EP1436866A4 - LASER WITH HIGH REPLACEMENT RATE WITH IMPROVED ELECTRODES - Google Patents
LASER WITH HIGH REPLACEMENT RATE WITH IMPROVED ELECTRODESInfo
- Publication number
- EP1436866A4 EP1436866A4 EP02759577A EP02759577A EP1436866A4 EP 1436866 A4 EP1436866 A4 EP 1436866A4 EP 02759577 A EP02759577 A EP 02759577A EP 02759577 A EP02759577 A EP 02759577A EP 1436866 A4 EP1436866 A4 EP 1436866A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- rate laser
- improved electrodes
- high rep
- rep
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0381—Anodes or particular adaptations thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0388—Compositions, materials or coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/09702—Details of the driver electronics and electric discharge circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US953026 | 2001-09-13 | ||
US09/953,026 US6711202B2 (en) | 2000-06-09 | 2001-09-13 | Discharge laser with porous insulating layer covering anode discharge surface |
US81589 | 2002-02-21 | ||
US10/081,589 US20020154670A1 (en) | 2000-06-09 | 2002-02-21 | Electric discharge laser with two-material electrodes |
US10/104,502 US6690706B2 (en) | 2000-06-09 | 2002-03-22 | High rep-rate laser with improved electrodes |
US104502 | 2002-03-22 | ||
PCT/US2002/028463 WO2003023910A2 (en) | 2001-09-13 | 2002-09-06 | High rep-rate laser with improved electrodes |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1436866A2 EP1436866A2 (en) | 2004-07-14 |
EP1436866A4 true EP1436866A4 (en) | 2009-10-28 |
Family
ID=27374022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02759577A Withdrawn EP1436866A4 (en) | 2001-09-13 | 2002-09-06 | LASER WITH HIGH REPLACEMENT RATE WITH IMPROVED ELECTRODES |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1436866A4 (ko) |
JP (1) | JP3971382B2 (ko) |
KR (1) | KR100940782B1 (ko) |
WO (1) | WO2003023910A2 (ko) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7230965B2 (en) * | 2001-02-01 | 2007-06-12 | Cymer, Inc. | Anodes for fluorine gas discharge lasers |
US7095774B2 (en) * | 2001-09-13 | 2006-08-22 | Cymer, Inc. | Cathodes for fluorine gas discharge lasers |
US7339973B2 (en) * | 2001-09-13 | 2008-03-04 | Cymer, Inc. | Electrodes for fluorine gas discharge lasers |
US7301980B2 (en) * | 2002-03-22 | 2007-11-27 | Cymer, Inc. | Halogen gas discharge laser electrodes |
EP2259390A1 (en) * | 2003-07-29 | 2010-12-08 | Cymer, Inc. | Gas discharge laser electrode |
JP4579002B2 (ja) * | 2005-02-21 | 2010-11-10 | 株式会社小松製作所 | パルス発振型放電励起レーザ装置 |
US7542502B2 (en) * | 2005-09-27 | 2009-06-02 | Cymer, Inc. | Thermal-expansion tolerant, preionizer electrode for a gas discharge laser |
WO2015125286A1 (ja) * | 2014-02-21 | 2015-08-27 | ギガフォトン株式会社 | レーザチャンバ |
CN111587471B (zh) | 2018-01-11 | 2024-04-05 | 西默有限公司 | 用于放电室的电极 |
CN112210775B (zh) * | 2020-10-09 | 2022-12-02 | 中国科学院微电子研究所 | 一种零件涂层制备装置及零件涂层制备方法、终端装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6348874A (ja) * | 1986-08-19 | 1988-03-01 | Matsushita Electric Ind Co Ltd | レ−ザ装置 |
DE4401892A1 (de) * | 1994-01-24 | 1995-07-27 | Lambda Physik Forschung | Elektrode für einen Gasentladungslaser |
JPH1168196A (ja) * | 1997-08-26 | 1999-03-09 | Nissin Electric Co Ltd | ガスレーザ装置 |
WO1999060679A1 (en) * | 1998-05-20 | 1999-11-25 | Cymer, Inc. | Reliable modular production quality narrow-band high rep rate f2 laser |
WO2001097344A1 (en) * | 2000-06-09 | 2001-12-20 | Cymer, Inc. | Flow shaping electrode with erosion pad for gas discharge laser |
WO2001097345A1 (en) * | 2000-06-09 | 2001-12-20 | Cymer, Inc. | Gas discharge laser long life electrodes |
