JP4123016B2 - Inspection method for polishing burnt metal parts - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an inspection method for polishing burn of metal parts using X-rays.
[0002]
[Prior art]
Conventionally, as a method for inspecting polishing burn of metal parts, there is a method defined in JIS G0561 (Non-patent Document 1). In this method for inspecting polishing burn of metal parts, after washing the metal parts with warm water, the first liquid prepared by mixing 5% nitric acid (specific gravity 1.42) and 95% water was washed with the above hot water. The metal part is etched and corroded until the first liquid becomes black (about 30 to 60 seconds), and then the metal part corroded by the first liquid is washed with warm water, and the washed metal part is washed with hydrochloric acid ( Specific gravity 1.18) Immerse in a second liquid prepared by mixing 50% and 50% water for 3 seconds. Then, the metal part taken out from the second liquid is washed with warm water and dried with a fine breeze, and the structure of the dried metal part is observed to determine the polishing burn of the metal part.
[0003]
[Non-Patent Document 1]
JIS G0561
[0004]
[Problems to be solved by the invention]
However, in the inspection method for polishing burn of a metal part shown in Non-Patent Document 1, the metal part is etched and corroded with the first liquid and the second liquid to determine whether the metal part is burned or burned. In addition, since it is necessary to remove metal corrosion by re-polishing the metal parts for metal parts that are judged to have no polishing burn after etching, the man-hours and metal parts required for the inspection of the metal parts for polishing burns are reduced. There is a problem that man-hours until the state of reuse is increased.
[0005]
Further, in the inspection method for polishing burn of metal parts shown in Non-Patent Document 1, the unevenness of corrosion that occurs when the metal parts are corroded may be discolored similar to the polishing burn and appear in the polishing burn. There is a problem in that there is a misjudgment that determines that a normal metal part is a metal part with polishing burn.
[0006]
Accordingly, an object of the present invention is to provide an inspection method for polishing burn of metal parts that can inspect the presence or absence of polishing burn with less man-hours and can accurately inspect the presence or absence of metal parts without damaging the metal parts. It is in.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, an inspection method for polishing burn of a metal part according to the invention of claim 1 comprises:
Prepare a plurality of metal part samples for threshold setting, emit X-rays from the X-ray emission device to each sample, and determine the intensity of X-ray diffracted by each sample for each sample. A half burn width of the intensity distribution with respect to the diffraction angle of the X-ray measured by the X-ray detector for each of the above samples is measured, and a polishing burn inspection method using etching for each of the above samples. To determine the presence or absence of polishing burn for each of the samples, and then polishing burn based on the half width of the sample where polishing burn was observed and the half width of the sample where polishing burn was not observed Determining a half-value width threshold for determining whether or not
An X-ray is emitted from the X-ray emitting device to the metal part to be inspected, the intensity of X-ray diffracted by the metal part to be inspected is measured by the X-ray inspection device, and the X of the metal part to be inspected is measured. The half-value width of the intensity distribution with respect to the diffraction angle of the X-rays measured by the line inspection device is obtained, and the half-value width of the metal part to be inspected is compared with the threshold value of the half-value width. And a step of determining whether or not the part has been burned and burned.
[0008]
In this specification, the intensity of the X-ray is defined as the number of X-ray photons measured by the X-ray detector per unit time or a physical quantity corresponding to the number (for example, voltage, current, etc.). The
[0009]
The diffraction angle is generally an angle between an optical axis of X-rays emitted from the X-ray detection device and an optical axis of diffraction X-rays emitted from the X-ray detection device and diffracted by the metal part. In addition to the general meaning angle, an angle obtained by performing linear transformation on the general meaning angle (when the general meaning angle is 2θ, the linear transformation angle θ ′ is θ ′ = a (2θ ) + B and a are real numbers and b is an arbitrary constant angle).
