JP4056296B2 - Damping member, manufacturing method thereof, and suspension device provided with damping member - Google Patents

Description

【００３６】
上表から判るように、本発明に係る制振部材１０は、室温では従来の樹脂製拘束層を有する制振部材（１）と金属製拘束層を有する制振部材（２）とのほぼ中間の制振性能を発揮でき、温度が上昇するに従い、制振部材（２）に匹敵する制振性能を発揮できる。
【００３７】
【発明の効果】
以上の説明から明らかなように、本発明によれば、粘弾性体を備えた制振部材を、その制振性能を低下させること無く、安定した品質に効率良く低コストで作製できるようになる。また、拘束層の材料及び形状を適宜選択することにより、制振対象の基材に要求される最適な制振性能を発揮することができる。
【図面の簡単な説明】
【図１】本発明の一実施形態による制振部材の斜視図である。
【図２】図１の制振部材の平面図である。
【図３】本発明の一実施形態によるサスペンション装置の平面図である。
【図４】図３のサスペンション装置の側面図である。
【図５】図３のサスペンション装置を搭載したディスク装置の概略斜視図である。
【図６】本発明の一実施形態による制振部材製造方法の説明図で、（ａ）〜（ｅ）の各ステップを示す。
【図７】変形例による制振部材の斜視図である。
【図８】図７の制振部材の平面図である。
【図９】本発明の他の実施形態による制振部材製造方法における最終段階の説明図である。
【符号の説明】
１０…制振部材
１２…第１層
１４…第２層
１６…中間層
１８…縁部分
１９…切れ込み
２０…離型紙層
２２…サスペンション装置
２６…基板
２８…アーム
５０…積層材料[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vibration damping member including a viscoelastic body and a manufacturing method thereof. Furthermore, the present invention relates to a suspension device provided with a vibration damping member.
[0002]
[Prior art]
A damping member provided with a viscoelastic body has been used in various fields. For example, in a disk device used as an auxiliary storage device of an information processing device, a head suspension that elastically supports a head unit for writing and reading data on a disk-shaped storage medium that rotates at high speed is generated when the disk device is operated. It is required to attenuate and suppress the vibration of the head part as quickly as possible. Therefore, conventionally, a damping member configured by laminating a constraining layer made of metal or resin on a damping layer made of a viscoelastic body is pasted on a leaf spring material of the head suspension to attach the damping layer to the head suspension. A vibration control method to be attached is adopted (for example, see Japanese Patent Application Laid-Open No. 11-66780).
[0003]
In the damping member having this type of laminated structure, excellent damping performance is exhibited when the constraining layer has rigidity equivalent to the base material to be damped (the leaf spring material in the above use example). I know that. Therefore, conventionally, a damping member having a metal constraining layer has been generally used for a head suspension of a disk device as one that can exhibit better damping performance. In addition, this type of damping member is usually punched into a predetermined contour by a press machine from a large laminate material formed by attaching a viscoelastic layer to one surface of a large restraint material made of metal or resin. It is produced through a process.
[0004]
As another vibration suppression measure in the head suspension of the disk device, a circuit board for signal transmission is attached to the head suspension, and the board portion of this circuit board has a function of a damping layer and the circuit portion has a constraining layer. A device having the above function is known (see, for example, Japanese Patent No. 2633491). However, this measure may cause circuit peeling or disconnection due to vibration applied to the circuit board, and the circuit itself is formed with the highest priority on conductivity and line arrangement, so it can exhibit the required damping effect It is inferior in practicality and reliability as compared with the above-described dedicated vibration damping member, such as difficulty in selecting the shape.
[0005]
[Problems to be solved by the invention]
When the damping member having the metal constraining layer described above is manufactured by a press machine, it is difficult to punch a large number of damping members from a large laminate material at the same time because the rigidity of the restraining material itself is high. Product costs tend to increase as efficiency decreases. Also, during the punching process, burr and sagging occur in the peripheral portion of the constraining layer obtained by shearing the constraining material, the constraining material is destroyed by shearing, and the viscoelastic body protrudes from the peripheral portion of the constraining layer. Inconveniences, and there is a concern that the product yield may be reduced. The burr and sagging at the peripheral part of the constraining layer not only affect the vibration damping performance of the vibration damping member itself, but are also feared to affect the operation of the disk device when used for the head suspension of the disk device, for example. In addition, there is a concern that the viscoelastic body that protrudes from the peripheral portion of the constraining layer promotes adhesion of dust that should be avoided in the disk device.
