JP4096348B2 - ケーブル処理装置 - Google Patents
ケーブル処理装置 Download PDFInfo
- Publication number
- JP4096348B2 JP4096348B2 JP2000107162A JP2000107162A JP4096348B2 JP 4096348 B2 JP4096348 B2 JP 4096348B2 JP 2000107162 A JP2000107162 A JP 2000107162A JP 2000107162 A JP2000107162 A JP 2000107162A JP 4096348 B2 JP4096348 B2 JP 4096348B2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- cable
- clamp
- cooling water
- vacuum vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000107162A JP4096348B2 (ja) | 2000-04-07 | 2000-04-07 | ケーブル処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000107162A JP4096348B2 (ja) | 2000-04-07 | 2000-04-07 | ケーブル処理装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001287188A JP2001287188A (ja) | 2001-10-16 |
JP2001287188A5 JP2001287188A5 (hu) | 2006-05-25 |
JP4096348B2 true JP4096348B2 (ja) | 2008-06-04 |
Family
ID=18620192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000107162A Expired - Fee Related JP4096348B2 (ja) | 2000-04-07 | 2000-04-07 | ケーブル処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4096348B2 (hu) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4432089B2 (ja) | 2007-05-15 | 2010-03-17 | ニッタ株式会社 | スイベルジョイント |
US11602064B2 (en) * | 2020-09-01 | 2023-03-07 | Applied Materials, Inc. | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers |
-
2000
- 2000-04-07 JP JP2000107162A patent/JP4096348B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2001287188A (ja) | 2001-10-16 |
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