove width after correcting the error related to the relative movement based on the detected value; A plurality of displacement meters that are arranged opposite to any one of the two opposing surfaces and detect a distance and a deviation of the distance between any one of the opposing surfaces, and the groove portion on the opposing surface. Relative movement in parallel direction From the time series data based on the detection values output from the plurality of displacement meters arranged in the movement direction of the relative movement, the relative of any one of the opposing surfaces after correcting the error related to the relative movement It functions as straightness calculation means (for example, step S11 to step S24 in the embodiment) for calculating straightness in the direction of movement. The straightness calculation means uses the straightness of the other facing surface as a detection target in addition to the straightness of the one facing surface, and based on the straightness of the one facing surface, Calculate the straightness of the other facing surface It is characterized by that.
[0030]
According to the above program, by detecting a distance between each facing surface and a deviation of the distance by a pair of displacement meters arranged between the two facing surfaces, the relative movement between the displacement meter and the groove portion is detected. The straightness error of the motion, that is, the error due to the change in the relative position between the displacement meter and the opposing surface can be canceled out, and the groove width and the groove width deviation can be calculated at an appropriate position of the groove portion.
In addition to this, by detecting a distance and a deviation of the distance between any one of the two opposing surfaces with a plurality of displacement meters arranged opposite to the one opposing surface, For example, the phase difference method cancels the straightness error of the movement in the relative movement between the displacement meter and the groove, that is, the error due to the change in the relative position between the displacement meter and the opposite surface, and The straightness in the direction of movement can be calculated.
That is, by the relative movement of the displacement meter and the groove portion, the groove width and the deviation of the groove width at an appropriate position of the groove portion and the straightness in the direction of relative movement of one of the opposing surfaces are calculated easily and accurately. be able to.
[0031]
further, Claim 10 In the program of the present invention described in the above, the straightness calculation means is based on the straightness of any one of the opposing surfaces and the deviation of the groove width calculated by the groove width calculation means. The straightness in the direction of the relative movement of either one of the opposing surfaces is calculated.
[0032]
According to the above program, for example, at the same position relative to the relative position of the displacement meter and the groove, by adding the straightness of one of the opposing surfaces and the deviation of the groove width, The straightness in the direction of relative movement can be calculated easily and accurately.
[0033]
further, Claim 11 According to the program of the present invention, the computer calculates a flatness calculation for calculating the flatness of the facing surface based on the straightness of the facing surface in a plurality of different relative movement directions calculated by the straightness calculating means. It is characterized by functioning as means (for example, step S25 in the embodiment).
[0034]
According to the above program, the straightness of the opposing surfaces in a plurality of different relative movement directions is set such that, for example, the straightness is equal to each other at a position where the measurement positions are equivalent. By calibrating, the straightness of the facing surface at an appropriate position in the groove can be calculated, and the flatness such as the undulation of the facing surface can be easily and accurately calculated by these straightnesses. .
[0035]
further, Claim 12 The computer program according to the present invention includes a detection value output from adjacent displacement meters arranged so as to be separated from each other by a predetermined distance in the direction of relative movement among the plurality of displacement meters, It is characterized by functioning as a correction means (for example, step S13, step S20 in the embodiment) for correcting an error relating to the relative movement based on the predetermined distance.
[0036]
According to the above program, based on the detection value output from the adjacent displacement meters arranged so as to be separated from each other by a predetermined distance in the direction of the relative movement, and the value of the predetermined distance, the error relating to the relative movement, It can be canceled out by the so-called phase difference method, and the groove width and the deviation of the groove width after correcting the error related to the relative movement and the straightness in the direction of the relative movement of the opposing surface can be calculated easily and accurately. it can.
[0041]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment of a groove surface shape measuring apparatus, a groove surface shape measuring method, and a program according to the invention will be described with reference to the accompanying drawings.
The groove surface shape measuring apparatus 10 according to the present embodiment includes the amount of change in the width of the slit or groove provided in the object to be detected, and the flatness of the two facing surfaces facing each other inside the slit or groove. Can be measured at the same time, for example, to measure the groove surface shape of the slot die 11 used when applying the coating liquid to a flexible belt-like support that runs in one direction, for example, As shown in FIG. 1, a plurality of, for example, four first to fourth displacement meters 12a,..., 12d constituting a laser displacement meter, etc., and processing for processing displacement data output from each displacement meter 12a,. The device 13, the control device 14, and the drive device 15 that is controlled by the control device 14 and moves the slot die 11 and the displacement meters 12 a,.
[0042]
The slot die 11 includes a manifold 21 for storing a coating solution therein, and the coating solution is discharged from a groove portion 22 extending from the manifold 21 in the coating width direction. In order to form a coating surface having a uniform coating thickness on a long substrate, in particular, a groove portion 22 from which the coating solution is discharged is applied. The groove width h (for example, several 100 μm) is formed to be relatively smaller than the length (for example, several m) of the groove portion 22 extending in the coating width direction.
Furthermore, the slot die 11 can be divided into two slot die members 11a and 11b so as to increase the groove width in the width direction (Z direction) of the groove portion 22, and these slot die members 11a. , 11b can be displaced by an appropriate distance in the Z direction by the groove width adjusting device 24.
Then, the slot die 11 and the groove width adjusting device 24 include a direction (X direction) parallel to a direction in which the groove portion 22 extends by the driving device 15 and a depth direction of the groove portion 22, that is, a direction orthogonal to the X direction and the Z direction (Y It is placed on a table 25 that can be moved in the direction).
[0043]
Then, for example, the displacement gauge fixing member 26 is arranged between the two slot die members 11a and 11b moved by a predetermined distance in the width direction (Z direction) of the groove portion 22 so as to be separated from each other by the groove width adjusting device 24. The displacement meter fixing member 26 is provided with each displacement meter 12a, which forms a laser displacement meter, etc. via any one of manual stages 27a, 27b, 27c whose position can be manually adjusted in the Z direction or the like. , 12d are connected.
The distance D between the first opposing gauge 22a and the first displacement gauge 12a fixed to the first manual stage 27a with respect to the two opposing surfaces 22A and 22B forming the groove 22 is D. ₁ (X, y) is detected, and the distance D between the second displacement meter 12b fixed to the second manual stage 27b and the other facing surface 22B ₂ (X, y) is detected.
For example, as shown in FIGS. 2 and 3, a predetermined distance L in the X direction with respect to the first and second displacement meters 12a and 12b arranged along the Z direction at a predetermined position in the X direction. _x The distance D between the opposing surface 22A is at a position separated by a distance D. ₃ A third displacement meter 12c for detecting (x, y) is arranged via a third manual stage 27c.
Further, a predetermined distance L in the Y direction with respect to the first displacement meter 12a. _y The distance D between the opposing surface 22A is at a position separated by a distance D. ₄ A fourth displacement meter 12d for detecting (x, y) is disposed, and the position of the fourth displacement meter 12d can be adjusted by the first manual stage 27a together with the first displacement meter 12a, for example.
And the distance D obtained by each displacement meter 12a, ..., 12d ₁ (X, y), ..., D ₄ The data (displacement data) of (x, y) is output to the processing device 13.
[0044]
The processing device 13 includes, for example, first to fourth displacement data acquisition units 31a,..., 31d that acquire displacement data output from the displacement meters 12a,. X direction straightness calculation unit 33a that calculates the straightness in the X direction of the two opposing surfaces 22A and 22B that form 22 and a Y direction straightness calculation unit 33b that calculates the straightness in the Y direction, and two that form the groove 22 And a flatness calculating unit 34 for calculating the flatness of the facing surfaces 22A and 22B.
