JP3970480B2 - Guide roller device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate moving a roller member to an outer ring. SOLUTION: This guide roller device comprising a rolling bearing fixed rotatably to a shaft member, a roller member 6 mounted on the outer ring outside of the this bearing, and a housing having a track contacting the roller member 6, which is shiftable by a specified length in the axial direction to the outer ring 5 of the bearing, is characterized by a self-lubricant material-made film 11 formed at least on either the inner surface of the roller member 6 or the outside of the outer ring 5.

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a guide roller device that rotates and contacts a housing, for example, a guide roller device used in a vacuum such as a semiconductor device.
[0002]
[Prior art]
As an example of this type of conventional guide roller device, there is a device as shown in FIGS.
[0003]
In FIG. 4, a guide roller device 41 is mounted on the fixed base 40, and a tray (housing member) 43 holding, for example, a semiconductor wafer 42 is guided on the guide roller device 41. As shown in FIG. 5, the guide roller device 41 includes two rows of ball bearings 45, 45 that are rotatably fixed to a support shaft member 44 that is fixed to the fixed base 40, and the two rows of ball bearings 45. , 45 are provided with roller members 47 on the outer peripheral surfaces of the outer rings 46. The roller member 47 has a flange 48 extending inward in the radial direction at one end portion, a circumferential groove 49 formed in the inner peripheral surface of the other end portion, and a C-shaped retaining ring 50 fitted therein. The ball bearings 45, 45 are maintained in the roller member 47 by the flange 48 and the retaining ring 50. Further, when the ball bearings 45, 45 are in contact with the flange 48 of the roller member 47, a predetermined axial clearance S is provided between the ball bearings 45, 45 and the retaining ring 50. That is, the roller member 47 is movable in the axial direction by a required dimension with respect to the outer rings 46 of the bearing.
[0004]
The roller member 47 is movable in the axial direction for the following reason. The roller member 47 attached to the support shaft member 44 via the bearings 45, 45 and the tray (housing member) 43 with which the roller member 47 is in rotational contact are not always in contact with each other in a normal positional relationship. As shown in FIG. In this case, a moment load acts on the bearings 45 and 45. Therefore, in order to prevent the bearings 45, 45 from being prematurely damaged by the action of the moment load, the roller member 47 is movable in the axial direction by a required dimension, for example, 1 to 2 mm, so as to absorb the deviation of the contact.
[0005]
[Problems to be solved by the invention]
In the above conventional example, the friction between the roller member 47 and the bearing outer rings 46 and 46 is large, the axial movement of the roller member 47 is not smoothly performed, and the displacement of the contact position between the tray (housing member) 43 and the roller member 47 is absorbed. Can not. This is because, for example, when the guide roller device 41 is used in a vacuum, the guide roller device 41 is used in a dry state, and therefore the friction between the roller member 47 and the bearing outer rings 46 and 46 is particularly large.
[0006]
Accordingly, an object of the present invention is to provide a guide roller device that reduces the friction between the roller member and the bearing outer ring and smoothes the axial movement of the roller member.
[0007]
[Means for Solving the Problems]
The invention according to claim 1 is a rolling bearing that is rotatably fixed to the support shaft member, a roller member that is mounted on the outer peripheral surface of the outer ring of the bearing, and a housing member that includes a raceway portion with which the roller member makes rotational contact. In the guide roller device in which the roller member is movable in the axial direction with respect to the outer ring of the bearing by a required dimension, the rolling bearing is a deep groove ball bearing, and the outer peripheral surface of the roller member is an axial cross section. The outer peripheral surface of the roller member is in rotational contact with the raceway portion of the housing member disposed substantially radially outward of the outer peripheral surface of the roller member , and the roller member is in the radial direction at one end. flange extending inwardly is formed, one end of the outer ring in contact with the flange, the other end of the outer ring has a predetermined gap between the retaining ring provided on the inner peripheral surface and the other end portion of the roller member The inner peripheral surface of the roller member and the outer ring Least on one circumferential surface, coating of self-lubricating material is formed, the roller member, during rotation relative to the housing, so that it can absorb the deviation in the axial direction of the contact position between the housing member of the roller member above It is characterized in that it can move easily and smoothly in the axial direction with respect to the outer ring of the bearing .
[0009]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows an embodiment in which a guide roller device 2 is mounted on a support shaft 1 fixed to a fixed base, and a tray (for example, a semiconductor wafer as shown in FIG. 4) is held on the guide roller device 2. (Corresponding to the housing members 1 and 2) 3 is guided. The guide roller device 2 includes two rows of ball bearings 4, 4 that are rotatably fixed to a support shaft member 1 via a spacer 10, and outer circumferences of outer rings 5, 5 of the two rows of ball bearings 4, 4. A roller member is mounted on the surface. The roller member 6 is formed with a flange 7 extending inward in the radial direction at one end, a circumferential groove 8 is formed on the inner peripheral surface of the other end, and a C-shaped retaining ring 9 is fitted. The ball bearings 4 and 4 are maintained in the roller member 6 by the flange 7 and the retaining ring 9. Further, when the ball bearings 4 and 4 are in contact with the flange 7 of the roller member 6, a predetermined axial gap S (for example, 1 to 2 mm) is provided between the ball bearing 4 and the retaining ring 9. That is, the roller member 6 is movable in the axial direction by a required dimension with respect to the outer ring 5 of the ball bearing 4.
