JP3985839B2 - Single crystal GaN substrate - Google Patents

Description

The present invention relates to a GaN single crystal substrate used for light emitting devices such as light emitting diodes (LEDs) and lasers (LDs) made of a group 3-5 compound semiconductor.

Light-emitting devices using Group 3-5 nitride semiconductors (GaN, GaInN) have already been put into practical use for blue LEDs and the like. Since a wide GaN substrate cannot be obtained, sapphire has been used exclusively as a substrate for nitride semiconductor light emitting devices. In sapphire (Al ₂ O ₃ ), the (0001) plane has 6-fold symmetry, and a GaN single crystal thin film grows on it. The GaN thin film and the GaInN thin film on sapphire have extremely many dislocations. However, it can still be used as a blue LED and has a long lifetime. Sapphire is both chemically and physically robust and heat resistant. It is a very hard and stable substrate material. Because of these advantages, a sapphire substrate is exclusively used as a substrate for a GaInN blue LED.

  However, the sapphire substrate has the following problems. The sapphire substrate has no cleavage plane. Moreover, it is an extremely hard material. When a large number of LED elements are manufactured on a wafer and divided into chips, it cannot be naturally divided on a cleavage plane like a normal semiconductor. The wafer can only be cut into chips by mechanical means (dicing). The dicing process increases costs. In the case of a semiconductor laser, it is not possible to create a reflective surface by further cleavage. Therefore, there was a problem in terms of quality. In addition, there is a drawback that the cost for manufacturing the reflecting surface is increased. Furthermore, sapphire is an insulating substrate.

  This also causes various problems. Since it is insulative, the bottom surface of the substrate cannot be used as an electrode as in a normal LED. Therefore, it is impossible to make electrodes on the upper and lower surfaces of the device. It is necessary to remove a part of the device by etching to expose the GaN lower layer and use this as an n-electrode. Wire bonding must be performed twice to connect the lead and the electrode. A current flows in the lateral direction in the semiconductor layer to which the lower electrode is attached, but a certain layer thickness must be provided to reduce the resistance. For this reason, the lower semiconductor layer becomes thick. In addition, since two electrodes are formed on the same surface, a large chip area is required. For this reason, GaN devices on sapphire substrates are expensive.

  In order to solve these sapphire substrate problems, it has been proposed to use a SiC substrate. The SiC single crystal has a cleavage plane and can be naturally cleaved from here. It should be possible to solve the problems of the dicing process and the resonator of the semiconductor laser. SiC is conductive and the lower electrode can be provided on the bottom surface of the SiC substrate. There is no space for the electrode and only one wire bonding is required. However, SiC is much more expensive than sapphire and is difficult to obtain and uneasy to supply. Further, there is a problem of crystallinity of a thin film such as GaN grown on the SiC substrate. Due to the high cost, the SiC substrate GaInN-based blue LED is hardly practically used even now.

The problem of crystallinity is described. When a GaN crystal thin film is grown on a sapphire substrate or SiC substrate, many defects such as dislocations are introduced into the epitaxial layer due to a lattice constant mismatch between GaN and the substrate material. The problem is that the crystallinity is poor because of different materials and different lattice constants. In fact, it is said that dislocations as high as 10 ⁹ cm ⁻² exist in an epitaxial layer (GaN, GaInN, etc.) of a sapphire substrate GaN-based LED device that is currently commercially available.

It is said that the dislocation of about 10 ⁸ cm ⁻² exists in the epitaxial layer, which is somewhat lower in the case of the SiC substrate.

  In the case of a semiconductor such as Si or GaAs, such a high density of dislocations does not make an effective device. For device fabrication, dislocation-free crystals for Si and low-dislocation crystals for GaAs are essential.

  Strangely, a GaN-based thin film functions normally as an LED even with such high-density dislocations. High-density dislocations have not hindered the practical application of GaN-based LEDs. Deterioration does not progress due to dislocation. In the case of a GaInN-based blue LED, high-density dislocation does not become a problem in terms of LED function.

That's fine for LEDs, but the presence of such many defects is still a problem when used as an LD. In the case of an LD that flows a much higher density current than an LED, there is a concern that defects are triggered, the lattice structure is disturbed, and the defects proliferate. Although a GaInN blue semiconductor laser is manufactured using a sapphire substrate, there is still a problem in terms of life. It is likely that many dislocations as high as 10 ⁹ cm ⁻² limit the lifetime of GaInN-based LDs.

  Taking these points into consideration, the present inventors consider that the most ideal substrate for a GaN semiconductor device is a GaN single crystal. If a GaN single crystal is used for the substrate, the problem of lattice constant mismatch is eliminated. Also, since GaN has a cleavage property, the process of cutting the wafer into chips is facilitated. It can be used as a resonator mirror surface in the case of a laser. Moreover, the GaN crystal is conductive, and the electrode arrangement is simplified. In this respect, a GaN single crystal is optimal as a substrate. The reason why the GaN single crystal was not used is that a large GaN single crystal having a practical size could not be produced so far.

  Even if the solid raw material is heated, it does not become a GaN melt but sublimes. Since a GaN melt cannot be used, the chocolate ski method starting from the melt cannot be used. It is said that there is an equilibrium between the liquid phase (melt) and the solid phase at ultra high pressure, but it is extremely difficult to produce a GaN single crystal with an ultra high pressure apparatus. Even if a GaN single crystal can be synthesized with an ultrahigh pressure apparatus, it is a small crystal and is not suitable as a substrate. To produce large crystals from equilibrium, a huge ultra-high pressure device is required, which is not commercially available.

  The present inventor examined technical problems and proposed a method for reducing crystal defect density by vapor-phase growth of GaN through a windowed mask. This is called the lateral overgrowth growth method or simply the lateral growth method.

Japanese Patent Application No. 9-298300 Japanese Patent Application No.10-9008 Japanese Patent Application No. 10-102546 IEICE Transactions vol. J81-C-II, no. 1, p58-64 (January 1998) Akira Sakai, Akira Sakurai “Reduction of dislocation density by selective lateral growth of GaN” Applied Physics Vol.

  Patent Documents 1 and 2 propose the lateral growth method of the present inventor. This is a method of obtaining a GaN crystal by providing a mask having a striped window and a dot-shaped window on a GaAs substrate, vapor-depositing GaN on the mask and removing the GaAs substrate. This is a means to make one GaN substrate,

Patent Document 3 proposes a method of using such a GaN substrate as a seed crystal, further laterally growing to produce a thick GaN ingot, and slicing the ingot to produce a plurality of GaN substrates. These novel methods of the present inventors made it possible for the first time to manufacture a GaN single crystal substrate on a commercial basis.

  Since GaN has a cleavage plane, the problem of cleavage can be overcome by using GaN as a substrate. Since there is an n-type GaN substrate, an LED can be made thereon and an n-electrode can be provided on the bottom of the n-type GaN substrate. Since it is not necessary to provide two electrodes on the same plane, the chip area can be saved. One wire is enough. Thus, this GaN substrate is useful as an LED substrate. When the LD substrate is used, it is convenient because the cleavage plane can be a resonator mirror. However, this GaN substrate still has problems and cannot be an LD substrate.

  In order to realize a blue and violet short wavelength laser diode, it has become clear that the greatest problem is to further reduce the defect density in the substrate. Since it is a laser diode used under severe conditions of high current density, it has been clarified that defects such as dislocations adversely affect the characteristics and life of the laser. In particular, it has been found that in order to extend the life of the laser, the GaN crystal needs to have a lower defect density.

In the conventional method, the dislocation density (EPD) of the GaN crystal did not become 1 × 10 ⁷ cm ⁻² or less even when lateral growth was performed using a stripe-shaped mask. Although a laser can be produced with such a GaN crystal, it is strongly desired that the EPD of the GaN substrate is 1 × 10 ⁶ cm ⁻² or less in order to produce a long-lived GaN-based laser. It is necessary to lower the EPD further than the currently reached level. Here, the long life means a life of 10,000 hours or more.

It is a first object of the present invention to provide a low dislocation GaN crystal of 1 × 10 ⁶ cm ⁻² or less. It is a second object of the present invention to provide a method for producing such a low dislocation GaN single substrate.

In order to solve the above-mentioned problems, the present inventor has studied a crystal growth mode by vapor phase growth.
Here, we looked back on the lateral overgrowth method as a crystal growth method for reducing dislocations, which has been attempted in the past.

  When using a stripe mask or the like and performing lateral overgrowth of GaN,

It is described in Non-Patent Documents 1 and 2. The process is shown in FIGS.

  FIG. 14 shows a state in which GaN is attached to a sapphire substrate and a stripe window mask extending in the [11-20] direction of GaN is provided. As shown in FIG. 15, when vapor phase growth starts, selective growth occurs preferentially from the mask window, and the (11-22) plane and the (-1-122) plane grow preferentially. So a triangular GaN ridge is formed along the window. Dislocations from the substrate are transferred to the GaN thin film. The direction of dislocation is indicated by a thin line. Since it is growing upward, dislocations also progress upward.

  After the window is filled, GaN protrudes from the mask window and extends laterally as shown in FIG. During this time, there is no significant change in height. The most advanced are the facet surfaces (11-22) and (-1-122). This grows laterally. Dislocations indicated by thin lines bend in the horizontal direction.

  Eventually, the growth layer from the adjacent mask window merges in the middle of the mask window to embed the facet surface. A surface defect in which dislocations gather in the middle of adjacent windows is formed. As shown in FIG. Thereafter, on the c-plane (0001), two-dimensional growth is performed, and specular growth proceeds. Of course, it is not easy to carry out mirror-like growth, but it is thought that it is necessary to grow while maintaining the mirror surface even during the growth because the purpose is to make a flat and smooth GaN single crystal.

  In this case, it has already been reported that the threading dislocation density is small in the portion protruding laterally from the window and growing on the mask. The nonpatent literature 2 considers the cause in detail. The reason why the dislocation is reduced by the mask described in Non-Patent Document 2 is as follows. When the crystal grows in the c-axis direction, dislocations also extend in the c-axis direction. Dislocations continuous in the c-axis direction are threading dislocations. However, when crystals grow on the mask in the lateral direction (perpendicular to the c-axis), dislocations also extend in the lateral direction as a general tendency. Therefore, it is considered that threading dislocations orthogonal to the c-axis will decrease.

In the above-mentioned report example Non-Patent Document 2, it is described that the growth starts perpendicularly to the substrate in the mask window and then begins to grow in the lateral direction. It is also described that a planar defect is formed in a portion where crystals grown from adjacent windows are combined on the mask. It is also reported in Non-Patent Document 1 that this planar defect becomes smaller as the film thickness increases and disappears when the film thickness is about 140 μm or more. Therefore, it is stated that the lateral overgrowth using a mask with a window was able to reduce the EPD of GaN to the order of 10 ⁷ cm ^-2 at once.

  The present inventor also carried out such lateral growth of GaN, and observed and examined the detailed state of the growth. In the following description, facet planes other than the c plane are simply referred to as facet planes in order to distinguish them from the two-dimensional growth on the (0001) plane, that is, c plane, which is observed in normal epitaxial growth.

The crystals extending on the mask are combined when the film thickness is about 6 μm. Thereafter, the crystal grows upward (c-axis direction). It was a two-dimensional growth in which c-planes were stacked, and it grew while maintaining a flat surface. The surface is a mirror-like plane. Various GaN films were grown by changing the growth film thickness from 0.2 mm to 0.6 mm. Although the dislocation density in the crystal decreased somewhat, the dislocation density did not fall below 1 × 10 ⁷ cm ⁻² . It must be said that this is still insufficient as a substrate for a semiconductor laser.

  The present inventor considered the reason why dislocations did not decrease as follows. As long as simple two-dimensional growth upward (c-planes are superimposed while maintaining flatness, that is, mirror growth), dislocations continue to extend in a direction perpendicular to the c-plane. As long as it extends freely upward, a mechanism that eliminates dislocations does not work. Therefore, once the two-dimensional growth is performed while maintaining the flatness strictly upward, the dislocations once generated cannot be erased.

