JP4029196B2 - Lock opening and closing device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a lock opening / closing device for opening / closing a container or the like that performs opening / closing of a lock by rotation.
[0002]
[Prior art]
In semiconductor manufacturing, the presence of particles has conventionally been recognized to affect wafer performance. Furthermore, in recent years, in addition to this, adhesion of gaseous substances is considered to affect the performance of the wafer. For this reason, a method has been proposed in which a wafer is stored in a cassette and the cassette is stored in an airtight container, or the airtight container is transported by an unattended transport device.
At the bottom of this hermetic container (hereinafter referred to as “pod”), there is a lid having a lock mechanism, and the cassette containing the wafer is inserted and removed from the bottom of the lid. The lid has two holes for opening and closing the lock so as to fit the pin provided on the stage of the lock opening and closing device, and the pod is locked and opened by rotating the pin inserted into the hole. .
[0003]
A conventional lock opening / closing device that opens and closes the lock on the pod side will be described below with reference to the drawings.
As shown in FIG. 3, the conventional lock opening / closing device includes a power supply unit including a geared motor 10, a power transmission unit including a worm shaft 20 and a worm 22, a stage 30, a pin 31, sensor operating pieces 32a and 32b, and sensors 33a and 33b. It comprises an opening / closing part and a control device 40 for controlling the rotation of the geared motor.
Next, the operation of releasing the lock of the lock opening / closing device will be described.
When the pod is placed on the stage 30 of the lock opening / closing device and the pin 31 is inserted into the hole in the lid at the bottom of the pod, the geared motor 10 starts to rotate by a signal from the control device 40. The rotational power by the geared motor 10 is transmitted by the belt 50 from the pulley 11 attached to the geared motor 10 to the pulley 21 attached to the worm shaft 20, and the worm shaft 20 starts to rotate. Reference numerals 23 a and 23 b are bearings for fixing the worm shaft 20.
The stage 30 is a worm wheel, and the rotation of the worm shaft 20 is transmitted to the stage 30 from the worm 22 installed on the worm shaft 20, and the stage 30 rotates in the direction A. Then, as a result of the rotation of the pin 31 provided on the stage 30, the cam at the center of the lid at the bottom of the pod is rotated, and the internal engagement plate is driven left and right to be locked or unlocked.
[0004]
By the way, the rotation angle from the locked state of the pod to the released state is defined as “θ”. Further, in order to perform the stop positioning of the pin 31, the angle formed by the position before starting the unlocking operation and the position of the sensor 33a for detecting "open" with respect to the rotation axis of the stage 30 is A sensor operating piece 32 a for detecting “open” is previously provided on the stage 30 at a position corresponding to the angle θ. Therefore, when the stage 30 rotates by an angle θ in the direction A and the sensor operating piece 32a moves to the position of the sensor 33a, the sensor 33a detects the sensor operating piece 32a.
Then, the output signal of the sensor 33 a is sent to the control device 40, and the control device 40 sends a stop signal to the geared motor 10.
As described above, the cam at the center of the lid at the bottom of the pod is turned by the angle θ to release the lock.
When the lock opening / closing device is locked, the control device 40 sends a signal to the geared motor 10 to rotate in the opposite direction to that of the unlocking described above, so that the rotation direction of the stage 30 is the direction B. A sensor operation piece 32b for detecting “closed” is provided in advance separately from the sensor operation piece 32a, and the control device 40 causes the geared motor to detect the output of the sensor operation piece 32b from the sensor 33b for detecting “closed”. A stop signal is sent to 10.
[0005]
[Problems to be solved by the invention]
By the way, in the above-described lock opening and closing device, the positioning of the stop position of the pin 31 is performed by finely adjusting the mounting positions of the sensor operating pieces 32a and 32b. However, since the stage 30 rotates at a low speed, the resolution with respect to the rotation angle of the motor is low, and detection errors are likely to occur unless the sensor operating pieces 32a and 32b are mounted on the stage 30 very accurately. Therefore, there is a problem that it takes a lot of work time to accurately position the sensor operating pieces 32a and 32b.
