JP4067867B2 - 電圧測定方法及び電気的検査方法 - Google Patents
電圧測定方法及び電気的検査方法 Download PDFInfo
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- JP4067867B2 JP4067867B2 JP2002132219A JP2002132219A JP4067867B2 JP 4067867 B2 JP4067867 B2 JP 4067867B2 JP 2002132219 A JP2002132219 A JP 2002132219A JP 2002132219 A JP2002132219 A JP 2002132219A JP 4067867 B2 JP4067867 B2 JP 4067867B2
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- 238000007689 inspection Methods 0.000 title claims description 465
- 238000000034 method Methods 0.000 title claims description 102
- 238000000691 measurement method Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims description 207
- 238000007493 shaping process Methods 0.000 claims description 38
- 239000012530 fluid Substances 0.000 claims description 13
- 238000012360 testing method Methods 0.000 claims description 13
- 238000009413 insulation Methods 0.000 claims 1
- 230000006698 induction Effects 0.000 description 29
- 238000012545 processing Methods 0.000 description 29
- 239000004065 semiconductor Substances 0.000 description 29
- 230000002950 deficient Effects 0.000 description 27
- 239000003990 capacitor Substances 0.000 description 26
- 230000008569 process Effects 0.000 description 26
- 238000005259 measurement Methods 0.000 description 24
- 239000000872 buffer Substances 0.000 description 23
- 238000010586 diagram Methods 0.000 description 23
- 239000010408 film Substances 0.000 description 21
- 238000004519 manufacturing process Methods 0.000 description 20
- 239000010410 layer Substances 0.000 description 15
- 230000008859 change Effects 0.000 description 12
- 239000000523 sample Substances 0.000 description 12
- 238000009826 distribution Methods 0.000 description 11
- 239000011159 matrix material Substances 0.000 description 11
- 238000005520 cutting process Methods 0.000 description 10
- 238000012544 monitoring process Methods 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 238000005070 sampling Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 230000008439 repair process Effects 0.000 description 4
- 230000005674 electromagnetic induction Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000002591 computed tomography Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009125 cardiac resynchronization therapy Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3225—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/04—Structural and physical details of display devices
- G09G2300/0404—Matrix technologies
- G09G2300/0408—Integration of the drivers onto the display substrate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Tests Of Electronic Circuits (AREA)
- Electroluminescent Light Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002132219A JP4067867B2 (ja) | 2001-05-15 | 2002-05-08 | 電圧測定方法及び電気的検査方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-145060 | 2001-05-15 | ||
| JP2001145060 | 2001-05-15 | ||
| JP2001223647 | 2001-07-24 | ||
| JP2001-223647 | 2001-07-24 | ||
| JP2002132219A JP4067867B2 (ja) | 2001-05-15 | 2002-05-08 | 電圧測定方法及び電気的検査方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003107136A JP2003107136A (ja) | 2003-04-09 |
| JP2003107136A5 JP2003107136A5 (enExample) | 2005-10-27 |
| JP4067867B2 true JP4067867B2 (ja) | 2008-03-26 |
Family
ID=27346707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002132219A Expired - Fee Related JP4067867B2 (ja) | 2001-05-15 | 2002-05-08 | 電圧測定方法及び電気的検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4067867B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005055422A (ja) * | 2003-07-23 | 2005-03-03 | Fuji Xerox Co Ltd | 故障診断用検知信号取得装置、故障診断装置、および支持基板 |
| KR101270180B1 (ko) | 2004-01-30 | 2013-05-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 검사장치 및 검사방법과, 반도체장치 제작방법 |
| JP4877870B2 (ja) * | 2004-01-30 | 2012-02-15 | 株式会社半導体エネルギー研究所 | 半導体装置の製造方法 |
| JP2007042492A (ja) * | 2005-08-04 | 2007-02-15 | Aitesu:Kk | 有機elリペア方法とリペア装置 |
| KR100759688B1 (ko) * | 2006-04-07 | 2007-09-17 | 삼성에스디아이 주식회사 | 원장단위 검사가 가능한 유기전계발광 표시장치 및모기판과 그 검사방법 |
| KR100812023B1 (ko) * | 2006-08-23 | 2008-03-10 | 삼성에스디아이 주식회사 | 유기전계발광 표시장치 및 그 모기판 |
| KR100732819B1 (ko) | 2006-08-30 | 2007-06-27 | 삼성에스디아이 주식회사 | 유기전계발광 표시장치 및 그의 모기판 |
| CN111261639A (zh) * | 2015-09-11 | 2020-06-09 | 夏普株式会社 | 图像显示装置以及图像显示元件的制造方法 |
-
2002
- 2002-05-08 JP JP2002132219A patent/JP4067867B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003107136A (ja) | 2003-04-09 |
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