WO2002037626A1 (en) * | 2000-11-01 | 2002-05-10 | Cymer, Inc. | Anode with porous insulating layer for discharge lasers |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04218985A (ja) * | 1990-07-06 | 1992-08-10 | Mitsubishi Electric Corp | エキシマレーザ装置 |
WO1992016036A1 (en) * | 1991-03-06 | 1992-09-17 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | A method for extending the gas lifetime of excimer lasers |
DE4113241C2 (de) * | 1991-04-23 | 1994-08-11 | Lambda Physik Forschung | Gepulster Gasentladungslaser |
US5359620A (en) * | 1992-11-12 | 1994-10-25 | Cymer Laser Technologies | Apparatus for, and method of, maintaining a clean window in a laser |
US5377215A (en) * | 1992-11-13 | 1994-12-27 | Cymer Laser Technologies | Excimer laser |
US5763930A (en) * | 1997-05-12 | 1998-06-09 | Cymer, Inc. | Plasma focus high energy photon source |
US5818865A (en) * | 1997-05-16 | 1998-10-06 | Cymer, Inc. | Compact excimer laser insulator with integral pre-ionizer |
-
2002
- 2002-09-06 EP EP02759577A patent/EP1436866A4/en not_active Withdrawn
- 2002-09-06 JP JP2003527843A patent/JP3971382B2/ja not_active Expired - Fee Related
- 2002-09-06 KR KR1020047003801A patent/KR100940782B1/ko not_active IP Right Cessation
- 2002-09-06 WO PCT/US2002/028463 patent/WO2003023910A2/en active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6348874A (ja) * | 1986-08-19 | 1988-03-01 | Matsushita Electric Ind Co Ltd | レ−ザ装置 |
DE4401892A1 (de) * | 1994-01-24 | 1995-07-27 | Lambda Physik Forschung | Elektrode für einen Gasentladungslaser |
JPH1168196A (ja) * | 1997-08-26 | 1999-03-09 | Nissin Electric Co Ltd | ガスレーザ装置 |
WO1999060679A1 (en) * | 1998-05-20 | 1999-11-25 | Cymer, Inc. | Reliable modular production quality narrow-band high rep rate f2 laser |
WO2001097344A1 (en) * | 2000-06-09 | 2001-12-20 | Cymer, Inc. | Flow shaping electrode with erosion pad for gas discharge laser |
WO2001097345A1 (en) * | 2000-06-09 | 2001-12-20 | Cymer, Inc. | Gas discharge laser long life electrodes |
WO2002037626A1 (en) * | 2000-11-01 | 2002-05-10 | Cymer, Inc. | Anode with porous insulating layer for discharge lasers |
Also Published As
Publication number | Publication date |
---|---|
KR20040031790A (ko) | 2004-04-13 |
KR100940782B1 (ko) | 2010-02-11 |
WO2003023910A2 (en) | 2003-03-20 |
JP3971382B2 (ja) | 2007-09-05 |
WO2003023910A3 (en) | 2003-05-30 |
EP1436866A2 (en) | 2004-07-14 |
JP2005503027A (ja) | 2005-01-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20040413 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK RO SI |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: GILLESPIE, WALTER, D Inventor name: UJAZDOWSKI, RICHARD, C. Inventor name: MORTON, RICHARD, G. Inventor name: STEIGER, THOMAS, D. Inventor name: DYER, TIMOTHY, S. Inventor name: IVASCHENKO, ALEX, P. Inventor name: WATSON, TOM, A. Inventor name: MOOSMAN, BRYAN G. Inventor name: RETTIG, CURTIS, L. |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20090924 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01S 3/038 20060101ALI20090918BHEP Ipc: H01S 3/225 20060101AFI20090918BHEP Ipc: H01S 3/036 20060101ALN20090918BHEP |
|
17Q | First examination report despatched |
Effective date: 20091215 |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: CYMER, LLC |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: WATSON, TOM, A. Inventor name: IVASCHENKO, ALEX, P. Inventor name: STEIGER, THOMAS, D. Inventor name: MOOSMAN, BRYAN G. Inventor name: RETTIG, CURTIS, L. Inventor name: MORTON, RICHARD, G. Inventor name: DYER, TIMOTHY, S. Inventor name: UJAZDOWSKI, RICHARD, C. Inventor name: GILLESPIE, WALTER, D |
|
INTG | Intention to grant announced |
Effective date: 20170614 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20171025 |