[0010]
The present inventor has a correlation between the half-value width of the intensity distribution with respect to the diffraction angle of the diffracted X-rays emitted by the X-ray emitting device and diffracted by the metal parts, and the presence or absence of polishing burn of the metal parts. It was discovered that the presence or absence of polishing burn of metal parts can be inspected by measuring the half width of the intensity distribution with respect to the diffraction angle of diffracted X-rays.
[0011]
According to the method for inspecting polishing burn of a metal part according to the first aspect of the present invention, since the burn burn of the metal part to be inspected is judged based on the half width of the intensity distribution with respect to the diffraction angle of X- ray, Unlike the above-described inspection method for polishing burns of metal parts, which etches and corrodes metal parts using the above, it is possible to determine the presence or absence of polishing burns of metal parts without damaging the metal parts. Therefore, the man-hours for inspecting the presence or absence of polishing burn of the metal parts and the man-hours until the metal parts determined to have no polishing burn after the inspection are reused are greatly reduced.
[0012]
Moreover, according to the inspection method for polishing burn of a metal part according to the first aspect of the invention, since the burn burn of the metal part to be inspected is determined based on the half width of the intensity distribution with respect to the diffraction angle of the X-ray, Etching of metal parts using a corrosive solution corrodes the metal parts accurately without burning as in the non-patent document 1 inspection method for polishing burns of metal parts. The presence or absence can be inspected.
[0013]
Further, the method for inspecting polishing burn of metal parts of the invention of claim 2 is as follows:
In the inspection method of the polishing burn of the metal part according to claim 1,
The diffraction angle is an angle formed by the optical axis of X-rays emitted from the X-ray emission device and the optical axis of diffraction X-rays emitted from the X-ray emission device and diffracted by the metal part,
When the metal part for the threshold setting and the metal part to be inspected are steel parts,
Characterized in that the half width of the intensity distribution for diffraction angle of X-rays measured by the X-ray detector of the metal component to be the inspection determines that the polishing burn occurs below the threshold value of the half width It is said.
Further, the method for inspecting polishing burn of metal parts of the invention of claim 3 is as follows:
In the inspection method of the polishing burn of the metal part according to claim 2,
The half-value width threshold is 6 °.
[0014]
In this specification, the central axis of the X-ray is referred to as the optical axis of the X-ray.
[0015]
The angle formed by the optical axis of X-rays emitted from the X-ray emitting device and the optical axis of diffracted X-rays emitted from the X-ray emitting device and diffracted by the metal parts is generally X-ray diffraction. In general, a diffraction angle having a general meaning represented by 2θ (note that an angle θ ″ (θ ″ = 2θ + β, β is 0 °) obtained by adding an arbitrary constant angle to the diffraction angle 2θ of this general meaning. Any constant angle) is also included in the general meaning of diffraction angle.
[0016]
When the angle formed by the optical axis of the X-ray emitted from the X-ray emitting device and the optical axis of the diffracted X-ray emitted from the X-ray emitting device and diffracted by the metal part is defined as a diffraction angle, The method for inspecting burn burn of metal parts of the present invention using the half width of the X-ray intensity distribution with respect to the diffraction angle of the X-ray and the method for inspecting burn burn of metal parts using conventional etching When the same steel part is burned and inspected, and the metal part is a steel part, the steel part is calculated with the half width value calculated by the method for inspecting the burnt metal part of the present invention. It was discovered that the presence or absence of polishing burn can be judged. When a steel part is used as the metal part and the half width of the intensity distribution with respect to the diffraction angle of the general meaning of the X-ray measured by the X-ray detector is 6 ° or less We found that metal parts were polished and burned without exception, regardless of differences in the hardness of steel parts due to differences in heat treatment and machining, such as carburization quenching and short peening.
[0017]
According to the method for inspecting polishing burn of a metal part according to the third aspect of the invention, the diffraction angle is determined based on the optical axis of the X-ray emitted from the X-ray emitting apparatus and the metal part emitted from the X-ray emitting apparatus. The half value of the intensity distribution with respect to the diffraction angle of the X-ray measured by the X-ray detector when the metal part is a steel part when the angle is made with the optical axis of the diffracted X-ray diffracted at Since it is determined that polishing burn has occurred when the width is 6 ° or less, it is possible to accurately determine the polishing burn of the steel part.
