JP2563923Y2 - Protective bearing for magnetic bearing device - Google Patents

Protective bearing for magnetic bearing device

Info

Publication number
JP2563923Y2
JP2563923Y2 JP1992039403U JP3940392U JP2563923Y2 JP 2563923 Y2 JP2563923 Y2 JP 2563923Y2 JP 1992039403 U JP1992039403 U JP 1992039403U JP 3940392 U JP3940392 U JP 3940392U JP 2563923 Y2 JP2563923 Y2 JP 2563923Y2
Authority
JP
Japan
Prior art keywords
bearing
protective
rotating
ball
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1992039403U
Other languages
Japanese (ja)
Other versions
JPH061845U (en
Inventor
有宏 藤原
正章 大槻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP1992039403U priority Critical patent/JP2563923Y2/en
Publication of JPH061845U publication Critical patent/JPH061845U/en
Application granted granted Critical
Publication of JP2563923Y2 publication Critical patent/JP2563923Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C23/00Bearings for exclusively rotary movement adjustable for aligning or positioning
    • F16C23/06Ball or roller bearings
    • F16C23/08Ball or roller bearings self-adjusting
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/04Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406Magnetic bearings
    • F16C32/044Active magnetic bearings
    • F16C32/0442Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30Parts of ball or roller bearings
    • F16C33/58Raceways; Race rings
    • F16C33/583Details of specific parts of races
    • F16C33/586Details of specific parts of races outside the space between the races, e.g. end faces or bore of inner ring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00Relieving load on bearings
    • F16C39/02Relieving load on bearings using mechanical means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00Engines or pumps
    • F16C2360/44Centrifugal pumps
    • F16C2360/45Turbo-molecular pumps

Description

【考案の詳細な説明】[Detailed description of the invention]

【0001】[0001]

【産業上の利用分野】この考案は、ターボ分子ポンプ等
の高速回転する回転部分を非接触状態に支持する磁気軸
受装置に装着され、上記回転部分を、いわゆるタッチダ
ウンさせるための、磁気軸受装置用保護軸受に関するも
のである。
The present invention relates to a magnetic bearing device which is mounted on a magnetic bearing device such as a turbo-molecular pump or the like which supports a rotating portion rotating at a high speed in a non-contact state, and causes the rotating portion to be so-called touch-down. The present invention relates to protective bearings for vehicles.

【0002】[0002]

【従来の技術】磁気軸受装置は、例えば、固定軸に固定
されたラジアル磁気軸受およびアキシャル磁気軸受によ
って、当該固定軸に対して30000〜40000rp
m程度の高速で回転されるロータを、非接触状態に支持
するものである。このロータの回転が停止される場合
に、高速回転しているロータが上記の磁気軸受と接触す
ると、当該磁気軸受を損傷させてしまう。したがって、
これを回避するために、固定軸には、ロータをいわゆる
タッチダウンさせるための保護軸受が設けられている。
タッチダウンとは、ロータが保護軸受に受けられて停止
する動作をいう。
2. Description of the Related Art A magnetic bearing device is, for example, a radial magnetic bearing and an axial magnetic bearing fixed to a fixed shaft.
The rotor which is rotated at a high speed of about m is supported in a non-contact state. When the rotation of the rotor is stopped, if the rotor rotating at a high speed contacts the magnetic bearing, the magnetic bearing is damaged. Therefore,
To avoid this, the fixed shaft is provided with a protective bearing for so-called touch-down of the rotor.
Touchdown refers to an operation in which the rotor is stopped by being received by the protective bearing.

【0003】通常、保護軸受としては、負荷容量を増す
ために総玉軸受が用いられている。この総玉軸受の一方
の軌道輪は、固定軸に固定されている。ロータが正常に
回転している状態では、他方の軌道輪とロータとの間に
は、所定の隙間(例えば0.2〜0.3mm程度)が設
けられており、ロータが停止するときに、上記他方の軌
道輪がロータと接触することにより、上記タッチダウン
が行われる。このタッチダウンにおいて、ロータが除々
に減速されて、ロータが低速回転となってから保護軸受
と接触する場合には、保護軸受にかかる負荷は比較的小
さいが、停電等でロータが高速回転のまま保護軸受と接
触する場合には、保護軸受にかかる負荷は、非常に大き
なものとなる。
[0003] Normally, all ball bearings are used as protective bearings in order to increase the load capacity. One race of the full ball bearing is fixed to a fixed shaft. In a state where the rotor is rotating normally, a predetermined gap (for example, about 0.2 to 0.3 mm) is provided between the other bearing ring and the rotor. The touchdown is performed by the other race contacting the rotor. In this touchdown, when the rotor gradually decelerates and comes into contact with the protective bearing after the rotor rotates at low speed, the load on the protective bearing is relatively small, but the rotor remains at high speed due to power failure or the like. In the case of contact with the protection bearing, the load on the protection bearing becomes very large.