[0045]
Each displacement data acquisition unit 31a, ..., 31d acquires displacement data output from each displacement meter 12a, ..., 12d and stores it in a storage unit (not shown).
The groove width change amount calculation unit 32 outputs the distance D output from the first displacement meter 12a at an appropriate position (x, y) in the XY plane. ₁ (X, y) and the distance D output from the second displacement meter 12b ₂ Based on (x, y), when the slot die 11 is moved in the X direction by the driving device 15, the relative position in the Z direction between the displacement gauge fixing member 26 and the two opposing surfaces 22A, 22B varies. The amount of change in groove width (groove width change) after correcting the error caused to the calculation result of the groove width due to the above, that is, the straightness error e (x, y) of the Z-direction motion related to the driving of the driving device 15 Amount) D (x, y) is calculated.
Then, the calculated groove width change amount D (x, y) is output to the X direction straightness calculation unit 33a and the Y direction straightness calculation unit 33b.
The groove width h of the groove portion 22 is based on, for example, the groove width change amount D (x, y) and a preset relative position in the Z direction between the first displacement meter 12a and the second displacement meter 12b. Calculated.
[0046]
The X direction straightness calculation unit 33a reads each displacement data when the slot die 11 is moved in the X direction by the driving device 15, and the first displacement at an appropriate position (x, y) in the XY plane. Distance D output from total 12a ₁ (X, y) and a predetermined distance L in the X direction _x The distance D output from the third displacement meter 12c arranged at a position shifted by ₃ Based on (x, y), for example, the straightness in the X direction of one facing surface 22A is calculated and output to the flatness calculating unit 34.
Further, the X-direction straightness calculation unit 33a is based on the calculated straightness in the X direction of the one opposing surface 22A and the groove width change amount D (x, y) input from the groove width change amount calculation unit 32. For example, the straightness in the X direction of the other facing surface 22B is calculated and output to the flatness calculation unit 34.
[0047]
Further, the Y direction straightness calculation unit 33b reads each displacement data when the slot die 11 is moved in the Y direction by the driving device 15, and reads the first data at an appropriate position (x, y) in the XY plane. Distance D output from one displacement meter 12a ₁ (X, y) and a predetermined distance L in the Y direction _y The distance D output from the fourth displacement meter 12d arranged at a position displaced by ₄ Based on (x, y), for example, the straightness in the Y direction of one opposing surface 22A is calculated and output to the flatness calculating unit 34.
Further, the Y-direction straightness calculation unit 33b is based on the calculated straightness of the one opposing surface 22A in the Y-direction and the groove width change amount D (x, y) input from the groove width change amount calculation unit 32. For example, the straightness in the Y direction of the other facing surface 22B is calculated and output to the flatness calculation unit 34.
[0048]
The flatness calculation unit 34 includes the straightness in the X direction of the facing surfaces 22A and 22B output from the X direction straightness calculation unit 33a and the Y direction of the facing surfaces 22A and 22B output from the Y direction straightness calculation unit 33b. The flatness of the facing surfaces 22A and 22B is calculated based on the straightness of the.
[0049]
The control device 14 controls the operations of the displacement gauges 12a,..., 12d and the driving device 15. For example, as shown in FIG. 2, the table 25 on which the slot die 11 is placed is moved by the driving device 15 in the X direction. Alternatively, by moving in the Y direction, each displacement meter 12a, ..., 12d is set to scan the groove portion 22 of the slot die 11 in the length direction or the depth direction.
That is, at the time of these scans, each displacement is measured so as to measure the distance between the opposing surfaces 22A and 22B or the deviation of the distance over the length direction (X direction) or the depth direction (Y direction) of the groove portion 22. The totals 12a, ..., 12d are controlled, and the obtained displacement data is output to the processing device 13. Then, information on the displacement in the X direction (X direction distance) or the displacement in the Y direction (Y direction distance) at a predetermined time point after the movement or during the movement is output to the processing device 13.
[0050]
The groove surface shape measuring apparatus 10 according to the present embodiment has the above-described configuration. Hereinafter, a groove surface shape measuring method by the groove surface shape measuring apparatus 10, in particular, a process for measuring a groove width change amount, and an X direction The process of measuring straightness in the Y direction and measuring the flatness of the groove surface will be described.
[0051]
Below, the process which measures groove width variation | change_quantity is demonstrated.
First, in step S01 shown in FIG. 4, the relative positions of the first and second displacement gauges 12a and 12b and the groove 22 are set to predetermined positions (x _j , Y _k ). Note that j and k are predetermined natural numbers.
Next, in step S02, the slot die 11 is moved in the X direction by the driving device 15, and the distances D between the opposing surfaces 22A and 22B by the displacement meters 12a and 12b. ₁ (X _n , Y _k ), D ₂ (X _n , Y _k ) Detection starts. Note that n is an arbitrary natural number (n = 1, 2,...).
Next, in step S03, the distance D output from the first displacement meter 12a. ₁ (X _n , Y _k ) And the distance D output from the second displacement meter 12b ₂ (X _n , Y _k ), When the slot die 11 is moved in the X direction by the driving device 15, the relative position in the Z direction between the displacement gauge fixing member 26 and the two opposing surfaces 22A, 22B varies. A change in groove width D (x) after correcting an error generated with respect to the calculation result of the groove width, that is, a straightness error e (x) of the Z-direction motion related to driving of the driving device 15. _n , Y _k ) Is calculated.
[0052]
Next, in step S04, the groove width change amount D (x in the X direction at an appropriate Y direction position. _n , Y) is determined whether the end of measurement is instructed.
If this determination is “NO”, the flow proceeds to step S 05.
On the other hand, if this determination is “YES”, the flow proceeds to step S 06.
In step S05, the relative position between the first and second displacement gauges 12a, 12b and the groove 22 is changed by a predetermined position in the Y direction, and the process returns to step S02 described above.
[0053]
In step S06, the relative position between the first and second displacement gauges 12a and 12b and the groove 22 is set to a predetermined position (x _j , Y _k ). Next, in step S07, the slot die 11 is moved in the Y direction by the driving device 15, and the distances D between the opposing surfaces 22A and 22B by the displacement meters 12a and 12b. ₁ (X _j , Y _n ), D ₂ (X _j , Y _n ) Detection starts.
Next, in step S08, the distance D output from the first displacement meter 12a. ₁ (X _j , Y _n ) And the distance D output from the second displacement meter 12b ₂ (X _j , Y _n ), When the slot die 11 is moved in the Y direction by the driving device 15, the relative position in the Z direction between the displacement gauge fixing member 26 and the two opposing surfaces 22A, 22B varies. A change in groove width D (x) after correcting an error generated with respect to the calculation result of the groove width, that is, a straightness error e (y) of the Z-direction motion related to driving of the driving device 15. _j , Y _n ) Is calculated.
[0054]
Next, in step S09, the groove width change amount D (x, y in the Y direction at an appropriate position in the X direction. _n It is determined whether or not the end of measurement is instructed.
If this determination is “NO”, the flow proceeds to step S 10, and in step S 10, the relative position between the first and second displacement meters 12 a and 12 b and the groove 22 is changed by a predetermined position in the X direction. The process returns to step S07.
On the other hand, if the determination result is “YES”, the series of processing ends.
[0055]
For example, the distance D output from the first displacement meter 12a ₁ (X) is a distance g between the first displacement meter 12a and the one opposing surface 22A at an appropriate position x in the X direction, as shown in the following formula (1). ₁ In (x), the straightness error e (x) of the Z-direction motion caused by the fluctuation of the Z-direction distance when the slot die 11 is moved in the X-direction, and the inclination generated when the slot die 11 is installed. It is set as a value obtained by adding the component ax.
Similarly, the distance D output from the second displacement meter 12b ₂ (X) is a distance g between the second displacement meter 12b and the other facing surface 22B at an appropriate position x in the X direction, as shown in the following formula (2). ₂ In (x), the straightness error e (x) of the Z-direction motion caused by the fluctuation of the Z-direction distance when the slot die 11 is moved in the X-direction, and the inclination generated when the slot die 11 is installed. And the component bx.
[0056]
[Expression 1]