In addition, the inspection method for polishing burn of metal parts of the invention of claim 4 is:
In the inspection method of the polishing burn of the metal parts according to any one of claims 1 to 3,
It is characterized in that it is determined whether or not a polishing burn having a portion whose structure is deformed by heat when polishing is performed on a surface portion of the metal part to be inspected exists in the metal part to be inspected. .
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.
[0019]
FIG. 1 shows the arrangement of instruments when inspecting polishing burn of the surface layer portion (including the raceway surface) of the raceway surface of the inner ring of the ball bearing as one embodiment of the method for inspecting polishing burn of metal parts of the present invention. FIG.
[0020]
In FIG. 1, 1 is an X-ray tube as an example of an X-ray emission device, 2 is an X-ray detector as an example of an X-ray detection device, 3 is an inner ring as an example of a steel part, and 4 is an inner ring 3 A lattice surface 5 indicates a raceway surface of the inner ring 3. In FIG. 1, a local portion of the raceway surface of the inner ring 3 is indicated by reference numeral 5, and the raceway surface of the inner ring 3 that is a curved surface having an arcuate cross section is approximately represented by a plane.
[0021]
In the X-ray tube 1, as shown in FIG. 1, the optical axis 7 of the outgoing X-ray emitted from the X-ray tube 1 matches the normal of the portion of the track surface 5 with which the optical axis 7 contacts. Is arranged. In other words, the ψ angle defined as the angle formed by the optical axis 7 of the X-ray incident on the inner ring 3 and the normal of the portion of the raceway surface 5 of the inner ring 3 in contact with the optical axis 7 is set to 0 °. Incident X-rays enter perpendicularly to the raceway surface 5 of the inner ring 3 so that stable diffracted X-rays can be obtained.
[0022]
In the above-described configuration, the X-ray detector 2 with the X-ray detection surface 2 a of the X-ray detector 2 facing the point P where the optical axis 7 of the emitted X-ray intersects the raceway surface 5 of the inner ring 3. The distance from the point P to the X-ray detection surface 2a of the X-ray detector 2 on one plane including the optical axis 7 of the X-ray (in this embodiment, this plane is the paper surface of FIG. 1) is The intensity of diffracted X-rays emitted from the X-ray tube 1 and diffracted by the grating surface 4 is moved on the same circumference by moving the metal part from the track surface 5 of the metal part to the X-ray tube 1 in the direction of arrow A. Measure at each point. Then, an X-ray intensity distribution of the diffracted X-ray is obtained with respect to a diffraction angle 2θ in a general sense, which is an angle formed by the optical axis 7 of the emitted X-ray and the optical axis 8 of the diffracted X-ray, and X with respect to the diffraction angle 2θ is obtained. Find the half width of the line intensity distribution.
[0023]
FIG. 2 is an example of an intensity distribution with respect to the diffraction angle 2θ of X-rays measured by the X-ray detector 2. In the X-ray intensity distribution shown in FIG. 2, when the diffraction angle 2θ is α, the X-ray intensity has a peak value a, and the X-ray intensity value is a / 2, which is half the peak value a. The half width of the intensity distribution with respect to the diffraction angle 2θ of X-rays, which is the width up to, is b. In the inspection method for polishing burn of metal parts of this embodiment, when the value of b is 6 ° or less, it is determined that polishing burn has occurred in the surface layer portion of the raceway surface of the inner ring.
[0024]
In FIG. 1, η is an angle formed by the optical axis 7 and the normal line z of the lattice plane 4, or an angle formed by the normal line z of the lattice plane 4 and the optical axis 8 of the diffracted X-ray. This is an angle derived by performing a linear transformation on the diffraction angle 2θ in a sense, and is one of the diffraction angles that can specify the positional relationship between the optical axis 7 of the emitted X-ray and the optical axis 8 of the diffracted X-ray.
