JP4067671B2 - Heat treatment furnace - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heat treatment furnace that performs firing, gradual cooling, and the like of a substrate glass for an electronic component that requires a cleanness, such as a substrate glass for liquid crystal and a substrate glass for plasma display.
[0002]
[Prior art]
In the heat treatment furnace used for the heat treatment of the object to be treated as described above, a heat-resistant lining material having a heat ray transmission function such as quartz glass or super heat-resistant glass is arranged inside the furnace in order to keep the cleanness. And the workpiece is indirectly heated by a heater provided around the inside of the furnace.
[0003]
The reason for this is that the furnace wall is always exposed to a high-temperature atmosphere in order to heat-treat the workpiece, and the refractory structure constituting the furnace wall becomes oxidized and brittle, and the volatilization contained in the workpiece As the chemical components evaporate and react with the components on the furnace wall, the precipitation and adhesion of impurities progresses, and these fall off the furnace wall and adhere as foreign matter on the workpiece, causing defective products. In order to prevent this, the heat resistant lining material as described above is disposed inside the furnace.
[0004]
[Problems to be solved by the invention]
Recently, the demand for liquid crystal displays, plasma displays, etc. is increasing, and the trend is toward larger size. Parts for these products are also required to cope with such a situation, and it is necessary to increase the size and width of the heat treatment furnace used for heat treatment of the parts.
[0005]
When the heat treatment furnace is enlarged and widened in order to satisfy the above requirements, the heat-resistant lining material disposed on the ceiling portion in the furnace needs to be enlarged and widened.
[0006]
However, when the heat-resistant lining material disposed on the ceiling is enlarged and widened, the weight increases, and it becomes easy to cause a creep by being exposed to a high temperature during the heat treatment, and there is a problem that crack breakage occurs at an early stage. .
[0007]
In addition, in order to produce a large and wide heat-resistant lining material, it is necessary to increase the size of the production equipment, which naturally increases the production cost. When such a heat-resistant lining material is used in a heat treatment furnace, There is also a problem that the heat treatment cost of the product becomes high.
[0008]
An object of the present invention is to provide a heat treatment furnace that can achieve both cost reduction, enlargement, and widening while ensuring cleanliness in the furnace .
[0009]
[Means for Solving the Problems]
In order to achieve the above object, a heat treatment furnace of the present invention is a heat treatment furnace used for heat treatment of a substrate glass for electronic components, and a furnace body having a tunnel-like heat treatment passage surrounded by a refractory structure, a heater disposed inside the periphery of the furnace body is disposed in a heat treatment channel of the furnace body, a tunnel-shaped inner passage surrounded with a heat-resistant lining material having a heat-ray transmission function, to be treated comprising a conveying means of the object to be processed over the entire length in the longitudinal direction is disposed in the heat treatment path in said heat treatment within the passageway to carry along the substrate glass is ones in a longitudinal direction of the heat treatment passage The heat-resistant lining material constituting the ceiling portion of the inner passage is provided by joining a plurality of sheets in the width direction and the longitudinal direction of the heat treatment passage, and a seam between the plurality of heat-resistant lining materials. Depending on the joint plate Are sealed, the plurality of heat-resistant lining material comprises a horizontal crosspiece member which laterally bridged supporting heat resistant lining material, the width direction of the heat treatment passage transverse crosspiece member which constitutes the ceiling of the passage of the support means having a 1 to hanger for lowering support suspended at a plurality of locations, the furnace is supported relative to the body, together with the horizontal crosspiece member is disposed within said passageway, transverse bars The hanging tool for suspending and supporting a member has a plate-like portion suspended from a ceiling portion of the furnace body through a gap between joints of the plurality of heat-resistant lining materials .
