JP4134240B2 - Particle size distribution measuring device - Google Patents

Particle size distribution measuring device Download PDF

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JP4134240B2
JP4134240B2 JP2007093230A JP2007093230A JP4134240B2 JP 4134240 B2 JP4134240 B2 JP 4134240B2 JP 2007093230 A JP2007093230 A JP 2007093230A JP 2007093230 A JP2007093230 A JP 2007093230A JP 4134240 B2 JP4134240 B2 JP 4134240B2
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particle size
size distribution
particles
scattered light
light intensity
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JP2007206084A (en
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寿一朗 右近
達夫 伊串
喜昭 東川
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Horiba Ltd
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Description

この発明は、粒径分布測定装置に関し、特に、分散した試料粒子に光を照射することによって生ずる回折光および/または散乱光の光強度を検出する複数の検出器を備え、これらの検出器からそれぞれ出力される光強度信号を信号処理部において処理し、この処理結果を例えば表示画面上に表示しうるように構成された粒径分布測定装置に関する。   The present invention relates to a particle size distribution measuring apparatus, and in particular, includes a plurality of detectors that detect the light intensity of diffracted light and / or scattered light generated by irradiating dispersed sample particles with light. The present invention relates to a particle size distribution measuring apparatus configured to process each output light intensity signal in a signal processing unit and display the processing result on a display screen, for example.

上記粒径分布測定装置は、試料としての粒子を分散バスにおいて適宜の液体(分散媒)に分散させて試料液とし、この試料液を分散バスと循環経路で接続された試料セルに循環供給し、その状態で試料セルに対して例えばレーザ光を照射するようにしている。   The particle size distribution measuring apparatus disperses particles as a sample in an appropriate liquid (dispersion medium) in a dispersion bath to obtain a sample solution, and circulates and supplies the sample solution to a sample cell connected to the dispersion bath through a circulation path. In this state, the sample cell is irradiated with, for example, laser light.

前記試料液中に粒子が多量に含まれている場合には、試料セル内のレーザ光が照射される部分に絶えず粒子が存在しており、この粒子にレーザ光が照射されることによって散乱光が安定に発生し、この散乱光が試料セルの前方、側方あるいは後方に設けられた検出器に入射する。
特開平10−197435号公報
When the sample liquid contains a large amount of particles, the particles are constantly present in the portion of the sample cell that is irradiated with the laser beam, and the scattered light is irradiated by irradiating the particle with the laser beam. Is stably generated, and this scattered light is incident on a detector provided in front, side or rear of the sample cell.
Japanese Patent Laid-Open No. 10-197435

ところで、前記試料液中に含まれる粒子が少なく、レーザ照射部を粒子が時折通過するような場合においては、散乱光は一瞬しか発生しない。通常、この種の粒径分布測定装置においては、散乱光強度信号を繰り返し取り込んで、これを積算することによって測定の再現性を高めるようにしているが、一般に、過大粒子(数百μm〜数mm)の量は、全体の粒子量中における割合が少ない場合が多く、したがって、積算後も過大粒子からの散乱光強度信号が全散乱光強度信号中でごく僅かとなり、ノイズと見分けがつかず、粒径分布として検出されにくい。 By the way, when there are few particles contained in the sample liquid and the particles occasionally pass through the laser irradiation portion, scattered light is generated only for a moment. Normally, in this type of particle size distribution measuring apparatus, the scattered light intensity signal is repeatedly taken and integrated to increase the reproducibility of the measurement. In general, however, oversized particles ( several hundred μm to several The amount of (mm) is often small in the total amount of particles. Therefore, even after integration, the scattered light intensity signal from the oversized particles is negligible in the total scattered light intensity signal and is indistinguishable from noise. It is difficult to detect as a particle size distribution.

これに対して、各粒子に基づく散乱光を積算せずに、複数の検出器のから出力される散乱光強度信号を信号処理部において1スキャン(一巡)取り込むごとに粒径分布演算を行って粒径分布を表示画面に表示する手法が考えられるが、この場合、信号取り込みを高速に行わないと、過大粒子からの散乱光信号を見逃すおそれが多分にある。すなわち、図6(A)に示すように、信号取り込みの間隔が長いと、過大粒子からの散乱光強度信号が取り込まれなくなる。   On the other hand, without integrating the scattered light based on each particle, the particle size distribution calculation is performed each time a scattered light intensity signal output from a plurality of detectors is taken in one scan (one round) in the signal processing unit. Although a method of displaying the particle size distribution on the display screen is conceivable, in this case, unless the signal is captured at high speed, there is a possibility that the scattered light signal from the oversized particles may be missed. That is, as shown in FIG. 6A, if the signal capture interval is long, the scattered light intensity signal from the excessive particles is not captured.