【0004】[0004]

【考案が解決しようとする課題】ところで、一般に、保
護軸受として用いられる深溝型総玉軸受は、図3に示す
ように、軌道輪91,92の周方向の一部に、両軌道輪
91,92間に玉93を入れるための玉入れ溝94,9
5を設けている。このため、軌道面91a,92aに、
玉入れ溝94,95が露出していることになる。
Generally, a deep groove type full ball bearing used as a protective bearing is provided with a pair of raceways 91, 92 in a circumferential direction of raceways 91, 92 as shown in FIG. Ball insertion grooves 94, 9 for inserting balls 93 between 92
5 are provided. For this reason, the raceway surfaces 91a and 92a
The ball insertion grooves 94 and 95 are exposed.

【0005】一方、ロータを受ける軌道輪91とロータ
90との間には、上記のように所定の隙間が設けられて
いるので、タッチダウン時に、ロータ90の軸線が傾斜
した状態で、軌道輪91と接触される場合が多い。この
場合、軌道輪91の軸方向の端部が、ロータ90との接
触部位Pとなり、当該軌道輪91も、ロータ90に追従
して傾斜されるので、玉入れ溝94によって、玉93の
動きが妨げられ、ひいては玉93や軌道面91aが摩耗
しやすくなり、耐久性の低下を招くという問題があっ
た。
On the other hand, since the predetermined gap is provided between the bearing ring 91 for receiving the rotor and the rotor 90 as described above, during touchdown, the bearing ring is inclined while the axis of the rotor 90 is inclined. 91 is often contacted. In this case, the end of the race 91 in the axial direction is a contact portion P with the rotor 90, and the race 91 is also inclined following the rotor 90. And the ball 93 and the raceway surface 91a are liable to be worn, resulting in a problem that durability is reduced.

【0006】この考案は、上記の技術的課題を解決し、
玉入れ溝によって玉の運動が阻害されることを防止し、
耐久性に優れた磁気軸受装置用保護軸受を実現すること
を目的とする。
This invention solves the above technical problem,
Prevents the movement of the ball from being hindered by the ball insertion groove,
An object of the present invention is to realize a protective bearing for a magnetic bearing device having excellent durability.

【0007】[0007]

【課題を解決するための手段】上記の目的を達成するた
めの請求項1記載の磁気軸受装置用保護軸受は、固定部
分に対し回転部分を非接触状態に支持する磁気軸受装置
の、当該固定部分に設けられ、回転部分の停止時に回転
部分を受ける、深溝型の総玉軸受からなる保護軸受にお
いて、回転部分の停止時に回転部分に接触される軌道輪
の、当該接触される面に、軸方向にそってクラウニング
が施されていることを特徴とするものである。
According to a first aspect of the present invention, there is provided a protective bearing for a magnetic bearing device, wherein the rotating portion is supported in a non-contact state with respect to a fixed portion. In a protective bearing comprising a deep groove type full ball bearing provided on a portion and receiving the rotating portion when the rotating portion is stopped, a bearing ring which is brought into contact with the rotating portion when the rotating portion is stopped has a shaft, The crowning is provided along the direction.

【0008】[0008]

【作用】上記の構成によれば、タッチダウン時に、回転
部分が傾いた状態で軌道輪に接触されても、当該接触さ
れる面にクラウニングが施してあるので、当該接触され
る面における、接触部位を、軸方向の中央寄りに位置さ
せることができる。したがって、タッチダウン時に軌道
輪を傾かせようとするモーメントを小さくすることがで
き、軌道輪の傾斜を抑制することができる。
According to the above arrangement, even when the rotating portion is in contact with the bearing ring in a tilted state at the time of touchdown, the contacted surface is crowned. The part can be located closer to the center in the axial direction. Therefore, the moment for tilting the bearing ring at the time of touchdown can be reduced, and the inclination of the bearing ring can be suppressed.

【0009】[0009]

