JP3995819B2 - 走査型プローブ顕微鏡 - Google Patents

走査型プローブ顕微鏡 Download PDF

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Publication number
JP3995819B2
JP3995819B2 JP00960899A JP960899A JP3995819B2 JP 3995819 B2 JP3995819 B2 JP 3995819B2 JP 00960899 A JP00960899 A JP 00960899A JP 960899 A JP960899 A JP 960899A JP 3995819 B2 JP3995819 B2 JP 3995819B2
Authority
JP
Japan
Prior art keywords
cantilever
sample surface
longer
tip
shorter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP00960899A
Other languages
English (en)
Japanese (ja)
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JP2000206026A (ja
JP2000206026A5 (https=
Inventor
正敏 安武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Analysis Corp
Original Assignee
SII NanoTechnology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SII NanoTechnology Inc filed Critical SII NanoTechnology Inc
Priority to JP00960899A priority Critical patent/JP3995819B2/ja
Priority to US09/483,727 priority patent/US6593571B1/en
Publication of JP2000206026A publication Critical patent/JP2000206026A/ja
Publication of JP2000206026A5 publication Critical patent/JP2000206026A5/ja
Application granted granted Critical
Publication of JP3995819B2 publication Critical patent/JP3995819B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/874—Probe tip array

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP00960899A 1999-01-18 1999-01-18 走査型プローブ顕微鏡 Expired - Fee Related JP3995819B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP00960899A JP3995819B2 (ja) 1999-01-18 1999-01-18 走査型プローブ顕微鏡
US09/483,727 US6593571B1 (en) 1999-01-18 2000-01-14 Scanning probe microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00960899A JP3995819B2 (ja) 1999-01-18 1999-01-18 走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JP2000206026A JP2000206026A (ja) 2000-07-28
JP2000206026A5 JP2000206026A5 (https=) 2005-05-19
JP3995819B2 true JP3995819B2 (ja) 2007-10-24

Family

ID=11725024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP00960899A Expired - Fee Related JP3995819B2 (ja) 1999-01-18 1999-01-18 走査型プローブ顕微鏡

Country Status (2)

Country Link
US (1) US6593571B1 (https=)
JP (1) JP3995819B2 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7665349B2 (en) * 2005-04-12 2010-02-23 Veeco Instruments Inc. Method and apparatus for rapid automatic engagement of a probe
JP4676237B2 (ja) * 2005-04-12 2011-04-27 エスアイアイ・ナノテクノロジー株式会社 Ａｆｍを用いたフォトマスク欠陥修正装置及び方法
DE102007023435A1 (de) * 2007-05-16 2008-11-20 Jpk Instruments Ag Verfahren zum rastersondenmikroskopischen Untersuchen einer Messprobe, Messsystem und Messsondensystem
DE102007032830B4 (de) * 2007-07-12 2010-04-15 Jörg Dipl.-Ing. Hoffmann Vorrichtung zur Vermessung eines Werkstücks sowie Messverfahren unter Einsatz einer derartigen Vorrichtung
EP2283486A2 (en) * 2008-05-23 2011-02-16 Veeco Instruments Inc. Preamplifying cantilever and applications thereof
JP5226481B2 (ja) * 2008-11-27 2013-07-03 株式会社日立ハイテクサイエンス 自己変位検出型カンチレバーおよび走査型プローブ顕微鏡
US20110041224A1 (en) * 2009-08-06 2011-02-17 Purdue Research Foundation Atomic force microscope including accelerometer
JP2013088390A (ja) * 2011-10-21 2013-05-13 Ricoh Co Ltd 部材表面汚染状態検知方法及び画像形成装置
CN116699180A (zh) * 2015-02-26 2023-09-05 沙朗特有限责任公司 用于制造纳电子机械系统探针的系统和方法
JP6729263B2 (ja) * 2016-10-06 2020-07-22 株式会社島津製作所 走査型プローブ顕微鏡

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5929643A (en) * 1995-12-07 1999-07-27 Olympus Optical Co., Ltd. Scanning probe microscope for measuring the electrical properties of the surface of an electrically conductive sample
WO1997034122A1 (en) * 1996-03-13 1997-09-18 International Business Machines Corporation Cantilever structures
US5825020A (en) * 1996-09-06 1998-10-20 The Regents Of The University Of California Atomic force microscope for generating a small incident beam spot
JP3753215B2 (ja) * 1998-09-10 2006-03-08 セイコーインスツル株式会社 走査型プローブ顕微鏡

Also Published As

Publication number Publication date
US6593571B1 (en) 2003-07-15
JP2000206026A (ja) 2000-07-28

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