さらに、前記信号処理部の時定数が1秒というように大きいと、一瞬発生する過大粒子に基づく散乱光は、図6(B),(C)に示すように、減衰して検知されなくなる。   Further, when the time constant of the signal processing unit is as large as 1 second, the scattered light based on excessive particles that are generated for a moment is attenuated and cannot be detected as shown in FIGS.

上述のような不都合は、試料液中に粒子を分散させて測定する所謂湿式の粒径分布測定装置のみならず、粒子を例えば空気などの気中において分散させて測定する所謂乾式の粒径分布測定装置においても同様に生じているところである。   The inconvenience as described above is not only a so-called wet particle size distribution measuring device for measuring particles dispersed in a sample solution, but also a so-called dry particle size distribution for measuring particles dispersed in air such as air. This is also occurring in the measurement apparatus.

この発明は、上述の事柄に留意してなされたもので、その目的は、試料中にわずかに含まれる過大粒子の存在を確実に検出し、これを画面上に表示するとともに、気泡やごみ等の異物、さらには測定限界を超える大粒子の混入も検出して、無駄な測定を防止することができる粒径分布測定装置を提供することである。   The present invention has been made in consideration of the above-mentioned matters, and its purpose is to reliably detect the presence of excessive particles slightly contained in the sample and display them on the screen as well as bubbles, dust, etc. It is an object of the present invention to provide a particle size distribution measuring apparatus that can detect unnecessary foreign matters and even large particles exceeding the measurement limit to prevent useless measurement.

上記目的を達成するため、請求項1に記載の発明では、分散した試料粒子に光を照射することによって生ずる回折光および/または散乱光の光強度を検出する散乱光角度に対応して設けられた複数の検出器を備え、これらの検出器からそれぞれ出力される光強度信号を信号処理部が順次取り込んで演算処理部に入力して粒径分布演算を行わせ、この粒径分布演算を光強度信号の取込みごとに行わせるように構成された粒径分布測定装置において、数百μm乃至数mmよりなる過大粒子以外の試料粒子からの散乱光に過大粒子からの散乱光が重畳した散乱光を検出したときの検出器から得られる光強度信号が、過大粒子以外の試料粒子からの散乱光を検出したときの検出器から得られる光強度信号と区別可能なパルスを含むように、前記信号処理部の前記光強度信号の取り込み間隔を短くしてあり、前記演算処理部が、前記パルスをカウントすることにより過大粒子の含有量を把握し、これを表示部の表示画面上に表示するように構成したことを特徴としている。 In order to achieve the above object, the invention according to claim 1 is provided corresponding to a scattered light angle for detecting the light intensity of the diffracted light and / or scattered light generated by irradiating the dispersed sample particles with light. A plurality of detectors, and the signal processing unit sequentially receives the light intensity signals output from these detectors and inputs them to the arithmetic processing unit to perform the particle size distribution calculation. In a particle size distribution measuring apparatus configured to be performed every time an intensity signal is captured , scattered light in which scattered light from oversized particles is superimposed on scattered light from sample particles other than oversized particles of several hundred μm to several mm. The light intensity signal obtained from the detector at the time of detecting the signal includes a pulse distinguishable from the light intensity signal obtained from the detector when the scattered light from the sample particles other than the excessive particles is detected. place Uptake interval of the light intensity signal parts Yes shorten, as the arithmetic processing unit, to determine the content of the excess particles by counting the pulses, and displays this on the display unit of the display screen It is characterized by the construction.

上記粒径分布測定装置においては、例えば、散乱光強度信号を、例えば1スキャン1ミリ秒といった高速で取り込むことにより、瞬間的にレーザ光路を通過する少数の過大粒子からの散乱光を確実に捉えて過大粒子の含有量を確実に把握して画面上に表示することができ、これによって、小さい粒子から過大粒子までの粒径分布などを正確に測定することができる。   In the above particle size distribution measuring apparatus, for example, by capturing the scattered light intensity signal at a high speed of, for example, 1 millisecond per scan, the scattered light from a small number of excessive particles that instantaneously pass through the laser beam path can be reliably captured. Thus, the content of excessive particles can be reliably grasped and displayed on the screen, whereby the particle size distribution from small particles to excessive particles can be accurately measured.

