JP3954985B2 - Electric furnace - Google Patents
Electric furnace Download PDFInfo
- Publication number
- JP3954985B2 JP3954985B2 JP2003133473A JP2003133473A JP3954985B2 JP 3954985 B2 JP3954985 B2 JP 3954985B2 JP 2003133473 A JP2003133473 A JP 2003133473A JP 2003133473 A JP2003133473 A JP 2003133473A JP 3954985 B2 JP3954985 B2 JP 3954985B2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- electric furnace
- reflector
- furnace wall
- air cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Description
【０００１】
【発明の属する技術分野】
本発明は電気炉、特に、半導体の加熱に好適な電気炉に関するものである。
【０００２】
【従来の技術】
従来の電気炉は、被加熱物の周りに発熱体を配置し、さらにその周りにセラミックファイバーからなる保温材を配置し、熱損失の低減や炉外壁の温度上昇の抑制を図っている。（特許文献１）。
【０００３】
【特許文献１】
特開平８−１４７６４号公報（第３頁、図１）。
【０００４】
【発明が解決しようとする課題】
然しながら、従来の電気炉では、保温材に発塵性があり、環境問題から塵埃のない保温材を有する電気炉が必要となってきた。本発明は、上記の課題を解決するとともに、発熱体の熱放射特性を向上させ、均一加熱を目的にしたものである。
【０００５】
【課題を解決するための手段】
本発明の電気炉は、炉壁と、この炉壁から炉心方向に向って順次に配設した外側反射体、内側反射体及び発熱体とより成り、上記外側反射体は内部に真空層を有し、上記内側反射体に面する側が鏡面であり、上記内側反射体は炉心に対する向きが可変であることを特徴とする。
【０００６】
上記発熱体は、タングステン、カーボン等の高抵抗発熱体を耐熱材チューブ内に封入してなるランプヒータであることを特徴とする。
【０００７】
また、上記発熱体の電源端子は、ピン−ソケット構造であることを特徴とする。
【０００８】
また、上記炉壁は、空冷層を有し、上記発熱体の電源端子が上記空冷層によって冷却されることを特徴とする。
【０００９】
【発明の実施の形態】
以下図面によって本発明の実施例を説明する。
【００１０】
図１において１は電気炉の筒状炉壁、２はこの炉内の中央に配置したウエハー等の被加熱物、３はこの被加熱物２を取り囲んで炉内に配置した複数の例えば８個の発熱体、４は炉壁１の外周面に設けた端子ボックスを示す。
【００１１】
本発明においては炉壁１の内面と発熱体３との間に外側反射体５と内側反射体６とを配置する。
【００１２】
上記外側反射体５は内部に真空層７を形成し、内側反射体６に面する側５ａを鏡面とし、上記内側反射体６は発熱体３からの熱線の反射方向を変え得るようその取付角度を調節自在ならしめる。
【００１３】
また、炉壁１内には空冷層８を形成し、この空冷層８に導入パイプ９を介して冷却エアーを導入し、導出パイプ１０を介して外部に導出せしめる。
【００１４】
上記発熱体３は例えば図２に示すようにタングステン、カーボン等の高抵抗発熱部材３ａを石英チューブやセラミックチューブ等の耐熱材チューブ３ｂ内に封入して成るランプヒータとする。
【００１５】
また、発熱部材３ａのリード線１１は先端にピン１２を有し、上記外側反射体５に設けた孔１３及び空冷層８を通して上記端子ボックス４内の電源ピンソケット１４に挿入接続される真空端子構造とする。
【００１６】
【発明の効果】
本発明の電気炉は上記のような構成であるから以下のような効果が得られる。
【００１７】
１）内側反射板の角度を適切に調整することで、被加熱物に焦点を合わせ、被加熱物への加熱効率を上げることができる。
【００１８】
２）発熱体の周りに外側及び内側の反射板を設けたので、反射板より漏れた放射エネルギを外部へ出さず外側反射板で被加熱物に戻すことで、被加熱物への熱効率はより一層向上する。
【００１９】
３）外側反射板を鏡面真空構造としたことで断熱性が優れ、断熱材が不要になり、結果的に熱ロスが少なくなり経済的である。
【００２０】
４）発熱体をランプヒータとし、取替え可能とすれば、電気炉として長寿命と成し得る。
【００２１】
５）セラミックスファイバからなる保温材（断熱材）を使用しないためクリーンで、環境上・安全上好ましい。
【００２２】
６）ランプヒータの電源端子をピン・ソケット方式とすれば、ワンタッチで発熱体を交換できる。
【００２３】
７）炉壁内に空冷層を設け、この空冷層を介して上記発熱体の電源端子を取り出すようにすれば、電源端子の寿命を長くできる。
【図面の簡単な説明】
【図１】本発明の電気炉の横断平面図である。
【図２】図１に示す発熱体の詳細図である。
【符号の説明】
１ 筒状炉壁
２ 被加熱物
３ 発熱体
３ａ 高抵抗発熱部材
３ｂ 耐熱材チューブ
４ 端子ボックス
５ 外側反射体
５ａ 内側反射体に面する側
６ 内側反射体
７ 真空層
８ 空冷層
９ 導入パイプ
１０ 導出パイプ
１１ リード線
１２ ピン
１３ 孔
１４ 電源ピンソケット[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an electric furnace, and more particularly to an electric furnace suitable for heating a semiconductor.
