JP4125215B2 - 光学装置および半導体露光装置 - Google Patents
光学装置および半導体露光装置 Download PDFInfo
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- JP4125215B2 JP4125215B2 JP2003374113A JP2003374113A JP4125215B2 JP 4125215 B2 JP4125215 B2 JP 4125215B2 JP 2003374113 A JP2003374113 A JP 2003374113A JP 2003374113 A JP2003374113 A JP 2003374113A JP 4125215 B2 JP4125215 B2 JP 4125215B2
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
- G02B13/143—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation for use with ultraviolet radiation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
T=exp(−190×1cm×0.01atm)=0.150
しかないことを示す。
Photochemistry of Small Molecules」 (Hideo Okabe著、AWiley−Interscience Publication、1978年、178頁)
(デバイス生産方法の実施例)
図6は微小デバイス(ICやLSI等の半導体チップ、液晶パネル、CCD、薄膜磁気ヘッド、マイクロマシン等)の製造のフローを示す。ステップ1(回路設計)ではデバイスのパターン設計を行う。ステップ2(マスク製作)では設計したパターンを形成したマスクを製作する。一方、ステップ3(ウエハ製造)ではシリコンやガラス等の材料を用いてウエハを製造する。ステップ4(ウエハプロセス)は前工程と呼ばれ、上記用意したマスクとウエハを用いて、リソグラフィ技術によってウエハ上に実際の回路を形成する。次のステップ5(組み立て)は後工程と呼ばれ、ステップ4によって作製されたウエハを用いて半導体チップ化する工程であり、アッセンブリ工程(ダイシング、ボンディング)、パッケージング工程(チップ封入)等の工程を含む。ステップ6(検査)ではステップ5で作製された半導体デバイスの動作確認テスト、耐久性テスト等の検査を行う。こうした工程を経て半導体デバイスが完成し、これが出荷(ステップ7)される。
L2:計測用光源レーザ光
R1:レチクル(原版)
R2:レチクル(原版)
W1:ウエハ(感光基板)
M1:レチクル上マーク(外側)
M2:レチクル上マーク(内側)
1:光源
2:照明光学系
3:投影光学系
4:TTL顕微鏡
5:切り換えミラー機構
6:レーザ光導入光学系
7:照明光学系パージ容器
8:投影光学系パージ容器
9:TTL顕微鏡パージ容器
10:レーザ光導入光学系パージ容器
11:窒素供給装置
12:窒素供給ライン
13:流量コントローラ
14:ガス排気ライン
15:照明光学系レンズ
16:σ絞り
17:リレーレンズ
18:NA絞り
19:対物レンズ
20:ミラー
21:ビームスプリッタ
22:エレクターレンズ
23:CCDカメラ
24:瞳面結像レンズ
26:突出壁
27:隔壁
28:内側カバー
29:外側カバー
30:Oリング
31:絞り保持パーツ
32:隙間埋めカバー
33:調寸スペーサ
34:調寸スペーサ
35:位置決めピン
38:リニアガイド
39:パルスモータ
40:ボールネジ
41:リニアガイド固定ベース
42:駆動部固定パーツ
43:調寸スペーサ
Claims (5)
- 紫外線の光路上に配置された光学部品と、
内向きに突出するように設けられた隔壁を有し、前記光学部品を収容する容器と、
前記容器の内部に不活性ガスを供給するガス供給手段と、
前記隔壁の内側で光学部品を保持し、その一部が前記隔壁に設けられた開口部を通り、前記隔壁の外側面に固定される保持部材と、
前記光学部品の位置調整時に前記保持部材と一緒に移動し、前記開口部における前記隔壁と前記保持部材との隙間を減らすように前記保持部材に取り付けられる着脱可能な隙間埋めカバーと、
前記隔壁および前記保持部材を覆い、前記容器を密閉可能で前記容器の外壁の一部となる外側カバーとを備え、
前記保持部材は前記外側カバーを取り外しかつ前記隙間埋めカバーを取り付け前記紫外線が前記光学部品に照射された状態で位置調整され、前記外側カバーは前記隙間埋めカバーを取り外した状態で取り付けられることを特徴とする光学装置。 - 前記隔壁には前記開口部とは別の開口部が設けられており、
前記外側カバーが前記容器から取り外された際、前記別の開口部を覆うように取り付けられる開口部カバーをさらに備えることを特徴とする請求項1に記載の光学装置。 - 前記紫外線は、ArFエキシマレーザ光またはF2エキシマレーザ光であることを特徴とする請求項1または2に記載の光学装置。
- 紫外線を用いて、原版のパターンを基板上に露光する露光装置であって、
前記原版を照明する照明光学系と、
前記原版のパターンを前記基板上に投影する投影光学系と、
前記原版および前記基板のうち少なくとも1つの位置を計測する計測手段とを備え、
前記照明光学系、前記投影光学系および前記計測手段のうち少なくとも1つは、請求項1から3のいずれか1つに記載の光学装置を含むことを特徴とする露光装置。 - 請求項4に記載の露光装置を用いて基板を露光するステップと、
露光された前記基板を現像するステップと、を備えるデバイス製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003374113A JP4125215B2 (ja) | 2003-11-04 | 2003-11-04 | 光学装置および半導体露光装置 |
US10/978,332 US7119952B2 (en) | 2003-11-04 | 2004-11-02 | Optical instrument, exposure apparatus, and device manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003374113A JP4125215B2 (ja) | 2003-11-04 | 2003-11-04 | 光学装置および半導体露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005142188A JP2005142188A (ja) | 2005-06-02 |
JP4125215B2 true JP4125215B2 (ja) | 2008-07-30 |
Family
ID=34616071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003374113A Expired - Fee Related JP4125215B2 (ja) | 2003-11-04 | 2003-11-04 | 光学装置および半導体露光装置 |
Country Status (2)
Country | Link |
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US (1) | US7119952B2 (ja) |
JP (1) | JP4125215B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006278960A (ja) * | 2005-03-30 | 2006-10-12 | Canon Inc | 露光装置 |
US7622310B2 (en) * | 2006-04-27 | 2009-11-24 | Metrosol, Inc. | Contamination monitoring and control techniques for use with an optical metrology instrument |
US7663747B2 (en) * | 2006-04-27 | 2010-02-16 | Metrosol, Inc. | Contamination monitoring and control techniques for use with an optical metrology instrument |
JP2009294439A (ja) * | 2008-06-05 | 2009-12-17 | Toshiba Corp | レジストパターン形成方法 |
CN106680991B (zh) * | 2016-07-26 | 2019-07-09 | 京东方科技集团股份有限公司 | 识别装置及对位设备 |
DE102018131009B3 (de) * | 2018-12-05 | 2020-02-20 | Schölly Fiberoptic GmbH | Bildaufnahmeverfahren und Bildaufnahmevorrichtung |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7016039B2 (en) * | 2003-02-10 | 2006-03-21 | Hinds Instruments, Inc. | Purging light beam paths in optical equipment |
-
2003
- 2003-11-04 JP JP2003374113A patent/JP4125215B2/ja not_active Expired - Fee Related
-
2004
- 2004-11-02 US US10/978,332 patent/US7119952B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20050117226A1 (en) | 2005-06-02 |
JP2005142188A (ja) | 2005-06-02 |
US7119952B2 (en) | 2006-10-10 |
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