また、上記粒径分布測定装置において、請求項2に記載のように、前記信号処理部が、前記粒径分布演算の演算結果を表示画面上に表示するように構成されていてもよい。 In the particle size distribution measuring apparatus, as described in claim 2, the signal processing unit may be configured to display a calculation result of the particle size distribution calculation on a display screen .

以上説明したように、この発明の粒径分布測定装置によれば、試料中にわずかに含まれる過大粒子の存在及び含有量を確実に検出し把握して小さい粒子から過大粒子までを含む試料粒子の粒径分布などを正確に測定することができるとともに、気泡やごみ等の異物の混入、さらには装置の測定限界を超える大粒子の混入などを検出することができ、無駄な測定を防止することができる。   As described above, according to the particle size distribution measuring device of the present invention, the sample particles including small particles to excessive particles can be detected and grasped reliably by detecting and grasping the presence and content of the excessive particles slightly contained in the sample. It is possible to accurately measure the particle size distribution, etc., and to detect foreign substances such as bubbles and dust, as well as large particles exceeding the measurement limit of the device, preventing unnecessary measurement. be able to.

以下、この発明の詳細を、図を参照しながら説明する。図1〜図3は、この発明の一つの実施の形態を示している。まず、図1は、この発明の粒径分布測定装置の一例を概略的に示すもので、この図において、1は分散バスで、その内部にはモータ2によって回転する攪拌羽根3が設けられているとともに、その底部の外部には図外の発振器によって振動する超音波振動子4が設けられている。そして、この分散バス1には、タンク5内の分散媒としての液体6が電磁弁7を備えた分散媒供給管8によって供給されるようにしてあり、適宜の手法で分散バス1に供給される試料粒子Pが分散媒6中において分散して、所定の試料液9となる。   Hereinafter, the details of the present invention will be described with reference to the drawings. 1 to 3 show an embodiment of the present invention. First, FIG. 1 schematically shows an example of a particle size distribution measuring apparatus according to the present invention. In this figure, 1 is a dispersion bath, inside which a stirring blade 3 rotated by a motor 2 is provided. In addition, an ultrasonic transducer 4 that is vibrated by an oscillator (not shown) is provided outside the bottom. The dispersion bath 1 is supplied with a liquid 6 as a dispersion medium in a tank 5 through a dispersion medium supply pipe 8 having an electromagnetic valve 7 and is supplied to the dispersion bus 1 by an appropriate method. Sample particles P dispersed in the dispersion medium 6 become a predetermined sample liquid 9.

そして、図1において、10は試料液9が流通的に供給される試料セルとしてのフローセルで、分散バス1とは、ポンプ11、切換え弁12を備えた循環流路13によって接続され、これらとともに試料液循環系14を構成している。前記フローセル10の一方の側には、例えば、レーザ光源15a、ミラー15b,15c、ビームエキスパンダ15dよりなるレーザ照射系15が設けられている。また、フローセル10の他方の側には、集光レンズ16およびレーザ照射系15によって発せられたレーザ光Lが試料液9中の試料粒子Pに照射されたときに生じる散乱光を検出する検出器17が設けられている。ここで、検出器17は、例えば、フローセル10の前方に設けられ比較的小さな角度で散乱する光を検出する前方検出器としてのリングディテクタ17aと、フローセル10の側方に設けられ比較的大きな角度で散乱する光を検出する側方検出器17bおよびフローセル10の後方に設けられより大きな角度で散乱する光を検出する後方検出器17cとからなり、側方検出器17bおよび後方検出器17cは、それぞれ複数のフォトダイオードからなる。   In FIG. 1, reference numeral 10 denotes a flow cell as a sample cell to which the sample liquid 9 is circulated, and is connected to the dispersion bath 1 by a circulation channel 13 including a pump 11 and a switching valve 12. A sample liquid circulation system 14 is configured. On one side of the flow cell 10, a laser irradiation system 15 including, for example, a laser light source 15a, mirrors 15b and 15c, and a beam expander 15d is provided. Further, on the other side of the flow cell 10, a detector that detects scattered light generated when the laser light L emitted by the condenser lens 16 and the laser irradiation system 15 is irradiated on the sample particles P in the sample liquid 9. 17 is provided. Here, the detector 17 is provided in front of the flow cell 10, for example, a ring detector 17a as a front detector for detecting light scattered at a relatively small angle, and a relatively large angle provided on the side of the flow cell 10. The side detector 17b for detecting the light scattered by and the rear detector 17c for detecting the light scattered at a larger angle provided behind the flow cell 10, and the side detector 17b and the rear detector 17c, Each consists of a plurality of photodiodes.

