JP4038284B2 - Processing equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a trap apparatus in a processing apparatus for drying wood, treating a metal surface, or decomposing plastic or garbage using a solvent vapor of a chlorinated organic solvent and water vapor accompanying the solvent vapor.
[0002]
[Prior art]
For example, when wood is subjected to a drying process, deformation or cracking may occur when it is rapidly dried. Therefore, it is ideal that the wood is dried slowly over time. However, in such sun drying, since it takes one year to dry, there is a problem that the productivity is poor and the cost for drying the wood becomes high.
[0003]
In recent years, therefore, a wood rapid drying treatment apparatus that can elucidate the drying mechanism of wood and can quickly dry the wood without causing deformation or cracking is disclosed in, for example, Japanese Patent Laid-Open Nos. 6-137757 and 7-32315. It is proposed in the issue gazette.
[0004]
The outline of the wood rapid drying processing apparatus disclosed in each of these publications will be explained. From the solvent tank to the bottom of the processing tank having a mounting table for mounting wood inside, for example, methylene chloride, etc. The chlorinated organic solvent is sent and stored, and the water sent from the water supply device through the water supply pipe is stored as an aqueous layer in the upper layer of the solvent liquid layer.
[0005]
The solvent liquid layer is heated to a temperature at which high-temperature water vapor is supplied from the boiler and can be vaporized (for example, about 80 ° C. in the case of methylene chloride) to become solvent vapor, and this solvent vapor is water and water when passing through the upper water layer. Contact to produce water vapor with saturated vapor pressure.
[0006]
The solvent vapor with water vapor generated in this way penetrates into the wood that is the object to be treated, releasing the pits that hinder the transpiration of moisture and enabling rapid drying of the wood. .
[0007]
The methylene chloride that has released the pits is then drained from the wood and removed.
[0008]
When the solvent vapor treatment with methylene chloride is completed, the treatment tank is allowed to cool to near room temperature, and then the solvent at the bottom of the tank is extracted from the drain pipe and returned to the solvent tank. .
[0009]
In addition, since wood with released pits has a rapid penetration of preservatives and colorants, such a wood quick drying treatment device can be used as a treatment device for treating preservatives and colorants. It has become.
[0010]
[Problems to be solved by the invention]
In the above-described conventional processing apparatus, it is necessary to extract the solvent and warm water from the processing tank before taking out a workpiece such as timber after a series of solvent vapor processing.
[0011]
However, for example, a solvent heated to about 80 ° C. has a strong odor and may lack oxygen. Therefore, it is necessary to wait until the processing tank cools below the condensation temperature of the solvent. Must be. For this reason, time-related processing efficiency and work efficiency are reduced.
[0012]
In addition, when the solvent or water that has penetrated deeply into the wood is extracted from the wood, the inside of the processing tank is evacuated, and at that time, sap such as wood crab is leached from the wood. Since the exuded sap is mixed with the solvent, the solvent after the treatment cannot be returned directly to the solvent tank, and the sap must be separated and removed by another separation device or the like.
[0013]
For this reason, there is a problem in that post-processing work such as separation and removal requires a lot of labor and time.
[0014]
The present invention has been made in view of the above-described conventional problems, and is simply and in a short time by treating the treated liquid with a solvent and operating the on-off valve from the outside of the treatment tank. It is intended to be able to do.
[0015]
[Means for Solving the Problems]
In order to achieve the above-mentioned object, the present invention is to expose a processing object by exposing the processing object to a processing fluid composed of a solvent vapor / water vapor of a chlorinated organic solvent in a sealable processing tank containing the processing object. In a processing apparatus for processing the inside or the surface of a processing object, the processing apparatus is formed so as to collect and circulate the processing fluid that has processed the processing object, and to recycle the processing fluid. The trap is formed with a storage space inside, and a pressure equalizing pipe for making the pressure of the storage space substantially equal to that of the fluid supply source, and a pressure for pressurizing the storage space. Pressure pipes, and open / close valves on the upstream and downstream sides of the trap in the circulation path, pressure equalization pipes and pressure pipes, and open / close these valves for interlocking or selective opening / closing. Feeds fluid to the downstream part of the trap It is characterized in that it has control can configured.