[0057]
[Expression 2]

[0058]
Here, when the mathematical expression (1) and the mathematical expression (2) are added and an inclination component generated when the slot die 11 is installed is removed by an appropriate numerical calculation or the like, as shown in the following mathematical expression (3), the driving device 15 It is possible to obtain the groove width change amount D (x) after correcting the straightness error e (x) of the Z-direction motion related to the driving of.
[0059]
[Equation 3]

[0060]
Here, the predetermined position y in the Y direction is obtained by repeating the processes in steps S01 to S05 described above. _k A plurality of positions x in the X direction _n Groove width change amount D (x) (n = 1, 2,...) _n , Y _k ) Is calculated, and the predetermined position x in the X direction is obtained by repeating the processing of steps S06 to S10 described above. _j A plurality of positions y in the Y direction _n Groove width change amount D (x) (n = 1, 2,...) _j , Y _n ) Is calculated.
Here, the measurement position is equivalent, that is, (x _n , Y _k ) = (X _j , Y _n ) Groove width change amount D (x _n , Y _k ) And groove width variation D (x _j , Y _n ) To be equal, so to speak, the groove width change amount D (x in the X direction) _n , Y) and the groove width change amount D (x, y) in the Y direction. _n ), The groove width change amount D (x, y) at an appropriate position (x, y) in the XY plane in the groove portion 22 can be calculated.
[0061]
Below, the process which measures flatness is demonstrated.
First, in step S11 shown in FIG. 5, the relative positions of the first and third displacement meters 12a, 12c and the groove 22 are set to predetermined positions (x _j , Y _k ).
Next, in step S12, the slot die 11 is moved in the X direction by the driving device 15, and the distance D between the opposing surface 22A by each of the displacement meters 12a and 12c. ₁ (X _n , Y _k ), D ₃ (X _n , Y _k ) Detection starts.
Next, in step S13, the distance D output from the first displacement meter 12a. ₁ (X _n , Y _k ) And a predetermined distance L in the X direction from the first displacement meter 12a _x The distance D output from the third displacement meter 12c arranged at a position shifted by ₃ (X _n , Y _k ), When the slot die 11 is moved in the X direction by the driving device 15, the relative position in the Z direction between the displacement gauge fixing member 26 and the two opposing surfaces 22A, 22B varies. The error that occurs, that is, the straightness error e (x _n ) Straightness f after correction _A (X _n , Y _k ) Is calculated.
[0062]
Next, in step S14, the straightness f calculated in step S13. _A (X _n , Y _k Y-direction position y equivalent to _k The groove width change amount D (x calculated in step S03 in FIG. _n , Y _k ) To get.
Next, in step S15, a predetermined position y in the Y direction _k Straightness f with respect to one opposing surface 22A in the X direction at _A (X _n , Y _k ) And groove width change amount D (x _n , Y _k ) And straightness f with respect to the other facing surface 22B. _B (X _n , Y _k ) Is calculated.
In step S16, the straightness f in the X direction at an appropriate position in the Y direction. _A (X _n , Y), f _B (X _n , Y) is determined whether the end of measurement is instructed.
If this determination is “NO”, the flow proceeds to step S 17.
On the other hand, if this determination is “YES”, the flow proceeds to step S18.
In step S17, the relative position between the first and third displacement gauges 12a, 12c and the groove 22 is changed by a predetermined position in the Y direction, and the process returns to step S12 described above.
[0063]
In step S18, the relative position between the first and fourth displacement gauges 12a, 12d and the groove 22 is set to a predetermined position (x _j , Y _k ). Next, in step S19, the slot die 11 is moved in the Y direction by the driving device 15, and the distance D between the opposing surface 22A by each of the displacement meters 12a and 12d. ₁ (X _j , Y _n ), D ₄ (X _j , Y _n ) Detection starts.
Next, in step S20, the distance D output from the first displacement meter 12a. ₁ (X _j , Y _n ) And a predetermined distance L in the Y direction from the first displacement meter 12a _y The distance D output from the fourth displacement meter 12d arranged at a position displaced by ₄ (X _j , Y _n When the slot die 11 is moved in the Y direction by the driving device 15 based on the The error that occurs, that is, the straightness error e (y) of the Z-direction motion related to the driving of the driving device 15 _n ) Straightness f after correction _A (X _j , Y _n ) Is calculated.
[0064]
Next, in step S21, the straightness f calculated in step S20. _A (X _j , Y _n X-direction position x equivalent to _j Groove width change amount D (x) calculated in step S08 described above _j , Y _n ) To get.
Next, in step S22, a predetermined position x in the X direction. _j Straightness f with respect to one opposing surface 22A in the Y direction at _A (X _j , Y _n ) And groove width change amount D (x _j , Y _n ) And straightness f with respect to the other facing surface 22B. _B (X _j , Y _n ) Is calculated.
In step S23, the straightness f in the Y direction at an appropriate position in the X direction. _A (X, y _n ), F _B (X, y _n It is determined whether or not the end of measurement is instructed.
If this determination is “NO”, the flow proceeds to step S24.
On the other hand, if this determination is “YES”, the flow proceeds to step S25.
[0065]
In step S24, the relative position between the first and fourth displacement gauges 12a, 12d and the groove 22 is changed by a predetermined position in the X direction, and the process returns to step S19 described above.
In step S25, straightness f in the X direction at an appropriate Y position. _A (X _n , Y), f _B (X _n , Y) and straightness f in the Y direction at an appropriate position in the X direction _A (X, y _n ), F _B (X, y _n ), The flatness such as the undulation of each of the opposing surfaces 22A and 22B at an appropriate position (x, y) in the XY plane in the groove portion 22 is calculated, and the series of processes is completed.
[0066]
That is, in the above-described processing of step S11 to step S17, as shown in FIG. 6, for example, as shown in FIG. Straightness f of one opposing surface 22A at _A (X _n , Y). And this straightness f _A (X _n , Y) and the groove width change amount D (x) calculated based on the displacement data output from the first and second displacement meters 12a and 12b. _n , Y) and the straightness f of the other facing surface 22B in the X direction at an appropriate Y direction position. _B (X _n , Y).
[0067]
Here, the straightness f of one opposing surface 22A in the X direction f _A (X _n , Y) is calculated by, for example, a phase difference method. In the following mathematical formulas (4) to (7), the description of the y coordinate is omitted.
For example, the distance D output from the first displacement meter 12a ₁ (X _n ) Is an appropriate position x in the X direction as shown in the following formula (4). _n The distance g between the first displacement meter 12a and the one opposing surface 22A at ₁ (X _n ), The straightness error e (x) of the Z-direction motion caused by the fluctuation of the Z-direction distance when the slot die 11 is moved in the X-direction. _n ) Is set as a value obtained by adding.
[0068]
[Expression 4]