  In addition, the mirror growth performed in Non-Patent Documents 1 and 2 (growing at the same speed in the c-axis direction on the entire surface) has another problem. In the mirror growth, the growth temperature is too high, and when GaAs is used as a substrate, there is a problem that the GaAs substrate deteriorates in a rough manner due to high heat. As long as sapphire is used as the substrate, the growth temperature is not too high, but if GaAs is used as the substrate, it is necessary to lower the growth temperature. The inventor wants to use a GaAs substrate. Since it reacts more chemically than sapphire, the GaAs substrate can be easily removed after GaN growth. There was such a hidden line.

  Now back to the problem of dislocations. In order to reduce the dislocation density, there must be some mechanism for erasing dislocations once generated. If the mirror surface is simply grown upward at a uniform rate, dislocations do not decrease.

The present inventor believes that dislocation elimination can be reduced by providing a dislocation annihilation mechanism in the crystal and growing the crystal while maintaining this mechanism.

  We investigated a method that can generate a dislocation annihilation mechanism and allow crystal growth with the dislocation mechanism. And we found a crystal growth method including a mechanism to eliminate dislocations. That is the present invention.

  In the present invention, crystal growth is performed under the condition that a facet surface is generated instead of a flat surface, and the facet remains until the end without devising embedding the facet surface. The facet plane eliminates the dislocation.

The present invention first realizes that the facet surface has a dislocation annihilation function and reduces the dislocation by the facet surface. Adjacent facet planes have a boundary, but dislocations are gathered at the boundary of the facet plane and erased. The boundary of the facet plane becomes a dislocation aggregation plane, and the intersection line of the dislocation aggregation plane becomes a multiple line in which dislocations are accumulated. When dislocations are reduced using the facet plane, it is possible to obtain low dislocations of 10 ⁶ cm ⁻² or less, which is one digit lower than conventional ones. Surprisingly, a low dislocation GaN single crystal such as 10 ⁴ cm ^{−2 to} 5 × 10 ³ cm ⁻² can be produced.

  The facet plane described here is not a c-plane but a plane that is not orthogonal to the growth direction. In normal crystal growth, growth is performed while maintaining a flat surface. Therefore, the growth that causes facets is not good. However, the present invention reverses the common sense and allows the generation of facets, so that the facets are continuously present during crystal growth to reduce dislocations. In this way, an unprecedented low dislocation GaN crystal could be grown. From this, it becomes possible to manufacture a low dislocation GaN substrate. It is an optimal crystal substrate as a substrate for blue and purple semiconductor lasers.

The GaN growth mode of the present invention can be described as follows.
(1) Growing in a state in which the facet surface exists until the end of growth without generating the facet surface and eliminating the facet surface.
(2) The facet surface has a boundary between adjacent facet surfaces.
(3) To have multiple points that are intersections of a plurality of facet planes.
As a result, a low dislocation GaN crystal of 10 ⁶ cm ⁻² or less was realized for the first time.

  It is necessary to explain in detail because the idea is difficult to understand. A facet plane is a plane other than a plane (growth plane) perpendicular to the growth direction. Here, since the growth is in the c-axis direction, the c-plane is the growth plane. The surfaces other than the c-plane are facet surfaces. I will describe the plane and direction in detail, so I will explain the definition here.

  Since GaN is hexagonal, a notation using four indices is used to represent the axial direction and plane orientation. Although there is a notation of 3 indices, here, the expression of 4 indices is used consistently. The a-axis and b-axis are 120 degrees and have the same length (a = b). The c-axis orthogonal to these is a unique axis and is not equal to the a-axis (c ≠ a). Since only the a-axis and the b-axis have no symmetry in expressing the ab plane direction, another axis is assumed. Let this be the d-axis. Although it is possible to specify the azimuth sufficiently with only a and b, an extra axis d is introduced so as not to impair the symmetry, so they are not independent of each other. If one parallel plane group is expressed by four indices (klmn), this means that the distance from the origin at the point where the first plane is cut from the a-axis, b-axis, d-axis, and c-axis when counted from the origin. a / k, b / l, d / m, c / n. This is the same definition as in other crystal systems. However, since the a, b, and d axes are redundant coordinates included in the plane, k, l, and m are not independent, and there is always a sum rule that k + 1 + m = 0. The c-axis is the same as in the case of cubic crystals. When there are n equivalent parallel surfaces in the c-axis unit length, the index in the c direction is n. Therefore, the front three of the four indices have rotational symmetry, but the rear one (c-axis) is independent.

  Each plane orientation is expressed by round parentheses (...). The collective plane orientation is expressed by curly braces {...}. Collective means a set of all plane orientations that can be reached by all symmetry operations that the crystal system allows a plane orientation. The crystal orientation is also expressed by the same index. The crystal orientation uses the same index as the index of the plane perpendicular to it. Individual orientations are represented by square brackets [...]. The set direction is expressed in square brackets <...>. These things are common sense of crystallography, but explained to avoid confusion. The negative index is indicated by a horizontal line above the number, which is intuitive and easy to understand. However, since a horizontal line cannot be drawn on the number, a negative number is shown here with a minus sign in front of the number.

Growing in the c-axis direction means growing on a surface having an equivalent axis in six directions. This means that the facet surface is other than the c-plane (0001), so if any of k, l, and m is not 0, it is a facet surface.
However, there is a distinction between facets that are likely to appear due to symmetry, etc., and facets that are difficult or impossible to appear. The main facets that appear frequently

{1-212}, {1-211}, {n-2nnk} (n and k are integers), {1-101}, {1-102}, {n−n0k} (n and k are integers)

Etc. As described above, {...} Is a collective surface display. For example, if the {1-212} plane is an individual plane, (1-212), (2-1-12), (11-22), (-12-12), (-2112), (-1-122) ). These six inclined surfaces (facet surfaces) are surfaces that form inverted hexagonal pyramid-shaped pits to be described later. However, because it is complicated, we do not write individual plane indices for the six planes. The facet plane of {1-212} is simply described, but the above six equivalent planes are actually shown. On the other hand, even if {2-1-12}, {11-22}, etc. are written, this is equivalent to the same set of elements as {1-212}.

  In the present invention, the basic principle that causes dislocation reduction is a mechanism that gathers defects such as dislocations at the boundary between facet surfaces with different plane orientations or between multiple facet planes with different plane orientations. This is thought to be due to working.

  As a result, defects such as dislocations in the crystal are collected at the boundary surface of the facet surface and multiple points of the facet surface, and as a result, the dislocation defects in the crystal are sequentially reduced and the quality is improved. At the same time, the number of defects increases at the boundary surface of the facet surface, which is an aggregate of defects, and at multiple points on the facet surface. The general principle of the present invention is as described above. The principle of the present invention will be described in more detail below. It is difficult to understand why the facet has the effect of collecting dislocations. First, a description will be given of the bending of dislocations in the two facet planes in the traveling direction, and then the specific accumulation of dislocations in the growth pits.

  In general, the direction of dislocation progression depends on the direction of crystal growth. In the case of a GaN crystal, dislocation advances in the c-axis direction during two-dimensional growth in the c-axis direction in the mask window. When the edge of the mask is exceeded, the crystal growth changes to a lateral growth mode on the mask. When the growth direction becomes the lateral direction, the direction of dislocation progression also changes to the lateral direction. This is revealed in a report on lateral overgrowth.

  14 to 17 show a lateral overgrowth process. As I explained earlier, I will look back once more to consider dislocations. FIG. 14 shows a state where a mask is provided on the substrate. FIG. 15 shows a state in which GaN is grown on the substrate. GaN grows (in the c-axis direction) on the portion not covered with the mask. Since it does not grow on the mask, a GaN crystal is formed in a triangular basket shape. The dislocation is straight upward (c-axis direction). The inclination angle of the crystal external shape is determined in advance. As the growth further proceeds, as shown in FIG. 16, the crystal grows on the mask and grows sideways (in the ab plane). Dislocations bend laterally. As the growth proceeds further, the GaN crystal from the adjacent window merges at the midpoint of the coating and grows further upward. Large defects are generated in the line of combination. Some dislocations are terminated by a misalignment line and disappear. Conventional lateral overgrowth has been grown to a flat surface (mirror surface) after combination.

  The present invention allows the growth including a large amount of concave and convex facets, not the mirror growth. Then, many parts where different facet surfaces intersect will appear. Consider the intersection of facet planes. There are two cases.

(1) When the facet angle is 180 degrees or less
First, consider a case where the boundary line is convex when the angle formed between the facet surfaces having different surface indices is smaller than 180 degrees. This is shown in FIG. A pyramid consisting of four inclined surfaces is drawn on a quadrangular prism. This is a general case. Only the two facet surfaces Fa and Fb are considered. The slanted slope is the facet. The average growth direction is the c-axis direction.

  However, the growth directions A and B on the facet plane are directions in which normals raised on the facet planes Fa and Fb are projected on the bottom surface. It is considered that the direction in which the dislocation proceeds is equal to the growth direction. FIG. 2 shows a facet plane growth direction and a dislocation progression direction projected onto the bottom surface. The growth direction A and the dislocation progression direction a are the same but diverge outward. The dislocation proceeds outward because the facet surfaces are convexly combined. The dislocation moves away from the facet boundary m. Different dislocation lines do not intersect. In this case, it is considered that crystal growth proceeds by freely taking over the base crystal. Although there may be a difference in impurity concentration due to a difference in growth plane index, the behavior of defects such as dislocations only takes over the defects of the underlying crystal. So there is no such thing as dislocation reduction. FIG. 3 shows the state after growth. The dislocation density does not change with increasing thickness. If the facet crossing angle is 180 degrees or less (inferior angle), there is no dislocation reduction effect.

(2) When the facet surface angle is 180 degrees or more
What is important is when the angle formed by the facet surfaces having different surface indices is larger than 180 degrees, that is, when the boundary line is concave. FIG. 4 shows such a case. Shaded portions are facet surfaces Fa and Fb. The average growth direction is the c-axis direction. The growth directions A and B on the facet plane are directions in which normals raised on the facet plane are projected on the bottom surface. It is considered that the direction in which the dislocation proceeds is equal to the growth direction. FIG. 5 shows a facet plane growth direction and a dislocation progression direction projected onto the bottom surface. The growth direction A and the dislocation progression direction a are equal, but they converge on the inside. The dislocation proceeds inward because the facet surface is mated with the recess. Different dislocation lines on adjacent facet planes intersect at a boundary line m. It is refracted at the boundary line as dislocation direction c. As shown in FIG. 6, the dislocation lines c are accumulated in a plane perpendicular to the boundary line.

  Since the integrated line m gradually rises as the crystal grows, the locus of the dislocation integrated line m becomes a plane. This is the planar defect K. The planar defect K can be a low-angle grain boundary. The planar defect portion K is a bisecting surface of the two facet surfaces Fa and Fb. Dislocations existing on the facet surface are thus absorbed by the surface and disappear from the facet surface. Since the dislocation lines gathered at the planar defect portion K still proceed obliquely inward, they gradually accumulate on the center line. Therefore, dislocations also decrease from the surface and accumulate on the center line. This is the basic principle of dislocation reduction according to the present invention. If the crossing angle of the facet plane is 180 degrees or more (superior angle), such a dislocation reduction effect is always obtained.

Next, a case where a plurality of facet surfaces having different surface indices have multiple points will be described. Although similar to FIGS. 4-6, FIG. 7 depicts a more specific set of facet surfaces (pits). When the GaN growth in which facets actually appear is performed, the protrusions as shown in FIGS. It becomes a recessed part (pit) like FIGS. The present invention attempts to take advantage of this asymmetry of the facet surface.
FIG. 7 corresponds to the inverted hexagonal pyramid EGHIJN-D formed by the {1-212} plane. FIG. 8 is a projection view of the pits on the c-plane. The average growth direction is the c-axis direction. In the pits, the growth directions A, B... Are considered to be directions perpendicular to the surface or parallel to the surface and perpendicular to the lateral line of the facet surface. The growth direction on the flat surface is the c-axis direction. Dislocation lines extend along the growth directions A, B,. The direction of dislocation a in Fa is parallel to A. The direction b of dislocation in Fb is parallel to B. Since the six pyramid surfaces (facet surfaces) grow at the same speed, the dislocation eventually reaches the boundary line m.