[0002]
[Prior art]
In a conventional electric furnace, a heating element is arranged around an object to be heated, and a heat insulating material made of ceramic fiber is arranged around the object to reduce heat loss and suppress temperature rise of the outer wall of the furnace. (Patent Document 1).
[0003]
[Patent Document 1]
Japanese Patent Laid-Open No. 8-14764 (
[0004]
[Problems to be solved by the invention]
However, in the conventional electric furnace, the heat insulating material has a dust generating property, and an electric furnace having a heat insulating material free from dust has become necessary due to environmental problems. The present invention is intended to solve the above problems and improve the heat radiation characteristics of the heating element to achieve uniform heating.
[0005]
[Means for Solving the Problems]
The electric furnace of the present invention comprises a furnace wall and an outer reflector, an inner reflector and a heating element which are sequentially arranged from the furnace wall toward the core, and the outer reflector has a vacuum layer inside. The side facing the inner reflector is a mirror surface, and the inner reflector has a variable orientation relative to the core.
[0006]
The heating element is a lamp heater in which a high-resistance heating element such as tungsten or carbon is enclosed in a heat-resistant material tube.
[0007]
The power supply terminal of the heating element has a pin-socket structure.
[0008]
The furnace wall has an air cooling layer, and the power supply terminal of the heating element is cooled by the air cooling layer.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0010]
In FIG. 1, 1 is a cylindrical furnace wall of an electric furnace, 2 is an object to be heated such as a wafer disposed in the center of the furnace, and 3 is a plurality of, for example, 8 pieces surrounding the object to be heated 2 and disposed in the furnace. The heating element 4 is a terminal box provided on the outer peripheral surface of the furnace wall 1.
[0011]
In the present invention, the
[0012]
The
[0013]
An air cooling layer 8 is formed in the furnace wall 1, and cooling air is introduced into the air cooling layer 8 via an introduction pipe 9 and led out to the outside via a
[0014]
For example, as shown in FIG. 2, the
[0015]
The
[0016]
【The invention's effect】
Since the electric furnace of the present invention is configured as described above, the following effects can be obtained.
[0017]
1) By appropriately adjusting the angle of the inner reflector, the object to be heated can be focused and the heating efficiency of the object to be heated can be increased.
[0018]
2) Since the outer and inner reflectors are provided around the heating element, the radiant energy leaked from the reflector is not returned to the outside but returned to the object to be heated by the outer reflector so that the thermal efficiency of the object to be heated is more Further improvement.
[0019]
3) Since the outer reflector has a mirror-surface vacuum structure, heat insulation is excellent, no heat insulating material is required, and as a result, heat loss is reduced, which is economical.
[0020]
4) If the heating element is a lamp heater and can be replaced, it can have a long life as an electric furnace.
[0021]
5) Since a heat insulating material (heat insulating material) made of ceramic fiber is not used, it is clean and preferable in terms of environment and safety.
[0022]
6) If the power terminal of the lamp heater is a pin / socket system, the heating element can be replaced with a single touch.
[0023]
7) By providing an air cooling layer in the furnace wall and taking out the power supply terminal of the heating element through the air cooling layer, the life of the power supply terminal can be extended.
[Brief description of the drawings]
FIG. 1 is a cross-sectional plan view of an electric furnace of the present invention.
FIG. 2 is a detailed view of the heating element shown in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Cylindrical furnace wall 2 To-be-heated
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003133473A JP3954985B2 (en) | 2003-05-12 | 2003-05-12 | Electric furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003133473A JP3954985B2 (en) | 2003-05-12 | 2003-05-12 | Electric furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004333098A JP2004333098A (en) | 2004-11-25 |
| JP3954985B2 true JP3954985B2 (en) | 2007-08-08 |
Family
ID=33508003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003133473A Expired - Fee Related JP3954985B2 (en) | 2003-05-12 | 2003-05-12 | Electric furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3954985B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104320868A (en) * | 2014-09-29 | 2015-01-28 | 绵阳力洋英伦科技有限公司 | Elliptical surface focusing type pipe type heating device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101290240B1 (en) * | 2010-03-31 | 2013-07-30 | 한국생산기술연구원 | Electric Furnace |
| KR101254156B1 (en) | 2011-05-18 | 2013-04-18 | 이근홍 | Furnace |
-
2003
- 2003-05-12 JP JP2003133473A patent/JP3954985B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104320868A (en) * | 2014-09-29 | 2015-01-28 | 绵阳力洋英伦科技有限公司 | Elliptical surface focusing type pipe type heating device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004333098A (en) | 2004-11-25 |
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