18は前記検出器17からの散乱光強度信号を処理する信号処理部で、次のような部材からなる。すなわち、19a〜19cはプリアンプ(総称するときは、単にプリアンプ19という)で、各検出器17a〜17cに対応して設けられている。20はプリアンプ19を経由した散乱光強度信号を順次切り換えてAD変換器21に送出する信号切換器である。22は演算処理部としてのコンピュータで、装置の各部に対する各種制御を行うとともに、AD変換器21を介して入力される検出器17からの散乱光強度信号を処理し、粒径分布演算を行うものである。   Reference numeral 18 denotes a signal processing unit for processing the scattered light intensity signal from the detector 17 and includes the following members. That is, 19a to 19c are preamplifiers (referred to simply as the preamplifier 19 when collectively referred to), and are provided corresponding to the detectors 17a to 17c. Reference numeral 20 denotes a signal switch for sequentially switching scattered light intensity signals that have passed through the preamplifier 19 and sending them to the AD converter 21. A computer 22 is an arithmetic processing unit that performs various controls on each unit of the apparatus and processes a scattered light intensity signal from the detector 17 input via the AD converter 21 to perform a particle size distribution calculation. It is.

また、図1において、23は前記コンピュータに付設された表示操作部で、CRTや液晶などよりなる表示部24の周辺に各種のファンクションキー25を備えており、コンピュータ22における粒径分布演算によって得られた粒径分布をグラフや数値などによって、表示部24に表示するように構成されている。また、26はプリンタで、前記粒径分布演算の結果を出力するものである。   In FIG. 1, reference numeral 23 denotes a display operation unit attached to the computer, which is provided with various function keys 25 around the display unit 24 made of CRT, liquid crystal, etc., and obtained by particle size distribution calculation in the computer 22. The obtained particle size distribution is displayed on the display unit 24 by a graph or a numerical value. A printer 26 outputs the result of the particle size distribution calculation.

そして、上記粒径分布測定装置においては、検出器17の後段に設けられる信号処理部18の応答速度が速くなるように、各部材19,20,21,22として高速応答性に優れたものを用い、検出器17からの散乱光強度信号を例えば1スキャン1ミリ秒といった高速で取り込み、演算処理を行うことができるようにしてある。また、前記検出器17としては、たった一つの大粒子からの散乱光であってもこれを確実に捕捉できるように、感度が十分に高いものを用いる。 Then, in the above particle size distribution measuring apparatus, as the response speed of the signal processing unit 1 8 provided downstream of the detector 17 is increased, an excellent high-speed response as the respective members 19, 20, 21, 22 The scattered light intensity signal from the detector 17 is taken in at a high speed, for example, 1 millisecond per scan, and can be processed. The detector 17 has a sufficiently high sensitivity so that even scattered light from only one large particle can be reliably captured.

上記構成の粒径分布測定装置を用いて粒径分布測定を行うには、偏析のない均一な定常状態の試料液9を循環系14に循環させ、試料液9で充填されているフローセル10に対してレーザ光源15からレーザ光Lを照射すると、レーザ光Lは、試料液9中の試料粒子Pにおいて散乱光を生ずる。この散乱光は、その散乱光角度に対応して設けられている検出器17に入射する。この散乱光の入射に基づいて検出器17から散乱光強度信号が出力され、プリアンプ19で所定の処理が施された後、信号切換回路20を介してAD変換器21に送られ、さらにコンピュータ22に取り込まれる。   In order to perform the particle size distribution measurement using the particle size distribution measuring apparatus having the above-described configuration, the sample liquid 9 in a uniform steady state without segregation is circulated through the circulation system 14, and the flow cell 10 filled with the sample liquid 9 is supplied to the flow cell 10. On the other hand, when the laser light L is irradiated from the laser light source 15, the laser light L generates scattered light in the sample particles P in the sample liquid 9. This scattered light is incident on the detector 17 provided corresponding to the angle of the scattered light. A scattered light intensity signal is output from the detector 17 based on the incidence of the scattered light, subjected to predetermined processing by the preamplifier 19, and then sent to the AD converter 21 via the signal switching circuit 20, and further to the computer 22 Is taken in.