  Does the dislocation extend to the adjacent facet surface beyond the boundary line m? However, the growth direction B of a certain facet plane and the dislocation progression direction b were parallel. The growth direction of the adjacent facet surface is 60 degrees different from the growth direction of the facet surface. If the dislocations are adjacent facet planes, the dislocations must be bent by 60 degrees. This is not possible. That is, the dislocation cannot get over the boundary line m. Therefore, it disappears at the boundary line m or goes to the center along the boundary line m. Since the boundary line m is a singular line of the crystal, dislocations are allowed to enter.

  Actually, on average, the upward growth is occurring, so the pits fill up little by little. Nevertheless, the reason why the pit does not become small is that the upper opening tends to widen. Assuming that the growth rate in the c-axis direction on the surface is V, the inclination of the facet surface relative to the surface is θ, and the growth rate on the facet surface is Vsinθ, the size of the pits remains unchanged and increases upward at a V velocity. Just do it. Old dislocations are buried in the crystal as they grow. That is, the dislocation line is embedded in the boundary line m. Since dislocations enter the boundary line m, dislocations in other regions decrease.

  Dislocations are embedded in the bisector of the adjacent facet plane. This surface is called a planar defect K. This is shown in FIG. The planar defect portion K is a surface that is rotationally symmetric with respect to the pit center line and forms an angle of 60 ° with each other.

  Since growth occurs in the upward direction, the dislocation at the boundary line moves toward the center. Therefore, the set of dislocations slides down the boundary line m and accumulates on the central axis. This is a continuous linear defect L below the multiple point D in FIG.

  At the multipoint D, dislocations from other facet plane boundaries, low-angle grain boundaries, etc. merge and all gather. Thus, all the dislocations in the pit formed by the six facet surfaces are collected at the multipoint D. Some of the dislocations disappear during the transition. The rest aggregates and remains at the multipoint D.

  Defects such as dislocations gathered at multiple points remain as a set of linear dislocation defects vertically below the multiple points as they grow. It is a linear defect portion L. In addition, a band-like defect (planar defect) K remains under the facet plane boundary, and a low-angle grain boundary also remains.

The band-like surface defects, small tilt grain boundaries, and linear defects that collect dislocations certainly remain in the crystal.
So it cannot be said that the number of dislocations has not decreased. Most of the dislocations disappear when they merge with the boundary line. It disappears when it gathers from the boundary line to multiple points. Furthermore, dislocations collected in a very narrow region disappear by interaction. For example, it disappears due to collision between edge dislocations. Therefore, the defect density decreases with growth.

  Formation of an assembly of defects such as planar defects and linear defects is also related to growth conditions, and the number of aggregates can be reduced by optimizing the growth conditions. Depending on the growth conditions, surface defects such as low-angle grain boundaries may disappear. The crystallinity in this case is good.

Depending on the growth conditions, a large number of dislocations may be observed in the vicinity of an aggregate of band-shaped surface defects, small-angle grain boundaries, and linear defects. A linear defect is counted as one etch pit. To put it simply, if one multipoint D collects an average of 10 ⁴ dislocations, for example, the etch pit is reduced to 10 ⁻⁴ .

  So far, the dislocation reduction method of the present invention has been described in detail. However, there are serious problems that have not yet been mentioned. The method described so far is only a dislocation reduction method at the site where the facet portion exists at that time. If even a part of the crystal has a c-axis growth part (mirror growth), this part has no effect of reducing dislocations. This is because in the case of c-axis growth, dislocations are only carried in the c-axis direction and do not decrease.

  FIG. 11 shows a longitudinal section of the crystal. The hatched portion s is a c-axis growth portion, and the white background portion w is a facet growth portion. FIG. 11 shows a case where these cross sections are not changed in the growth direction. Let q be the boundary between the c-axis growth portion s and the facet growth portion w. The boundary q is invariant to the growth direction. The white background portion w has the above-described dislocation reduction effect. However, dislocations do not decrease in the shaded area s. Assuming that the initial EPD is Q, this is preserved in the hatched portion, so even if the EPD in the facet growth portion is 0, the final EPD is proportionally distributed, so that EPD = Qs / (s + w) become. The reduction effect is given by s / (s + w). This is only about 1/2 or 1/3 at most. However, the present invention brings about a reduction effect of about 1/10000 as described in the examples.

  In this regard, the inventor has already prepared a clever solution. Let's talk about the solution.

In the growth of a GaN crystal, how facets are formed depends on the growth conditions. For example, it depends on growth conditions such as NH ₃ partial pressure, GaN growth rate, growth temperature, and gas flow. By skillfully controlling these growth conditions, mirror growth does not occur and facet growth occurs. In contrast to conventional methods, the present invention avoids specular surfaces and prefers facets.

For example, the higher the growth temperature, the more likely it becomes a mirror surface (c-plane growth), and the facet hardly occurs. The lower the growth temperature, the easier facet growth. The slower the growth rate, the easier the mirror growth and the less faceting occurs. When the growth rate is increased, facet growth is easier. When NH ₃ partial pressure is low, it tends to be a mirror surface. In other words, facet growth can be achieved by increasing the NH ₃ partial pressure. The lower the HCl partial pressure, the more likely it becomes a mirror surface. Therefore, increasing the HCl partial pressure facilitates facet growth. In other words, facet growth can be achieved under conditions opposite to mirror growth.

During the growth of the GaN crystal, these growth conditions are changed so that the region where the facet surface exists is changed in the lateral direction so that each region has experience of facet growth when viewed in the thickness direction. The experience of faceted growth is simply called “faceted growth history”. The conditions are varied with time so that there is a history of facet growth somewhere in the total area. Since the facet grown part has no dislocation seeds, no dislocation exists even after specular growth. By doing so, a low dislocation density can be achieved on the entire surface. The height z is taken upward in the crystal cross section. Since the growth thickness is proportional to time, the height z is proportional to time t. If it discusses by time t, it will become the expression containing the time of a history. A facet characteristic function w (x, y, z) is defined by taking three-dimensional coordinates (x, y, z) in the crystal. This is a characteristic function that takes a value of 1 if (x, y, z) is a faceted growth portion and 0 otherwise.
w (x, y, z) = 0 Point (x, y, z) is specular growth
w (x, y, z) = 1 Point (x, y, z) is faceted growth
The two-dimensional hysteresis characteristic function W (x, y) is perpendicular to the surface point (x, y) and has a facet growth w (x, y, z) = 1 somewhere in the z direction. , Y) is set to 1, and when there is no facet growth anywhere in the z direction, it is assumed that the function is such that W at the point (x, y) is 0.
W (x, y) = max _z {w (x, y, z)}
It is a history characteristic function defined as follows. If this is 1, it means facet growth somewhere in the z direction. If W (x, y) = 1 over the entire surface, the entire surface has a facet history. However, even if W (x, y) = 1 over the entire surface, it does not necessarily mean that w (x, y, z) = 1 in the xy plane for an arbitrary z. If there are many circumstances where w (x, y, z) = 1 at a certain time (a certain xy plane), W (x, y) = 1 over the entire surface.

  FIG. 12 shows a longitudinal section of the growth surface in such a case. The white background is the facet growth part (pit growth part) w. This had the effect of absorbing dislocations. There is a time when the facet growth region (white background) is temporarily wide at the beginning of growth. At this time, the facet growth region absorbs dislocations into planar defects and linear defects. After that, even if c-axis growth occurs in the upper part, there is no dislocation seed, so there is no dislocation. In FIG. 12, even if it is a hatched portion (mirror growth portion), there is almost no dislocation if a white background (facet growth) once exists below it. Therefore, even if the area of the shaded part (mirror growth part) becomes large at the end of growth, it is low dislocation.

  FIG. 13 is a more extreme one. In the early stage of growth, facet growth occurs on the entire surface (white background). Since facet growth occurs here, the dislocation is reduced. Thereafter, even if the growth conditions are changed and c-axis growth (mirror growth) is performed, the dislocation is not transmitted because there is no dislocation seed. By such a movement of the transverse facet growth region, the entire surface can be lowered in dislocation.

If there is a history of facet growth somewhere in the axial direction, the number of dislocations is small even if c-axis growth is performed thereafter. Therefore, the dislocation distribution at a certain height at a certain time is not determined by the distribution of the facet region and the specular region at that height. If there is facet growth in the previous growth, the dislocation is lowered. So far, we have explained that dislocations are reduced because the dislocations are swept by linear defects by facet growth, but it seems that dislocations are only proportionally distributed between facet area F and mirror surface area (WF). Then a dramatic reduction in dislocation should not occur. The present invention reduces dislocations on the order of 10 ⁻⁴ to 10 ⁻³ , but the cause is that all the facet growth histories in the vertical direction work effectively.

Giving such a facet growth history is more effective in the early stage of growth as much as possible. In particular, when producing a long ingot, it is industrially advantageous to perform the operation with facet history as early as possible. In order to provide the facet history, any means such as lowering the growth temperature, raising the HCl partial pressure, raising the NH ₃ partial pressure, or raising the growth rate may be taken. Further, the facet growth history imparting action may be naturally performed due to a condition change in the vicinity of the crystal growth part during the growth.

  Thus, the GaN crystal growth of the present invention is performed while reducing dislocations. In the GaN crystal of the present invention, there are band-like surface defects, low-angle grain boundaries, linear dislocation defect aggregates, and the like. However, there are almost no dislocations in the region other than the region including them. It is an area of no dislocation. When finally used as a substrate, the threading dislocation density is extremely small and the crystallinity is greatly improved. It is a low dislocation GaN single crystal that can withstand practical use as an LD substrate.

The basic concept of the GaN crystal growth method of the present invention described above is summarized below.
(1) Reduction of dislocation due to dislocation moving to the boundary between the facet surface and the facet surface.
(2) Formation of a defect surface (planar defect portion) by dislocations gathering below the facet plane boundary.
(3) Dislocation diffusion prevention by confluence and confinement of dislocations at multiple points where a plurality of facet surfaces intersect.
(4) Formation of a linear defect due to dislocations gathering below the multipoint.
(5) Increase in low defect areas due to expansion of facet growth history holding area.

By these actions, the present invention can obtain a GaN single crystal having few dislocation defects other than multiple points and having dislocation defects only at multiple points. Multiple points are calculated as one etch pit by EPD observation. If one multiple point (linear defect) can accumulate, for example, 10 ⁴ dislocations on average, if there were 10 ⁸ cm ⁻² dislocations at the beginning, the dislocations would be at a level of 10 ⁴ cm ^−2. Can be reduced.

  The basic parts of the present invention have been described above. Further, the present invention will be described in detail. As described above, the present invention reduces dislocations by growing a growth surface of a vapor phase growth without embedding the facet structure while maintaining a three-dimensional facet structure instead of a planar state. This is a crystal growth method of single crystal gallium nitride. In other words, GaN is grown under the condition that it becomes a facet surface instead of a mirror surface.

  The three-dimensional facet structure means a mortar-shaped pit having a facet surface or a composite of pits having a facet surface.

  Furthermore, the present invention provides a single crystal gallium nitride crystal growth method that reduces dislocation while having a facet defect substantially perpendicular to the average growth surface at the boundary of the facet surface while maintaining the facet structure. is there.

  Alternatively, the present invention provides a single-crystal gallium nitride that has a facet structure and reduces dislocations while having a collection of linear defects substantially perpendicular to the average growth plane at multiple points of a plurality of facet planes. It can also be said that this is a crystal growth method.

