JP2000206026A5 - - Google Patents

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Publication number
JP2000206026A5
JP2000206026A5 JP1999009608A JP960899A JP2000206026A5 JP 2000206026 A5 JP2000206026 A5 JP 2000206026A5 JP 1999009608 A JP1999009608 A JP 1999009608A JP 960899 A JP960899 A JP 960899A JP 2000206026 A5 JP2000206026 A5 JP 2000206026A5
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JP
Japan
Prior art keywords
spm
prevention
charging
background
control
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JP1999009608A
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English (en)
Japanese (ja)
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JP2000206026A (ja
JP3995819B2 (ja
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Priority to JP00960899A priority Critical patent/JP3995819B2/ja
Priority claimed from JP00960899A external-priority patent/JP3995819B2/ja
Priority to US09/483,727 priority patent/US6593571B1/en
Publication of JP2000206026A publication Critical patent/JP2000206026A/ja
Publication of JP2000206026A5 publication Critical patent/JP2000206026A5/ja
Application granted granted Critical
Publication of JP3995819B2 publication Critical patent/JP3995819B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP00960899A 1999-01-18 1999-01-18 走査型プローブ顕微鏡 Expired - Fee Related JP3995819B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP00960899A JP3995819B2 (ja) 1999-01-18 1999-01-18 走査型プローブ顕微鏡
US09/483,727 US6593571B1 (en) 1999-01-18 2000-01-14 Scanning probe microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00960899A JP3995819B2 (ja) 1999-01-18 1999-01-18 走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JP2000206026A JP2000206026A (ja) 2000-07-28
JP2000206026A5 true JP2000206026A5 (https=) 2005-05-19
JP3995819B2 JP3995819B2 (ja) 2007-10-24

Family

ID=11725024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP00960899A Expired - Fee Related JP3995819B2 (ja) 1999-01-18 1999-01-18 走査型プローブ顕微鏡

Country Status (2)

Country Link
US (1) US6593571B1 (https=)
JP (1) JP3995819B2 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7665349B2 (en) * 2005-04-12 2010-02-23 Veeco Instruments Inc. Method and apparatus for rapid automatic engagement of a probe
JP4676237B2 (ja) * 2005-04-12 2011-04-27 エスアイアイ・ナノテクノロジー株式会社 Ａｆｍを用いたフォトマスク欠陥修正装置及び方法
DE102007023435A1 (de) * 2007-05-16 2008-11-20 Jpk Instruments Ag Verfahren zum rastersondenmikroskopischen Untersuchen einer Messprobe, Messsystem und Messsondensystem
DE102007032830B4 (de) * 2007-07-12 2010-04-15 Jörg Dipl.-Ing. Hoffmann Vorrichtung zur Vermessung eines Werkstücks sowie Messverfahren unter Einsatz einer derartigen Vorrichtung
EP2283486A2 (en) * 2008-05-23 2011-02-16 Veeco Instruments Inc. Preamplifying cantilever and applications thereof
JP5226481B2 (ja) * 2008-11-27 2013-07-03 株式会社日立ハイテクサイエンス 自己変位検出型カンチレバーおよび走査型プローブ顕微鏡
US20110041224A1 (en) * 2009-08-06 2011-02-17 Purdue Research Foundation Atomic force microscope including accelerometer
JP2013088390A (ja) * 2011-10-21 2013-05-13 Ricoh Co Ltd 部材表面汚染状態検知方法及び画像形成装置
CN116699180A (zh) * 2015-02-26 2023-09-05 沙朗特有限责任公司 用于制造纳电子机械系统探针的系统和方法
JP6729263B2 (ja) * 2016-10-06 2020-07-22 株式会社島津製作所 走査型プローブ顕微鏡

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5929643A (en) * 1995-12-07 1999-07-27 Olympus Optical Co., Ltd. Scanning probe microscope for measuring the electrical properties of the surface of an electrically conductive sample
WO1997034122A1 (en) * 1996-03-13 1997-09-18 International Business Machines Corporation Cantilever structures
US5825020A (en) * 1996-09-06 1998-10-20 The Regents Of The University Of California Atomic force microscope for generating a small incident beam spot
JP3753215B2 (ja) * 1998-09-10 2006-03-08 セイコーインスツル株式会社 走査型プローブ顕微鏡

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