[0010]
In the heat treatment furnace of the present invention, a plurality of heat resistant lining materials constituting the ceiling portion of the inner passage are arranged in the width direction and the longitudinal direction of the heat treatment passage, and the heat resistance of the plurality of sheets is Since the seam between the lining materials is sealed by the joint plate, a plurality of inexpensive heat-resistant lining materials having a small width dimension can be added and used. It can prevent falling and ensure the cleanliness in the furnace . In addition , the horizontal beam member that supports the heat-resistant lining material disposed on the ceiling portion of the inner passage of the furnace body is suspended and supported by the hanging tools suspended at a plurality of positions in the width direction of the heat treatment passage. By doing so, even if the heat treatment passage is widened, the amount of creep deformation of the crosspiece member is reduced, and accordingly, the amount of creep deformation of the heat resistant lining material of the ceiling portion is also reduced, and crack damage can be prevented. .
[0011]
Further, in the heat treatment furnace according to the present invention, the suspension member that suspends and supports the crosspiece member is suspended from the ceiling portion of the furnace body through a gap between seams of the plurality of heat resistant lining materials. Therefore, a plurality of heat-resistant lining materials on the ceiling portion can be disposed close to each other at a narrow interval (gap) as large as the plate thickness of the hanger in the width direction of the heat treatment passage. .
[0012]
The said suspension tool shall comprise the support part of the said crosspiece member formed in the lower end of the said plate-shaped part at right angles to the plate surface of this plate-shaped part .
[0015]
DETAILED DESCRIPTION OF THE INVENTION
1 is a schematic longitudinal front view showing an embodiment of the heat treatment furnace of the present invention, FIG. 2 is a schematic longitudinal side view showing an embodiment of the heat treatment furnace of the present invention, and FIG. 3 is a ceiling portion in the embodiment of the heat treatment furnace of the present invention. The principal part schematic perspective view which shows the support state of the heat resistant lining material of FIG. 4, FIG. 4 is an expansion perspective view which shows the suspension support state of the crosspiece member by a hanging tool.
[0016]
1 and 2, 1 is a furnace body, 2 is a heater, 3 is a heat resistant lining material, 4 is a crosspiece member, 5 is a conveying means, 6 is a hanging tool, 7 is an object to be processed, and 8 is a setter. , 9 indicates side support members, and 10 indicates a bottom support member.
[0017]
The furnace body 1 has a tunnel-like heat treatment passage 11 surrounded by a refractory structure. As shown in FIG. 1, the heat treatment passage 11 is widened and flattened in order to improve the productivity by arranging a plurality of rows 7 to be processed (FIG. 1 shows an example of three rows) and performing parallel processing. Yes. In this way, by widening the heat treatment passage 11 of the furnace body 1, the workpiece 7 can be applied to a large-sized object.
[0018]
The heater 2 for heating is arrange | positioned by the suitable space | interval at the inner periphery of the furnace main body 1, ie, the ceiling part a, the both-sides parts b and c, and the bottom part d.
[0019]
The heat-resistant lining material 3 is composed of a plate-like heat-resistant material having a heat ray transmission function such as quartz glass or super heat-resistant glass, for example, and the inner periphery of the heat treatment passage 11, that is, the ceiling portion a, The inner passage 12 is configured by being disposed on both sides b, c and the bottom d at appropriate intervals from the heater 2.
[0020]
The heat-resistant lining material 3 has a unit length, a width dimension, and a thickness, and is provided with a heat treatment passage 11 via supporting means, that is, a crosspiece member 4, a hanging tool 6, a side support member 9, and a bottom support member 10. The necessary number of sheets are added in the width direction and the longitudinal direction. The joint 3a of the heat-resistant lining material 3 of the ceiling part a is covered and sealed by applying a joint plate 3b made of the same material. In this case, the joint plate 3b may simply be placed on the joint 3a and bonded. Alternatively, it may be fixed.
[0021]
The specific arrangement structure of the heat resistant lining material 3 is as follows. That is, first, the heat resistant lining material 3 of the ceiling part a is supported by the crosspiece member 4. Since the horizontal beam member 4 is disposed in the inner passage 12, it is necessary to maintain heat resistance and cleanliness. For example, the horizontal beam member 4 is made of a material having high heat resistance such as alumina, and is required to be lightweight. In order to maintain the strength, a case of a hollow round pipe is illustrated, but a square pipe or other appropriate shapes may be adopted.