  In the case of a growth pit, the {11-22} plane appears most frequently as its side. Therefore, it is often an inverted hexagonal pyramid pit surrounded by six equivalent {11-22} planes. Next, the {1-101} plane may also appear. In that case, an inverted 12-pyramidal pit is formed by {11-22} and {1-101} described above. It was found that the facet surface was almost concave (pit) and not raised (projection). The main facet planes are {11-22}, {1-211}, {n-2nnk} (n and k are integers), {1-101}, {1-102}, {n−n0k} ( n and k are integers).

  Furthermore, the present invention further forms a pit having a three-dimensional facet structure by crystal growth without embedding the facet structure, and forms a collection of linear defects substantially perpendicular to the average growth direction. A crystal growth method in which dislocations are reduced and a GaN single crystal is grown. When the facet structure is an inverted hexagonal pyramid-shaped pit, a collection of these linear defects continuously exists at the bottom of the pit.

  The present invention also provides a crystal growth method for single-crystal gallium nitride in which dislocations are reduced by crystal growth of a pit having a three-dimensional facet structure so that a band-like surface defect exists below the boundary of the facet plane. It is.

  The present invention further provides that when the pit structure having a three-dimensional facet structure is an inverted hexagonal pyramid, a band-like surface defect existing below the facet plane boundary line of the pit exists radially at an angle of 60 °. This is a crystal growth method of a GaN single crystal that reduces dislocations by growth.

  The present invention reduces the dislocation by changing the region where the facet plane exists in the lateral direction during GaN crystal growth, and giving a history of facet plane growth in the growth direction (vertical direction) in any arbitrary region. This is a crystal growth method of single crystal gallium nitride.

  The facet surface of a pit having a three-dimensional facet structure is most often a {11-22} plane. In that case, the plane orientation of the band-like surface defect existing substantially perpendicular to the average growth surface at the lower part of the pit portion is {11-20}. In that case, the band-like surface defect may exist as a low-angle grain boundary.

  It is only important to grow while maintaining the facet plane, and the growth direction of GaN is arbitrary for the present invention. In particular, when the average growth direction is the c-axis direction, the effect of reducing dislocations is greater.

  In order to obtain the dislocation reduction effect of the present invention, the ratio F of the area F of the surface irregularities of the three-dimensional facet structure to the total area W of the crystal surface on the GaN crystal surface during and after vapor phase growth. / W needs to be 10% or more. Here, the three-dimensional facet structure includes a composite of pits and pits composed of facet surfaces.

  In order to obtain a further dislocation reduction effect, the ratio F / W of the facet area F to the total area W is preferably 40% or more. This is because it is necessary to cover a certain area or more with a three-dimensional facet structure in order to reduce dislocations.

  In order to reduce dislocation more effectively, the facet area ratio is preferably 80% or more. When it is 80% or more, in the case of a facet structure composed of growth pits, the growth pits are connected to each other.

  Further, when all of the growth pits including the three-dimensional facet plane and the composite are connected to each other and the c-plane portion does not exist on the surface (F / W = 100%), the dislocation reduction effect is most remarkable.

  What has been described above is the case where what appears on the growth surface is a faceted surface with a clear orientation. However, it was confirmed that the same dislocation reduction effect was obtained even when the growth pits that do not have a facet surface with a clear orientation occupy the surface. For example, there is a rounded inverted hexagonal pyramid pit. Even if the pit surface is not a facet surface having a clear orientation, dislocations can be reduced similarly to the facet surface. Even if it consists of a rounded curved surface, it has a pit shape (concave portion), so the dislocation lines merge at the seam of the surface and disappear.

  The present invention includes the case where the growth pits and the composite of the growth pits on the surface after vapor phase growth have a curved surface deviated from the facet plane. Similarly, the facet surface includes a curved surface in which the ratio to the total area of the surface concavo-convex portions composed of the growth pits and the composite of the growth pits on the surface after the vapor phase growth is 10% or more and all the surfaces are deviated from the facet surfaces The case where it is comprised is also included.

  The pit diameter of a pit diameter having a three-dimensional facet surface or a composite of pits having a facet surface is preferably 10 μm to 1000 μm. If the pit diameter is too small, the dislocation reduction effect is small. If the pit diameter is too large, the loss during polishing increases, which is uneconomical.

  What has been described above is the growth method of GaN. In order to obtain a GaN substrate, the following steps are further required. In vapor phase growth, a low dislocation GaN single crystal is grown with a three-dimensional facet structure rather than a flat surface.

  The low dislocation GaN single crystal grown with this facet structure is mechanically processed to give planarity. Further, the surface is polished to obtain a single crystal GaN substrate having a flat and smooth surface.

  The machining for providing flatness may be grinding. Alternatively, the machining for providing flatness may be slice cutting.

The crystal growth method of the present invention is based on vapor phase growth. As a vapor growth method of GaN,
○ HVPE method (Hydride Vapor Phase Epitaxy)
○ MOCVD (Metalorganic Chemical Vapor Phase Deposition)
○ MOC method (Metallic Organic Chloride Vapor Phase Epitaxy)
○ Sublimation method
and so on. The present invention can be practiced using any of these methods. Here, the case of the HVPE method which is considered to be the simplest and the fastest growth rate will be described.

In the HVPE method, HCl gas is blown into a Ga melt obtained by heating a Ga boat in the upstream part of a hot wall type reactor, and NH ₃ is blown in a downstream part of the reactor. Then, HCl is blown into heated Ga metal (melt) to synthesize GaCl, which is then sent downward, reacted with NH ₃ below to synthesize GaN, and GaN is deposited on the substrate.

As a substrate used for GaN growth, single crystal substrates such as sapphire, SiC, Si, spinel (MgAl ₂ O ₄ ) _, NdGaO ₃ , ZnO, MgO, SiO _2, GaAs, GaP, GaN, and AlN are suitable. GaN can be grown directly on these substrates without going through a mask. It is also effective to use a mask (described later). These are suitable as GaN substrates in terms of lattice constant and coefficient of thermal expansion.

  When growing a GaN single crystal in the c-axis direction, it is necessary to use a single crystal substrate having six-fold symmetry or three-fold symmetry around the axis. In other words, the crystal system is a single crystal that is hexagonal (cubic symmetric) or cubic (cubic symmetric). In the case of the cubic system, there is a three-fold symmetry if the (111) plane is used. Some of the above take two or more crystal systems depending on the temperature and pressure at the time of production.

Here, hexagonal and cubic crystals are selected from the above materials. As sapphire, SiC, SiO ₂ , NdGaO ₃ , ZnO, GaN, AlN, etc., hexagonal single crystals can be used. For Si, spinel, MgO, GaAs, GaP, etc., a cubic (111) plane substrate can be used. This is for growing GaN on the c-plane, but when the surface other than the c-plane is used, the surface of the substrate is also different from this. It is necessary to match the symmetry between GaN and the substrate.

Substrates for GaN growth are sapphire, SiC, Si, spinel (MgAl ₂ O ₄ ), NdGaO ₃ , ZnO, MgO, SiO with an amorphous or polycrystalline mask layer having an opening on the surface. _2. It is also useful to use a single crystal substrate such as GaAs, GaP, GaN, AlN. The use of a mask contributes to lowering the dislocation of the GaN crystal.

  There are two options for how to make a mask. One is a method of forming a mask directly on a substrate. In this case, it is necessary to devise such as depositing a GaN buffer layer on the exposed surface of the substrate inside the window prior to the epi layer. The other is a method of forming a thin GaN layer on a substrate in advance and forming a mask thereon. The latter is more preferable because the growth proceeds smoothly.

  The mask must have many openings (windows). This is because a GaN crystal grows only in the opening. GaN does not start growing on the mask. The mask is for lateral growth (Lateral Overgrowth).

There are several options for the shape of the mask window.
(1) Dot shape: An isolated point such as a circle or a square is regularly distributed. When c-plane GaN is grown, the three adjacent windows may be arranged so as to form vertices of an equilateral triangle. The column direction is parallel to some lower order crystal orientation.
(2) Stripe shape: A plurality of parallel strip-shaped covering portions and openings are alternately provided. The width of the covering portion, the width of the opening, or the pitch is a parameter. The band-shaped covering portion and the opening are made parallel to a certain low-order crystal orientation. The length of the opening and the covering is equal to the length of the substrate.
(3) Finite-length stripe shape: a strip-shaped opening with a finite length. In addition to the width of the covering portion, the width of the opening, the pitch, and the orientation, the length of the opening is also a parameter.

  Growth using these masks with windows has an effect that defects can be reduced from the initial stage as compared with growth without a mask.

  A GaN crystal having a large number of facet surfaces is vapor-phase grown on a substrate with a mask or a substrate without a mask. Thereafter, the uneven surface is flattened and smoothed by grinding.

  When the material of the underlying substrate and the upper GaN crystal is different, the underlying substrate can be removed by etching or grinding. It is also possible to remove the base substrate and grind and polish the substrate side to process the back surface flatly. This is a case where one GaN wafer is manufactured. A thick crystal can be grown and cut to produce a plurality of wafers.

Therefore, the thickness of a plurality of GaN on a single crystal substrate such as sapphire, SiC, Si, spinel (MgAl ₂ O ₄ ), NdGaO ₃ , ZnO, MgO, SiO ₂ , GaAs, GaP, GaN, AlN, etc. After vapor-phase growth into an ingot, a plurality of wafers are obtained by slicing in a direction perpendicular to the axis.

Alternatively, sapphire, SiC, Si, spinel (MgAl ₂ O ₄ ), NdGaO ₃ , ZnO, MgO, SiO ₂ , GaAs, GaP, GaN, having an amorphous or polycrystalline mask layer having an opening on the surface, On a single crystal substrate such as AlN, GaN is vapor-grown to a thickness of a plurality of sheets to form an ingot, and then sliced in a direction perpendicular to the axis to obtain a plurality of wafers. it can

  As in the case of making a single wafer, this mask layer may be formed directly on the above substrate, or after forming a GaN epitaxial growth layer on the above substrate, a mask layer may be formed. good. In general, the latter is more preferable because the growth proceeds smoothly.

Since the heterogeneous material is used as the substrate, cracks are likely to occur on the substrate side or the GaN crystal side due to differences in the coefficient of thermal expansion. In that sense, GaAs substrates are the most promising. This is because the coefficient of thermal expansion and the lattice constant are close to GaN. However, GaAs is susceptible to damage due to reaction with NH ₃ in a high-temperature growth atmosphere. When trying to grow a GaN crystal having a flat mirror surface, the GaAs substrate is heated to a high temperature, but a part of the GaAs substrate is softened and collapsed. The growth that holds the facet surface employed by the present invention may be at a lower temperature than the specular growth. GaAs substrates withstand the temperature of facet growth well. Therefore, the present invention can suitably use a GaAs substrate.

  A mask layer is formed on the surface of the GaAs substrate (111), and a three-dimensional facet structure is formed on the GaAs substrate (111) instead of a planar state. A single crystal GaN single substrate can be manufactured by reducing dislocation by growing without embedding the facet structure, and then removing the GaAs substrate and polishing the front and back surfaces. The removal of the GaAs substrate is easily performed by wet etching such as aqua regia.

  Using the single crystal GaN single substrate thus obtained as a seed crystal, a GaN crystal can be further grown. A GaN single substrate is used as a seed crystal, and the growth surface is not in a planar state, and has a three-dimensional facet structure and maintains the facet structure, in particular, facets with pits and pit composites. It is possible to mass-produce a single GaN substrate by growing GaN crystals with low dislocations to the thickness of multiple sheets without embedding the structure, slicing them into a plurality of wafers in the direction perpendicular to the axis, and polishing them. is there.

The GaN substrate thus obtained is finally polished, but becomes a GaN substrate reflecting the growth mode of the present invention. Dislocations are reduced by growing a GaN crystal without embedding the facet structure while the growth surface of the vapor phase growth is not flat but has a three-dimensional facet structure. The accumulated dislocations have a collection of linear defects, and the density of the linear defect collection is 10 ⁵ cm ⁻² or less.