[0006]
On the other hand, when a vibration damping member having a resin constraining layer is produced by a press machine, the rigidity of the restraining material itself is relatively low, and a large number of vibration damping members can be easily punched out simultaneously from a large laminate material. Therefore, it can be produced efficiently and at low cost. Further, since the restraint material can be sheared quickly and accurately also during the punching process, it is possible to suppress as much as possible the burr and sagging of the peripheral portion of the constraining layer and the viscoelastic body from protruding from the peripheral portion. However, the vibration damping member having the resin constraining layer may not exhibit sufficient vibration damping performance depending on the application as described above.
[0007]
An object of the present invention is to provide a vibration damping member including a viscoelastic body, which can be manufactured stably and efficiently at low cost without reducing the vibration damping performance, and the production of such a vibration damping member. It is to provide a method.
[0008]
Another object of the present invention is to provide a suspension device provided with a damping member, which can exhibit sufficient damping performance and can be manufactured with stable quality efficiently and at low cost. There is to do.
[0009]
[Means for Solving the Problems]
In order to achieve the above object, the invention according to claim 1 is a damping member having a laminated structure including a first layer made of a viscoelastic body and a second layer made of a metal, than the first layer. An intermediate layer having a high rigidity and lower rigidity than the second layer is interposed between the first layer and the second layer, and the intermediate layer protrudes from the periphery over the entire periphery of the second layer. A vibration damping member having an edge portion is provided.
[0010]
The invention according to claim 2 provides the vibration damping member according to claim 1, wherein the edge portion of the intermediate layer substantially covers the first layer.
The invention according to claim 3 is the vibration damping member according to claim 1 or 2, further comprising a release paper layer installed along the first layer on the opposite side of the intermediate layer. Provided is a damping member as described.
[0011]
Invention of Claim 4 is a manufacturing method of the damping member provided with the viscoelastic body, Comprising: A metal sheet is prepared, a resin layer is laminated | stacked on one surface of a metal sheet, and a metal sheet is removed locally Then, while exposing one surface of the resin layer locally, forming a metal region having a predetermined contour substantially surrounded by the exposed portion of the one surface of the resin layer, the back surface opposite to the one surface of the resin layer A viscoelastic body layer is laminated, and the resin layer and the viscoelastic body layer are cut within an exposed portion of one surface of the resin layer.
[0012]
According to a fifth aspect of the present invention, in the suspension device including the substrate and the vibration damping member attached to the substrate, the vibration damping member includes a first layer made of a viscoelastic body attached to the substrate, and a first layer made of metal. Two layers, and an intermediate layer interposed between the first layer and the second layer with higher rigidity than the first layer and lower than the second layer, and the intermediate layer is formed of the second layer There is provided a suspension device characterized by having an edge portion protruding from the peripheral edge over the entire peripheral edge.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Corresponding components are denoted by common reference symbols throughout the drawings.
Referring to the drawings, FIGS. 1 and 2 show a vibration damping member 10 according to an embodiment of the present invention. The damping member 10 includes a first layer 12 made of a viscoelastic body, a second layer 14 made of a metal having higher rigidity than the first layer 12, and higher than the first layer 12 and higher than the second layer 14. The laminated structure includes an intermediate layer 16 having a low rigidity and interposed between the first layer 12 and the second layer 14.
[0014]
The first layer 12 of the damping member 10 is a damping layer that is fixed to the surface of a base material to be damped (for example, a leaf spring material of a head suspension of a disk device), and corresponds to the required damping performance. It has a substantially uniform thickness and contour shape. The material of the first layer 12 can be selected from various viscoelastic materials such as resin-based, rubber-based, asphalt-based, and metal-based materials in accordance with the material of the vibration suppression target base material. In particular, it is advantageous to produce the first layer 12 from a material having an adhesive property so that the damping member 10 can be directly attached to the damping target substrate.
[0015]
Further, the second layer 14 is a constraining layer for constituting a so-called constrained vibration damping structure, and has a substantially uniform thickness according to the required vibration damping performance, and preferably from the contour shape of the first layer 12. Has a slightly smaller outline shape. The material of the second layer 14 can be selected from metal materials having various rigidity, such as stainless steel, aluminum alloy, nickel alloy, copper, titanium, and iron, corresponding to the material of the vibration suppression target base material. In particular, the second layer 14 preferably has a rigidity equivalent to that of the vibration suppression target base material from the viewpoint of ensuring sufficient vibration suppression performance.