[0016]
In addition, as a to-be-processed object, it applies also to what contains the unnecessary substance soluble in a chlorinated organic solvent inside a substance like a wood, a metal, steel materials, iron powder, garbage, etc., for example. In the case of timber, torus or margo that closes the hole in the case of wood, metal, steel, iron powder, etc. In the case of fat such as vegetable scraps and moisture constituting cells, and in the case of FRP waste, it is a binder that binds a synthetic resin and a reinforcing fiber body.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0018]
FIG. 1 is a block diagram showing a schematic configuration of a solvent vapor processing system according to an embodiment of the present invention.
[0019]
In the figure, the solvent vapor processing system 1 of the present embodiment is formed so as to collect, circulate and reuse a processing fluid such as a solvent vapor that has processed the object to be processed 20, and accommodates the object to be processed 20. A sealed processing tank 2 for processing with solvent vapor, a solvent vapor generator 3 provided separately from the processing tank 2 for generating solvent vapor, and a bottom of the processing tank 2 Containers such as a water recovery tank 22 connected via a pipe 45, a trap 21, and a pipe 46, and a solvent recovery tank 14 for temporarily storing a solvent solution for recovering the solvent in the processing tank 2 are provided. Yes.
[0020]
The solvent vapor generator 3 and the processing tank 2 are connected by supply piping 33, 35, and 36 for supplying solvent vapor.
[0021]
Here, as shown in FIGS. 2 to 4, the solvent vapor generator 3 includes a water layer 31 made of water and a solvent liquid layer 30 made of a chlorinated organic solvent below the water layer 31. It is like that.
[0022]
The solvent vapor generator 3 includes a cylindrical mixed liquid tank 60 having a side opening, a lid 61 that seals the side opening of the mixed liquid tank 60 so as to be openable and closable, and a solvent provided above the mixed liquid tank 60. A steam outlet nozzle 62, a steam blow nozzle 63, a solvent liquid inlet nozzle 64, a feed water inlet nozzle 65, and a heating steam inlet nozzle connected to the heating device 17 disposed at the immersion position of the solvent liquid layer 30 in the mixed liquid tank 60. 66, a heating steam outlet nozzle 67, and a tank bottom nozzle 68 provided at the bottom of the mixed liquid tank 60.
[0023]
In the solvent vapor generator 3, the liquid level of the water layer 31 is measured and monitored by a water level gauge 32 (see FIG. 1).
[0024]
The nozzle 68 at the bottom of the tank is connected to a one-touch joint 53 and an on-off valve 78 that are used when the solvent is added or withdrawn.
[0025]
The water supply inlet nozzle 65 is connected to the water supply device W. Further, in the middle of the piping of the heating device 17, a chilled water pipe 18 is connected to adjust the heating temperature and send chilled water from the cooling device C used during forced cooling.
[0026]
In FIG. 1 again, the processing tank 2 is configured so as to be openable and closable so as to be sealed, and accommodates the workpiece 20 on a mounting table (not shown).
[0027]
A spray nozzle serving as a tip of the supply pipe 36 is provided in the processing tank 2, and a steam pipe 19 connected to the boiler B is arranged for heating in the tank.
[0028]
A pipe 45 provided at the bottom of the processing tank 2 is connected to the upper part of the trap 21, and a pressure equalizing pipe 44 connected to the processing tank 2 and a steam pipe from the boiler B are connected to the upper part of the trap 21. Has been.
[0029]
The lower part of the trap 21 and the water recovery tank 22 are connected via a pipe 46. The water recovery tank 22 has a hanging partition and an upright partition in the tank. The water recovery tank 22 dives below the hanging partition and discharges water beyond the standing partition to a drum can 24 or the like by driving a water pump 23.
[0030]
In the middle of the return pipe 37 connected to the upper part of the processing tank 2, the blower 4 and the pump device 5 which is a vacuum pump are connected in parallel.
[0031]
The end of the return pipe 37 branches to a pipe 38 having the heater 6 and a return pipe 39 having the condenser 8.
[0032]
The heater 6 heats the solvent vapor and water vapor from the pipe 38 by exchanging heat with the high-temperature steam led from the boiler B to the steam pipe 7, and then sends it out to the pipe 40.
[0033]
The condenser 8 cools the solvent vapor and water vapor from the return pipe 39 by heat exchange with the low-temperature refrigerant led to the refrigerant pipe 9 from the refrigeration apparatus R, and then sends it to the pipe 41 or the return pipe 49. Yes.