[0025]
The inventor of the present invention uses a conventional method for inspecting the polishing burn using the etching and a polishing burn using the half width of the present invention for the surface layer portion of the raceway surface 32 of the inner ring 31 of the ball bearing indicated by D in FIG. The polishing burn was inspected by two methods of inspection methods.
[0026]
FIG. 4A is a normal quenching product of JIS SUJ2 bearing steel, and the half width when the diffraction angle 2θ of a general meaning is used as the diffraction angle is 6.30 deg. FIG. 4B is a microscopic structural diagram when the inner ring portion indicated by D is processed by a polishing burn inspection method using conventional etching, and FIG. 4B is a normal quenching product of JIS SUJ2 bearing steel. Further, when the diffraction angle 2θ having a general meaning is used as the diffraction angle, the half ring width is 5.00 deg. The portion of the inner ring indicated by D in FIG. 3 is subjected to polishing burn inspection using conventional etching. It is a microscope organization chart when processing by the method.
[0027]
As shown in FIG. 4A, in the case where the half width is 6.30, thin black dots are spread uniformly and uniformly in the microscopic structure diagram. From this, it can be seen that the structure of the surface layer portion is not affected by heat when polishing, and the hardness of the surface layer portion is not lowered. On the other hand, as shown in FIG. 4B, when the half-value width is 5.00, in the microscopic structure diagram, the dark portion is a portion where the structure is changed by heat when polishing near the surface of the surface layer portion. A black part is seen. In this dark black part, the structure becomes brittle even if it is changed by the heat at the time of polishing, and the hardness of the structure is also reduced to a value below the specified value.
[0028]
In FIG. 5, the half width of the X-ray intensity distribution of the X-ray with respect to the diffraction angle 2θ in a general sense and the conventional etching were used when the surface layer portion D was a normal quenching product of SUJ2 bearing steel. The pass / fail result of polishing burn by microscopic structure observation of the surface layer part processed by the method is shown.
[0029]
In FIG. 5, the vertical axis indicates the half width, the horizontal axis indicates the sample number, the white circle indicates a sample in which no polishing burn is observed as shown in FIG. As shown in B), a sample with polishing burn is shown.
[0030]
As shown in FIG. 5, the inner rings of the sample numbers 2, 3, 6 and 10 judged to be unacceptable by the microscopic observation were all half-widths of the intensity distribution of the diffracted X-ray with respect to the diffraction angle 2θ of 6 degrees or less. On the other hand, the inner rings of Sample Nos. 1, 4, 5, 7, 8, 9, 11, 12, 13, 14 and 15 that were judged to be acceptable by the microscopic observation are the intensity distribution of the diffracted X-rays with respect to the diffraction angle 2θ. All the half-value widths are larger than 6 deg. From this, the threshold of the half width of the intensity distribution of the diffracted X-ray with respect to the diffraction angle 2θ, which is a general meaning for judging whether or not the inner ring using the normally quenched product of SUJ2 bearing steel has been polished and burned, is set. 6 deg can be set.
[0031]
FIG. 6 shows the half-value width of the intensity distribution of the diffracted X-ray with respect to the diffraction angle 2θ in a general sense when the material of the surface layer portion D is carburized and quenched SAE5120 steel, and the conventional etching is used. 5 shows the result of pass / fail of polishing burn by microscopic observation of the surface layer portion processed by the conventional method.
[0032]
Also in FIG. 6, as in FIG. 5, the vertical axis is the half width, the horizontal axis is the sample number, the white circle is a sample in which the polishing burn is not observed as shown in FIG. As shown in FIG. 4B, the sample in which the polishing burn was observed in the microscopic observation is shown.
