JP4023938B2 - Heating device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heating apparatus used for heat application of an adhesive for surface mount components in semiconductor manufacturing, heat treatment after bonding, cream solder reflow, heating for high temperature operation test, and the like.
[0002]
[Prior art]
A so-called heating device called a block heater is made of stainless steel with excellent heat resistance in a block shape, and a heater that is a heat source is embedded in the block. The heating heater raises the temperature of the entire block, and this heat The above-mentioned adhesive or the like is cured.
[0003]
Particularly important in such a heating apparatus is to raise the temperature of the entire heating area with high accuracy and uniformity. If there is unevenness in the heating area of the heating apparatus, for example, it was used for heat application of an adhesive for surface mount components. In this case, unevenness of curing of the resin is caused and appears as product distortion.
[0004]
The distortion of the product due to such temperature unevenness not only adversely affects the performance of the product, but also cracks are generated from the strained part, which may cause damage to the product in a severe case.
[0005]
As a means for solving such problems and obtaining a uniform surface temperature, the present applicant disclosed in Japanese Patent Application Laid-Open No. 8-335490, in the block body made of stainless steel that has been conventionally used, the thermal conductivity. We proposed a heating device embedded with a uniform heating enclosure made of copper, etc.
[0006]
According to this heating device, it is possible to lower the thermal resistance of the entire heating device as compared with the one formed only of stainless steel, thereby efficiently conducting the heat of the heater to the heating surface side. A uniform temperature distribution can be obtained.
[0007]
[Problems to be solved by the invention]
However, in the conventional method, the block main body and the enclosure for uniform heating are simply joined by mechanical fitting or silver brazing, and the inner surface of the block main body and the uniform heating enclosure are mechanically fitted. There is a tendency that a gap is easily formed in the entire boundary portion with the outer surface of the body, and in the case of silver brazing, there is a tendency that a gap is partially formed.
[0008]
Such an entire gap deteriorates the thermal efficiency, and the partial gap causes uneven temperature. In particular, the temperature irregularity becomes more severe as the temperature becomes higher. When the temperature is 400 ° C., ± 3 ° C., and when the temperature is 500 ° C., the temperature irregularity is ± 7.5 ° C.
[0009]
Therefore, the problem to be solved by the present invention is to solve the above-mentioned problems of the heating apparatus previously proposed by the present applicant, and to provide a heating apparatus with better thermal efficiency and less temperature unevenness.
[0010]
[Means for Solving the Problems]
As a result of diligent research to solve the above-mentioned problems, the present inventor made a heat-resistant metal block as an outer frame, and once heated the material of the metal body for uniform heating inserted therein to the melting point and then cooled it. The present invention has been completed based on the knowledge that the inner surface of the heat-resistant metal block and the outer surface of the metal body for uniform heating are completely in close contact with each other, thereby improving thermal efficiency and eliminating temperature unevenness. .
[0011]
That is, the present invention is a heating apparatus in which a metal body for uniform heating having a higher thermal conductivity than the heat-resistant metal block is embedded in the heat-resistant metal block provided with heating means, In the state where the metal body for uniform heating is inserted, the heating is performed at a temperature equal to or higher than the melting point of the metal body for uniform heating, and the inner surface of the heat-resistant metal block and the outer surface of the metal body for uniform heating are brought into close contact with each other. To do.
[0012]
Here, stainless steel having excellent durability can be suitably used as the heat-resistant metal block, and any of copper, silver, aluminum, and gold having excellent thermal conductivity can be suitably used as the metal body for uniform heating. .
[0013]
In addition, as described above, the present invention is not limited to the heating means and the metal body for uniform heating embedded in the heat-resistant metal block, but also the heating device body provided with the heating means, and the heating device body. It is also possible in a heating device comprising a uniform heating member that is placed, arranged on the front surface, or mounted and used.
[0014]
In this case, the uniform heating member includes a heat resistant metal block and a metal body for uniform heating embedded in the heat resistant metal block and having a higher thermal conductivity than the heat resistant metal block. In the state where the metal body for uniform heating is inserted, the heating is performed at a temperature equal to or higher than the melting point of the metal body for uniform heating to bring the inner surface of the heat-resistant metal block and the outer surface of the metal body for uniform heating into close contact.
[0015]
The method for manufacturing a heating device according to the present invention is a method for manufacturing a heating device in which a metal body for uniform heating having a higher thermal conductivity than that of the heat-resistant metal block is embedded in a heat-resistant metal block having heating means. , Opening one surface of the heat-resistant metal block, inserting a metal material for uniform heating from the opening, and then heating the heat-resistant metal block and uniform heating at a temperature equal to or higher than the melting point of the metal body for uniform heating. The metal body material is heated and then cooled to bring the inner surface of the heat-resistant metal block and the outer surface of the uniform heating metal body into close contact.
