JP4020492B2 - Vacuum deaerator - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vacuum degassing apparatus for degassing a gas contained in an ultrasonic cleaning liquid or the like.
[0002]
[Prior art]
Conventionally, in ultrasonic cleaning, ultrasonic deburring cleaning, ultrasonic polishing processing, ultrasonic etching processing, etc., ultrasonic waves are radiated into the liquid such as cleaning liquid, and cleaning and micro flash are performed by the impact force of cavitation generated at that time. However, if the gas contained in the cleaning solution is removed, the impact force of cavitation is enhanced and the propagation characteristics of sound waves in the liquid are improved. For this reason, the gas contained in the cleaning liquid or the like is degassed by using, for example, a technique of deaeration using a hollow fiber membrane or the like or a deaeration device 51 as shown in FIG. Such a technique is known.
[0003]
The degassing device 51 is adapted to degas a gas such as dissolved oxygen from the cleaning liquid S in the cleaning tank 52. The vacuum pump 54 sucks the cleaning liquid S into the de-cylinder 55 and the sucked cleaning liquid S. By spraying from the spraying unit 56, a plurality of filter media 57 such as a plastic plate, a SUS plate or a net provided with a plurality of holes having a hole diameter of about several millimeters are sequentially passed to increase the contact area of the liquid in a vacuum atmosphere. After the deaeration, the degassed liquid is returned to the cleaning tank 52 through the circulation pump 58.
A liquid column pipe 59 for detecting the height of the liquid level in the cylinder is provided on the side wall of the decylinder 55, and the liquid is supplied by level switches 60a, 60b, 60c provided at predetermined positions of the liquid column pipe 59. While detecting the surface, the operation of the solenoid valve 61 and the circulation pump 58 is automatically controlled by this detection signal.
Reference numeral 62 denotes an ultrasonic generator.
[0004]
[Problems to be solved by the invention]
However, when a hollow fiber membrane or the like is used, the equipment cost is expensive and clogging is likely to occur, and since the surface tension of the liquid is used, if alcohol or a surfactant enters, the decompressor side There is a problem that liquid leaks out, and it is not suitable for deaeration of ultrasonic cleaning liquid or the like.
For this reason, in reality, it is used only for deaeration of water such as city water and pure water.
[0005]
On the other hand, in the case of the degassing device 51, since the cleaning liquid can be applied even when the cleaning liquid is a hydrocarbon solvent other than water, alcohol, or other cleaning agents such as chlorofluorocarbon alternatives, the degassing apparatus 51 is widely used as a degassing apparatus for ultrasonic cleaning liquids. However, in the case of using a fine mesh member 57 in order to increase the deaeration capability, there is a problem that the cleaning and replacement work becomes large and it becomes a serious work.
In addition, although a material with a hole diameter of about several millimeters that is difficult to clog is used as the brazing material 57, when a large amount of organic matter is contained in the liquid, it may cause spoilage or bacteria when used for a long period of time. It is easy to become.
Furthermore, since the coarse brazing material 57 is used, if it is attempted to increase the deaeration efficiency by increasing the contact area of the liquid in a vacuum atmosphere, it is necessary to laminate the brazing material 57 in several layers, There is also a problem that it is easy to invite an increase in the size of the apparatus and an increase in the equipment cost.
[0006]
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a device having a low deaeration device at a low cost and at the same time being miniaturized to be easy to handle and having a high deaeration efficiency.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides a vacuum degassing apparatus in which a processing liquid such as an ultrasonic cleaning liquid is introduced into a vacuum container to degas the gas contained in the processing liquid . The filter for filtration which has a micropore with a hole diameter of 100 micrometers or less is provided in this, and while making the said vacuum vessel and the filter for filtration accommodated in this vacuum vessel into a cylindrical shape, it is vacuum in the cylinder of the filter for filtration. A pulling pipe is provided, and a spiral seal member is interposed between the inner wall of the vacuum vessel and the outer surface of the filter for filtering, so that the processing liquid introduced into the vacuum vessel passes through the filter for filtration. At the same time , the gas was degassed from the processing liquid passed by the vacuum pipe, and filtration and deaeration were performed simultaneously.