[0033]
As shown in FIG. 6, the inner rings of sample numbers 2, 4, 6 and 9 that were judged to be unacceptable by the microscopic observation were all half-widths of the intensity distribution of diffracted X-rays with respect to the diffraction angle 2θ of 6 degrees or less. On the other hand, in the inner rings of sample numbers 1, 3, 5, 7, 8 and 10 that were judged to be acceptable by microscopic observation, the full width at half maximum of the intensity distribution of the diffracted X-ray with respect to the diffraction angle 2θ was all larger than 6 deg. ing. Therefore, in the inner ring of SAE5120 steel that has been subjected to carburizing and quenching to increase the surface layer hardness, it is generally determined whether or not polishing and quenching has occurred as in the case of the inner ring that is a normal quenched product of SUJ2 bearing steel The threshold value of the half-value width of the intensity distribution of the diffracted X-ray with respect to the diffraction angle 2θ in a general sense can be set to 6 deg.
[0034]
In addition, the present inventor also applied the half-value width of the intensity distribution of the diffracted X-ray with respect to the diffraction angle 2θ in a general sense and the surface layer processed by using conventional etching even in the steel part subjected to short peening. The relationship with the result of pass / fail of polishing burn was observed. When a diffraction angle 2θ having a general meaning is used as the diffraction angle, the threshold value for determining whether or not the steel part subjected to short peening is polished or burned is the threshold value for polishing or burning the steel part subjected to normal quenching. It has been found that the threshold value is 6 deg which is the same value as the threshold value for determining the presence or absence and the threshold value for determining the presence or absence of grinding burn of the steel parts subjected to carburizing and quenching.
[0035]
According to the method for inspecting polishing burn of metal parts in the above embodiment, since the burn-up of the surface layer portion of the inner ring 3 is determined based on the half width of the X-ray intensity distribution with respect to 2θ as an example of the X-ray diffraction angle. Unlike the conventional method for inspecting and burning metal parts by etching the metal parts with a corrosive liquid, it is possible to determine whether or not the inner ring 3 is burned without damaging the inner ring 3. Therefore, it is possible to significantly reduce the number of man-hours required for inspection of polishing burn and the time required for reusing the inner ring that has been determined to have no polishing burn after inspection.
[0036]
In addition, according to the method for inspecting polishing burn of metal parts of the above embodiment, the surface burn of the surface layer portion of the inner ring 3 is performed based on the half width of the X-ray intensity distribution with respect to 2θ as an example of the X-ray diffraction angle. Because it is judged, the unevenness of corrosion is not judged as polishing burn as in the conventional method of inspecting polishing burn of metal parts that etch and corrode metal parts using corrosive liquid, and it is normal that there is no polishing burn. There is no misjudgment that determines that the inner ring is an inner ring with polishing burn.
[0037]
Further, according to the method for inspecting polishing burn of a metal part of the above embodiment, the diffraction angle is diffracted by the optical axis of the X-ray emitted from the X-ray emitting apparatus and the metal part emitted from the X-ray emitting apparatus. Measured by the X-ray detector 2 when the diffraction angle 2θ in a general sense, which is an angle formed by the optical axis of the diffracted X-rays, and when the metal part is an inner ring 3 that is a steel part. Further, since it is determined that the inner ring has burnt burn when the half width of the intensity distribution with respect to the diffraction angle 2θ of the X-ray is 6 ° or less, it is possible to accurately determine the burn burn of the inner ring.
[0038]
In the inspection method for polishing burn of metal parts of this embodiment, the inner ring of the ball bearing is adopted as the metal part. However, in the inspection method of polishing burn of metal part of the present invention, the outer ring of the ball bearing is used as the metal part. Metal parts other than the inner ring of the ball bearing, such as an outer ring, an inner ring, and a roller of the ball, roller bearing, may be employed.
[0039]
Moreover, in the inspection method for polishing burn of metal parts of this embodiment, the inner ring 3 which is a steel part was adopted as a metal part. However, in the inspection method of polishing burn of metal parts of this embodiment, as a metal part, Metal parts other than steel parts such as copper parts, aluminum parts, and stainless steel parts may be used.