[0034]
The discharge pipe 41 of the condenser 8 and the heater 6 inlet pipe 38 are connected by a bypass pipe 42. The bypass pipe 42 is used by opening the on-off valve 102 when the solvent vapor and water vapor during circulation are cooled too much by the condenser 8 or heated too much by the heater 6.
[0035]
A pipe 34 branched from the supply pipe 33 extends to the vicinity of the bottom of the spray tank 26, and a spray pipe 27 is provided at the tip thereof.
[0036]
The water in the water layer 31 in the spray tank 26 is sprayed and circulated from the spray pipe 29 to the upper space in the spray tank 26 by driving the spray pump 28.
[0037]
One end of the pipe 43 is branched and connected in the middle of the pipe 34. The pipe 43 is connected to the pipes 41 and 40 in the middle, and the end is connected to the middle of the supply pipe 35. A pressure equalizing pipe 48 connected to the upper part of the condenser 8, a return pipe 49 connected to the bottom of the condenser 8, and a steam pipe 11 from the boiler B are connected to the upper part of the trap 10.
[0038]
The lower part of the trap 10 and the solvent recovery tank 14 are connected via return pipes (circulation paths) 50 and 51. A pipe 47 branched from the pipe 46 is connected to the connection position of the pipes 50 and 51.
[0039]
In this embodiment, two traps 21 and 10 are provided. Since these traps 21 and 10 have the same structure, the structure will be described below.
[0040]
First, as shown in FIGS. 5 to 7, the traps 21 and 10 have a casing body 69a formed of stainless steel in a bottomed cylindrical shape, and the opening is closed by a plate-like lid body 69b, and stored inward. A working space 69c is formed.
[0041]
The casing main body 69a of the trap 10 is connected to the return pipe 49 and the return pipe 50 that form a circulation path, the pressure equalizing pipe 48, and the pressurizing pipe 11 from the boiler B to pressurize the storage space 69c. The pipe portions 49, 50, 48, and 11 are provided with on-off valves 93, 96, 92, and 95, respectively.
[0042]
The pressurizing pipe 11 from the boiler B is connected in the middle of the pressure equalizing pipe 48 so as to communicate with the storage space 69c. However, the pressurizing pipe 11 is stored separately from the pressure equalizing pipe 48. It can also be connected so as to communicate with the work space 69c.
[0043]
Further, a float portion of a float type liquid level control LC attached to the bottom portion (side wall portion) of the casing main body 69a is protruded from the storage space 69c.
[0044]
On the other hand, the casing main body 69a of the trap 21 is connected with a pipe 45 and a pipe 46 forming a circulation path, a pressure equalizing pipe 44, and a pressure pipe 70 from the boiler B for pressurizing the storage space 69c. The pipe portions 45, 46, 44 and 70 are provided with on-off valves 77, 97, 76 and 100, respectively.
[0045]
Similarly to the trap 10, the pressure pipe 70 from the boiler B is connected to the pressure equalizing pipe 44 and communicated with the storage space 69 c in the trap 21. It can also be connected so as to communicate with the storage space 69 c independently of the pipe 44.
[0046]
Similarly to the casing main body 69a of the trap 10, a float portion of a float-type liquid level control LC attached to the bottom of the casing main body 69a protrudes from the storage space 69c.
[0047]
The solvent recovery tank 14 stores the solvent liquid flowing in from the return pipe 51 (the amount of water is extremely small) for a while while cooling with the cold water in the cold water pipe 15 connected to the cooling device C, and driving the solvent pump 16. Thus, the gas is recovered to the solvent vapor generator 3 through the return pipe 52.
[0048]
That is, the solvent vapor generator 3, the supply pipes 33, 35, and 36, the processing tank 2, the pump device 5, the condenser 8, the trap 10, the solvent recovery tank 14, and the return pipes 37, 39, 49, 50, 51 and 52 constitute a solvent recovery circuit S.
[0049]
The cooler 12 is connected to the upper part of the solvent recovery tank 14 by piping, and cools the solvent vapor from the solvent recovery tank 14 by exchanging heat with the low-temperature refrigerant introduced from the refrigeration apparatus R to the refrigerant pipe 13. It is devised so that it can be liquefied and captured and not released into the atmosphere as much as possible.
[0050]
The pipes 34, 38, 40 to 43, 45 to 47, the supply pipes 33, 35, and 36, the return pipes 37, 39, 49, and 52, and the pressure equalizing pipes 44 and 48 are supplied from a control device (not shown). On-off valves 71 to 102 (numbers are shown in circles) are provided for opening and closing the valves by control signals or manually.