[0008]
In other words, the conventional vacuum degassing apparatus is designed on the assumption that the eye of the dredged material will not be clogged, but conversely, if the dredged material that is easily clogged is used, the deaeration performance can be improved. In particular, filtration and deaeration are simultaneously performed by a filter for filtration having fine pores having a pore diameter of 100 μm or less, particularly preferably 1 to 5 μm.
At this time, the filtration filter can be constructed more inexpensively and easily if a commercially available material such as a porous material, a perforated material, or a fibrous material is used.
[0009]
Moreover, if such a fine filter is used, the contact area of the liquid in a vacuum atmosphere can be increased, so that a desired deaeration effect can be obtained without increasing the size of the apparatus as in the prior art. I can do it.
Furthermore, since filtration and deaeration can be performed simultaneously, there is no need to provide a separate filter or the like, and the apparatus can be further reduced in size and cost.
[0010]
Here, the treatment liquid such as the ultrasonic cleaning liquid includes the ultrasonic cleaning liquid, the ultrasonic deburring cleaning liquid, the ultrasonic polishing liquid, the ultrasonic etching liquid, and the like. Examples of the liquid include water, various solvents, alcohols, treatment agents, and the like.
[0011]
In addition, a filter for filtration is provided in a cylindrical vacuum vessel via a spiral seal member, and the treatment liquid introduced into the vessel is spirally flowed along the seal member while By filtering from the outside to the inside, even if clogging occurs in a part of the filter for filtration, the treatment liquid is filtered through another part, and the entire area of the filter for filtration is efficiently It can be filtered and degassed while in use.
[0012]
According to a second aspect of the present invention, the filter for filtration is configured as a cartridge type that can be easily replaced.
That is, since this filter for filtration is premised on causing clogging, it is desirable that the filter for filtration in use can be easily replaced with a new filter for filtration when clogged. Therefore, it is possible to easily replace the cartridge type so that the desired deaeration performance can always be maintained.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the accompanying drawings.
Here, FIG. 1 is an overall perspective view of an ultrasonic cleaning device incorporating a vacuum deaerator, Figure 2 is a front view thereof, FIG. 3 is a schematic diagram of a device configuration of an ultrasonic cleaning device, FIG 4 is a vacuum degasser the basic configuration example diagram of FIG. 5 is a usage scenario view of the vacuum degassing apparatus according to the present invention.
[0014]
A vacuum degassing apparatus 2 according to the present invention is incorporated in an ultrasonic cleaning apparatus 1 as shown in FIGS. 1 and 2, and in addition to the vacuum degassing apparatus 2, a cleaning liquid is contained in the ultrasonic cleaning apparatus 1. The cleaning tank 3 to be stored, the ultrasonic generator 4 that emits ultrasonic waves to the cleaning liquid at the bottom of the cleaning tank 3, a vacuum pump, a circulation pump, and the like are built in and compactly configured, and various switches are provided. The operation unit 5 is provided.
[0015]
In the basic configuration of the ultrasonic cleaning apparatus 1, as shown in the schematic diagram of FIG. 3, the cleaning liquid S in the cleaning tank 3 is sucked by the vacuum pump 6 and introduced into the vacuum degassing apparatus 2. After the cleaning liquid S is filtered and degassed by the vacuum degassing device 2, it is returned to the cleaning tank 3 by the processed cleaning liquid Swo circulation pump 7.
[0016]
As shown in FIG. 4, the vacuum degassing device 2 having a basic configuration is internally provided with a cylindrical vacuum vessel 8 and a packing 9 (seal member) and a vacuum seal 10 in the vacuum vessel 8. A filtration filter 11 having a cylindrical shape and a perforated evacuation pipe 12 that passes through the inside of the filtration filter 11 are provided. The filtration filter 11 and the evacuation pipe 12 are configured in a cartridge type. Thus, it can be easily attached to and detached from the vacuum vessel 8.