[0040]
In the inspection method for polishing burn of metal parts of this embodiment, the optical axis 7 of the X-rays emitted from the X-ray tube 1 matches the normal direction of the portion of the track surface 5 that the optical axis 7 reaches. An X-ray tube 1 as an example of an X-ray emitting device is disposed, and the ψ angle defined as the angle formed by the optical axis 6 of the X-ray incident on the inner ring 3 and the normal line of the orbital plane 5 is 0 °. However, in the inspection method for polishing burn of metal parts of the present invention, the ψ angle defined as the angle formed by the optical axis of the X-ray incident on the inner ring and the normal of the portion of the raceway surface reached by the optical axis is The X-ray emission device may be arranged so as to have an angle other than 0 °.
[0041]
In the method for inspecting polishing burn of metal parts according to this embodiment, an X-ray tube 1 as an example of an X-ray emission device is fixed, and an X-ray detector 2 as an example of an X-ray detection device is fixed as shown in FIG. The X-ray intensity distribution with respect to the diffraction angle 2θ of the general meaning was derived by moving in the direction of the arrow A shown in Fig. 1. In the method for inspecting polishing burn of metal parts of the present invention, while fixing the X-ray detection device, The X-ray emission device may be moved to derive an X-ray intensity distribution with respect to a diffraction angle 2θ having a general meaning.
[0042]
Moreover, in the inspection method for polishing burn of metal parts of this embodiment, a diffraction angle 2θ having a general meaning is adopted as the diffraction angle, and the inner ring 3 is determined by the value of the half width of the X-ray intensity distribution with respect to the diffraction angle 2θ. In the method for inspecting polishing burn of metal parts according to the present invention, an angle (for example, θ, (θ + η), η or 2η or the like) as a diffraction angle, the presence or absence of polishing burn of a metal part such as an inner ring may be determined based on the half-value width of the X-ray intensity distribution with respect to the angle obtained by linearly transforming the diffraction angle 2θ (note that When the angle obtained by linearly transforming the diffraction angle 2θ in a general sense is adopted as the diffraction angle, the half-value width threshold value for judging whether or not the metal part is burned and burned is that the metal part is a steel part. Is not necessarily 6 °).
[0043]
【The invention's effect】
As apparent from the above, according to the method for inspecting polishing burn of a metal part according to the first aspect of the invention, it is determined whether the burn of the metal part to be inspected is based on the half width of the intensity distribution with respect to the X- ray diffraction angle. Therefore, it is possible to determine the presence or absence of polishing burn of metal parts without damaging the metal parts, until the man-hours required for inspection of polishing burn and the state of reusing the metal parts determined to have no polishing burn after inspection The number of man-hours can be greatly reduced.
[0044]
Further, according to the method for inspecting polishing burn of a metal part according to the first aspect of the present invention, since the burn-in of the metal part to be inspected is judged based on the half width of the intensity distribution with respect to the diffraction angle of X-ray, the metal part The corrosion unevenness of the metal part can be accurately determined without judging the unevenness of the corrosion as the polishing burn unlike the inspection method of the polishing burn of the metal part in which the metal part is burnt and burned.
[0045]
In addition, according to the method for inspecting polishing burn of metal parts according to the first aspect of the present invention, the corrosion of the parts to be inspected is unnecessary as described above, and the reuse of the parts to be inspected is easy. Application to an inspection apparatus incorporated in an inspection line is preferable. Furthermore, application to an automatic inspection device of an automatic line is also preferable.
[0046]
According to the third aspect of the method for inspecting polishing burn of a metal part of the invention, the diffraction angle is determined based on the optical axis of the X-ray emitted from the X-ray emitting apparatus and the metal part emitted from the X-ray emitting apparatus. The half value of the intensity distribution with respect to the diffraction angle of the X-ray measured by the X-ray detector when the metal part is a steel part when the angle is made with the optical axis of the diffracted X-ray diffracted at Since it is determined that polishing burn has occurred when the width is 6 ° or less, it is possible to accurately determine the polishing burn of the steel part.