[0016]
The intermediate layer 16 is a characteristic layer element of the vibration damping member 10 and has a substantially uniform thickness and a contour shape identical to the contour shape of the first layer 12. The intermediate layer 16 has a first surface 16a that uniformly contacts the first layer 12 as a whole, and a second surface that uniformly contacts the second layer 14 at a predetermined surface area on the opposite side of the first surface 16a. A surface 16b. Accordingly, the intermediate layer 16 is provided with an annular edge portion 18 that protrudes outward from the outer peripheral edge 14 a over the entire outer peripheral edge 14 a of the second layer 14. The intermediate layer 16 substantially entirely covers the surface 12 a of the first layer 12 on the side close to the second layer 14, including the edge portion 18. The material of the intermediate layer 16 can be selected from various materials that can exhibit expected effects in the manufacturing process of the vibration damping member 10 described later, such as metal, thermoplastic resin, and hardened adhesive.
[0017]
When the vibration damping member 10 having the above configuration is manufactured from a large-sized laminated material through a punching process using a press machine, the second layer 14 having the highest rigidity in the laminated structure is formed in a state of the large-sized laminated material. By forming in advance a contour shape smaller than the contour shape of the damping member 10 to be punched out, shearing of the second layer 14 is made unnecessary. If it does in this way, the punching process of the damping member 10 becomes substantially equivalent to the thing with respect to the damping member which has the conventional resin constraining layer. Therefore, in the vibration damping member 10, it is possible to reliably reduce the production efficiency and the problem of burrs and sagging at the periphery of the constraining layer caused by punching the metal constraining material, which has occurred in the conventional vibration damping member punching process. It can be avoided. In addition, the required vibration damping performance can be easily ensured by optimizing the material and dimensions of the second layer 14 that is the constraining layer.
[0018]
From the viewpoint of securing the above-described effects, it is advantageous to make the intermediate layer 16 from the same resin material as the resin constraining layer used in the conventional vibration damping member. In this case, the intermediate layer 16 functions as a support layer that directly supports the second layer 14, which is a constraining layer, and constrains the first layer 12 made of a viscoelastic body in cooperation with the second layer 14. Demonstrate the function. Therefore, the second layer 14 and the intermediate layer 16 can be combined and considered as a two-layer structure constraining material used for the vibration damping member 10.
[0019]
The intermediate layer 16 also serves to protect the outer peripheral edge region of the first layer 12 that extends outside the outer peripheral edge 14 a of the second layer 14 at the edge portion 18 thereof. Furthermore, by making the intermediate layer 16 from a low-adhesive material, it is possible to prevent dust from adhering to the edge portion 18 exposed to the outside of the second layer 14. In addition, when providing the user with the vibration damping member 10 as a product, it is preferable to install the release paper layer 20 along the back surface 12 b of the first layer 12.
[0020]
The damping member 10 having the above configuration is attached to the surface of various damping target base materials such as metal, wood, concrete, plastic, etc. by directly attaching the first layer 12 by its own adhesiveness, Thereby, a required damping performance can be exhibited with respect to the damping target base material. 3 and 4 show a suspension device 22 according to an embodiment of the present invention in which such a vibration damping member 10 is attached to a head suspension of a disk device which is an auxiliary storage device of an information processing device. FIG. 5 schematically shows a configuration of a hard disk device 24 widely used in a personal computer or the like as an example of a disk device provided with the suspension device 22.
[0021]
The suspension device 22 includes a leaf spring-like substrate 26, the vibration damping member 10 attached to the substrate 26, and an arm 28 that supports the substrate 26 so as to be elastically deformable. In the hard disk device 24, the substrate 26 functions as a head suspension that elastically supports the head portion 32 that writes and reads data to and from the disk-shaped storage medium 30 that rotates at high speed. The substrate 26 has a substantially trapezoidal outline shape, and the head portion 32 is installed in the short upper bottom region, and is fixedly connected to the arm 28 in the long lower bottom region. In the illustrated hard disk device 24, a plurality of suspension devices 22 are integrated at the base ends of the respective arms 28 to constitute an actuator 36 that rotates over a predetermined angular range about a shaft 34. The actuator 36 supports the plurality of head portions 32 carried by the plurality of suspension devices 22 in a state of being opposed to the recording surfaces 30a of the plurality of disk-shaped storage media 30, and the head portions 32 are supported by the recording surfaces 30a. Track tracking operation.