[0022]
As shown in FIG. 1, the horizontal beam member 4 is installed in parallel to the width direction of the heat treatment passage 11 inside the ceiling portion a of the furnace main body 1, and at that time, one or a plurality of locations (FIG. An example of the case of a part is suspended and supported by a hanging tool 6, and supported at both ends by the wall surfaces of both side portions b and c of the furnace body 1.
[0023]
In FIG. 1, the crosspiece member 4 is divided into three in the width direction of the heat treatment passage 11 and is suspended and supported at the positions of the hanging tools 6 provided at two locations. It may be used and supported by being suspended by penetrating the support hole at the position of the hanger 6.
[0024]
As shown in FIG. 2, the horizontal beam member 4 is horizontally mounted at an appropriate interval such as an equal interval in the longitudinal direction of the heat treatment passage 11, and thereby a heat resistant lining material disposed on the ceiling portion a. 3 is also supported in the longitudinal direction of the heat treatment passage 11.
[0025]
As shown in FIG. 4, the lifting tool 6 includes a plate-like portion 6 a and support portions 6 b of the horizontal beam member 4 provided on both sides of the lower end of the plate-like portion 6 a so as to be orthogonal to the plate surface. Since it is necessary to maintain heat resistance and cleanliness, for example, it is composed of a heat resistant metal material such as Inconel coated with an antioxidant paint.
[0026]
As shown in FIGS. 1 and 2, the hanging tool 6 is preferably hung at an upper position penetrating the ceiling portion a of the furnace body 1 with as little heat influence as possible.
[0027]
As shown in FIGS. 1 and 3, the hanging position of the hanging tool 6 is the position of the joint 3 a of the heat-resistant lining material 3 of the ceiling portion a that is added and arranged in the width direction of the heat treatment passage 11. The plate-like portion 6a of the hanging tool 6 is suspended through the gap between the joints 3a.
[0028]
Next, as shown in FIG. 1, the heat resistant lining material 3 on both sides b and c is arranged by adding a necessary number of sheets in the longitudinal direction of the heat treatment passage 11, and is provided with side support provided on both sides of the furnace body 1. Supported by member 9.
[0029]
Moreover, as shown in FIG. 1, the heat resistant lining material 3 of the bottom part d is plural in the width direction of the heat treatment passage 11 as in the case of the ceiling part a (FIG. 1 illustrates the case of three sheets). And is supported by the bottom support member 10. Further, as shown in FIG. 2, the heat treatment passage 11 is arranged by adding a necessary number of sheets and supported by the bottom support member 10 as shown in FIG. 2. The bottom support members 10 are provided at appropriate intervals such as equal intervals in the width direction and the longitudinal direction of the heat treatment passage 11.
[0030]
As shown in FIGS. 1 and 2, the conveying means 5 is exemplified by a case where it is constituted by drive rollers arranged at equal intervals over the entire length in the longitudinal direction of the heat treatment passage 11, but other conveying means are adopted. May be.
[0031]
The workpiece 7 is positioned and placed on the setter 8 and is placed on the conveying means 5 from the entrance side of the furnace body 1.
[0032]
The configuration of the heat treatment furnace of the present invention is as described above. Next, the heat treatment operation of the workpiece 7 will be described.
[0033]
First, on the inlet side of the furnace main body 1, the workpieces 7 placed in advance on the setter 8 are arranged in three rows and placed on the driving roller of the transport means 5. The conveying means 5 sends the workpiece 7 into the inner passage 12 of the heat treatment passage 11 at a predetermined conveying speed. As a result, the workpiece 7 passes through the inner passage 12 and passes through the heat resistant lining material 3 by the heater 2 provided on the ceiling portion a, both side portions b and c, and the bottom portion d, thereby providing a clean atmosphere. Indirect heating is performed, and predetermined heat treatment, for example, firing, slow cooling, and the like are performed. And after leaving from the exit side of the inner passage 12, it is sent to the next process.