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a lock opening / closing device that can easily position a stop position of a pin in opening / closing of a lock.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, the invention according to claim 1 of the present invention includes a power providing means for generating a rotational force, a power transmitting means for decelerating and transmitting the output of the power providing means, and the power An opening / closing means for opening and closing the container by the rotational force transmitted through the transmission means and a control means for controlling the power providing means are provided at a rotating portion of the power transmission means at a higher speed side than the opening / closing means. A first sensor actuating piece that rotates integrally with the lever and a first sensor that is operated when the first sensor actuating piece reaches a predetermined rotational position; The lock opening and closing device controls ON / OFF of the power supply means by an output signal of the first sensor.
According to a second aspect of the present invention, in the lock opening / closing device according to the first aspect, the first sensor operating piece and the first sensor are provided in two sets.
[0007]
According to a third aspect of the present invention, there is provided power supply means for generating rotational force, power transmission means for decelerating and transmitting the output of the power supply means, and rotational force transmitted through the power transmission means. A first open / close means that opens and closes the container and a control means for controlling the power providing means are provided in a rotating portion of the power transmission means on the high speed side of the opening / closing means and rotate integrally with the rotating portion. A sensor operating piece, a first sensor operated by the first sensor operating piece reaching a predetermined rotational position, a second sensor operating piece rotating integrally with the opening / closing means, and the sensor operation A second sensor that is switched when the piece reaches a predetermined position, and the control means turns on / off the power supply means by a logical product of the output signals of the first sensor and the second sensor. A lock operating unit and controls the FF.
According to a fourth aspect of the present invention, in the lock opening and closing device according to the third aspect, the first sensor operating piece and the first sensor are provided in two sets, and the second sensor operating piece and the second sensor are provided. It is characterized by having two sets.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a lock opening and closing device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a view showing a lock opening and closing device according to an embodiment of the present invention. In the figure, the same reference numerals are given to portions corresponding to the respective portions in FIG.
The lock opening / closing device of this embodiment is obtained by adding the following configuration to the conventional lock opening / closing device shown in FIG. Specifically, first sensor operating pieces 24a and 24b for positioning the stop position of the pin 31 on the worm shaft 20 and first sensors 26a and 26b for detecting the sensor operating pieces 24a and 24b are newly provided. The signals of the sensors 26a and 26b are input to the control device 40, and the motor is controlled by the outputs of the sensors 26a, 26b, 33a and 33b. Hereinafter, a method for adjusting the position of the sensor operating pieces 24a, 24b, 32a, 32b and stop control in the control device 40 by providing a new configuration will be described. Hereinafter, the sensor operating pieces 32a and 32b are referred to as “second sensor operating pieces”, and the sensors 33a and 33b are referred to as “second sensors”.
[0009]
First, a method for adjusting the position of the first and second sensor operating pieces 24a and 32a in positioning the stop position of the pin 31 when the lock is opened will be described. The rotation angle from the locked state of the pod to the released state is defined as “θ”.
First, the angle between the position before starting the unlocking operation and the position of the second sensor 33a for detecting “open” with respect to the rotation axis of the stage 30 is substantially the lock opening / closing angle θ. The position of the second sensor operating piece 32 a for detecting “open” on the stage 30 is adjusted to the position. Here, the adjustment angle α of the second sensor operating piece 32a is θ−β <α <so that the second sensor 33a detects the second sensor operating piece 32a when the pin 31 rotates the lock opening / closing angle θ. θ
Adjust within the range. Here, the angle β is a rotation angle at which the stage 30 rotates when the worm shaft 20 makes one rotation. Note that the difference between the lock opening / closing angle θ and the adjustment angle α of the second sensor operating piece 32a is an error angle γ (γ = θ−α, 0 <γ <β).
In order to eliminate the error angle γ described above, after the second sensor 33a detects the second sensor operating piece 32b, the worm shaft 20 is further rotated so that the stage 30 rotates in the direction A, and the error angle γ. We will reduce. Finally, the angle between the position before starting the unlocking operation and the position of the second sensor 33a for detecting “open” with respect to the rotation axis of the stage 30 is accurately the angle θ. The rotation of the worm shaft 20 is stopped at the position where the error angle γ disappears, and the set bolt 25a is used at the position where the first sensor operating piece 24a is detected by the first sensor 26a for detecting “open”. The first sensor operating piece 24 a is fixed to the worm shaft 20.