[0069]
The distance D output from the third displacement meter 12c ₃ (X _n ) Is an appropriate position x in the X direction as shown in the following formula (5), for example. _n The distance g between the third displacement meter 12c and the one opposing surface 22A at ₃ (X _n ), The straightness error e (x) of the Z-direction motion caused by the fluctuation of the Z-direction distance when the slot die 11 is moved in the X-direction. _n ), And the first displacement meter 12a and the third displacement meter 12c are arranged along the X direction. ₃ (X _n ) Is an appropriate position x in the X direction. _n A predetermined distance L from _x The distance g between the first displacement meter 12a and the one opposing surface 22A at the position obtained by subtracting only ₁ (X _n -L _x ).
[0070]
[Equation 5]

[0071]
Here, in the difference between the above formula (4) and the above formula (5), the straightness error e (x _n ) Can be removed, and as shown in the following equation (6), this difference is expressed as a predetermined distance L. _x ΔD obtained by dividing by _A (X _n ) Is the straightness error e (x _n ) Is corrected, the distance between the first displacement meter 12a and the one opposing surface 22A, that is, the straightness f _A (X _n ).
[0072]
[Formula 6]

[0073]
Accordingly, by integrating the above formula (6) sequentially, the straightness f obtained by removing the error related to the driving of the driving device 15 as shown in the following formula (7). _A (X _n ) Can be calculated.
In addition, the appropriate position x in the X direction of the groove part 22 _n (N is an arbitrary natural number) indicates a position where each displacement data is detected. For example, the position x in this detection _n For position x _n-1 Is the position at the previous detection.
[0074]
[Expression 7]

[0075]
Similarly, in the processing of step S18 to step S24 described above, for example, as shown in FIG. 7, the displacement data output from the first and fourth displacement gauges 12a and 12d is used at appropriate positions in the X direction. Straightness f of one opposing surface 22A in the Y direction _A (X, y _n ) Is calculated. And this straightness f _A (X, y _n ) And the groove width variation D (x, y) calculated based on the displacement data output from the first and second displacement meters 12a and 12b. _n ) And the straightness f of the other facing surface 22B in the Y direction at an appropriate position in the X direction. _B (X, y _n ) Is calculated.
[0076]
In this case, similarly to the processing in the X direction, for example, according to the phase difference method, as shown in the following formula (8), the difference change ΔD in the Y direction with respect to the one opposing surface 22A. _A (Y _n ) Is an appropriate position y in the Y direction. _n The distance g between the first displacement meter 12a and the one opposing surface 22A at ₁ (Y _n ) And an appropriate position y in the Y direction _n The distance g between the fourth displacement meter 12d and the one opposing surface 22A at ₄ (Y _n ), That is, an appropriate position y in the Y direction. _n A predetermined distance L from _y The distance g between the first displacement meter 12a and the one opposing surface 22A at the position obtained by subtracting only ₁ (Y _n -L _y ) With the predetermined distance L _y The value obtained by dividing by.
[0077]
[Equation 8]

[0078]
Then, by integrating the above equation (8) sequentially, as shown in the following equation (9), the straightness f obtained by removing the error related to the driving of the driving device 15 is obtained. _A (Y _n ) Can be calculated.
In addition, description of x coordinate was abbreviate | omitted in the said Numerical formula (8) and following Numerical formula (9). Further, an appropriate position y in the Y direction of the groove 22 _n (N is an arbitrary natural number) indicates the position where each displacement data is detected. For example, the position y in this detection _n For position y _n-1 Is the position at the previous detection.
[0079]
[Equation 9]