[0051]
In Fig. 1, the alphabetic symbols that indicate the type of instrument are LA level alarm, LC level control, TI temperature display, TA temperature alarm, TC temperature control, PA pressure alarm. PC is the pressure control.
[0052]
In addition, the tanks and containers constituting the solvent vapor processing system 1 are all formed of sealed containers in order not to scatter odorous chlorinated organic solvents into the atmosphere. The processing tank 2 is also a pressure vessel that can withstand the vacuum state during use.
[0053]
Next, a process of subjecting the workpiece 20 to solvent vapor treatment by the solvent vapor treatment system 1 will be described.
[0054]
In the solvent vapor processing system 1, a processing tank primary evacuation step, a solvent vapor supply step, a solvent vapor circulation step, and a processing tank secondary evacuation step are mainly executed. The traps 21 and 10 will be described together in the following description of each of these steps.
"Processing tank primary evacuation process"
First, the on-off valves 75, 82, 83, 84, 86, 92, 93, 96 are opened, and at least the on-off valves 73, 74, 77, 80, 81, 85, 89, 98, among the remaining on-off valves. 102 is set to “closed”, and the system lineup is completed in advance.
[0055]
Further, the inside of the solvent vapor generator 3 is maintained at a temperature at which the solvent can be vaporized by the heating device 17 (for example, about 80 ° C. when methylene chloride is used).
[0056]
Thereby, the solvent vapor | steam vaporized from the solvent liquid layer 30 contacts the water of the water layer 31, and becomes a solvent vapor | steam accompanying water vapor | steam.
[0057]
On the other hand, the inside of the processing tank 2 is at room temperature. Therefore, when the pump device 5 is driven, the processing tank 2 is evacuated to about 50 Torr, and for example, air or the like is extracted from the processing object 20.
"Solvent vapor supply process"
Next, the pump device 5 is stopped from the line-up state of the previous process, the on-off valves 72 and 74 are “open”, and the on-off valve 75 is “closed”.
[0058]
Then, the vacuum state in the processing tank 2 becomes a driving source, and “solvent vapor with water vapor” from the solvent vapor generator 3 is supplied into the processing tank 2 through the supply pipes 33, 35, and 36. The
[0059]
And the to-be-processed object 20 is exposed to the solvent vapor | steam accompanying the supplied water vapor | steam.
"Solvent vapor circulation process"
Subsequently, the open / close valves 73, 75, 80, 81, 84, 85, 86, 87, 89 are opened from the state of the previous process, and the open / close valve 72 is closed. The on-off valves 90 and 91 for the heater 6 or the condenser 8 are controlled to open and close so that the inside of the processing tank 2 matches the target temperature.
[0060]
Therefore, when the blower 4 is driven, the solvent vapor and water vapor in the processing tank 2 are sucked into the blower 4 through the return pipe 37 and further guided to the heater 6 or the condenser 8 from the pipe 38 or the return pipe 39.
[0061]
The solvent vapor and water vapor led to the heater 6 are heated and then flow into the pipe 43 via the pipe 40, and the solvent vapor and water vapor led to the condenser 8 are cooled and then flow into the pipe 43 via the pipe 41 To do.
[0062]
The solvent vapor and water vapor having a predetermined temperature flowing into the pipe 43 return to the processing tank 2 through the supply pipe 36. Such a solvent vapor circulation process is continuously performed for about 6 to 8 hours, whereby the solvent vapor and water vapor penetrate deep into the object to be processed 20, and unnecessary substances inside the object to be processed 20 become solvent and hot water. It melts in.
[0063]
The unnecessary matter taken out from the workpiece 20 in this way falls to the bottom of the processing tank 2, and together with the water condensed at the bottom, passes through the pipe 45, the trap 21, the pipe 46, and the water recovery tank 22 to the drum can 24. Contained and discharged.
[0064]
In this solvent vapor circulation step, by heating the inside of the processing tank 2 through high-temperature steam through the vapor pipe 19, unnecessary substances inside the object to be processed 20 are easily dissolved and flow easily.
[0065]
If the operation of increasing the pressure in the processing tank 2 by the blower 4 and the operation of switching the opening / closing of the on-off valve and evacuating the processing tank 2 by driving the pump device 5 are repeated alternately, it becomes unnecessary even more easily. Things can be taken out.