[0017]
That is, a cover 14 that is detachable by tightening and releasing the V band 13 is provided on one end side of the vacuum vessel 8, and a handle 14a is provided on the outer side of the cover 14, and air permeability is provided on the inner side. The filter 15 for filtration supported by the reinforcing material 16 having air permeability and liquid permeability, and the vacuum pulling pipe 12 are attached to the holder 15.
For this reason, if the cover 14 is removed by loosening the V band 13 and holding the handle 14 a, the filter 11 for filtration and the vacuum pipe 12 can be removed integrally through the holder 15.
[0018]
The cover 14 can be attached to the vacuum vessel 8 in an airtight state by a seal ring 17, and a vacuum pulling connection portion 18 for connecting to the vacuum pump 6 is provided in a part of the cover 14.
[0019]
The vacuum vessel 8 includes an introduction port 20 through which the cleaning liquid S flows and a discharge port 21 through which the processed cleaning liquid S that has passed through the filter 11 for filtration flows out.
A gap is formed between the outer surface of the filter 11 for filtration and the inner wall of the vacuum vessel 8 by the vacuum seal 10 and the packing 9, and the introduction port 20 allows the cleaning liquid S to pass between the vacuum seal 10 and the packing 9. It is provided at a position where it can be introduced into the gap.
Incidentally, the filter 11 for filtration of embodiment is marketed, and a hole diameter is about 1-5 micrometers. Of course, it is not limited to a commercially available type.
[0020]
In the vacuum deaeration device 2 as described above, when the vacuum pump 6 evacuates the vacuum connection 18, air is sucked from the vacuum pipe 12 and the vacuum container 8 is in a vacuum state.
For this reason, the cleaning liquid S sucked from the introduction port 20 passes from the outside of the filtration filter 11 toward the inside of the cylinder, removes foreign matters having a predetermined diameter or more, and passes through the eyes of the filtration filter 1. At times, gases such as dissolved oxygen are degassed with vacuuming. At this time, since the filter 11 has a finer mesh than the conventional one, the contact area of the liquid in a vacuum atmosphere is increased, and degassing is performed more efficiently.
[0021]
Incidentally, when 70 liters of city water (dissolved oxygen 5.65 mg / l) is circulated for 30 minutes, the degassing apparatus using the hollow fiber membrane has a dissolved oxygen content of 0.7 to 1.2 mg / l. In the conventional degassing apparatus shown in FIG. 6, the dissolved oxygen was 1.2 to 1.8 mg / l. However, in the degassing apparatus of the present invention, the dissolved oxygen was 0.9 to 1.5 mg / l. It is confirmed that a degassing effect that is more efficient than the conventional one can be obtained.
[0022]
In addition, in the case of a degassing device using a hollow fiber membrane, it is limited to water, but in the case of the present invention, it can be used for degassing various solvents other than water, and the price is also hollow. It can be configured with about 1/5 or less compared to a yarn membrane, and about 1/3 or less compared with a conventional deaeration device.
In addition, both the hollow fiber membrane degassing device and the conventional degassing device require a filtering means such as a filter separately, but in the case of the present invention, they are unnecessary and the cost can be reduced accordingly. .
[0023]
In addition, the size of the device can be significantly reduced compared to the size of hollow fiber membrane degassing devices and conventional degassing devices (both width 400mm, length 800mm, height 1500mm). In the form, the width is about 250 mm, the length is about 600 mm, and the height is about 600 mm.
[0024]
Incidentally, FIG. 5 is a usage scenario view of the vacuum degassing apparatus 2 according to the entire area of the filtration filter 11 efficiently used and filtered, the present invention which is adapted to degassing.
That is, in the form of the packing 9 as shown in FIG. 4, most of the cleaning liquid S sucked from the introduction port 20 initially passes through the filtration filter 11 near the introduction port 20 due to the action of the suction force. Since filtration and deaeration are performed, the eyes near the inlet 20 are locally clogged. Then, the cleaning liquid S now flows down to the position of the packing 9 below, and the eyes of the filter 11 for filtration near the packing 9 are locally clogged. That is, there is a possibility that the middle part of the filter 11 for filtration may not be used efficiently.