[0080]
And the predetermined position y in the Y direction is obtained by repeating the processes in steps S11 to S17 described above. _k A plurality of positions x in the X direction _n Straightness f of two opposing surfaces 22A and 22B at (n = 1, 2,...) _A (X _n , Y _k ), F _B (X _n , Y _k ) Is calculated, and the predetermined position x in the X direction is obtained by repeating the processing in steps S18 to S24 described above. _j A plurality of positions y in the Y direction _n Straightness f of two opposing surfaces 22A and 22B at (n = 1, 2,...) _A (X _j , Y _n ), F _B (X _j , Y _n ) Is calculated.
Here, for example, as shown in FIG. 8, the measurement position is equivalent, that is, (x _n , Y _k ) = (X _j , Y _n ), The straightness f _A (X _n , Y _k ) And straightness f _A (X _j , Y _n ) And straightness f _B (X _n , Y _k ) And straightness f _B (X _j , Y _n ) Equal to each other, so to speak, each straightness f in the X direction f _A (X _n , Y _k ), F _B (X _n , Y _k ) And each straightness f in the Y direction _A (X _j , Y _n ), F _B (X _j , Y _n ) And the straightness f at an appropriate position (x, y) in the XY plane in the groove 22. _A (X, y), f _B (X, y) can be calculated.
And each straightness f at these appropriate positions (x, y) _A (X, y), f _B By (x, y), the flatness such as the undulation of each of the facing surfaces 22A and 22B can be calculated.
[0081]
When the displacement die fixing member 26 is tilted with respect to the facing surfaces 22A and 22B when the slot die 11 is moved by the driving device 15, this tilt component is obtained by, for example, an autocollimator (not shown). The straightness is calculated in consideration of the measurement result.
For example, as shown in FIG. 9, the displacement gauge fixing member 26 has an appropriate inclination angle e with the first displacement gauge 12a as a fulcrum. _p (X _n ), The distance D output from the first displacement meter 12a is inclined with respect to the opposing surfaces 22A and 22B. ₁ ｀ (x) and the distance D output from the third displacement meter 12c ₃ ｀ (x) is described, for example, as shown in the following formula (10) and the following formula (11). C is an arbitrary constant. In addition, in the following formulas (10) to (13), the description of the y coordinate is omitted.
[0082]
[Expression 10]

[0083]
[Expression 11]

[0084]
Inclination angle e _p (X _n ) Is small enough to be ignored, or by measuring with an autocollimator or the like, the distance D in the above formula (11) ₃ 傾斜 (x) to tilt angle e _p (X _n ), The difference between the above formula (10) and the above formula (11) is set to a predetermined distance L as shown in the following formula (12). _x ΔD obtained by dividing by _A ｀ (x _n ) Is straightness f _A (X _n ) And can be approximated as a single derivative of the following equation, and by integrating the following formula (12) sequentially, as shown in the following formula (13), the straightness error of the motion related to the driving of the driving device 15 and the tilt of the motion Straightness f in the X direction with components removed _A (X _n ) Can be calculated.
[0085]
[Expression 12]

[0086]
[Formula 13]

[0087]
Similarly to the process in the X direction, for example, the difference change ΔD in the Y direction shown in the following formula (14) _A ｀ (y _n ) Are sequentially integrated, as shown in the following formula (15), the straightness f in the Y direction from which the straightness error of the motion related to the driving of the driving device 15 and the tilt component of the motion are removed is obtained. _A (Y _n ) Can be calculated. In addition, in the following numerical formula (14) and the following numerical formula (15), the description of the x coordinate is omitted.
[0088]
[Expression 14]

[0089]
[Expression 15]

[0090]
As described above, according to the groove surface shape measuring device 10 and the groove surface shape measuring method according to the present embodiment, the drive device 15 causes the slot die 11 to move in the X direction relative to the displacement gauges 12a,. One opposing surface 22A together with the groove width change amount D in the X direction or Y direction after correcting the straightness error e of the Z direction motion related to the driving of the driving device 15 by making a relative movement only once in the Y direction. Straightness f in X direction or Y direction with respect to _A Can be measured easily and accurately.
Further, the groove width change amount D in the X direction or the Y direction and the straightness f in the X direction or the Y direction with respect to the one opposing surface 22A. _A Based on the above, the straightness f in the X direction or the Y direction with respect to the other facing surface 22B after correcting the straightness error e of the Z-direction motion related to the driving of the driving device 15 _B Can be calculated easily and accurately.
Further, the drive device 15 performs the relative movement between the slot die 11 and each of the displacement gauges 12a,..., 12d at a plurality of different positions in the X direction or the Y direction, thereby appropriately changing the position in the XY plane in the groove portion 22. Straightness f at position (x, y) _A (X, y), f _B (X, y) can be calculated, and the flatness such as the undulation of each of the facing surfaces 22A and 22B can be calculated easily and accurately.
[0091]
In the above-described embodiment, the slot die 11 is moved by the driving device 15. However, the present invention is not limited to this, and the displacement gauges 12a, ..., 12d may be moved in the X direction and the Y direction. Good.
[0092]
In the present embodiment described above, the straightness f in the Y direction at an appropriate position in the X direction. _A (X, y _n ) When measuring the first displacement meter 12a and a predetermined distance L in the Y direction from the first displacement meter 12a. _y The straightness error e (y) of the Z-direction motion related to the driving of the driving device 15 based on the displacement data output from the fourth displacement meter 12d disposed at a position shifted by _n ) Straightness f after correction _A (X, y _n However, the present invention is not limited to this. For example, by the inversion method, the Z-direction motion related to the driving of the driving device 15 based on the displacement data output from the first displacement meter 12a and the second displacement meter 12b. Straightness error e (y _n ) Straightness f after correction _A (X, y _n ) May be calculated.
[0093]
In this inversion method, for example, as shown in FIG. 10, first, as the first measurement, for example, in a state where the first displacement meter 12a and one opposing surface 22A of the slot die 11 are arranged to face each other, Predetermined position x _j , The slot die 11 is moved in the Y direction by the driving device 15, and the distance D between the first displacement meter 12a and the one opposing surface 22A at an appropriate position y in the Y direction by the first displacement meter 12a. ₁ (Y) is detected. Here, the distance D output from the first displacement meter 12a ₁ (X) is a distance g between the first displacement meter 12a and the one opposing surface 22A at an appropriate position y in the Y direction, for example, as shown in the following formula (16). ₁ (Y) is set as a value obtained by adding the straightness error e (y) of the Z-direction motion caused by the fluctuation of the Z-direction distance when the slot die 11 is moved in the Y-direction. Has been.
[0094]
[Expression 16]