【実施例】以下実施例を示す添付図面によって詳細に説
明する。図2は、この考案の一実施例としての保護軸
受、を含む磁気軸受装置を示している。同図を参照し
て、固定部分としての筒状のケーシング1の内周側に、
回転部分としての回転軸2が配置されている。回転軸2
は、ケーシング1に設けられた一対のラジアル磁気軸受
3および一対のアキシャル磁気軸受4で非接触状態に支
持され、例えば30000〜40000rpm程度の高
速で回転する。ケーシング1の上下の2箇所に、回転軸
2の停止時にこれを受けるための保護軸受5,6が設け
られている。上側の保護軸受は本考案に係る深溝型の総
玉軸受5である。下側の保護軸受6はアキシャル方向の
負荷も受けられるように斜接玉軸受が2個正面合わせで
配置されている。保護軸受5,6の軌道輪は、例えばS
US440C材で、玉は窒化珪素などのセラミックス材
あるいはSUS440C材で形成されている。玉の表面
には、銀などのコーティング膜が好適に被覆される。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. FIG. 2 shows a magnetic bearing device including a protective bearing as one embodiment of the present invention. Referring to the figure, on the inner peripheral side of a cylindrical casing 1 as a fixed portion,
A rotating shaft 2 as a rotating part is arranged. Rotary axis 2
Is supported in a non-contact state by a pair of radial magnetic bearings 3 and a pair of axial magnetic bearings 4 provided in the casing 1, and rotates at a high speed of, for example, about 30000 to 40000 rpm. Protective bearings 5 and 6 are provided at two upper and lower portions of the casing 1 to receive the rotating shaft 2 when the rotating shaft 2 stops. The upper protective bearing is the deep groove type full ball bearing 5 according to the present invention. The lower protective bearing 6 has two oblique contact ball bearings arranged face to face so that a load in the axial direction can be received. The races of the protective bearings 5, 6 are, for example, S
The ball is made of a ceramic material such as silicon nitride or SUS440C material. The surface of the ball is preferably covered with a coating film such as silver.

【0010】回転軸2が正常に回転しているときには、
総玉軸受5の後述する内輪51と回転軸2との間に、例
えば0.2〜0.3mm程度の隙間が生じており、回転
軸2が停止するときには、回転軸2が内輪51に接触し
て総玉軸受5によって受けられる。これにより、タッチ
ダウン時に、回転軸2が磁気軸受3,4等に接触してこ
れらを損傷しないようになっている。
When the rotating shaft 2 is rotating normally,
A gap of, for example, about 0.2 to 0.3 mm is formed between an inner ring 51 of the full ball bearing 5 and an inner ring 51 described later, and when the rotating shaft 2 stops, the rotating shaft 2 contacts the inner ring 51. And received by the total ball bearing 5. This prevents the rotating shaft 2 from contacting and damaging the magnetic bearings 3 and 4 during touchdown.

【0011】図1を参照して、これら総玉軸受5は、ケ
ーシング1に固定された外輪52、回転軸2の外周面に
対向された内輪51、および内外輪51,52の軌道面
51a,52a間に介在された玉53からなる。内外輪
51,52の周方向の一部に、内外輪51,52間に玉
53を入れるための玉入れ溝54,55が設けられてお
り、このため、軌道面51a,52aに、玉入れ溝5
4,55が露出されている。また、タッチダウン時に回
転軸2の接触を受ける、内輪51の内周面51bには、
軸方向に沿ってクラウニング(例えば曲率半径Rが50
0〜1000mm程度)が施されている。
Referring to FIG. 1, these full ball bearings 5 include an outer ring 52 fixed to the casing 1, an inner ring 51 opposed to the outer peripheral surface of the rotating shaft 2, and raceway surfaces 51a of the inner and outer rings 51, 52. It consists of a ball 53 interposed between 52a. Ball insertion grooves 54 and 55 for inserting the balls 53 between the inner and outer rings 51 and 52 are provided in a part of the inner and outer rings 51 and 52 in the circumferential direction, so that the ball surfaces are inserted into the raceway surfaces 51a and 52a. Groove 5
4,55 are exposed. Further, the inner peripheral surface 51b of the inner ring 51, which receives the contact of the rotating shaft 2 at the time of touchdown,
Crowning along the axial direction (for example, when the radius of curvature R is 50
(About 0 to 1000 mm).

【0012】この実施例によれば、タッチダウン時に回
転軸2によって接触される内輪51の内周面51bに、
軸方向に沿ってクラウニングを施してある。したがっ
て、軸線2aが傾いた状態で回転軸2が内輪51の内周
面51bに接触されたとき、クラウニングを施していな
い場合と比較して、当該内周面51bの、回転軸2との
接触部位Pを、軸方向の中央寄りに位置させることがで
きる(図1および図3参照)。したがって、内輪51を
傾かせようとするモーメントを小さくすることができ、
これにより、タッチダウン時に、内輪51が傾斜するこ
とを抑制することができ、玉53が玉入れ溝54と干渉
することを回避することができる。したがって、タッチ
ダウン時に、玉入れ溝54によって玉53の動きが妨げ
られることがなく、耐久性を向上することができる。
According to this embodiment, the inner peripheral surface 51b of the inner ring 51 contacted by the rotating shaft 2 at the time of touchdown has:
Crowned along the axial direction. Therefore, when the rotating shaft 2 is brought into contact with the inner peripheral surface 51b of the inner race 51 in a state where the axis 2a is inclined, the contact of the inner peripheral surface 51b with the rotating shaft 2 is greater than when the crowning is not performed. The part P can be located near the center in the axial direction (see FIGS. 1 and 3). Therefore, the moment for tilting the inner ring 51 can be reduced,
Thereby, at the time of touchdown, the inclination of the inner ring 51 can be suppressed, and the interference of the ball 53 with the ball insertion groove 54 can be avoided. Therefore, at the time of touchdown, the movement of the ball 53 is not hindered by the ball insertion groove 54, and the durability can be improved.