[Brief description of the drawings]
FIG. 1 is a diagram showing the arrangement of instruments when performing a method for inspecting polishing burn of metal parts according to an embodiment of the present invention.
FIG. 2 is a diagram showing an example of an intensity distribution of diffracted X-rays with respect to a diffraction angle 2θ.
FIG. 3 shows a raceway surface extracted from the inner ring when the presence or absence of polishing burns on the surface of the raceway surface of the inner ring is examined by two methods, the method using the half width of the present invention and the conventional method using corrosion. It is a figure which shows the location of the surface layer part.
FIG. 4A is a micrograph of the cross section of the portion shown in FIG. 3 in which the material is a normal hardened product and the half-value width of the X-ray intensity distribution with respect to 2θ is 6.30 deg. FIG. 4B is a micrograph of the cross section of the portion shown in FIG. 3 where the material is a normal hardened product and the half width of the X-ray intensity distribution with respect to 2θ is 5.00 deg. is there.
FIG. 5 is a diagram showing the relationship between the half-value width of the X-ray intensity distribution with respect to 2θ in an inner ring using a normally quenched product of SUJ2 bearing steel and the presence or absence of grinding burn of the inner ring.
FIG. 6 is a diagram showing the relationship between the half-value width of the X-ray intensity distribution with respect to 2θ in an inner ring using carburized and quenched SAE5120 steel and the presence or absence of grinding burn of the inner ring.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 X-ray tube 2 X-ray detector 3,31 Inner ring 4 Grating surface 5,32 Orbital surface 7 Optical axis of X-rays emitted from X-ray emitting device 8 Optical axis of diffracted X-rays b X-ray intensity with respect to diffraction angle 2θ Half width of distribution D Surface layer 2θ Diffraction angle in a general sense

Claims (4)

Prepare a plurality of metal part samples for threshold setting, emit X-rays from the X-ray emission device to each sample, and determine the intensity of X-ray diffracted by each sample for each sample. A half burn width of the intensity distribution with respect to the diffraction angle of the X-ray measured by the X-ray detector for each of the above samples is measured, and a polishing burn inspection method using etching for each of the above samples. To determine the presence or absence of polishing burn for each of the samples, and then polishing burn based on the half width of the sample where polishing burn was observed and the half width of the sample where polishing burn was not observed Determining a half-value width threshold for determining whether or not
An X-ray is emitted from the X-ray emitting device to the metal part to be inspected, the intensity of X-ray diffracted by the metal part to be inspected is measured by the X-ray inspection device, and the X of the metal part to be inspected is measured. The half-value width of the intensity distribution with respect to the diffraction angle of the X-rays measured by the line inspection device is obtained, and the half-value width of the metal part to be inspected is compared with the threshold value of the half-value width. And a step of judging whether or not the part has been burned and burned. In the inspection method of the polishing burn of the metal part according to claim 1,
The diffraction angle is an angle formed by the optical axis of X-rays emitted from the X-ray emission device and the optical axis of diffraction X-rays emitted from the X-ray emission device and diffracted by the metal part,
When the metal part for the threshold setting and the metal part to be inspected are steel parts,
Characterized in that the half width of the intensity distribution for diffraction angle of X-rays measured by the X-ray detector of the metal component to be the inspection determines that the polishing burn occurs below the threshold value of the half width Inspection method of polishing burn of metal parts. In the inspection method of the polishing burn of the metal part according to claim 2,
  An inspection method for polishing burn of metal parts, wherein the threshold value of the half width is 6 °. In the inspection method of the polishing burn of the metal parts according to any one of claims 1 to 3,
It is determined whether or not a polishing burn having a portion whose structure is deformed by heat when polishing is performed on a surface portion of the metal part to be inspected exists in the metal part to be inspected. Inspection method for polishing burnt metal parts.

Images