[0095]
Next, as a second measurement, the positions of the displacement gauge fixing member 26 and the displacement gauges 12 and 12b are not changed. For example, the second displacement gauge 12b and one facing surface 22A of the slot die 11 are arranged to face each other. For example, the slot die 11 is reversed and moved in the XZ plane by the driving device 15 or the like, and a predetermined position x in the X direction is _j , The slot die 11 is moved in the Y direction by the driving device 15, and the distance D between the second displacement meter 12 b and the one opposing surface 22 A at an appropriate position y in the Y direction is determined by the second displacement meter 12 b. ₂ (Y) is detected.
The distance g between the first displacement meter 12a and the one opposing surface 22A in the first measurement before and after the reversal movement of the slot die 11. ₁ (Y) and the distance g between the second displacement meter 12b and one opposing surface 22A ₂ Set so that (y) is equivalent.
Here, as compared with the first measurement, the distance g between the second displacement meter 12b and the one opposing surface 22A. ₂ Since the contribution of the straightness error e (y) of the Z-direction motion to (y) is in the reverse direction, the distance D output from the second displacement meter 12b ₂ (X) is a distance g between the second displacement meter 12b and the one opposing surface 22A at an appropriate position y in the Y direction, as shown in the following formula (17). ₂ (Y) is set as a value obtained by subtracting the straightness error e (y) of the Z-direction motion caused by the fluctuation of the Z-direction distance when the slot die 11 is moved in the Y-direction. The
[0096]
[Expression 17]

[0097]
Therefore, by adding the above equation (16) and the above equation (17), for example, as shown in the following equation (18), the straightness error e (y) of the Z-direction motion related to the driving of the driving device 15 is obtained. Can be erased.
And from this mathematical formula (18), as shown in the following mathematical formula (19), between the first displacement meter 12a after correcting the straightness error e (y) of the Z-direction motion and the one opposing surface 22A. Distance g ₁ (Y), that is, the straightness f in the Y direction with respect to one opposing surface 22A _A (Y) can be obtained.
In this case, a predetermined distance L in the Y direction _y Since it is not necessary to dispose a plurality of displacement gauges 12a and 12d apart from each other, the movement distance of the slot die 11 in the Y direction by the driving device 15, that is, the measurement range in the Y direction by the displacement gauges 12a and 12b is expanded. be able to. In addition, measurement on the open end of the groove 22, that is, the edge can be performed.
[0098]
[Expression 18]

[0099]
[Equation 19]