【0013】なお、上記実施例においては、鉛直なケー
シング1を中心として回転する回転軸2を受けるものと
したが、水平な固定軸を中心として回転するロータを受
けるものとして構成することもできる。また、タッチダ
ウン時に回転軸2が外輪52の外周面に接触する保護軸
受においては、外輪52の外周面にクラウニングを施せ
ば良い。
In the above-described embodiment, the rotary shaft 2 that rotates about the vertical casing 1 is received, but the rotor that rotates about a horizontal fixed shaft may be received. Further, in a protective bearing in which the rotating shaft 2 contacts the outer peripheral surface of the outer ring 52 at the time of touchdown, the outer peripheral surface of the outer ring 52 may be crowned.

【0014】この考案の要旨を変更しない範囲で種々の
変更を施すことが可能である。
Various changes can be made without changing the gist of the present invention.

【0015】[0015]

【考案の効果】以上のように、この考案の磁気軸受装置
用保護軸受によれば、タッチダウン時に回転部分の軸線
が傾いた状態で軌道輪に接触されたとき、接触される部
位を、軸方向の中央寄りに位置させることができるの
で、軌道輪を傾かせようとするモーメントを小さくする
ことができる。したがって、タッチダウン時の軌道輪の
傾斜を抑制することができ、玉と玉入れ溝との干渉を回
避して、耐久性を向上することができるという特有の効
果を奏する。
As described above, according to the protective bearing for a magnetic bearing device of the present invention, when the rotating part is in contact with the bearing ring while the axis of the rotating part is inclined at the time of touchdown, the contacted part is formed by the shaft. Since it can be located near the center in the direction, the moment for tilting the bearing ring can be reduced. Therefore, it is possible to suppress the inclination of the bearing ring at the time of touchdown, to avoid interference between the ball and the ball insertion groove, and to achieve a unique effect that the durability can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この考案の一実施例としての磁気軸受装置用保
護軸受の概略断面図である。
FIG. 1 is a schematic sectional view of a protective bearing for a magnetic bearing device as one embodiment of the present invention.

【図2】磁気軸受装置の概略縦断面図である。FIG. 2 is a schematic longitudinal sectional view of a magnetic bearing device.

【図3】従来の保護軸受の断面図である。FIG. 3 is a sectional view of a conventional protective bearing.

【符号の説明】[Explanation of symbols]

1 ケーシング(固定部分) 2 回転軸(回転部分) 5 総玉軸受(保護軸受) 51 内輪 51b 内周面(接触される面) Reference Signs List 1 casing (fixed part) 2 rotating shaft (rotating part) 5 total ball bearing (protection bearing) 51 inner ring 51b inner peripheral surface (contact surface)

Claims (1)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】固定部分に対し回転部分を非接触状態に支
持する磁気軸受装置の、当該固定部分に設けられ、回転
部分の停止時に回転部分を受ける、深溝型の総玉軸受か
らなる保護軸受において、 回転部分の停止時に回転部分によって接触される軌道輪
の、当該接触される面に、軸方向に沿ってクラウニング
が施されていることを特徴とする磁気軸受用保護軸受。
1. A magnetic bearing device for supporting a rotating part in a non-contact state with respect to a fixed part. A protective bearing comprising a deep groove type full ball bearing provided on the fixed part and receiving the rotating part when the rotating part stops. 3. The protective bearing for a magnetic bearing according to claim 1, wherein a surface of the bearing ring contacted by the rotating portion when the rotating portion is stopped is crowned along the axial direction on the contact surface.
JP1992039403U 1992-06-09 1992-06-09 Protective bearing for magnetic bearing device Expired - Fee Related JP2563923Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1992039403U JP2563923Y2 (en) 1992-06-09 1992-06-09 Protective bearing for magnetic bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1992039403U JP2563923Y2 (en) 1992-06-09 1992-06-09 Protective bearing for magnetic bearing device

Publications (2)

Publication Number Publication Date
JPH061845U JPH061845U (en) 1994-01-14
JP2563923Y2 true JP2563923Y2 (en) 1998-03-04

Family

ID=12552030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1992039403U Expired - Fee Related JP2563923Y2 (en) 1992-06-09 1992-06-09 Protective bearing for magnetic bearing device

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