[0034]
【The invention's effect】
According to the heat treatment furnace of the present invention, since the heat- resistant lining material constituting the ceiling portion of the inner passage is arranged by adding a plurality of sheets in the width direction and the longitudinal direction of the heat treatment passage, the width dimension is small and inexpensive. By using a plurality of heat resistant lining materials, a large and wide heat treatment furnace can be constructed at low cost, and the heat treatment cost of the workpiece can be reduced, and as a result, the product cost can be reduced. In addition, since the seams between the heat-resistant lining materials are sealed with a joint plate, oxides, other foreign matters, impurities, etc. intrude or fall, ensuring cleanliness in the furnace, and during heat treatment It can prevent adhering to a to-be-processed object. Furthermore, since the hanging tool that suspends and supports the horizontal beam member has a plate-like portion that is suspended from the ceiling portion of the furnace body through the gaps between the seams of the plurality of heat-resistant lining materials, the suspension member is suspended in the width direction of the heat treatment passage. A plurality of heat-resistant lining materials of the portion can be arranged close to each other with a narrow interval (gap) as large as the plate thickness of the plate-like portion of the hanger.
[0035]
In addition, the horizontal beam member that horizontally supports the heat-resistant lining material disposed on the ceiling portion is supported by being suspended and supported by the hanging tools provided at a plurality of positions in the width direction of the heat treatment channel. Even if the width is widened, the amount of creep deformation of the crosspiece member is small, which also reduces the amount of creep deformation of the heat-resistant lining material of the ceiling, and prevents crack breakage and enables long-term use .
[Brief description of the drawings]
FIG. 1 is a schematic longitudinal sectional front view showing an embodiment of a heat treatment furnace of the present invention.
FIG. 2 is a schematic longitudinal sectional side view showing an embodiment of a heat treatment furnace of the present invention.
FIG. 3 is a schematic perspective view of a main part showing a support state of a heat-resistant lining material for a ceiling in an embodiment of the heat treatment furnace of the present invention.
FIG. 4 is an enlarged perspective view showing a state in which a horizontal beam member is supported by a hanging tool.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Furnace body 2 Heating heater 3 Heat resistant lining material 3a Seam 3b Joint plate 4 Crosspiece member 5 Conveyance means 6 Hanging tool 6a Plate-like part 6b Support part 7 To-be-processed object 8 Setter 9 Side part support member 10 Bottom part support member 11 Heat treatment passage 12 Inner passage a Ceiling part b, c Both side parts d Bottom part

Claims (2)

A heat treatment furnace used for heat treatment of substrate glass for electronic components,
A furnace body having a heat treatment path shaped around a is surrounded by the refractory structure tunnel, a heater for heating disposed inside the periphery of the furnace body is disposed in a heat treatment channel of the furnace body, a heat ray transmissive A tunnel-shaped inner passage surrounded by a heat-resistant lining material having a function, and a longitudinal direction of the heat treatment passage in the heat treatment passage for transporting the substrate glass as the object to be treated along the longitudinal direction of the heat treatment passage. wherein disposed over the direction entire length provided with a conveying means of the workpiece,
The heat resistant lining material constituting the ceiling portion of the inner passage is arranged by adding a plurality of sheets in the width direction and the longitudinal direction of the heat treatment passage, and a seam between the plurality of heat resistant lining materials is provided. Sealed by a joint plate,
The plurality of heat-resistant lining materials constituting the ceiling portion of the inner passage include a horizontal beam member that horizontally supports the heat-resistant liner material, and the horizontal beam member is disposed in one or more locations in the width direction of the heat treatment passage. in the support means and a hanger for hanging support, which is supported against the furnace body,
The horizontal beam member is disposed in the inner passage, and the hanging tool for hanging and supporting the horizontal beam member passes through a gap between seams of the plurality of heat-resistant lining materials. A heat treatment furnace characterized by having a plate-like portion depending from the plate . The hanger is at the lower end of the plate-like portion, which is formed perpendicular to the plate surface of the plate portion, according to claim 1, characterized in that it comprises a supporting portion of the lateral beam member Heat treatment furnace.

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