[0022]
In the above-described configuration, the damping member 10 provided in each suspension device 22 acts to attenuate and suppress the vibration of each head portion 32 generated when the hard disk device 24 is operated as quickly as possible. Further, if the intermediate layer 16 of each vibration damping member 10 is made of a low-adhesive material, it is possible to reliably avoid the adhesion of dust to be avoided to the edge portion 18 exposed to the outside of the second layer 14. . In the suspension device 22, the damping member 10 is attached to the surface of the arm 28 (that is, another substrate) instead of or in addition to the damping member 10 being attached to the surface of the substrate 26. You can also.
[0023]
In the damping member 10 applied to the suspension device 22, an acrylic viscoelastic material, a silicone viscoelastic material, a rubber viscoelastic material, a polyolefin resin, or the like is preferably used as the viscoelastic body constituting the first layer 12. Can be adopted. In particular, acrylic viscoelastic materials are advantageous in that they not only have excellent vibration damping characteristics, but also generate less gas during heating. The thickness of the first layer 12 can be variously set in accordance with the material and the required damping performance, and is, for example, in the range of 1 μm to 150 μm. As the material of the second layer 14, stainless steel or aluminum alloy can be most preferably employed. In particular, when the substrate 26 of the suspension device 22 is made of stainless steel, it is advantageous that the second layer 14 is also made of stainless steel. On the other hand, an aluminum alloy is advantageous in terms of suppressing the material cost. Although the thickness of the 2nd layer 14 can also be set variously according to material and the required damping performance, it is the range of 1 micrometer-100 micrometers, for example.
[0024]
The intermediate layer 16 of the vibration damping member 10 applied to the suspension device 22 can be formed from a thermoplastic resin material such as polyimide, polyethylene terephthalate, or aramid, or a material obtained by curing an epoxy or urethane adhesive. In particular, polyimide that has been generally used as a material for conventional resin constraining layers can be advantageously used. The thickness of the intermediate layer 16 formed from these materials can be selected in the range of 1 μm to 100 μm, for example. When the thickness is less than 1 μm, it is difficult to accurately handle the material of the intermediate layer 16 in the manufacturing process of the vibration damping member 10 described later. Moreover, when this thickness exceeds 100 micrometers, the rigidity of the material of the intermediate | middle layer 16 will become high too much, and there exists a possibility that the same inconvenience as the case where a metal layer may be sheared may arise.
[0025]
An example of a method for manufacturing the above-described vibration damping member 10 will be described with reference to FIG.
First, a metal sheet 38 having a surface 38a and a back surface 38b opposite to each other is prepared. The metal sheet 38 has a uniform thickness substantially the same as the thickness of the second layer 14 of the vibration damping member 10. Next, the resin layer 40 is formed on the back surface 38b of the metal sheet 38 by, for example, a coating process (FIG. 6A). The resin layer 40 is formed to have a uniform thickness substantially the same as the thickness of the intermediate layer 16 of the vibration damping member 10, and is provided with a substantially flat surface 40a and a back surface 40b opposite to each other.
[0026]
Next, the unnecessary portion 42 of the metal sheet 38 is locally removed by, for example, an etching process. As the etching process, a process generally performed as a circuit forming method in the printed circuit board manufacturing process can be adopted. Thereby, the surface 40a of the resin layer 40 is locally exposed, and a plurality of metal regions 44 having a predetermined outline substantially surrounded by the exposed portion of the resin layer surface 40a are formed (FIG. 6B). ). Each metal region 44 formed in this way constitutes the second layer 14 of the vibration damping member 10. On the other hand, a viscoelastic body layer 48 is laminated and formed on one surface of a separately prepared large release paper material 46 by, for example, a coating process (FIG. 6C). The viscoelastic body layer 48 is formed to have a uniform thickness substantially the same as the thickness of the first layer 12 of the vibration damping member 10, and is provided with a substantially flat surface 48a and a back surface 48b opposite to each other.