[0100]
In the inversion method described above, in the first measurement, the distance D between the first displacement meter 12a and the one opposing surface 22A. ₁ However, the present invention is not limited to this. For example, in the first measurement, the distance D between the first displacement meter 12a and the one opposing surface 22A. ₁ In addition to (y), the distance D between the second displacement meter 12b and the other facing surface 22B ₂ (Y) may be detected.
In this case, when the slot die 11 is reversely moved in the XZ plane after the first measurement is performed, the second displacement meter 12b and one facing surface 22A of the slot die 11 are arranged to face each other. At the same time, the first displacement meter 12c and the other facing surface 22B of the slot die 11 are set to face each other.
In the second measurement, the distance D between the second displacement meter 12b and the one opposing surface 22A. ₂ In addition to (y), the distance D between the first displacement meter 12a and the other facing surface 22B ₁ (Y) is detected.
Thereby, the straightness f of one opposing surface 22A is obtained by one reversal movement. _A (X, y _n ) And the straightness f of the other facing surface 22B _B (X, y _n ) And can be measured. Moreover, the groove width change amount D (x, y) is determined from the outputs of the first displacement meter 12a and the second displacement meter 12b. _n ) Can be calculated.
As in the Y direction, straightness f in the X direction is obtained by the inversion method. _A (X _n , Y), f _B (X _n , Y) and groove width variation D (x _n , Y) may be measured.
[0101]
In the above-described embodiment, the groove width change amount D and the groove width h of the groove portion 22 are measured based on the displacement data output from the first displacement meter 12a and the second displacement meter 12b. For example, as shown in FIGS. 11 and 12, the groove width change amount D and the groove width h may be measured by a single differential interferometer or the like.
Below, the groove surface shape measuring apparatus 40 and the groove surface shape measuring method which concern on the modification of this embodiment are demonstrated.
For example, as shown in FIGS. 11 and 12, the groove surface shape measuring apparatus 40 according to this modification includes a light source 41, a beam splitter 42, a first reflecting mirror 43, and a light receiving unit mounted on a table 25. Unit 44, a polarizing beam splitter 45, first to third quarter-wave plates 46a, 46b, 46c, and a second reflecting mirror 47. For example, a light source is sequentially provided along the X direction. 41, a beam splitter 42, a polarizing beam splitter 45, and a second reflecting mirror 47 are disposed, and further, the first reflecting mirror 43, the light receiving unit 44, and the beam splitter 42 are sandwiched from both sides in the Z direction. Is arranged.
[0102]
Here, the light receiving unit 44 emits interference between the first reflected light L 1 emitted from the light source 41 and reflected by the first reflecting mirror 43 and the second reflected light L 2 reflected by the second reflecting mirror 47. The detection result corresponding to the optical path difference is output to the processing device 13 or the like. Then, the processing device 13 calculates the groove width change amount D and the groove width h based on the detected interference.
For example, as shown in FIG. 11, the first reflected light L <b> 1 is extracted in the Z direction by the beam splitter 42 out of the laser light emitted in the X direction from the light source 41 and reflected by the first reflecting mirror 43. The light is incident on the light receiving unit 44.
On the other hand, as shown in FIG. 12, for example, the second reflected light L2 is emitted from the light source 41 in the X direction, passes through the beam splitter 42, is extracted in the Z direction by the polarization beam splitter 45, and is After being reflected on one opposing surface 22A of the slot die 11 via the four-wave plate 46a and then reflected on the other opposing surface 22B of the slot die 11 via the second quarter-wave plate 46b After being extracted in the X direction by the polarization beam splitter 45 and reflected by the second reflecting mirror 47 toward the light source 41 through the third quarter wavelength plate 46c, it is reflected by the beam splitter 42 in the Z direction. And is incident on the light receiving unit 44.
Here, even if the groove width h of the groove portion 22 changes, the optical path of the first reflected light L1 remains unchanged, but the optical path of the second reflected light L2 changes, so the first light detected by the light receiving portion 44. The groove width change amount D and the groove width h are calculated according to the change in the interference between the reflected light L1 and the second reflected light L2.
[0103]
Note that the groove surface shape measuring apparatuses 10 and 40 for realizing the groove surface shape measuring method according to the embodiment of the present invention may be realized by dedicated hardware, and include a memory and a CPU. It is also possible to realize the functions by loading a program for realizing the functions of the processing device 13 and the control device 14 of the groove surface shape measuring apparatuses 10 and 40 and executing them.
[0104]
Further, by recording a program for realizing the above-described groove surface shape measuring method according to the present invention on a computer-readable recording medium, causing the computer system to read and execute the program recorded on the recording medium. The crystal shape may be measured. The computer system referred to here may include an OS and hardware such as peripheral devices.
[0105]
The computer-readable recording medium is a portable medium such as a flexible disk, a magneto-optical disk, a ROM, and a CD-ROM, and a storage device such as a hard disk built in the computer system. Furthermore, a computer-readable recording medium is a medium that dynamically holds a program for a short time, such as a communication line when transmitting a program via a network such as the Internet or a communication line such as a telephone line, In this case, a volatile memory in a computer system that serves as a server or a client in this case includes a program that holds a program for a certain time.
Further, the program may be a program for realizing a part of the above-described functions, and may be a program capable of realizing the functions described above in combination with a program already stored in a computer system. .
[0106]
【The invention's effect】
As described above, according to the groove surface shape measuring apparatus of the present invention as set forth in claim 1, any of the groove width and the groove width deviation at an appropriate position of the groove portion due to the relative movement of the displacement meter and the groove portion, The straightness in the direction of relative movement of one of the opposing surfaces can be calculated easily and accurately.
Furthermore, according to the groove surface shape measuring apparatus of the present invention as set forth in claim 2, the straightness in the direction of relative movement of either one of the opposing surfaces due to the straightness of any one of the opposing surfaces and the deviation of the groove width. Can be calculated easily and accurately.
Furthermore, according to the groove surface shape measuring apparatus of the present invention as set forth in claim 3, the straightness of the facing surface at an appropriate position in the groove is calculated from the straightness of the facing surface in a plurality of different relative movement directions. With these straightnesses, the flatness of the facing surface can be easily and accurately calculated.
Furthermore, according to the groove surface shape measuring apparatus of the present invention as set forth in claim 4, an error relating to relative movement is output from adjacent displacement meters arranged so as to be separated by a predetermined distance in the direction of relative movement. Based on the detected value and the value of the predetermined distance, it can be canceled by a so-called phase difference method, the groove width after correcting the error related to relative movement, the deviation of the groove width, and the straightness in the direction of relative movement of the opposing surface The degree can be calculated easily and accurately.
[0108]
Also, Claim 5 According to the groove surface shape measuring method of the present invention described, the relative movement between the displacement gauge and the groove portion causes the groove width and the groove width deviation at an appropriate position of the groove portion, and the relative movement direction of one of the opposing surfaces. The straightness at can be calculated easily and accurately.
further, Claim 6 According to the groove surface shape measuring method of the present invention described, the straightness in the direction of relative movement of either one of the opposing surfaces can be easily and accurately determined by the straightness of any one of the opposing surfaces and the deviation of the groove width. It can be calculated well.
further, Claim 7 According to the groove surface shape measuring method of the present invention described, the straightness of the opposing surface at an appropriate position in the groove can be calculated from the straightness of the opposing surface in a plurality of different relative movement directions. By the straightness, the flatness of the facing surface can be calculated easily and accurately.
further, Claim 8 According to the groove surface shape measuring method of the present invention described above, the detection value output from the adjacent displacement meters arranged so that the error relating to the relative movement is separated by a predetermined distance in the direction of the relative movement, Based on the distance value, it can be canceled out by the so-called phase difference method, and the groove width and the deviation of the groove width after correcting the error related to the relative movement and the straightness in the direction of the relative movement of the opposing surface can be easily obtained. And can be calculated with high accuracy.
[0110]
Also, Claim 9 According to the program of the present invention described, by the relative movement of the displacement meter and the groove portion, the groove width at an appropriate position of the groove portion and the deviation of the groove width, and the straightness in the direction of relative movement of one of the opposing surfaces, Can be calculated easily and accurately.
further, Claim 10 According to the program of the present invention described, the straightness in the direction of relative movement of either one of the opposing surfaces can be calculated easily and accurately based on the straightness of any one of the opposing surfaces and the deviation of the groove width. Can do.
further, Claim 11 According to the program of the present invention described, the straightness of the opposing surface at an appropriate position in the groove portion can be calculated from the straightness of the opposing surface in a plurality of different relative movement directions. The flatness of the facing surface can be calculated easily and accurately.
further, Claim 12 According to the program of the present invention described above, the detection value output from the adjacent displacement meters arranged so as to separate the error relating to the relative movement by a predetermined distance in the direction of the relative movement, and the value of the predetermined distance Based on the above, the so-called phase difference method can be canceled out, and the groove width and the deviation of the groove width after correcting the error related to the relative movement and the straightness in the direction of the relative movement of the opposite surface can be calculated easily and accurately. can do.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing a groove surface shape measuring apparatus according to an embodiment of the present invention.
2 is a perspective view showing a moving direction of a slot die in the groove surface shape measuring apparatus shown in FIG. 1. FIG.
3 is a view of the main part of the groove surface shape measuring apparatus shown in FIG. 1 as viewed along the depth direction (Y direction) of the groove.
FIG. 4 is a flowchart showing details of a process for measuring a groove width change amount;
FIG. 5 is a flowchart showing details of processing for measuring flatness.
6 is a perspective view showing an arrangement of each displacement meter according to the processing of step S11 to step S17 shown in FIG.
7 is a perspective view showing an arrangement of each displacement meter according to the processing of step S18 to step S24 shown in FIG.
FIG. 8 is a diagram illustrating an example of measurement results of straightness at a plurality of positions in the X direction and the Y direction.
FIG. 9 is a diagram illustrating an example of a state in which each displacement meter is tilted with respect to a facing surface.
FIG. 10 is a view showing a change in relative position between each displacement meter and the slot die before and after the reversal movement of the slot die.
FIG. 11 is a diagram showing an optical path of first reflected light L1 in a groove shape measuring apparatus according to a modification of the embodiment.
FIG. 12 is a diagram showing an optical path of second reflected light L2 in the groove surface shape measuring apparatus according to a modification of the present embodiment.
FIG. 13 is a cross-sectional view showing an arrangement state of the slot die and the gap gauge in the measurement of the groove width of the groove portion of the slot die according to an example of the prior art.
FIG. 14 is a diagram showing an arrangement state of the slot die and the contact-type displacement probe in the measurement of the flatness of the groove surface of the groove portion of the slot die according to an example of the prior art.
[Explanation of symbols]
10 Slit shape measuring device
11 Slot die
12a First displacement meter (displacement meter)
12b Second displacement meter (displacement meter)
12c Third displacement meter (displacement meter)
12d Fourth displacement meter (displacement meter)
15 Driving device (moving means, reverse moving means)
22 Groove
22A Opposite surface
22B Opposite surface
32 Groove width change amount calculation unit (groove width calculation means)
33a X direction straightness calculation unit (straightness calculation means)
33b Y direction straightness calculation unit (straightness calculation means)
34 Flatness calculation unit (flatness calculation means)
41 Light source
42 Beam splitter (first branching means)
43 1st reflecting mirror (1st branching means, 2nd branching means)
44 Light-receiving part (light-receiving means)
45 Polarizing beam splitter (second branching means)
46a First quarter wave plate (second branching means)
46b Second quarter wave plate (second branching means)
46c 3rd quarter wave plate (2nd branch means)

