JP3971382B2 - 改良された電極を備える高繰返率のレーザ - Google Patents
改良された電極を備える高繰返率のレーザ Download PDFInfo
- Publication number
- JP3971382B2 JP3971382B2 JP2003527843A JP2003527843A JP3971382B2 JP 3971382 B2 JP3971382 B2 JP 3971382B2 JP 2003527843 A JP2003527843 A JP 2003527843A JP 2003527843 A JP2003527843 A JP 2003527843A JP 3971382 B2 JP3971382 B2 JP 3971382B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- discharge
- laser
- anode
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0381—Anodes or particular adaptations thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0388—Compositions, materials or coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/09702—Details of the driver electronics and electric discharge circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/953,026 US6711202B2 (en) | 2000-06-09 | 2001-09-13 | Discharge laser with porous insulating layer covering anode discharge surface |
US10/081,589 US20020154670A1 (en) | 2000-06-09 | 2002-02-21 | Electric discharge laser with two-material electrodes |
US10/104,502 US6690706B2 (en) | 2000-06-09 | 2002-03-22 | High rep-rate laser with improved electrodes |
PCT/US2002/028463 WO2003023910A2 (en) | 2001-09-13 | 2002-09-06 | High rep-rate laser with improved electrodes |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005503027A JP2005503027A (ja) | 2005-01-27 |
JP2005503027A5 JP2005503027A5 (ko) | 2006-01-05 |
JP3971382B2 true JP3971382B2 (ja) | 2007-09-05 |
Family
ID=27374022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003527843A Expired - Fee Related JP3971382B2 (ja) | 2001-09-13 | 2002-09-06 | 改良された電極を備える高繰返率のレーザ |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1436866A4 (ko) |
JP (1) | JP3971382B2 (ko) |
KR (1) | KR100940782B1 (ko) |
WO (1) | WO2003023910A2 (ko) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7230965B2 (en) * | 2001-02-01 | 2007-06-12 | Cymer, Inc. | Anodes for fluorine gas discharge lasers |
US7339973B2 (en) * | 2001-09-13 | 2008-03-04 | Cymer, Inc. | Electrodes for fluorine gas discharge lasers |
US7095774B2 (en) * | 2001-09-13 | 2006-08-22 | Cymer, Inc. | Cathodes for fluorine gas discharge lasers |
US7301980B2 (en) * | 2002-03-22 | 2007-11-27 | Cymer, Inc. | Halogen gas discharge laser electrodes |
EP2259390A1 (en) * | 2003-07-29 | 2010-12-08 | Cymer, Inc. | Gas discharge laser electrode |
JP4579002B2 (ja) * | 2005-02-21 | 2010-11-10 | 株式会社小松製作所 | パルス発振型放電励起レーザ装置 |
US7542502B2 (en) * | 2005-09-27 | 2009-06-02 | Cymer, Inc. | Thermal-expansion tolerant, preionizer electrode for a gas discharge laser |
WO2015125286A1 (ja) * | 2014-02-21 | 2015-08-27 | ギガフォトン株式会社 | レーザチャンバ |
KR102626653B1 (ko) * | 2018-01-11 | 2024-01-17 | 사이머 엘엘씨 | 방전 체임버용 전극 |
CN112210775B (zh) * | 2020-10-09 | 2022-12-02 | 中国科学院微电子研究所 | 一种零件涂层制备装置及零件涂层制备方法、终端装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6348874A (ja) * | 1986-08-19 | 1988-03-01 | Matsushita Electric Ind Co Ltd | レ−ザ装置 |
JPH04218985A (ja) * | 1990-07-06 | 1992-08-10 | Mitsubishi Electric Corp | エキシマレーザ装置 |
WO1992016036A1 (en) * | 1991-03-06 | 1992-09-17 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | A method for extending the gas lifetime of excimer lasers |
DE4113241C2 (de) * | 1991-04-23 | 1994-08-11 | Lambda Physik Forschung | Gepulster Gasentladungslaser |
US5359620A (en) * | 1992-11-12 | 1994-10-25 | Cymer Laser Technologies | Apparatus for, and method of, maintaining a clean window in a laser |
US5377215A (en) * | 1992-11-13 | 1994-12-27 | Cymer Laser Technologies | Excimer laser |
DE4401892C2 (de) * | 1994-01-24 | 1999-06-02 | Lambda Physik Forschung | Elektrode für einen Gasentladungslaser und Verfahren zum Formen einer Elektrode für einen Gasentladungslaser |
US5763930A (en) * | 1997-05-12 | 1998-06-09 | Cymer, Inc. | Plasma focus high energy photon source |
US5818865A (en) * | 1997-05-16 | 1998-10-06 | Cymer, Inc. | Compact excimer laser insulator with integral pre-ionizer |
US6330261B1 (en) * | 1997-07-18 | 2001-12-11 | Cymer, Inc. | Reliable, modular, production quality narrow-band high rep rate ArF excimer laser |
JPH1168196A (ja) * | 1997-08-26 | 1999-03-09 | Nissin Electric Co Ltd | ガスレーザ装置 |
US6654403B2 (en) * | 2000-06-09 | 2003-11-25 | Cymer, Inc. | Flow shaping electrode with erosion pad for gas discharge laser |
US6466602B1 (en) * | 2000-06-09 | 2002-10-15 | Cymer, Inc. | Gas discharge laser long life electrodes |
US6711202B2 (en) * | 2000-06-09 | 2004-03-23 | Cymer, Inc. | Discharge laser with porous insulating layer covering anode discharge surface |
-
2002
- 2002-09-06 JP JP2003527843A patent/JP3971382B2/ja not_active Expired - Fee Related
- 2002-09-06 EP EP02759577A patent/EP1436866A4/en not_active Withdrawn
- 2002-09-06 WO PCT/US2002/028463 patent/WO2003023910A2/en active Application Filing
- 2002-09-06 KR KR1020047003801A patent/KR100940782B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
WO2003023910A3 (en) | 2003-05-30 |
JP2005503027A (ja) | 2005-01-27 |
EP1436866A2 (en) | 2004-07-14 |
KR100940782B1 (ko) | 2010-02-11 |
EP1436866A4 (en) | 2009-10-28 |
WO2003023910A2 (en) | 2003-03-20 |
KR20040031790A (ko) | 2004-04-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7132123B2 (en) | High rep-rate laser with improved electrodes | |
US6414979B2 (en) | Gas discharge laser with blade-dielectric electrode | |
EP1297594B1 (en) | Gas discharge laser long life electrodes | |
US6690706B2 (en) | High rep-rate laser with improved electrodes | |
US6560263B1 (en) | Discharge laser having electrodes with sputter cavities and discharge peaks | |
JP3971382B2 (ja) | 改良された電極を備える高繰返率のレーザ | |
US7003012B2 (en) | Discharge laser with porous insulating layer covering anode discharge surface | |
US6654403B2 (en) | Flow shaping electrode with erosion pad for gas discharge laser | |
US20020154670A1 (en) | Electric discharge laser with two-material electrodes | |
US7190708B2 (en) | Annealed copper alloy electrodes for fluorine containing gas discharge lasers | |
JP2002094151A (ja) | ブレード絶縁電極を備えたガス放電レーザ |
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