"Secondary vacuuming process tank for processing"
Each on-off valve is returned to the line-up state of the primary evacuation process described above and operated in the same manner.
[0066]
The inside of the processing tank 2 is evacuated again while being maintained at about 80 ° C. Thereby, a solvent, warm water, and the unnecessary substance which melt | dissolved in these are extracted from the back part in the to-be-processed object 20. FIG.
[0067]
In this case, the solvent vapor reaches the condenser 8 through the return pipe 37, the pump device 5, and the return pipe 39.
[0068]
Then, the solvent liquid condensed and liquefied by the condenser 8 is transferred from the return pipe 49 to the trap 10 and further stored in the solvent recovery tank 14 from the return pipes 50 and 51. When the solvent liquid reaches a predetermined liquid level or higher in the solvent recovery tank 14, the solvent liquid is recovered by the solvent vapor generator 3 through the return pipe 52 by driving the solvent pump 16.
[0069]
On the other hand, unnecessary materials and water dropped on the bottom of the processing tank 2 are stored in the drum 24 through the pipe 45, the trap 21, the water recovery tank 22, and the like.
[0070]
At this time, in the trap 10, the on-off valves 95 and 96 are closed and the on-off valves 92 and 93 are opened, so that the solvent can be stored in the condenser 8 so as to be able to flow out with equal pressure.
[0071]
When the amount of the stored solvent liquid reaches a predetermined level, the liquid level control (LC) is activated, the on-off valves 92 and 93 are closed, the on-off valves 95 and 96 are opened, and the inside of the trap 10 is pressurized with steam from the boiler B. The solvent liquid is guided to the solvent recovery tank 14.
[0072]
On the other hand, in the trap 21, the on-off valves 97, 100 are closed and the on-off valves 74, 76, 77 are opened, so that water can be stored in the processing tank 2 so as to be able to flow out with equal pressure. .
[0073]
When the amount of stored water reaches a predetermined level, the liquid level control (LC) is activated, the on-off valves 76 and 77 are closed, and the on-off valves 97, 99, and 100 are opened.
[0074]
As a result, the inside of the trap 21 is pressurized by the steam from the boiler B, and the water is guided to the water recovery tank 22.
[0075]
On the other hand, when the temperature of the processing tank 2 decreases and the solvent condenses and the amount of solvent increases in the trap 21, the on-off valve 99 is closed and the on-off valve 98 is opened to recover the solvent in the trap 21 via the pipe 47. Transition to the tank 14.
[0076]
Then, when a series of solvent vapor processing is completed, the processing tank 2 is allowed to cool to a temperature below the boiling point of the solvent, and air is further introduced into the processing tank 2 so that the workpiece 20 can be taken out. It becomes a state.
[0077]
All of the solvent vapor released from the safety valve (not shown) of each tank in each step described above is guided to the spray tank 26.
[0078]
On the other hand, when the processing tank 2, the solvent vapor generator 3 and the respective pipes are at a predetermined pressure or higher to generate solvent vapor to be released, these solvent vapors pass from the spray pipe 27 to the spray tank 26 through the pipes 34 and 43. Led.
[0079]
These solvent vapors are struck and captured by the water sprayed by the spray pump 28 and the spray pipe 29 into the water layer 31 and are not directly released to the atmosphere.
[0080]
By the way, when the workpiece 2 is “wood”, the processing tank 2 is heated by the high-temperature steam of the steam pipe 19 and is heated by the heater 6 as it is from the above-described secondary vacuuming process. By circulating in the blower 4, it can be used for the “wood drying step”.
[0081]
Accordingly, as in the conventional system, there is a problem that the processing tank waits for the temperature of the processing tank to drop to near room temperature, the wood after the solvent vapor processing is once taken out from the processing tank, and the wood drying process is performed by another drying apparatus. Disappear.
[0082]
As described above in detail, according to the solvent vapor processing system 1 of this embodiment, unnecessary substances inside the object to be processed 20 are removed by the solvent vapor accompanying the water vapor sent from the solvent vapor generator 3 to the processing tank 2. Dissolved and removed.
[0083]
In addition, since the solvent in the processing tank 2 is recovered to the solvent vapor generator 3 by the solvent recovery circuit S, the processing tank 2 may be lowered to at least a temperature at which water is condensed after a series of processing.