ところで、既に説明しているように、この実施の形態における粒径分布測定装置においては、プリアンプ19、信号切換回路20、AD変換器21およびコンピュータ22からなる信号処理部18として、応答速度の速いものを用いるとともに、検出器17として、たった一つの大粒子からの散乱光であってもこれを確実に捕捉できるように、感度が十分に高いものを用いているので、大きな粒子であれば、当該粒子において生ずる散乱光の光強度としては大きいため、一つの試料粒子Pがフローセル10内を通過するときに得られる信号だけでも粒径分布演算を行うことができる。 However, as already explained, the particle size distribution measuring apparatus in this embodiment, the preamplifier 19, as a signal processing unit 18 of the signal switching circuit 20, AD converter 21 and a computer 22, a fast response speed In addition to using a detector, the detector 17 is sufficiently sensitive so that even scattered light from only one large particle can be reliably captured. Since the light intensity of the scattered light generated in the particles is large, the particle size distribution calculation can be performed only with a signal obtained when one sample particle P passes through the flow cell 10.

前記粒径分布測定装置においては、過大粒子が微量含まれている試料粒子Pにおいては、過大粒子以外の粒子からの散乱光は安定して検出されるが、過大粒子がレーザLの光軸を通過する瞬間のみ過大粒子からの散乱光が重畳した散乱光が検出される。そして、前記粒径分布測定装置においては、プリアンプ19からコンピュータ22までの信号処理部18の時定数を十分短くしているので、前記過大粒子による散乱光強度信号の減衰がなくなり、この散乱光強度信号の取り込み抜けがないように、高速で繰り返し散乱光強度信号を取り込み、これに基づいてコンピュータ22において粒径分布演算を行って、前記試料粒子Pにおける粒径分布を求め、この粒径分布をコンピュータ22に付設された表示操作部23の表示部24の表示画面24aに表示するのである。   In the particle size distribution measuring apparatus, in the sample particle P containing a small amount of excessive particles, scattered light from particles other than the excessive particles is stably detected. Scattered light in which scattered light from excessive particles is superimposed only at the moment of passing. In the particle size distribution measuring apparatus, since the time constant of the signal processing unit 18 from the preamplifier 19 to the computer 22 is sufficiently shortened, the scattered light intensity signal is not attenuated by the excessive particles, and this scattered light intensity is eliminated. In order not to miss the signal capture, the scattered light intensity signal is repeatedly captured at high speed, and based on this, the particle size distribution calculation is performed in the computer 22 to obtain the particle size distribution in the sample particle P. The information is displayed on the display screen 24 a of the display unit 24 of the display operation unit 23 attached to the computer 22.

このように、この実施の形態における粒径分布測定装置においては、信号処理部18の構成部材19〜22として高速応答性を有するものを用い、複数の検出器17からの散乱光強度信号の取込みから粒径分布演算および粒径分布表示までを高速で繰り返し行い、散乱光強度信号の取込みごとに粒径分布演算を行って表示画面24a上に粒径分布を表示するようにしているので、従来の粒径分布測定装置においては困難であった、試料粒子Pに微量含まれる過大粒子を確実に検出することができる。   As described above, in the particle size distribution measuring apparatus according to this embodiment, the constituent members 19 to 22 of the signal processing unit 18 have high-speed responsiveness, and the scattered light intensity signals are captured from the plurality of detectors 17. To the particle size distribution calculation and the particle size distribution display at high speed, the particle size distribution calculation is performed every time the scattered light intensity signal is captured, and the particle size distribution is displayed on the display screen 24a. It is possible to reliably detect excessive particles contained in a small amount in the sample particle P, which is difficult in the particle size distribution measuring apparatus.