[0010]
With this position adjustment method, first, the second sensor 33a detects the sensor operating piece 32a, and then the first sensor 26a detects the sensor operating piece 24a. When both the first and second sensors 26a and 33a output output signals, the pin 31 has rotated the lock opening / closing angle θ.
As described above, the position adjustment of the second sensor operation piece 32a on the stage 30 can be adjusted while allowing an error within the range of the rotation angle β of the stage 30 when the worm shaft 20 makes one rotation. Therefore, adjustment of the 2nd sensor operation piece 32a becomes easy. Further, the error angle γ between the adjustment angle of the second sensor operating piece 32a and the lock opening / closing angle θ can be adjusted within a range in which the worm shaft 20 makes one rotation, that is, a wide angle range of 0 to 360 degrees. Therefore, the stop position of the pin 31 can be positioned more easily and accurately.
Here, the position adjusting method of the first and second sensor operating pieces 24a and 32a in positioning the pin 31 stop position when releasing the lock has been described. However, the first method in positioning the pin 31 stop position when locking is applied. The method for adjusting the positions of the first and second sensor operating pieces 24b and 32b is the same.
[0011]
Next, stop control in the control device 40 of the lock opening / closing device will be described.
FIG. 2 is a time chart for explaining stop control when releasing the lock. In the figure, output signals of the first and second sensors 26a and 33a necessary for stop control when releasing the lock, and a motor rotation control signal for controlling the rotation of the geared motor 10 are shown. Here, it is assumed that the sensor 26a, 33a is “ON” when the sensor operating piece 24a, 32a is detected, and is “OFF” otherwise.
Incidentally, since the rotational speed of the worm shaft 20 is faster than the rotational speed of the stage 30, the output signal of the first sensor 26a is generated in a pulsed manner. In the figure, times t1 and t2 indicate rising times of the output signal of the first sensor. Therefore, the time T is a time for the worm shaft 20 to make one rotation.
In the stop control, when the output signal of the second sensor 33a is "ON" and the output signal of the first sensor 26a is "ON", that is, the control device 40 outputs the signals of the two sensors 33a and 26a. At the time t2 when the logical product of “1” is “ON”, the motor rotation signal is set to “OFF” for the geared motor 10 and the stop control is performed. As described above, when the output signal of the second sensor 33a is “ON” and the output signal of the first sensor 26a is “ON”, the rotation angle of the pin is rotated by the lock opening / closing angle θ. Yes, this makes it possible to accurately control the rotation angle of the pin.
Note that the stop control when locking by the control device 40 is different in that the output signal of the first sensor 26b and the output signal of the second sensor 33b are used, but similar to the stop control when releasing the lock. Be controlled.
As described above, by using the lock opening / closing device of this embodiment, the stop position of the pin 31 can be easily positioned with high accuracy.
[0012]
Note that, as the lock opening / closing device in the above embodiment, all the output signals of the four sensors 26 a, 26 b, 33 a, 33 b are input to the control device 40. By the way, the stop control is performed when the logical product of the output signals of the first sensor 26a and the second sensor 33a is "ON" or when the logical product of the output signals of the first sensor 26b and the second sensor 33b is " This is done by sending a motor rotation stop signal when it is “ON”. Therefore, an AND gate for obtaining the product of the output signals of the first sensor 26a and the second sensor 33a is provided, and the output is input to the control device 40 as a stop control signal when the lock is opened. Similarly, the output signal of the AND gate for obtaining the product of the output signals of the first sensor 26b and the second sensor 33b is input to the control device 40 as a stop control signal for closing the lock. As a result, there are two control input signals, and the conventional control device 40 shown in FIG. 3 can be used as it is.
[0013]
Further, the second sensor operating pieces 32a and 32b and the second sensors 33a and 33b are removed, and the control device 40 is provided with a pulse counter that counts pulses of the output signals of the first sensors 26a and 26b. Then, the rotation speed of the worm shaft 20 when the pin 31 rotates at the lock rotation angle θ is obtained in advance, and the first sensor operating pieces 24a and 24b are adjusted so that no error occurs in the lock rotation angle θ. deep. In the stop control by the control device 40, the number of pulses of the output signals of the first sensors 26a and 26b is counted by a pulse counter, and the motor rotates when the pulse counter reaches the rotation speed of the worm shaft 20 determined in advance. A stop signal may be sent.