[0027]
Next, the viscoelastic body layer 48 is laminated on the back surface 40b of the resin layer 40 carrying the plurality of metal regions 44 with the front surface 48a in close contact, thereby producing a large laminate material 50 (FIG. 6D). ). At this time, it is possible to fix the viscoelastic body layer 48 to the resin layer 40 by the adhesiveness that the viscoelastic body layer 48 inherently has or the adhesiveness that is expressed by being exposed to heat, light, solvent, or the like. it can. Finally, the laminate material 50 is supplied to the press machine, and the resin layer 40, the viscoelastic body layer 48, and the release paper material 46 are replaced with the intermediate layer 16 of the vibration damping member 10 within the exposed portion of the surface 40a of the resin layer 40. Cut along the contour shapes of the first layer 12 and the release paper layer 20 at once. Note that unnecessary materials generated by cutting are discarded. In this manner, the vibration damping member 10 including the edge portion 18 in the intermediate layer 16 is manufactured (FIG. 6E).
[0028]
In the above manufacturing method, the metal sheet 38 having the highest rigidity in the laminated material 50 is formed in advance in the shape of the second layer 16 of the vibration damping member 10 prior to the punching process by the press machine. The shearing of the metal sheet 38 becomes unnecessary. The step of punching the laminated material 50 into the substantial contour shape of the vibration damping member 10 is substantially equivalent to the step of punching the vibration damping member having the conventional resin constraining layer. As a result, it is possible to reliably avoid the burrs and sagging of the peripheral portion of the second layer, the protrusion of the first layer 12 from the peripheral portion of the second layer, and the destruction of the sheet 38, which are predicted when the metal sheet 38 is punched. can do.
[0029]
In particular, in the manufacturing method described above, it is advantageous to punch a plurality of damping members 10 at the same time in the punching process by a press machine. Also in this case, since the metal sheet 38 is not sheared, the plurality of damping members 10 can be efficiently and stably manufactured at low cost. The vibration damping member 10 thus manufactured reliably exhibits the vibration damping performance required for the suspension device 22, for example, by the restraining action of the second layer 16 having high rigidity.
[0030]
The preferred embodiment of the present invention has been described above, but the present invention is not limited to the configuration of the illustrated embodiment, and various modifications and corrections can be made within the scope of the claims.
For example, as shown in FIGS. 7 and 8, in the damping member 10, the second layer 14 can be divided into a plurality of second layer portions 14 ′ on the second surface 16 b of the intermediate layer 16. In this case, the shape, arrangement, and number of the divided second layer portions 14 ′ can be variously selected according to the damping performance required for the damping member 10. For example, in the application to the suspension device 22 shown in FIG. 3 described above, the vibration damping member 10 is arranged with the upper and lower bottom portions of the trapezoidal outline thereof directed in the longitudinal direction of the substrate 26. It has been found that when the layer 14 has an elongated shape along the longitudinal direction of the substrate 26, a high damping effect can be exhibited. Therefore, as shown in FIG. 8, by forming a plurality of second layer portions 14 'extending between the upper bottom portion and the lower bottom portion of the trapezoidal outline of the damping member 10, the vibration damping in the suspension device 22 is performed. The damping performance of the member 10 can be improved.
[0031]
Moreover, in the manufacturing method of the damping member 10 mentioned above, instead of applying the resin layer 40 to the metal sheet 38, the resin layer 40 prepared in a separate process is bonded to the metal sheet 38 with an epoxy or urethane adhesive. It can also be laminated by sticking to the back surface 38b. Alternatively, instead of using the metal sheet 38, a metal layer having a desired thickness is formed by performing a deposition process such as sputtering on the surface 40 a of the resin layer 40 or sequentially performing electroless plating and electroplating. can do. Furthermore, instead of applying the viscoelastic body layer 48 to the release paper material 46, the viscoelastic body layer 48 can be directly applied to the back surface 40b of the resin layer 40 by a silk screen printing process or the like. In this case, the release paper material 46 can be attached in a later step.
[0032]
Further, in the final stage of the manufacturing method of the vibration damping member 10 described above, instead of completely cutting the laminated material 50 to produce a plurality of independent damping members 10, as shown in FIG. The notches 19 can be cut so that only the 50 release paper materials 46 are not cut. If it does in this way, it will become a form where a plurality of damping members 10 were connected mutually via those release paper layers 20, and storage and conveyance of a plurality of damping members 10 only became possible in this strip form. In addition, since the release paper layer 20 can be easily peeled off from the individual vibration damping members 10 at the time of use, an advantage of improving the attaching work efficiency of the vibration damping members 10 can be obtained.
[0033]
The vibration damping member according to the present invention is not limited to the suspension device of the disk device, and can be used by being attached to a vibration generating portion in various electronic devices and acoustic devices. Moreover, the manufacturing method of the damping member which concerns on this invention is applicable not only to a damping member but other laminated body products, such as a heat resistant film, a reinforcing tape, and a decorative film.