[0016]
Further, another heating device manufacturing method of the present invention includes a heating device main body provided with a heating means, and a member for uniform heating that is mounted on the heating device main body, placed on the front surface, or mounted and used. The heating device comprising: the uniform heating member embedded in the heat resistant metal block and the heat resistant metal block and having a higher thermal conductivity than the heat resistant metal block; The metal body material for uniform heating is inserted into the heat resistant metal block, heated at a temperature equal to or higher than the melting point of the metal body for uniform heating, and then cooled to heat the inner surface of the heat resistant metal block evenly. The outer surface of the metal body is in close contact.
[0017]
Here, the heating temperature is preferably from the melting temperature of the metal body for uniform heating to the melting temperature + 1 ° C. (for example, 1083 to 1084 ° C. in the case of copper). If the heating temperature is too high, exceeding the melting temperature of the uniform heating metal body + 1 ° C, the molten material overflows and cavities are generated inside, which causes a problem in uniform heating.
[0018]
By heating under the above conditions, a volume diffusion layer is formed at the boundary between the inner surface of the heat-resistant metal block and the outer surface of the metal body for uniform heating, whereby the inner surface of the heat-resistant metal block and the outer surface of the metal body for uniform heating are completely adhered. It is considered that it can be in a state. This phenomenon is presumed to be caused by a phenomenon similar to volume diffusion in solid phase sintering.
[0019]
In addition, when heating the metal body material for uniform heating to the melting point, in order to prevent the melt from overflowing and generating cavities due to overheating, in the case of copper, for example, from about 1050 ° C. to 1083 It is desirable to heat up to about 30 to 40 minutes.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
The features of the present invention will be described below in detail based on the embodiments shown in the drawings. FIG. 1 is a partially cutaway perspective view showing the heating device of the first embodiment, and FIG. 2 is a longitudinal sectional view of the heating device shown in FIG.
[0021]
The heating device 10 of this embodiment includes a heat-resistant metal block 11 made of stainless steel having excellent heat resistance and wear resistance, and copper having a higher thermal conductivity than stainless steel inserted into the heat-resistant metal block 11. It comprises a metal body 12 for uniform heating and a heater 13 as a heat source. The upper surface side of the figure is a heating surface in semiconductor manufacturing or the like.
[0022]
Next, a manufacturing process of the heating apparatus shown in FIG. 1 will be described with reference to FIGS.
[0023]
In FIG. 3, 11a-11e are each part which comprises the metal block 11, and these parts 11a-11e are assembled by welding in the state which opened only the upper surface, and the copper plate G as a metal body material for uniform heating is carried in an inside. insert. At that time, assuming that the upper surface is lowered by filling the gaps between the parts 11a to 11e and the copper plate G by melting the copper plate G, the height dimension is made longer by about 10 mm.
[0024]
In this state, as shown in FIG. The electric furnace 50 is provided with divided heaters 50a to 50e that are divided into a bottom surface and a side surface, respectively, and these are temperature-controlled independently.
[0025]
In the case of this embodiment, the copper plate G having dimensions of 300 mm in length, 300 mm in width, and 35 mm in thickness is completely melted by heating at 1083 ° C. in an inert gas atmosphere or a reducing gas atmosphere for 90 minutes, and then naturally Cooling.
[0026]
Thereafter, the upper surface is cut by about 10 mm to have a predetermined size, and a hexahedron is completed by covering the cut surface with the metal block part 11f and performing welding as shown in FIG. Further, a hole (not shown) is processed for the heater, and the heater 13 shown in FIGS. 1 and 2 is attached as necessary to complete the heater.
[0027]
Thus, in the heating apparatus 10 of the present embodiment, the uniform heating metal body 12 is heated at a temperature of 1083 ° C., which is the melting point of copper, with the copper plate G inserted into the heat resistant metal block 11, and is heat resistant. The inner surface of the metal block 11 and the outer surface of the metal body 12 for uniform heating are completely in close contact with each other.
[0028]
In order to confirm the effect of the heating device of the present embodiment, an actual heating test was performed on the heating device of the present embodiment by the melting method and the conventional heating device by the silver brazing method. FIG. 6 is a graph showing the results.
[0029]
As shown in FIG. 6, in the heating device of the present embodiment, the deviation at the set temperature of 400 to 500 ° C. is about ½ compared to the conventional heating device, which is a significant improvement compared to the conventional device. It was seen.
[0030]
As described above, according to the heating apparatus of the present embodiment, a heating apparatus having a relatively simple structure with good thermal efficiency and less temperature unevenness can be obtained. In addition, since each member is subjected to heat treatment, the residual stress becomes zero, and the generation of thermal strain during use can be reduced and stable performance can be maintained.
[0031]
FIG. 7 is a longitudinal sectional view showing the heating device of the second embodiment. The heating device 20 of the present embodiment is used by being mounted on the heating device main body 21 provided with the heater 21 a and the heating device main body 21. It is a heating device comprising the uniform heating member 22.