  There are two methods for measuring the density of linear defect aggregates. One is a method of measuring by CL (cathode luminescence). When a negative voltage is applied to the sample side and the sample is irradiated with an electron beam, electrons inside the crystal are excited by the electrons. It emits light when it returns to its original state. Light emitted when electrons in the valence band are excited and returned to the conduction band by adjusting the electron acceleration voltage has energy equal to the bandwidth. When a scan image by light emission from the band edge is observed, the pit portion is observed as a white region, and a region grown using the c-plane as a growth surface is observed as a black region. These linear defect portions are observed as black dots in the white region which is the pit surface growth portion. Therefore, if the number of black dots in a certain area in CL is counted and divided by the area, the density of linear defects can be found.

  Another measurement method is measurement of etch pit density. Linear defects are observed as large etch pits by the following method. It is measured by etching the GaN single crystal substrate to be measured in a mixed acid of sulfuric acid and phosphoric acid heated to 250 ° C. and counting the number of pits on the surface.

Ordinary dislocations are etch pits with a diameter of several μm at most, but these linear defects are observed as large hexagonal etch pits with a diameter of 10 μm to several tens of μm. When the density of such large hexagonal etch pits is observed, the density is observed as 10 ⁵ cm ⁻² or less. In addition to the large etch pits at the defect gathering portion, small etch pits due to normal dislocations are also observed, and the total density thereof is 10 ⁶ cm ⁻² or less.

[Example 1 (Growth without mask + grinding on sapphire)]
18A to 18C show the steps of the first embodiment. A mask 22 with a window is attached on the substrate 21. The substrate may be any of the aforementioned substrates such as sapphire and GaAs. GaN crystal is vapor-phase grown through the window. Since the growth is performed under the condition of facet growth while avoiding the mirror surface condition, the facet surface 25 becomes a surface rich in irregularities appearing innumerably as shown in FIG. There may be some mirror surface s. The uneven surface is ground and polished to obtain a flat and smooth surface. As shown in FIG. 18C, a GaN single crystal with a substrate is obtained.
Here, a sapphire single crystal substrate was used as the substrate. c-plane single crystal sapphire substrate. A GaN epitaxial growth layer having a thickness of 2 μm was formed on the entire surface by HVPE in advance. A double structure substrate of GaN / sapphire substrate was completed. Two types of substrates were prepared: one with a striped mask on the surface (B) and one without a mask (Ex). The direction (longitudinal direction) of the mask stripe was made parallel to the <1-100> direction of the sapphire substrate-like GaN layer. The width of the mask window is 4 μm, the width of the covering portion is 4 μm, and the period is 8 μm. The mask material is SiO ₂ and the film thickness is 0.1 μm.

The second substrate has a three-layer structure of mask / GaN / sapphire, and the first substrate has a two-layer structure of GaN / sapphire. A GaN crystal was grown on such a substrate by HVPE. The HVPE apparatus used in this example is provided with a boat containing Ga metal inside an atmospheric pressure reactor so that HCl + carrier gas can be introduced toward the boat, and a substrate is placed below and NH ₃ is placed in the vicinity of the substrate. + Carrier gas is drawn in. There is a heater in the surrounding area, and the Ga boat and the substrate can be heated. There is an exhaust port below, and it is pulled down by a vacuum pump. HCl gas is flowed from above the furnace into a Ga boat heated to 800 ° C., and reacted with Ga metal to synthesize GaCl. NH ₃ gas is allowed to flow in the vicinity of the lower substrate, and reacted with GaCl falling downward to deposit GaN on the substrate. The carrier gas was all hydrogen.

(Formation of buffer layer)
First, the substrate is kept at a low temperature of about 490 ° C., the NH ₃ gas partial pressure is 0.2 atm (20 kPa), the HCl partial pressure is 2 × 10 ⁻³ atm (0.2 kPa), and the growth time is 10 minutes. The layer was formed to a thickness of about 30 nm. The upper substrate has a mask with a thickness of 100 nm, and GaN is not deposited on the mask. Therefore, the buffer layer is stacked 30 nm only inside the window. The B substrate is entirely covered with a 30 nm buffer layer.

(Epitaxial layer formation)
These samples were heated to 980 ° C. to 1050 ° C., and an epi layer was further provided on the buffer layer. For the upper substrate (without mask), an epi layer was formed under two conditions. These are designated as samples A and B. The second substrate (with mask) was epitaxially grown under five different conditions. Let this be samples C, D, E, F, and G.

○ Sample A
Substrate used Sapphire substrate (without mask)
Growth temperature 1050 ° C
NH ₃ partial pressure 0.2atm (20kPa)
HCl partial pressure 5 × 10 ⁻³ atm (0.5 kPa)
Growth time 8 hours
Growth layer thickness 290μm

○ Sample B
Substrate used Sapphire substrate (without mask)
Growth temperature 1000 ° C
NH ₃ partial pressure 0.3atm (30kPa)
HCl partial pressure 2 × 10 ⁻² atm (2 kPa)
Growth time 3.5 hours
Growth layer thickness 420μm

○ Sample C
Substrate used Sapphire substrate (with mask)
Growth temperature 1050 ° C
NH ₃ partial pressure 0.2atm (20kPa)
HCl partial pressure 5 × 10 ⁻³ atm (0.5 kPa)
Growth time 9 hours
Growth layer thickness 270μm

○ Sample D
Substrate used Sapphire substrate (with mask)
Growth temperature 1020 ° C
NH ₃ partial pressure 0.2atm (20kPa)
HCl partial pressure 1 × 10 ⁻² atm (1 kPa)
Growth time 6 hours
Growth layer thickness 330μm

○ Sample E
Substrate used Sapphire substrate (with mask)
Growth temperature 1000 ° C
NH ₃ partial pressure 0.3atm (30kPa)
HCl partial pressure 2 × 10 ⁻² atm (2 kPa)
Growth time 3.5 hours
Growth layer thickness 400μm

○ Sample F
Substrate used Sapphire substrate (with mask)
Growth temperature 1000 ° C
NH ₃ partial pressure 0.4atm (40kPa)
HCl partial pressure 3 × 10 ⁻² atm (3 kPa)
Growth time 3 hours
Growth layer thickness 465μm

○ Sample G
Substrate used Sapphire substrate (with mask)
Growth temperature 980 ℃
NH ₃ partial pressure 0.4atm (40kPa)
HCl partial pressure 4 × 10 ⁻² atm (4 kPa)
Growth time 2.5 hours
Growth layer thickness 440μm

  The film formation parameters of these six samples are as described above. Samples A and C have the same conditions but different times. Samples B and E have the same conditions and the same time but different film thicknesses.

  Although temperature is an important parameter, samples A, C, and D are formed at relatively high temperatures such as 1050 ° C. and 1020 ° C. Samples B, E, F, and G are grown at a relatively low temperature of 1000 ° C. or lower.

NH ₃ partial pressure also appears to affect film formation. Samples A, C, and D have an NH ₃ partial pressure of 0.2 atm (20 kPa). Samples B and E have an NH ₃ partial pressure of 0.3 atm (30 kPa). Samples F and G are the highest at 0.4 atm (40 kPa).

Regarding the HCl partial pressure, samples A, C, and D are 10 ⁻² atm (1 kPa) or less, and samples B, E, F, and G are 2 × 10 ⁻² atm (2 kPa) or more.

  As long as the same conditions persist, time and growth layer thickness will be proportional. The growth rate per unit time is particularly low in samples C (30 μm / h) and A (36 μm / h). Sample D (55 μm / h) is also low. These are growth rates of less than 100 μm / h. Samples B (120 μm / h), E (114 μm / h), F (155 μm / h), and G (176 μm / h) all exceed 100 μm / h.

Samples with a high growth rate (G, F, B, E) generally have a high NH ₃ partial pressure, a high HCl partial pressure, and a low temperature. Conversely, the growth rate seems to be slow (C, A, D) when the NH ₃ partial pressure is low, the HCl partial pressure is low, and the temperature is high.

  The surface of these samples was observed with a microscope. The state of the growth surface is described next for each sample. A micrograph of the growth surface was subjected to image analysis, and a value (facet portion ratio) F / W obtained by dividing the area F of the pit portion by the area W of the entire surface was obtained.

  The surface after growth varies depending on the growth conditions. Some became flat surfaces that could not be mirror-grown. Some were covered with pit facets, resulting in a significantly uneven surface. The mirror-grown samples A and C have a c-plane surface, are smooth and flat, and have no facets. The almost mirror-finished sample D includes about 10% of facet portions.

  In other samples B, E, F, and G, the three-dimensional facets cover the surface as pits. The facet surface in the pit is often a {11-22} surface. In that case, the pit has an inverted hexagonal pyramid shape. The {1-101} plane may appear at the same time as the {11-22} plane. In that case, the pit has an inverted dodecagonal pyramid shape. The flat part is often c-plane. However, in addition to the c-plane, a surface with a low inclination angle also appeared.

  After microscopic observation of the surface, grinding was performed on the GaN growth layer of each sample. Further, the surface was polished to flatten the surface of the GaN crystal. As for the surface flatness after polishing, the surface roughness was finished to a level of Rmax 1.5 nm or less to obtain a product form (wafer).

  After that, various evaluations were performed. In order to obtain EPD, the sample was immersed in a solution obtained by heating a mixed acid of sulfuric acid and phosphoric acid to 250 ° C., and etching was performed so that etch pits appeared on the surface. Etch pits that appeared by etching were counted using a microscope. As described above, the facet area ratio F / W was calculated by image analysis of a micrograph. A low inclined surface slightly inclined from the c-plane is included in the c-plane in the image analysis. Therefore, the value of F / W is not necessarily faithful to the definition. Rather, it should be considered as the ratio between the pit and the total area. The measured values of the surface state after growth, facet area ratio F / W, and EPD are shown for each sample below.

○ Sample A
Surface state after growth: Specular surface, no surface pits observed.
Facet area ratio after growth (F / W): 0%
EPD: 1 × 10 ⁸ cm ⁻²

○ Sample B
Surface condition after growth: Plane part and facet are mixed. Many facets are observed as surface pits.
Facet area ratio after growth (F / W): Approximately 50%
EPD: 3 × 10 ⁵ cm ⁻²

○ Sample C
Surface state after growth: Specular surface, no surface pits observed.
Facet area ratio after growth (F / W): 0%
EPD: 3 × 10 ⁷ cm ⁻²

○ Sample D
Surface condition after growth: Almost mirror-like, and surface pits are observed in various places.
Facet area ratio after growth (F / W): 10%
EPD: 8 × 10 ⁵ cm ⁻²

○ Sample E
Surface condition after growth: Plane part and facet are mixed. Many facets are observed as surface pits.
Facet area ratio after growth (F / W): approx. 40%
EPD: 5 × 10 ⁴ cm ⁻²

○ Sample F
Surface state after growth: Far from the mirror state. A c-plane plane part is partially observed. State where pits are connected.
Facet area ratio after growth (F / W): Approximately 80%
EPD: 2 × 10 ⁴ cm ⁻²

○ Sample G
Surface condition after growth: Surface condition consisting of pits or other facets over the entire surface.
Facet area ratio after growth (F / W): almost 100%
EPD: 1 × 10 ⁴ cm ⁻²

Of these samples, samples A and C without facets are not included in the present invention. Samples B, D, E, F, and G are faceted and have the structure of the present invention. In either case, EPD is extremely small. Conventionally, the EPD of GaN crystals did not drop below 10 ⁷ cm ⁻² , but all of these samples were smaller than 10 ⁶ cm ⁻² . The object of the present invention was to reduce the EPD to 10 ⁶ cm ^-2 or less. Either embodiment satisfies this. Samples D and B satisfy the requirements with 8 × 10 ⁵ cm ⁻² and 3 × 10 ⁵ cm ⁻² . Samples E, F, and G are 10 ⁴ cm ^-2 generations, and are unprecedented low dislocation GaN single crystals that are unprecedented.