Claims (12)

A groove surface shape measuring device for measuring a groove surface shape of a groove portion composed of two opposing surfaces,
A pair of displacement meters that are arranged to face each of the facing surfaces and detect a distance between each of the facing surfaces and a deviation of the distance;
A plurality of displacement meters that are disposed to face either one of the two facing surfaces and detect a distance between the two facing surfaces and a deviation of the distance;
Moving means for relatively moving the displacement meter and the groove in a direction parallel to the facing surface;
A groove width calculating means for calculating a groove width of the groove portion and a deviation of the groove width after correcting an error relating to the relative movement based on a detection value output from the pair of displacement meters when the moving means is operated;
Any one of the opposing faces after correcting the error related to the relative movement from the time series data based on the detection values output from the plurality of displacement meters arranged in the movement direction of the relative movement when the moving means is operated. Straightness calculation means for calculating straightness in the direction of relative movement of the surface ,
The straightness calculation means uses the straightness of either one of the opposing surfaces as a detection target in addition to the straightness of any one of the opposing surfaces, based on the straightness of any one of the opposing surfaces. A groove surface shape measuring apparatus which calculates the straightness of the other facing surface .   The straightness calculation means is based on the straightness of any one of the opposing faces and the deviation of the groove width calculated by the groove width calculation means. The groove surface shape measuring apparatus according to claim 1, wherein straightness in the relative movement direction is calculated.   The flatness calculating means for calculating the flatness of the facing surface based on the straightness of the facing surface in a plurality of different relative movement directions calculated by the straightness calculating means. The groove surface shape measuring apparatus as described. The plurality of displacement meters are arranged such that adjacent displacement meters are separated by a predetermined distance in the direction of relative movement,
The correction means which correct | amends the error which concerns on the said relative movement based on the detected value and the said predetermined distance which are output from the said adjacent displacement meters is provided in any one of Claims 1-3 characterized by the above-mentioned. Groove surface shape measuring device. A groove surface shape measuring method for measuring a groove surface shape of a groove portion composed of two opposing surfaces,
A pair of displacement meters that are arranged to face each of the facing surfaces and detect a distance between each of the facing surfaces and a deviation of the distance, and the groove portion are relatively moved in a direction parallel to the facing surface, A groove width calculating step for calculating a groove width of the groove portion and a deviation of the groove width after correcting the error related to the relative movement based on the detection values output from the pair of displacement meters;
A plurality of displacement meters that are disposed to face either one of the two facing surfaces and detect a distance between the two facing surfaces and a deviation of the distance, and the groove portion are opposed to each other. Any of the above after correcting the error related to the relative movement from the time series data based on the detection values output from the plurality of displacement meters arranged in the movement direction of the relative movement, relative movement in the direction parallel to the surface look including the straightness calculating a straightness or in one direction of the relative movement of the opposing surfaces,
In the straightness calculation step, in addition to the straightness of any one of the facing surfaces, the straightness of any one of the facing surfaces is detected, and based on the straightness of any one of the facing surfaces, A groove surface shape measuring method, wherein the straightness of the other facing surface is calculated .   The straightness calculating step is based on the straightness of any one of the facing surfaces and the deviation of the groove width calculated in the groove width calculating step. 6. The groove surface shape measuring method according to claim 5, wherein straightness in the relative movement direction is calculated.   The flatness calculation step of calculating the flatness of the facing surface based on the straightness of the facing surface in a plurality of different directions of relative movement calculated by the straightness calculation step. The groove surface shape measuring method described.   Among the plurality of displacement gauges, an error related to the relative movement based on a detection value output from adjacent displacement gauges arranged so as to be separated from each other by a predetermined distance in the relative movement direction and the predetermined distance. The groove surface shape measuring method according to claim 5, further comprising a correcting step for correcting. A program for causing a computer to function as a means for measuring a groove surface shape of a groove portion composed of two opposing surfaces,
A pair of displacement meters that are arranged to face each of the facing surfaces and detect a distance between each of the facing surfaces and a deviation of the distance, and the groove portion are relatively moved in a direction parallel to the facing surface, A groove width calculating means for calculating a groove width of the groove portion and a deviation of the groove width after correcting the error relating to the relative movement based on a detection value output from a pair of displacement meters;
A plurality of displacement meters that are disposed to face either one of the two facing surfaces and detect a distance between the two facing surfaces and a deviation of the distance, and the groove portion are opposed to each other. Any of the above after correcting the error related to the relative movement from the time series data based on the detection values output from the plurality of displacement meters arranged in the movement direction of the relative movement, relative movement in the direction parallel to the surface The straightness calculating means functions as straightness calculating means for calculating the straightness in the direction of relative movement of one of the opposing faces, and the straightness calculating means is configured to add either one of the other opposing faces in addition to the straightness of the other opposing face. as the detection target straightness of the opposing surface, based on the straightness of the one of the opposed surfaces, program and calculates the straightness of the other one of the opposing surfaces.   The straightness calculation means is based on the straightness of any one of the opposing faces and the deviation of the groove width calculated by the groove width calculation means. The program according to claim 9, wherein straightness in the relative movement direction is calculated. Computer
11. The apparatus according to claim 10, further comprising a flatness calculating unit that calculates the flatness of the facing surface based on the straightness of the facing surface in a plurality of different relative movement directions calculated by the straightness calculating unit. The program described in. Computer
Among the plurality of displacement gauges, an error relating to the relative movement based on a detection value output from adjacent displacement gauges arranged so as to be separated from each other by a predetermined distance in the direction of the relative movement and the predetermined distance. The program according to any one of claims 9 to 11, wherein the program is made to function as a correction unit that corrects.

Images