[0025]
Therefore, in this configuration example, the form of the packing 9 of the vacuum degassing apparatus 2 in FIG. 4 is changed to the spiral packing 9r, and the cleaning liquid S introduced from the introduction port 20 is guided spirally along the spiral packing 9r. Thus, when the filter 11 near the inlet 20 is first clogged, the cleaning liquid S passes through the filter 11 from the clogged portion or the spirally descended portion, and is filtered. It becomes deaerated, and it can filter and deaerate, using the whole area | region of the filter 11 for filtration from upper direction to the downward | lower direction sequentially and using efficiently.
In FIG. 5, the same parts as those in FIG.
[0026]
When the eyes of the filter 11 for filtration are clogged over the entire area, the cover 14 is removed and the cartridge is replaced, but the replacement operation is very simple.
[0027]
The present invention is not limited to the above embodiment. What has substantially the same configuration as the matters described in the claims of the present invention and exhibits the same operational effects belongs to the technical scope of the present invention.
For example, the vacuum degassing apparatus 2 according to the present invention can be applied to an ultrasonic polishing apparatus and an etching apparatus other than the ultrasonic cleaning apparatus 1, and the cleaning liquid S may be a processing liquid such as ultrasonic polishing and etching.
Moreover, the hole diameter of the filter 11 for filtration is not limited to 1-5 micrometers.
[0028]
【The invention's effect】
As described above, the vacuum degassing apparatus according to the present invention is provided with a cylindrical filter for filtration having fine holes having a predetermined diameter or less in a cylindrical vacuum container, and a vacuum is formed in the cylinder of the filter for filtration. While providing a pipe, a spiral sealing member is interposed between the inner wall of the vacuum vessel and the outer surface of the filter for filtering, so that the processing solution such as the cleaning solution introduced into the vacuum vessel is passed through the filter for filtration. Since the filtration and the deaeration are performed at the same time, the contact area of the liquid in a vacuum atmosphere can be increased, and the apparatus can be made small and inexpensive while obtaining a desired deaeration effect.
Further, since filtration and deaeration can be performed at the same time, there is no need to provide a filter or the like, and further miniaturization and cost reduction can be achieved.
Further, the spiral seal member allows filtration and deaeration while efficiently using the entire area of the filter for filtration.
Furthermore, it is convenient because liquids other than water, such as various solvents, alcohols, treatment agents, etc., can be degassed.
[0029]
In this case, as according to claim 2, if constituting the filtration filter in replaceable cartridge type in a simple, always Ru can maintain the desired degassing performance.
[Brief description of the drawings]
[1] vacuum degassing incorporating an apparatus overall perspective view schematic diagram of an apparatus configuration of FIG. 2 the front view [FIG 3] Ultrasonic cleaning device [4] vacuum degassing apparatus of the ultrasonic cleaning device illustration of a basic configuration example FIG 5 shows usage scenario view of the vacuum degassing apparatus according to the present invention Figure 6 incorporating a conventional vacuum degassing apparatus ultrasonic cleaning device

Claims (2)

A vacuum deaeration apparatus in which a treatment liquid such as an ultrasonic cleaning liquid is introduced into a vacuum container to degas the gas contained in the treatment liquid , and a micropore having a pore diameter of 100 μm or less in the vacuum container The filter for filtration having a vacuum filter and a filter for filtration accommodated in the vacuum container are both cylindrical, and a vacuum pulling pipe is provided in the cylinder of the filter for filtration. between the inner wall of the container and the outer surface of the filtration filter, and interposed helical sealing member, Rutotomoni passed through the filtration filter of the treatment liquid introduced into the vacuum chamber, by the evacuation pipe A vacuum degassing apparatus characterized in that gas is degassed from the processing solution that has passed, and filtration and degassing are performed simultaneously.   2. The vacuum degassing apparatus according to claim 1, wherein the filter for filtration is configured in a cartridge type that can be easily replaced.

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