[0084]
Thereby, the water separated from the solvent vapor can be extracted from the bottom of the processing tank 2.
[0085]
Therefore, the degree of cooling of the processing tank 2 can be reduced, and the cooling time can be shortened.
[0086]
In addition, when processing “wood” by the present solvent vapor processing system 1, unnecessary materials such as Torus and Margo are dissolved and removed, and a wall hole between the temporary road pipes is opened, so that drying of the wood can be accelerated. .
[0087]
Further, when “metal, steel, or iron powder” is processed by the solvent vapor processing system 1, it acts to dissolve and remove the deposits between the metal structures, such as triiron tetroxide on the metal surface. A passive film can be generated to prevent rust progression.
[0088]
When “FRP waste” is processed by the solvent vapor processing system 1, the FRP waste is removed by dissolving and removing the binder that binds the synthetic resin of the FRP waste and the reinforcing fiber body. Since the strength of the object is greatly reduced, crushing work at the time of disposal can be facilitated.
[0089]
Furthermore, when “food waste” is processed by the solvent vapor processing system 1, fat and water constituting cells such as fish and vegetable waste are dissolved and removed, so that decomposition of food waste can be accelerated and accelerated. .
[0090]
【The invention's effect】
As described above, in the present invention, the processing apparatus is in a circulation path for circulating the processing fluid of the processing apparatus formed so as to collect, circulate and reuse the processing fluid that has processed the object to be processed. A trap is provided, a pressure equalizing pipe for making the pressure of the storage space formed inside the trap substantially equal to the fluid supply source, and a pressurizing pipe for pressurizing the inside of the storage space are provided. Open / close valves are provided in the upstream and downstream parts, pressure equalization pipe and pressurization pipe, respectively, and these open / close valves are linked or selectively opened / closed to supply the processing fluid in the trap to the downstream part of the trap. Since it is configured to be controllable, the processing fluid can be circulated easily and in a short time from the outside of the processing tank simply by interlocking or selectively opening and closing the on-off valves provided in each pipe. .
[0091]
As a result, before removing the workpiece such as timber after the series of solvent vapor treatment, it is possible to wait until the treatment tank cools below the condensation temperature of the solvent even when the solvent and hot water are withdrawn from the treatment tank. Therefore, the processing can be performed continuously, and the processing efficiency and work efficiency can be greatly improved.
[0092]
Furthermore, when the solvent or water that has penetrated deeply into the wood is extracted from the wood, the inside of the treatment tank is evacuated, and at that time, the solvent mixed with sap such as wood sap is also separated and removed. There is also an advantage that the post-processing can be performed in a short time because the pumping and discharging to the apparatus can be easily performed.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a schematic configuration of a solvent vapor processing system according to the present invention.
FIG. 2 is a plan view showing a solvent vapor generator used in the solvent vapor treatment system.
FIG. 3 is a bottom view showing a solvent vapor generator used in the solvent vapor treatment system.
4 is a cross-sectional view taken along line AA of the solvent vapor generator shown in FIG.
FIG. 5 is a plan view of a trap used in the solvent vapor processing system.
FIG. 6 is a longitudinal front view of a trap used in the solvent vapor processing system.
FIG. 7 is a longitudinal side view of a trap used in the solvent vapor processing system.
[Explanation of symbols]
2 ... Processing tank 10, 21 ... Trap 20 ... Object 49/50 ... Circulation path (return pipe)
45.46 ... circulation path (piping)
44, 48 ... pressure equalizing piping 11, 70 ... pressurizing piping 69c ... trap storage space

Claims (1)

  A processing apparatus for processing the inside or the surface of a processing object by exposing the processing object to a processing fluid comprising a solvent vapor / chlorine of a chlorinated organic solvent in a sealable processing tank for storing the processing object. The processing apparatus is configured to collect, circulate, and reuse the processing fluid that has processed the object to be processed, and provide a trap in the circulation path that circulates the processing fluid. And a pressure equalizing pipe for making the pressure of the storage space substantially equal to that of the fluid supply source, and a pressure pipe for pressurizing the inside of the storage space. Open / close valves are provided in the upstream and downstream parts, pressure equalization pipe and pressurization pipe, respectively, and these on / off valves are linked or selectively opened and closed to control the processing fluid in the trap to the downstream part of the trap. It is possible to configure Management apparatus.

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