Samples A and B are both formed with a GaN epi layer without using a mask. Compare these. Sample A, which is not of the present invention, has a high growth temperature, NH ₃ , HCl partial pressure is low, and the growth rate is slow. However, EPD is as high as 10 ⁸ cm ^−2, which is a conventional level (10 ⁷ cm ⁻² or more).

Sample B belonging to the present invention is facet grown with a low growth temperature, a high NH ₃ and HCl partial pressure, and a high growth rate. Since the facet ratio is 50% and EPD is 3 × 10 ⁵ cm ⁻² , the problem (<10 ⁶ cm ⁻² ) is satisfied. In either case, the mask does not cause the EPD in sample B to be reduced to 1/300 of that in sample A.

It is clear that the cause of EPD reduction is the presence of facets. Where the facet exists, the EPD becomes 0, and the mirror surface portion is not as simple as before. If so, the EPD should be proportionally distributed by the density of the specular portion and the density of the facet area. Since the facet portion is 50% in sample B, if simple proportional distribution, the EPD should be 5 × 10 ⁷ cm ⁻² which is half of A as a whole. However, it is reduced to 1/300. This means that the EPD is also reduced in the region of sample B which is a mirror surface. Therefore, there is some change in the inner part of the mirror area.

Both sample A (without mask) and sample C (with mask) have no facets and are completely mirrored. There was a common property that the temperature was high, the NH ₃ and HCl partial pressures were low, and the growth rate was slow. By comparing the two, the influence of the mask can be known. Since sample A is 10 ⁸ cm ⁻² and C is 3 × 10 ⁷ cm ⁻² , neither exceeds the wall of the prior art (> 10 ⁷ cm ⁻² ). EPD is reduced to about 30% of B. This is because sample C is growing through the mask window. The profit of the mask only reduces EPD to about 30%. Facets can reduce EPD more dramatically.

The dislocation reduction effect due to the facet can also be clearly seen from sample D. Sample D is almost mirror-finished and the area where pits are present is only 10%. Nevertheless, the EPD is reduced to 8 × 10 ⁵ cm ⁻² . Even compared with the conventional technique with a mask (sample C; 3 × 10 ⁷ cm ⁻² ), EPD is reduced to 1/40. If the EPD is 0 in the facet region and the mirror region has the same EPD density as in the prior art, if the facet surface is 0.1, the EPD should be reduced only to 2.7 × 10 ⁷ cm ⁻² . The ratio of the facet surface on the surface is 0.1, but the facet history also reduces the EPD on the mirror surface. Facets are affecting the interior of the specular area. As described above, the dislocation reduction by the facet of the present invention cannot be understood only by looking at the surface.

Samples E, F, and G were all written with an EPD on the order of 10 ⁴ cm ⁻² and no similarities. Among them, the smallest EPD is sample G (1 × 10 ⁴ cm ⁻² ) having a facet area ratio of 100%. Sample E (5 × 10 ⁴ cm ⁻² ) having a facet ratio of 40% has a large EPD among the three. From these facts, it can be seen that even if the facet region is about 10% of the surface, there is a remarkable effect (sample D) in reducing EPD, and the higher the facet ratio, the more significant the EPD reduction.

  A longitudinal section of the pit-shaped facet grown sample was observed with a transmission electron microscope. In any sample, it was found that a streak defect exists at the center of the pit facet perpendicular to the substrate surface. This is a streak defect in the c-axis direction.

  A planar defect including a streak defect at the center of the pit was also observed. In some cases, there may be a planar defect that opens radially at an angle of about 60 ° around the streak defect at the center of the pit. The plane orientation of these planar defects was {11-20}. It was confirmed that the planar defects were small-angle grain boundaries.

  The results of observation of the crystal with a transmission electron microscope were almost the same in the samples B, D, E, F, and G. Although dislocations were observed at the center of the pit, dislocations were often observed within the field of view of the transmission electron microscope at locations away from the center of the pit.

In this example, EPD could be reduced to the order of 10 ⁴ cm ⁻² . Further optimization of conditions may allow EPD to be further reduced. In addition, if the EPD is of the order of 10 ⁴ cm ⁻² , it is expected that a sufficiently long life will be obtained when an LD (laser diode) is produced on this GaN substrate. Further, in order to make it more useful as a substrate for LD, sapphire on the back surface of the relatively thick samples F and G could be removed by grinding to obtain a single GaN substrate.

[Example 2 (on GaAs substrate, thickening + slicing)]
FIGS. 19A to 19C show the steps of the second embodiment. A mask 22 with a window is attached on the substrate 21. The substrate may be any of the aforementioned substrates such as sapphire and GaAs. A GaN crystal 27 is vapor-phase grown through the window. Since the growth is performed under the condition of facet growth while avoiding the mirror surface condition, the facet surface 25 becomes a surface rich in irregularities appearing innumerably as shown in FIG. There may be some mirror surface s. The substrate is removed, the GaN crystal 27 is taken out, and the uneven surface is ground and polished to obtain a flat and smooth surface. As shown in FIG. 19C, a single crystal 28 made of GaN alone is obtained.
In Example 1, only one GaN wafer was produced using sapphire as a substrate. This time, a plurality of wafers can be cut out (sliced) from one crystal. This is to know the difference in EPD due to the difference in the upper and lower positions of the crystal. A GaAs substrate is used instead of a sapphire substrate.

A Ga surface (also referred to as (111) a surface) of a 2-inch (111) GaAs substrate was used. In order to use as a mask, a SiO ₂ film was formed on the entire surface of the GaAs substrate by plasma CVD. The thickness of the mask is 0.1 μm. Thereafter, the mask window was opened by photolithography.

  The mask window can have various shapes. Here, the dot windows are provided in a staggered arrangement. The dot window has a diameter of about 2 μm and may be circular or square. A row of dot windows of the same size at the same 4 μm pitch is arranged at a pitch of 4 μm in the <11-2> direction of the GaAs substrate and at a distance of 3.5 μm in the <11-2> direction. Dots belonging to adjacent rows were shifted by 2 μm (half pitch) in the <11-2> direction. This was repeated in the <11-2> direction. In other words, the windows are arranged such that an equilateral triangle having a side of 4 μm can be formed by connecting three adjacent dot centers.

A GaN buffer layer and an epi layer were formed on a GaAs substrate on which a mask with a dot window was formed by the HVPE method. Similarly to Example 1, a boat containing Ga metal was installed in the upper part of the atmospheric pressure reactor and heated to 800 ° C. to flow HCl gas to generate GaCl, and NH ₃ gas and GaCl blown near the lower substrate. To grow a GaN film on the substrate. In Example 1, the growth was for only one wafer. In Example 2, a plurality of wafers were to be manufactured. The HVPE apparatus used in the second embodiment has a structure capable of growing for a long time, and is different from the apparatus of the first embodiment.

(Formation of buffer layer)
The GaAs substrate was kept at a low temperature of about 500 ° C., and a GaN film was grown at an NH ₃ partial pressure of 0.2 atm (20 kPa) and an HCl partial pressure of 2 × 10 ⁻³ atm (0.2 kPa) for about 30 minutes. A buffer layer having a thickness of about 80 nm was deposited only on the GaAs exposed portion of the mask window. The carrier gas is hydrogen gas.

(Formation of epi layer)
The temperature of the GaAs substrate was raised to about 1000 ° C., and the NH ₃ partial pressure was 0.4 atm (40 kPa) and the HCl partial pressure was 3 × 10 ⁻² atm (3 kPa). The growth time was about 100 hours.
A GaN ingot having a height of 25 mm could be produced by epi-growth for 100 hours. A GaAs substrate remains on the bottom of the ingot. The GaN growth surface is not a two-dimensional plane (mirror surface) growth, and high-density facets can be seen. There is only about 10% of the area composed of the c-plane, which is the planar growth portion. 90% is a region where facets exist (F / W = 0.9). Many inverted hexagonal pyramid pits consisting of {11-22} planes were also observed.

  The ingot was sliced by a slicer to obtain a thin piece (wafer). The approximately 2 mm thick part on the GaAs substrate side and the approximately 3 mm thick part on the growth surface side were discarded. The thin piece was polished to obtain 20 GaN substrates having a flat surface and a diameter of 2 inches and a thickness of 350 μm.

  Even if the GaN ingot is the same, EPD varies depending on the part. Therefore, three wafers (H) near the GaAs substrate side, wafer (I) in the center, and wafer (J) near the growth surface are taken out, and the surface state and EPD are obtained by microscopic observation and image processing as in the first embodiment. Etc. were investigated.

○ Sample H EPD: 8 × 10 ³ cm ⁻²
○ Sample I EPD: 6 × 10 ³ cm ⁻²
○ Sample J EPD: 5 × 10 ³ cm ⁻²

Thus, a very low EPD value was obtained. In the case of Example 1, the minimum EPD was 10 ⁴ cm ⁻² , but still lower than that. NH ₃ partial pressure (0.4 atm (40 kPa)) and HCl partial pressure (3 × 10 ⁻² atm (3 kPa)) are both high and low (1000 ° C.) under the same growth conditions as Sample F of Example 1. is there.

  When the surface of the polished wafer was observed, the etch pits were inverted hexagonal pyramids with various sizes ranging from several μm to several tens of μm. From the cathodoluminescence experiment, it was found that the center of the etch pit often coincides with the center of the growth pit consisting of facets during crystal growth in the vertical direction. In particular, most of the etch pits having a large diameter are located at the center of the growth pit during crystal growth.

  Next, it processed into the thin piece and produced the sample, and observed the defect of the vertical direction with the transmission electron microscope. A streak defect perpendicular to the substrate surface can be seen at the center of the etch pit and at the center of the growth pit during crystal growth of facets. Further, planar defects including streak defects are also observed. In some cases, a planar defect including a streak defect at the center of the pit is present at an included angle of 60 degrees. Several dislocations were observed near the center of the pit. However, dislocations were hardly seen in the field of view of the transmission electron microscope at a location away from the pit center. Further, from the results of cathodoluminescence, there were some locations where the outer shape of the etch pit was slightly deviated from the regular hexagonal shape and had a rounded curve, but the dislocation reduction effect was the same.

  Such extremely low dislocation GaN has never existed so far. When a GaN-based LD is manufactured using such a low dislocation GaN substrate, a long-life laser device may be manufactured.

[Example 3 (sapphire substrate, thickening + slicing)]
20A to 20C show the steps of Example 3. A mask 22 with a window is attached to the substrate 21. The substrate may be any of the aforementioned substrates such as sapphire and GaAs. A thick GaN crystal 29 is vapor-phase grown through the window. Since the growth is performed under the condition of facet growth while avoiding the mirror surface condition, the facet surface 25 becomes a surface rich in irregularities appearing innumerable as shown in FIG. There may be some mirror surface s. A thick GaN crystal 29 is cut in a direction perpendicular to the axis to form a plurality of wafers. The surface of the wafer is ground and polished to obtain a flat and smooth surface. As shown in FIG. 20 (c), a plurality of GaN single-piece mirror wafers 30, 31, 32, 33... Are obtained.
In Example 2, GaN was thickened using a GaAs substrate and sliced into 20 wafers. Now use sapphire substrate to thicken and slice GaN to get multiple wafers.
A sapphire single crystal having a c-plane with a thickness of 0.4 mm was used as a substrate. A GaN epilayer of about 1 μm was formed on the sapphire surface by HVPE in advance.

The surface was coated with a mask material (SiO ₂ ) having a thickness of 0.1 μm. Although the mask window can have various shapes, it is a dod window similar to that of the second embodiment. The dimensions and period are the same. Since there is a GaN layer on sapphire, the direction of the mask window arrangement is defined with respect to the orientation of the GaN layer.