図2および図3は、これを概略的に説明するための図で、検出器17からの散乱光強度信号を時定数の短い信号処理部18で処理することにより、従来は、図6(A),(B)に示すように減衰していた散乱光強度信号は、図3(A),(B)に示すように、減衰することがなくなり、その状態でコンピュータ22に送られる。そして、コンピュータ22においては、前記散乱光強度信号が入力されるごとに粒径分布演算を高速で行うことにより粒径分布が得られる。この粒径分布演算は、散乱光強度信号が入力されるごとに行われるので、粒径分布演算の都度、図2において符号27a〜27eで示すように、粒径分布が得られる。この場合、試料粒子P中に過大粒子が含まれている場合、同図において符号28で示すように、過大粒子の分布が表示される。   FIGS. 2 and 3 are diagrams for schematically explaining this. The scattered light intensity signal from the detector 17 is processed by the signal processing unit 18 having a short time constant. The scattered light intensity signals attenuated as shown in FIGS. 3A and 3B are not attenuated as shown in FIGS. 3A and 3B, and are sent to the computer 22 in this state. In the computer 22, the particle size distribution is obtained by performing the particle size distribution calculation at a high speed every time the scattered light intensity signal is input. Since the particle size distribution calculation is performed every time the scattered light intensity signal is input, the particle size distribution is obtained as indicated by reference numerals 27a to 27e in FIG. In this case, when the sample particles P include excessive particles, the distribution of the excessive particles is displayed as indicated by reference numeral 28 in FIG.

上述のように、この発明の粒径分布測定装置は、信号処理部18の構成部材19〜22として高速応答性を有するものを用いることにより、瞬間の変化に追従することができるようになり光強度信号の取り込みや粒径分布演算を高速に行うことができるようになったが、これに伴って、表示画面24a上における粒径分布の表示も高速で行われ、つまり、高速で表示内容が切り替わる。そこで、このような高速で表示内容が高速で切り替わる表示画面24aにおいて変化する粒径分布を確実に捉えることができるようにするため、前記粒径分布を残存表示されるようにするのが好ましい。   As described above, the particle size distribution measuring apparatus according to the present invention can follow an instantaneous change by using a component having high-speed response as the constituent members 19 to 22 of the signal processing unit 18 so that the light can be tracked. The intensity signal can be taken in and the particle size distribution calculation can be performed at high speed. However, along with this, the display of the particle size distribution on the display screen 24a is also performed at high speed. Switch. Therefore, it is preferable to display the particle size distribution so that the particle size distribution changing on the display screen 24a in which the display contents are switched at high speed can be reliably captured.

図4は、前記粒径分布の残存表示の手法の例を概略的に示すもので、同図(A)は、設定された時間だけ、各粒子の頻度分布の最大値を表示画面24a上に残存表示する例を示しており、同図(B)は、予め設定された回数だけ、過去の粒径分布を重ね描き表示する例を示している。これらいずれの場合においても、画面が高速に切り替わることにより一瞬しか表示されない過大粒子の存在を、測定者など観察する者が確実に認識することができる。   FIG. 4 schematically shows an example of the residual display method of the particle size distribution. FIG. 4A shows the maximum value of the frequency distribution of each particle on the display screen 24a for a set time. An example of remaining display is shown, and FIG. 5B shows an example in which past particle size distributions are overlaid and displayed by a preset number of times. In any of these cases, an observer such as a measurer can surely recognize the presence of oversized particles that are displayed only for a moment when the screen is switched at high speed.

そして、前記粒径分布を表示画面24aに表示する場合、任意に設定した積算分布値に対する粒径(D80やD90等)を、数値またはグラフで表示するようにしてもよい。   And when displaying the said particle size distribution on the display screen 24a, you may make it display the particle size (D80, D90, etc.) with respect to the arbitrarily set integrated distribution value by a numerical value or a graph.

また、グラフ表示の場合、粒径分布を棒グラフで表示してもよく、さらに、図5に示すように、横軸に時間をとり横軸を図中の矢印で示すようにスイープさせて粒径の変化を絶えず確認できるようにしてもよい。   In the case of a graph display, the particle size distribution may be displayed as a bar graph. Further, as shown in FIG. 5, the time is taken on the horizontal axis and the horizontal axis is swept as shown by the arrow in the figure to show the particle size. It may be possible to constantly check the change of.