[0032]
The uniform heating member 22 includes a heat-resistant metal block 22a made of stainless steel and a metal body 22b made of copper having a higher thermal conductivity than the heat-resistant metal block 22a embedded in the metal block 22a. Further, similarly to the heating device of the first embodiment, in a state where the metal body for uniform heating 22b is inserted into the heat resistant metal block 22a, the metal body is heated at a temperature equal to or higher than the melting point of the metal body for uniform heating 22b. The inner surface of the block 22a and the outer surface of the uniform heating metal body 22b are in close contact with each other. Also in the heating apparatus of this embodiment, the improvement equivalent to the heating apparatus of the said embodiment was confirmed.
[0033]
【The invention's effect】
According to the present invention, a heating device having a relatively simple structure, good thermal efficiency, and low temperature unevenness can be obtained. Further, since each member is subjected to heat treatment, the residual stress becomes zero, and the occurrence of thermal strain during use is reduced, and stable performance can be maintained.
[Brief description of the drawings]
FIG. 1 is a partially cutaway perspective view showing a heating device according to a first embodiment of the present invention.
FIG. 2 is a longitudinal sectional view of the heating apparatus shown in FIG.
3A and 3B are explanatory views showing a manufacturing process of the heating apparatus shown in FIG. 1, wherein FIG. 3A is a top view and FIG. 3B is a longitudinal sectional view.
4 is an explanatory view showing a manufacturing process of the heating device shown in FIG. 1. FIG.
5 is an explanatory diagram showing a manufacturing process of the heating device shown in FIG. 1. FIG.
FIG. 6 is a graph showing the results of a heating test.
FIG. 7 is a longitudinal sectional view showing a heating device according to a second embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Heating device 11 Heat-resistant metal block 11a-11f Parts of heat-resistant metal block 12 Metal body for uniform heating 13 Heater 20 Heating device 21 Heating device main body 21a Heater 22 Member for uniform heating 22a Heat-resistant metal block 22b Metal body for uniform heating 50 Electric furnace 50a-50e Division heater 51 Lid G Copper plate

Claims (6)

A heating apparatus in which a metal body for uniform heating having a higher thermal conductivity than the heat resistant metal block is embedded in a heat resistant metal block provided with a heating means, wherein the metal for uniform heating is embedded in the heat resistant metal block A heating apparatus in which a heat-resistant metal block inner surface and a uniform heating metal body outer surface are brought into close contact with each other by heating at a temperature equal to or higher than the melting point of the uniform heating metal body with the body inserted. A heating device comprising a heating device main body provided with a heating means, and a uniform heating member placed on the heating device main body, or disposed on the front surface or mounted and used. The member includes a heat-resistant metal block and a uniform heating metal body embedded in the same heat-resistant metal block and having a higher thermal conductivity than the heat-resistant metal block, and the uniform heating metal body inside the heat-resistant metal block A heating apparatus in which the heat-resistant metal block inner surface and the uniform heating metal body outer surface are brought into close contact with each other by heating at a temperature equal to or higher than the melting point of the uniform heating metal body in a state where the metal is inserted. The heating apparatus according to claim 1 or 2, wherein the heat-resistant metal block is stainless steel, and the metal body for uniform heating is copper, silver, aluminum, or gold. A method of manufacturing a heating device in which a metal body for uniform heating having a higher thermal conductivity than the heat resistant metal block is embedded in a heat resistant metal block provided with a heating means, wherein one surface of the heat resistant metal block is opened. Then, the metal material for uniform heating is inserted from the opening, and then the heat resistant metal block and the metal material for uniform heating are heated at a temperature equal to or higher than the melting point of the metal body for uniform heating and then cooled. And the manufacturing method of the heating apparatus characterized by making a heat resistant metal block inner surface and the metal body outer surface for uniform heating contact | adhere. A heating device manufacturing method comprising: a heating device main body provided with a heating means; and a member for uniform heating that is placed on the heating device main body, or disposed on the front surface or mounted and used. The uniform heating member includes a heat resistant metal block and a metal body for uniform heating embedded in the heat resistant metal block and having a higher thermal conductivity than the heat resistant metal block, and is used for uniform heating inside the heat resistant metal block. The metal body material is inserted and heated at a temperature equal to or higher than the melting point of the uniform heating metal body and then cooled to bring the heat-resistant metal block inner surface and the uniform heating metal body outer surface into close contact with each other. A method for manufacturing a heating device. . The heat-resistant metal block is stainless steel, the metal body for uniform heating is copper, silver, aluminum, or gold, and the heating temperature is a melting temperature to a melting temperature of the metal body material for uniform heating. 6. The method for manufacturing a heating device according to claim 4, wherein the temperature is + 1.degree.

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