The dot window has a diameter of about 2 μm and may be circular or square. The GaN layers are arranged in a row at a pitch of 4 μm in the <1-100> direction, and a row of dot windows of the same size is provided at the same 4 μm pitch at a distance of 3.5 μm in the <11-20> direction. Dots belonging to adjacent rows were shifted by 2 μm (half pitch) in the <1-100> direction. This was repeated in the <11-20> direction. In other words, the windows are arranged such that an equilateral triangle having a side of 4 μm can be formed by connecting three adjacent dot centers.
The epitaxial layer was grown directly on the mask without forming the buffer layer. The same HVPE apparatus that can form a film for a long time as in Example 2 was used.

(Formation of epi layer)
The temperature of the substrate composed of the mask / GaN / sapphire substrate was kept at about 1030 ° C., and the NH ₃ partial pressure was 0.35 atm (35 kPa) and the HCl partial pressure was 4 × 10 ⁻² atm (4 kPa). The growth time was about 100 hours. The time is the same as in Example 2, but the NH ₃ partial pressure is slightly lower and the HCl partial pressure is slightly higher.

  A GaN ingot having a height of about 3 cm could be produced by epitaxial growth. Due to thermal stress during cooling, the sapphire substrate on the bottom of the ingot was cracked. The GaN ingot was usable without cracks. The GaN growth surface was the same as in Example 2, and many facets were observed. The region composed of the c-plane, which is a planar growth portion, was extremely narrow and about 30%. Since the facet area is 70%, the facet area ratio F / W is 0.7.

  Many inverted hexagonal pyramid pits consisting of {11-22} planes were also observed. The ingot was sliced and processed to obtain 24 wafers. The 3 mm thick part on the sapphire substrate side and the 3 mm thick part on the growth surface side were discarded. The 24 wafers were polished to form a flat and smooth GaN wafer having a thickness of 350 μm.

  Similar to Example 2, three wafers taken from different parts of the same ingot were compared. Three samples, a sample (K) close to the sapphire substrate, a sample (L) in the center, and a sample (M) close to the growth surface, were taken out, and the surface state, EPD, and the like were examined by microscopic observation.

○ Sample K EPD: 2 × 10 ⁴ cm ⁻²
○ Sample L EPD: 1 × 10 ⁴ cm ⁻²
○ Sample M EPD: 8 × 10 ³ cm ⁻²

A higher EPD value was obtained, although higher than Example 2. In the case of Example 1, the minimum EPD was 10 ⁴ cm ⁻² , which is equivalent to it. The method of Example 1 can produce only one wafer, but the thickening method of Example 3 can produce several tens of GaN wafers at a time. It is important that the NH ₃ partial pressure (0.35 atm (35 kPa)) and the HCl partial pressure (4 × 10 ⁻² atm (4 kPa)) are both high and the temperature (1030 ° C.) is also high. This will sustain the growth of facets.

  When the surface of the polished wafer was observed, the etch pits were inverted hexagonal pyramids with various sizes ranging from several μm to several tens of μm. From the cathodoluminescence experiment, it was found that the center of the etch pit often coincides with the center of the growth pit consisting of facets during crystal growth in the vertical direction. In particular, most of the etch pits having a large diameter are located at the center of the growth pit during crystal growth. This is also common with the second embodiment.

  Next, it processed into the thin piece and produced the sample, and observed the defect of the vertical direction with the transmission electron microscope. A streak defect perpendicular to the substrate surface can be seen at the center of the etch pit and at the center of the growth pit during crystal growth of facets. Further, planar defects including streak defects are also observed. In some cases, a planar defect including a streak defect at the center of the pit is present at an included angle of 60 degrees. Several dislocations were observed near the center of the pit. However, dislocations were hardly seen in the field of view of the transmission electron microscope at a location away from the pit center.

  Such low dislocation GaN has never existed so far. When a GaN-based LD is manufactured using such a low dislocation GaN substrate, a long-life laser device may be manufactured.

[Example 4 (sapphire substrate, 4-step epi, thickening + slicing)]
20A to 20C show the steps of Example 4. A mask 22 with a window is attached to the substrate 21. The substrate may be any of the aforementioned substrates such as sapphire and GaAs. A thick GaN crystal 29 is vapor-phase grown through the window. Since the growth is performed under the condition of facet growth while avoiding the mirror surface condition, the facet surface 25 becomes a surface rich in irregularities appearing innumerable as shown in FIG. There may be some mirror surface s. A thick GaN crystal 29 is cut in a direction perpendicular to the axis to form a plurality of wafers. The surface of the wafer is ground and polished to obtain a flat and smooth surface. As shown in FIG. 20 (c), a plurality of GaN single-piece mirror wafers 30, 31, 32, 33... Are obtained.
A substrate in which a GaN layer and a mask layer (dot window) were formed on a sapphire substrate was prepared in the same manner as in Example 3.
The buffer layer was not formed, and was fabricated by four-stage growth while changing only the conditions of the epi layer. An HVPE apparatus capable of growing for a long time in the same manner as in Example 2 was used.

(Formation of GaN epilayer)
Stage 1 (first 2 hours)
Growth temperature: 1030 ° C
NH ₃ partial pressure; 0.12 atm (12 kPa)
HCl partial pressure; 2 × 10 ⁻² atm (2 kPa)
Second stage (next 2 hours)
Growth temperature: 1030 ° C
NH ₃ partial pressure; 0.35 atm (35 kPa)
HCl partial pressure; 2 × 10 ⁻² atm (2 kPa)
Stage 3 (following 2 hours)
Growth temperature: 1030 ° C
NH ₃ partial pressure; 0.12 atm (12 kPa)
HCl partial pressure; 2 × 10 ⁻² atm (2 kPa)
Stage 4 (remaining 95 hours)
Growth temperature: 1030 ° C
NH ₃ partial pressure; 0.35 atm (35 kPa)
HCl partial pressure; 4 × 10 ⁻² atm (4 kPa)

The total growth time is 101 hours. The growth temperature is consistent at 1030 ° C. Stages 1-3 are changes in the initial short period (6 hours), mainly changing the NH ₃ partial pressure. The four-stage 95-hour growth is exactly the same as in Example 3.

  As a result of the epi-growth, a GaN ingot having a height of about 3 cm was produced in substantially the same manner as in Example 3. The appearance was the same as in Example 3. The state of the growth surface was also similar to Example 3. By processing the ingot of Example 4 in the same manner as in Example 3 (slicing + polishing), 24 GaN wafers having a diameter of 2 inches and a thickness of 350 μm were obtained. As in Example 3, the 3 mm thick part on the sapphire substrate side and the 3 mm thick part on the growth surface side were discarded.

In order to evaluate the GaN substrate, as in Examples 3 and 2, three wafers were taken: a sample (P) on the sapphire substrate side, a sample (Q) at the center, and a sample (R) near the growth surface side. Surface observation and EPD measurement were performed.
○ Sample P EPD: 1 × 10 ⁴ cm ⁻²
○ Sample Q EPD: 8 × 10 ³ cm ⁻²
○ Sample R EPD: 6 × 10 ³ cm ⁻²

As in Examples 2 and 3, the EPD tends to decrease as it goes to the growth surface side. EPD is even lower than in Example 3.
Etch pits have a reverse hexagonal pyramid shape with various sizes ranging from a small one having a diameter of about 2 μm to a one having a diameter of about several tens of μm.

  The etch pits of Example 3 and Example 4 were compared in detail. From the result of cathodoluminescence (CL), it is considered that the etch pit having a large diameter is caused by a linear defect perpendicular to the substrate. Etch pits with a small diameter are thought to be due to normal threading dislocations. In detail, in Example 3 and Example 4, there was a difference in the density of etch pits having a small diameter. In Example 4, the density of the smaller etch pits is lower.

Measured density of small etch pits
Example 3
Example 4
K 1.5 × 10 ⁴ cm ⁻²
P 5 × 10 ³ cm ⁻²
L 6 × 10 ³ cm ⁻² Q 4 × 10 ³ cm ⁻²
M 4 × 10 ³ cm ⁻² R 2 × 10 ³ cm ⁻²

  In order to investigate this cause, a crystal of about 3 mm (cut off portion) on the side close to the sapphire substrate of the ingots of Examples 3 and 4 was broken, and the cross section in the height direction was analyzed by cathodoluminescence. In Example 4, it was found that the pit shape was greatly changed in the initial stage of growth, and the facet growth region was present over the entire surface in the thickness direction.

  This is because in Example 4, the initial growth conditions were changed in a complicated manner to change the pit shape. This is because the facet growth part due to the pit shape change at the early stage of growth changes variously in the lateral direction. The dislocation of Example 4 is remarkably reduced by having a history of facet growth over the entire region in the thickness direction.

Example 5 (GaAs upper seed crystal + ingot)]
A GaAs substrate is used as the substrate. As for the GaAs substrate, a Ga surface of a 2-inch (111) substrate is used, and similarly to Example 2, a SiO ₂ film is first formed to a thickness of 0.1 μm by plasma CVD, and then masked by photolithography. I opened the window.

Although various shapes are possible for the mask window, a striped window is formed here. The stripe window was 3 μm wide and 6 μm pitch, and the stripe direction was the <11-2> direction of the GaAs substrate. Such a stripe window was formed on the entire surface of the mask. The film thickness of the SiO ₂ mask is naturally 0.1 μm.
GaN was grown on the substrate on which the mask was formed by the HVPE method. The same apparatus as in Example 2 was used for the HVPE method in Example 5.

(Formation of buffer layer)
In the same manner as in Example 2, first, at a low temperature of about 500 ° C., the NH ₃ gas partial pressure is 0.2 atm (20 kPa), the HCl gas partial pressure is 2 × 10 ⁻³ atm (2 kPa), and the growth time is about 30. In minutes, a buffer layer made of GaN was grown to about 80 nm. Since the mask film thickness (100 nm) is thicker than the buffer layer, the GaN buffer layer grows on the surface of the GaAs substrate in the mask opening (window) at this stage. No GaN is deposited on the mask.

(Formation of epi layer)
Thereafter, the temperature was raised to 1000 ° C., and a GaN epitaxial layer was grown at this temperature. Within the same HVPE device but with different conditions. NH ₃ partial pressure was 0.4 atm (40 kPa), and GaCl partial pressure was 3 × 10 ⁻² atm (3 kPa). The growth time was about 4 hours.
Thereafter, the GaAs substrate was etched away in aqua regia. Further, the outer shape of the GaN crystal was processed by grinding according to the process shown in FIG. By polishing the surface, a GaN crystal having a thickness of about 0.4 mm was obtained.
When the etch pit density of this crystal was measured, EPD was 2 × 10 ⁴ cm ⁻² . It has a sufficiently low etch pit density and can be used alone as a GaN single crystal substrate.

(Epitaxial growth from GaN seed crystals)
Next, ingot production was attempted according to the process of FIG. 21 using this substrate as a seed crystal. The same HVPE method was used. The growth conditions are NH ₃ partial pressure 0.4 atm (40 kPa) and HCl partial pressure 3 × 10 ⁻² atm (3 kPa). A GaN ingot with a height of about 2.6 cm was obtained with a growth time of 100 hours. It was in an ideal state with no cracks. The growth surface was not two-dimensional planar growth, and many facets were observed. The area composed of the c-plane, which is a planar growth portion, was only about 5% of the total surface area. 95% was faceted. Many inverted hexagonal pyramid-shaped pits consisting of {11-22} planes were also observed.

  The ingot was sliced with a slicer and cut into wafers. Since there was a slicer cutting pattern, both sides of the wafer were polished. As a result, 25 GaN substrates having a flat surface with a diameter of 2 inches and a thickness of 350 μm were obtained. A portion of about 1 mm thickness on the GaAs substrate side and a portion of about 3 mm thickness on the growth surface side were discarded. The yield was the highest so far, and there was no arsenic contamination from the GaAs substrate. It was a method that made it easy to obtain good quality single crystals.