[0010]
A coating 11 of a self-lubricating material such as a tetrafluoroethylene resin coating or a fluorine coating is formed on the outer circumferential surface of the outer rings 5, 5, the inner circumferential surface of the roller member 6, or both surfaces thereof. Thereby, the axial movement of the roller member 6 on the outer rings 5 and 5 can be performed easily and smoothly. Moreover, since it is a low dust-generating film, the generation of abrasion powder between the roller member 6 and the outer rings 5 and 5 can be reduced, and environmental pollution can be prevented.
Moreover, in the said embodiment, since the guide roller apparatus 2 is not enlarged, it is advantageous in size.
[0011]
2 is a reference example, which is basically the same as the embodiment of FIG. 1, and therefore only the differences will be described. A plurality of semicircular arc-shaped raceway grooves 13 extending in the axial direction are formed at a plurality of positions on the inner peripheral surface of the roller member 6, and are fitted and fixed to the outer peripheral surfaces of the outer rings 5, 5. A raceway groove 14 having a semicircular cross section extending in the axial direction is formed on the outer peripheral surface of the annular body 12 so as to face the raceway groove 13 of the roller member 6. A plurality of balls 15 straddling both the raceway grooves 13 and 14 are interposed between the axial raceway grooves of the ring body 12 which is a part of the outer rings 5 and 5. The rotation of the ball 15 allows the roller member 6 to move in the axial direction on the ring body 12 easily and smoothly. In order to further smoothly rotate the balls 15, spacer balls 16 having a smaller diameter than the balls 15 may be disposed between the balls 15. A retaining ring 17 is press-fitted and fixed to the inner peripheral surface of the roller member 6 instead of the C-shaped retaining ring 9. With this configuration, the reference example of FIG. 2 is slightly larger than the embodiment of FIG.
[0012]
Further, in the embodiment of FIG. 1 and the reference example of FIG. 2, when the early wear between the roller member 6 and the tray 3 becomes a problem, as shown in FIG. Alternatively, a film 18 of a self-lubricating material such as a molybdenum disulfide film may be formed. The film 18 may be formed on the rolling surface of the roller member 6 of the tray 3 or may be formed on both surfaces of the roller member 6 and the tray 3. In addition, in the case of the tetrafluoroethylene resin coating, it has a low dust generation performance, which can contribute to the reduction of dust generation.
[0013]
【The invention's effect】
Since the axial movement of the roller member fitted to the bearing outer ring can be easily and smoothly performed on the outer ring, the displacement of the contact position between the roller member and the housing that is in rolling contact with the roller member can be absorbed. The extra moment load is less likely to act on the bearing, and the bearing is prevented from being damaged early.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a guide roller device according to an embodiment of the present invention.
2A is a cross-sectional view of a guide roller device of a reference example , and FIG. 2B is a side view of a roller member and an outer ring member.
FIG. 3 is a side view of another embodiment of the present invention.
FIG. 4 is a mounting view of a conventional guide roller device.
FIG. 5 is a cross-sectional view of a conventional guide roller device.
FIG. 6 is a contact state diagram of a conventional guide roller device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Support shaft 2 Guide roller apparatus 3 Tray 4 Ball bearing 5 Outer ring 6 Roller member 7 鍔 8 Circumferential groove 9 Retaining ring 10 Spacer 11 Coating 12 Ring 13 Track groove 14 Track groove 15 Ball

Claims (1)

A roller bearing rotatably fixed to the support shaft member; a roller member mounted on an outer peripheral surface of the outer ring of the bearing; and a housing member having a raceway portion with which the roller member is in rotational contact. In the guide roller device that is movable in the axial direction by a required dimension with respect to the outer ring of the bearing,
The rolling bearing is a deep groove ball bearing, and the outer peripheral surface of the roller member is a curve in an axial section, and the outer peripheral surface of the roller member is disposed substantially radially outward of the outer peripheral surface of the roller member. Rotational contact with the raceway of the housing member
The roller member flange extending radially inwardly at one end portion is formed, the retaining ring on the flange end of the outer ring is in contact, the other end of the outer ring is provided on the inner peripheral surface and the other end portion of the roller member A coating of a self-lubricating material is formed on at least one of the inner peripheral surface of the roller member and the outer peripheral surface of the outer ring ,
The roller member can move easily and smoothly in the axial direction with respect to the outer ring of the bearing so as to absorb the deviation of the axial contact position of the roller member with the housing member when rotating with respect to the housing. There is a guide roller device.

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