[0034]
【Example】
6 is applied to a constraining layer material composed of a copper sheet 38 having a thickness of 30 μm and a polyimide layer 40 having a thickness of 50 μm, and dried at 100 ° C. for 15 minutes. A viscoelastic body layer 48 having a thickness of 25 μm was formed and laminated, and the damping member 10 was produced by punching into a 10 mm × 100 mm strip with a press machine. A vibration loss coefficient η at the secondary antiresonance frequency (200 Hz to 300 Hz) was measured by exciting the geometric center of the first layer 12 or the second layer 14 to the vibration damping member 10. Here loss coefficient eta is calculated as the maximum displacement and the force f = K ₁ chi in chi and force f = K ₂ chi in zero displacement is measured, η = K 2 _/ K ₁ on the hysteresis curve of the vibration response system Is done. As Comparative Examples 1 and 2, a damping member (1) having a constraining layer made only of a polyimide film having a thickness of 50 μm, and a damping member (2) having a constraining layer made only of stainless steel having a thickness of 50 μm, On the other hand, the loss coefficient η was measured in the same manner. The results are shown in the table below.
[0035]
[Table 1]

[0036]
As can be seen from the above table, the damping member 10 according to the present invention is substantially intermediate between the damping member (1) having a conventional resin constraining layer and the damping member (2) having a metal constraining layer at room temperature. The damping performance comparable to that of the damping member (2) can be exhibited as the temperature rises.
[0037]
【The invention's effect】
As is clear from the above description, according to the present invention, it becomes possible to manufacture a damping member provided with a viscoelastic body with stable quality efficiently and at low cost without deteriorating its damping performance. . In addition, by appropriately selecting the material and shape of the constraining layer, it is possible to exhibit the optimum vibration damping performance required for the base material to be damped.
[Brief description of the drawings]
FIG. 1 is a perspective view of a vibration damping member according to an embodiment of the present invention.
2 is a plan view of the vibration damping member of FIG. 1. FIG.
FIG. 3 is a plan view of a suspension device according to an embodiment of the present invention.
4 is a side view of the suspension device of FIG. 3. FIG.
5 is a schematic perspective view of a disk device on which the suspension device of FIG. 3 is mounted. FIG.
FIG. 6 is an explanatory diagram of a vibration damping member manufacturing method according to an embodiment of the present invention, and shows each step of (a) to (e).
FIG. 7 is a perspective view of a vibration damping member according to a modified example.
8 is a plan view of the vibration damping member of FIG.
FIG. 9 is an explanatory view of a final stage in a vibration damping member manufacturing method according to another embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Damping member 12 ... 1st layer 14 ... 2nd layer 16 ... Intermediate | middle layer 18 ... Edge part 19 ... Notch 20 ... Release paper layer 22 ... Suspension apparatus 26 ... Substrate 28 ... Arm 50 ... Laminate material

Claims (5)

In the vibration damping member having a laminated structure including the first layer made of a viscoelastic body and the second layer made of a metal,
An intermediate layer interposed between the first layer and the second layer and having a rigidity higher than that of the first layer and lower than that of the second layer, the intermediate layer including the second layer; A vibration damping member having an edge portion projecting from the peripheral edge over the entire peripheral edge. The vibration damping member according to claim 1, wherein the edge portion of the intermediate layer substantially covers the first layer. The vibration damping member according to claim 1 or 2, further comprising a release paper layer installed along the first layer on the opposite side of the intermediate layer. A method for manufacturing a vibration damping member having a viscoelastic body,
Prepare a metal sheet,
Laminating a resin layer on one surface of the metal sheet,
The metal sheet is locally removed to locally expose one surface of the resin layer and to form a metal region having a predetermined contour substantially surrounded by the exposed portion of the one surface of the resin layer. ,
Laminating a viscoelastic body layer on the back surface opposite to the one surface of the resin layer,
Cutting the resin layer and the viscoelastic body layer within the exposed portion of the one surface of the resin layer;
The manufacturing method characterized by this. In a suspension device comprising a substrate and a damping member attached to the substrate,
The vibration damping member has a first layer made of a viscoelastic body attached to the substrate, a second layer made of metal, and has rigidity higher than the first layer and lower than the second layer. An intermediate layer interposed between the first layer and the second layer, the intermediate layer having an edge portion extending from the peripheral edge over the entire peripheral edge of the second layer; Suspension device.

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