なお、連続してフローセル10を通過する粒子群の散乱光情報は連続した信号情報から得られるが、僅かに含まれる過大粒子の情報は、粒子数が少ないため、散乱光強度信号はパルスで測定され、パルスの信号頻度が過大粒子の測定頻度に相当することになる。そこで、1個の粒子のパルス散乱光を複数の検出器で測定して粒径演算が得られるが、このパルスをカウントすることにより過大粒子の含有量を把握することができる。   Note that the scattered light information of the particles passing through the flow cell 10 can be obtained from the continuous signal information. However, since the information on the excessively contained particles is small, the scattered light intensity signal is measured in pulses. Therefore, the signal frequency of the pulse corresponds to the measurement frequency of the excessive particles. Therefore, the particle size calculation can be obtained by measuring the pulse scattered light of one particle with a plurality of detectors. By counting the number of pulses, the content of excessive particles can be grasped.

この発明の粒径分布測定装置の構成の一例を概略的に示す図である。It is a figure which shows roughly an example of a structure of the particle size distribution measuring apparatus of this invention. 前記粒径分布測定装置の画面上の表示動作を説明するための図である。It is a figure for demonstrating the display operation on the screen of the said particle size distribution measuring apparatus. 前記粒径分布測定装置における散乱光強度信号の処理状態を説明するための図である。It is a figure for demonstrating the processing state of the scattered light intensity signal in the said particle size distribution measuring apparatus. 前記粒径分布測定装置における粒径分布の表示態様を説明するための図である。It is a figure for demonstrating the display mode of the particle size distribution in the said particle size distribution measuring apparatus. 前記粒径分布測定装置における粒径分布の表示態様を説明するための図である。It is a figure for demonstrating the display mode of the particle size distribution in the said particle size distribution measuring apparatus. 従来技術の欠点を説明するための図である。It is a figure for demonstrating the fault of a prior art.

符号の説明Explanation of symbols

17 検出器
18 信号処理部
19 プリアンプ
20 信号切換器
21 AD変換器
22 コンピュータ
24a 表示画面
27a〜27e 粒径分布
P 試料粒子
L 光
DESCRIPTION OF SYMBOLS 17 Detector 18 Signal processing part 19 Preamplifier 20 Signal switcher 21 AD converter 22 Computer 24a Display screen 27a-27e Particle size distribution P Sample particle L Light

Claims (2)

分散した試料粒子に光を照射することによって生ずる回折光および/または散乱光の光強度を検出する散乱光角度に対応して設けられた複数の検出器を備え、これらの検出器からそれぞれ出力される光強度信号を信号処理部が順次取り込んで演算処理部に入力して粒径分布演算を行わせ、この粒径分布演算を光強度信号の取込みごとに行わせるように構成された粒径分布測定装置において、数百μm乃至数mmよりなる過大粒子以外の試料粒子からの散乱光に過大粒子からの散乱光が重畳した散乱光を検出したときの検出器から得られる光強度信号が、過大粒子以外の試料粒子からの散乱光を検出したときの検出器から得られる光強度信号と区別可能なパルスを含むように、前記信号処理部の前記光強度信号の取り込み間隔を短くしてあり、前記パルスをカウントすることにより過大粒子の含有量を把握し、これを表示部の表示画面上に表示するように構成したことを特徴とする粒径分布測定装置。 It has a plurality of detectors provided corresponding to the angle of scattered light that detects the light intensity of diffracted light and / or scattered light generated by irradiating the dispersed sample particles with light, and is output from each of these detectors. The particle size distribution is configured so that the signal processing unit sequentially captures the light intensity signal and inputs it to the arithmetic processing unit to perform the particle size distribution calculation, and to perform this particle size distribution calculation every time the light intensity signal is captured. In the measuring device, the light intensity signal obtained from the detector when the scattered light obtained by superimposing the scattered light from the excessive particles on the scattered light from the sample particles other than the excessive particles of several hundred μm to several mm is excessive. The light intensity signal capturing interval of the signal processing unit is shortened so as to include a pulse that can be distinguished from the light intensity signal obtained from the detector when detecting scattered light from sample particles other than particles, To grasp the content of the excess particles by counting the serial pulse, a particle size distribution measuring apparatus characterized by being configured to display this on the display unit of the display screen. 前記信号処理部が、前記粒径分布演算の演算結果を表示画面上に表示するように構成されている請求項1に記載の粒径分布測定装置。 The particle size distribution measuring apparatus according to claim 1, wherein the signal processing unit is configured to display a calculation result of the particle size distribution calculation on a display screen .
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