Further, the first sensors 26 a and 26 b and the first sensor operating pieces 24 a and 24 b are provided on the worm shaft 20 that is a power transmission mechanism, but may be provided on any of the shafts that are faster than the stage 30.
Moreover, in the said embodiment, although the 1st sensor action | operation pieces 24a and 24b are being fixed with the set bolts 25a and 25b, you may fix with another method.
In the above embodiment, the lock opening / closing device has been described by taking the opening / closing of the lock of the pod for housing the wafer as an example, but it can be widely used in the rotation control of a predetermined angle.
[0014]
【The invention's effect】
As described above, according to the lock opening / closing device of the present invention, the following effects can be obtained.
According to the first aspect of the present invention, the sensor operating piece is attached to the power transmission mechanism having a high rotational resolution, and the sensor that detects the rotation of the shaft at a high speed by the sensor operating piece is provided. Positioning control is possible.
According to the second aspect of the present invention, both the opening and closing of the lock can be controlled with high accuracy by providing two sets of the sensor operating piece and the sensor in the power transmission mechanism with high rotational resolution.
[0015]
According to the third aspect of the present invention, by providing the sensor operating piece and the sensor in the power transmission mechanism and the opening / closing mechanism having high rotational resolution, a certain degree of error is allowed in positioning the stop position of the sensor operating piece of the opening / closing mechanism. This makes it possible to easily position the stop position. In addition, since the sensor operating piece is attached to the high-speed shaft and the sensor for detecting the rotation of the worm shaft is provided by the sensor operating piece, positioning control can be performed more easily and with high accuracy. Furthermore, in the control means, the product of the output signals of the sensors provided in the opening / closing means and the power transmission means is used as the input signal of the control device, so that the conventional control device can be used as it is.
According to the fourth aspect of the present invention, both the opening and closing of the lock can be controlled easily and accurately by providing two sets of sensor operation pieces and sensors in the power transmission mechanism and the opening / closing mechanism with high rotational resolution. be able to.
[Brief description of the drawings]
FIG. 1 is a view showing a lock opening and closing device according to an embodiment of the present invention.
FIG. 2 is a time chart for explaining stop control.
FIG. 3 is a view showing a conventional example of a lock opening / closing device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Geared motor 11 Pulley 20 Worm shaft 21 Pulley 22 Worm 23a, 23b Bearing 24a, 24b First sensor operation piece 25a, 25b Set bolt 26a, 26b First sensor 30 Stage 31 Pin 32a, 32b Second sensor operation piece 33a, 33b Second sensor 40 Control device 50 Belt

Claims (4)

Power providing means for generating rotational force, power transmitting means for decelerating and transmitting the output of the power providing means, opening / closing means for opening and closing the container by the rotational force transmitted through the power transmitting means, and the power Control means for controlling the providing means,
A first sensor actuating piece which is provided in a rotating part at a higher speed than the opening / closing means in the power transmission means and rotates integrally with the rotating part;
A first sensor operated by the first sensor operating piece reaching a predetermined rotational position;
Have
The lock opening / closing apparatus, wherein the control means controls ON / OFF of the power supply means by an output signal of the first sensor. The lock opening and closing device according to claim 1, wherein two sets of the first sensor operating piece and the first sensor are provided. Power providing means for generating rotational force, power transmitting means for decelerating and transmitting the output of the power providing means, opening / closing means for opening and closing the container by the rotational force transmitted through the power transmitting means, and the power Control means for controlling the providing means,
A first sensor actuating piece which is provided in a rotating part at a higher speed than the opening / closing means in the power transmission means and rotates integrally with the rotating part;
A first sensor operated by the first sensor operating piece reaching a predetermined rotational position;
A second sensor operating piece that rotates integrally with the opening and closing means;
A second sensor that is switched when the sensor operating piece reaches a predetermined position;
Have
The lock opening / closing device, wherein the control means controls ON / OFF of the power supply means by a logical product of output signals of the first sensor and the second sensor. Two sets of the first sensor operating piece and the first sensor are provided,
The lock opening and closing device according to claim 3, wherein two sets of the second sensor operating piece and the second sensor are provided.

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