  These GaN substrates (wafers) were evaluated. For the evaluation, among the cut GaN wafers, a wafer sample on the GaAs substrate side was designated as S, a sample near the center of the ingot was designated as T, and a wafer sample above the ingot was designated as U. The EPD on the wafer surface was measured by the same method as in Example 1. The EPD measurement results were as follows.

○ Sample S EPD: 7 × 10 ³ cm ⁻²
○ Sample T EPD: 5 × 10 ³ cm ⁻²
○ Sample U EPD: 3 × 10 ³ cm ⁻²

  As described above, the lowest EPD value was obtained. The etch pit was observed with a microscope. Etch pits were hexagonal pyramids with a size of several μm to several tens of μm. It was found by observation by cathodoluminescence that the etch pit is often located at the center of the growth pit composed of facets during crystal growth. In particular, most of the etch pits having a large diameter are located at the center of the growth pit during crystal growth.

  A wafer was processed into a thin piece to prepare a sample, and a longitudinal section was observed with a transmission electron microscope. As a result, a streak defect perpendicular to the substrate surface was observed in the center of the etch pit and in the center of the growth pit during crystal growth consisting of facets. A planar defect including a streak defect at the center of the pit was also observed. In some cases, there were 6 sheet-like defects opened at an angle of about 60 degrees around the streak defect at the center of the central pit. Several dislocations were observed near the center of the pit, but there were few dislocations in general. At a position away from the center, almost no dislocation was observed within the field of view of the transmission electron microscope.

The crystal growth method of single crystal GaN and the method of manufacturing a GaN single crystal substrate according to the present invention have made it possible to obtain a GaN single crystal having a low dislocation of 10 ⁶ cm ⁻² or less, which has not been obtained conventionally. This enables industrial production of low dislocation GaN single crystals. Using a low dislocation GaN single crystal substrate, a long-life, high-quality blue and purple short-wavelength semiconductor laser can be manufactured.

The perspective view which shows that a crystal grows in the direction which diverges in the pyramid containing a facet surface, when the angle which an adjacent facet surface makes is 180 degrees or less. The top view which shows that a dislocation | rearrangement moves away from a boundary line since the advancing direction of a dislocation is parallel to a growth direction when the angle which an adjacent facet surface makes is 180 degrees or less. The perspective view which shows that a crystal grows in the direction which diverges in a pyramid containing a facet surface, and a dislocation also diverges and a pyramid is raised as it is upwards and grows when the angle which an adjacent facet plane makes is 180 degrees or less. The perspective view which shows that a crystal grows in the direction converged inside in the inverted pyramid containing a facet surface, when the angle which an adjacent facet surface makes is 180 degree | times or more. The top view which shows that a dislocation | rearrangement approaches a boundary line because the advancing direction of a dislocation is parallel to a growth direction when the angle which an adjacent facet surface makes is 180 degree | times or more. A perspective view showing that when an angle formed by adjacent facet planes is 180 degrees or more, a crystal grows in a converging direction in a pyramid including the facet plane, dislocations also converge on a boundary line, and an inverted pyramid is raised as it is and grown. . The perspective view showing the state where the reverse hexagonal pyramid pit appeared on the surface in GaN vapor phase growth. The top view of the reverse hexagonal pyramid showing the growth direction B in a growth pit, the advancing direction b of a dislocation, etc., and showing that a dislocation collides with a boundary line. The perspective view which shows that when a reverse hexagonal pyramid pit appears in the surface in GaN vapor phase growth, the dislocation | rearrangement advances inward and is accumulated in the boundary line, and the planar defect part which extended the boundary line in the growth direction is produced | generated. The top view which shows the growth direction B in the reverse hexagonal pyramid of a growth pit, the advancing direction b of a dislocation, etc. FIG. 6 is a plan view of an inverted hexagonal pyramid showing that the center is a multiple point of dislocation because the dislocation collides with the boundary line, proceeds inward along the boundary line, and accumulates at the center point. The longitudinal cross-sectional view of the crystal | crystallization at the time of growing by the substantially constant pit surface shape, keeping growth conditions constant. The shaded portion is the mirror growth (c-axis growth) portion s, and the white background is the facet growth portion w. The longitudinal cross-sectional view of a crystal | crystallization at the time of changing a growth condition and changing a facet growth part and a specular growth part to a horizontal direction, and making it have the history of facet growth to most. The hatched portion is the mirror growth (c-axis growth) portion s, and the white background portion is the facet growth portion w. The longitudinal cross-sectional view of a crystal | crystallization at the time of changing a growth condition and changing the facet growth part and a specular growth part to the horizontal direction so that the whole facet growth history may be given at a certain time. The shaded portion is the mirror growth (c-axis growth) portion s, and the white background is the facet growth portion w. Sectional drawing of a state in which a mask with a window is provided on the substrate in the lateral overgrowth of GaN. FIG. 3 is a cross-sectional view of a state in which a GaN crystal grows in a triangular basket shape only in an opening of a mask in GaN lateral overgrowth. FIG. 4 is a cross-sectional view of a state in which a GaN crystal grows in a trapezoidal bowl shape extending laterally on the mask beyond the opening of the mask in the lateral overgrowth of GaN. In GaN lateral overgrowth, the cross-sectional view of a state in which crystals grown from adjacent openings merge in a bisector and the facet surface disappears and a flat surface is maintained while maintaining a flat surface. Sectional drawing which shows the growth process of GaN concerning one Example of this invention. FIG. 18A is a cross-sectional view of a state where a windowed mask is formed on a substrate. FIG. 18B is a cross-sectional view showing a state in which a GaN crystal is facet grown on the substrate through the window opening. FIG. 18C is a longitudinal cross-sectional view of a GaN wafer with a substrate obtained by grinding and polishing the crystal growth surface to obtain a flat and smooth substrate. Sectional drawing which shows the growth process of GaN concerning the other Example of this invention. FIG. 19A is a cross-sectional view of a state in which a windowed mask is formed on the substrate. FIG. 19B is a cross-sectional view showing a state in which a GaN crystal is facet grown on the substrate through the window opening. FIG. 19C is a longitudinal sectional view of a single GaN wafer obtained by removing the substrate, taking out the GaN crystal, grinding and polishing the uneven crystal growth surface to make it smooth and flat, and grinding the back surface. Sectional drawing which shows the growth process of GaN concerning the other Example of this invention. FIG. 20A is a cross-sectional view of a state in which a windowed mask is formed on the substrate. FIG. 20B is a cross-sectional view showing a state where a thick GaN crystal is facet grown on the substrate through the window opening. FIG. 20 (c) is a longitudinal sectional view of a flat and smooth mirror wafer obtained by removing the substrate, cutting a long GaN crystal ingot, and grinding both surfaces of the wafer as a plurality of as-cut wafers. Sectional drawing which shows the growth process of GaN concerning the other Example of this invention. FIG. 21A is a cross-sectional view of a state where a windowed mask is formed on a substrate. FIG. 21B is a cross-sectional view of a state in which a GaN crystal is facet grown on the substrate through the window opening. FIG. 21 (c) is a longitudinal sectional view of the substrate removed and the GaN crystal ingot cut to form one as-cut wafer, and both surfaces of the wafer were ground and smoothed. FIG. 21D is a cross-sectional view of a state in which a longer GaN ingot is facet grown using it as a seed crystal. FIG. 19 (e) is a cross-sectional view of a mirror wafer obtained by cutting a long GaN ingot to form a plurality of wafers and grinding both surfaces.

Explanation of symbols

1 Substrate
2 mask
3 opening (window)
4 GaN crystals grown in a triangular bowl
5 Facet surface
6 Longitudinal dislocation
7 rollover
8 Turning facet surface
9 Faceted surface
10 GaN mirror crystal
11 Planar defects
12 Mirror surface
21 Substrate
22 Mask
23 Opening (window)
24 Epi-grown GaN crystal
25 Faceted surface
26 GaN wafer with substrate
27 Epi-grown GaN crystal
28 GaN wafer
29 Thickened epi-grown GaN crystal
30-33 Sliced wafer
34 Epi-grown GaN crystal
35 GaN seed crystal
36 Epi-grown GaN crystal
37-40 sliced GaN wafer

Claims (12)

On the base substrate, the growth surface of vapor phase growth is not in a flat state, but has a three-dimensional facet structure with concave portions combined with facet surfaces, and the growth conditions are changed while maintaining the facet structure. The area where the facet plane exists is changed in the lateral direction, and the facet structure is grown without being embedded until the end of the growth , so that every area in the crystal has faceted growth in the thickness direction. The concentration of dislocations is concentrated on the bottom of the recess to reduce the dislocation density of the portion other than directly below the bottom of the recess to 1 × 10 ⁶ cm ⁻² or less , the base substrate is removed, the dislocation-concentrated portion and the low dislocation density A GaN crystal having a diameter of 10 μm having a flat surface by giving the GaN crystal planarity by mechanical processing and then polishing the surface thereof. A single-crystal GaN substrate comprising a dislocation-concentrated portion having a dislocation complex of m to 1000 μm and a dislocation density low portion having a dislocation density of 1 × 10 ⁶ cm ⁻² or less . 2. The single crystal GaN according to claim 1, wherein the ratio of the area of the three-dimensional facet structure on the surface of the three-dimensional facet structure during and after the vapor phase growth to the total area as viewed from the plane is 10% or more. substrate. The ratio of the area seen from the plane of the growth pits composed of three-dimensional facet surfaces and the surface irregularities composed of the composites on the surface during and after vapor phase growth to the total area is 40% or more. The single crystal GaN substrate according to claim 1. The ratio of the area seen from the plane of the growth pit composed of the three-dimensional facet surface and the surface irregularity composed of the composite during the vapor phase growth and the surface after growth to the total area is 80% or more. The single crystal GaN substrate according to claim 1, wherein 2. The single crystal according to claim 1, wherein all of the growth pits composed of three-dimensional facet planes on the surface during and after vapor phase growth and the composite thereof are connected to each other and do not have a c-plane portion. Crystal GaN substrate. 6. The growth pit and its composite on the surface after vapor phase growth include a curved surface deviated from the facet plane, according to any one of claims 1, 2, 3, 4 and 5. The single crystal GaN substrate as described. A facet surface including a curved surface in which the ratio of the area seen from the plane of the growth pits on the surface after vapor phase growth and its complex to the total area is 80% or more, and all surfaces deviate from the facet surface. The single crystal GaN substrate according to claim 4, wherein The growth surface after the vapor phase growth is not in a flat state, but has a three-dimensional facet structure, and while maintaining the facet structure, the facet structure is grown without being embedded until the end of growth, thereby reducing dislocations. The linear defect assembly portion is substantially perpendicular to the average growth plane, and the density of the linear defect assembly portion is 10 ⁵ cm ^-2 or less. The single crystal GaN substrate as described. The growth surface after vapor phase growth is not flat, but has a three-dimensional facet structure, and the facet structure is grown without being embedded until the end of growth with the facet structure, thereby reducing dislocations. The single crystal GaN substrate according to claim 1, wherein an etch pit density in the low dislocation density portion is 10 ⁶ cm ^-2 or less. 10. The pit diameter of a pit having a three-dimensional facet surface or a composite of pits having a facet surface is 10 μm to 1000 μm. The single crystal GaN substrate according to any one of the above. After vapor phase growth of GaN is grown on a single crystal base substrate made of any of sapphire, SiC, Si, spinel, NdGaO ₃ , ZnO, MgO, SiO ₂ , GaAs, GaP, GaN, and AlN, these bases The single crystal GaN substrate according to claim 1, wherein the substrate is removed. For vapor phase growth of GaN, sapphire, SiC, Si, spinel, NdGaO ₃ , ZnO, MgO, SiO ₂ , GaAs, GaP, having an amorphous or polycrystalline mask layer with an opening on the surface, 12. The single crystal GaN substrate according to claim 11, wherein the base substrate is removed after being grown on a single crystal base substrate made of either GaN or AlN.

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