CN215300942U

CN215300942U - 82V520W heat source lamp applied to RTP annealing equipment

Info

Publication number: CN215300942U
Application number: CN202121209717.9U
Authority: CN
Inventors: 曹见丽; 刘永
Original assignee: Huai'an Jingling Electronic Technology Co ltd
Current assignee: Huai'an Jingling Electronic Technology Co ltd
Priority date: 2021-06-01
Filing date: 2021-06-01
Publication date: 2021-12-24
Anticipated expiration: 2031-06-01

Abstract

The utility model relates to a TRP annealing furnace technical field that generates heat, specifically disclose a 82V520W heat source lamp that is applied to RTP annealing equipment, including encapsulation fluorescent tube and cooling tube, the cooling tube cover is established on the encapsulation fluorescent tube, encapsulation fluorescent tube one end stretches out the cooling tube and forms exothermic part, the other end is connected with the mount pad, be equipped with the heating wick in the exothermic part; the inner wall of the radiating tube is provided with a radiating guide groove which surrounds the packaging lamp tube and is arranged along the length direction of the packaging lamp tube, the end part of the radiating tube is also spliced and matched with the mounting seat, and the mounting seat is provided with a conductive pin which is in conductive connection with the heating lamp core; the radiating tube is arranged on the packaging lamp tube, so that the heating lamp core is ensured to be fully radiated after being electrified, and the heating is more stable; after the light source is powered on, the heat dissipation guide groove can play a good role in heat dissipation, heat is prevented from being conducted to one end of the mounting seat, and the mounting seat is prevented from being overheated; not only convenient to insert and the installation is more stable.

Description

82V520W heat source lamp applied to RTP annealing equipment

Technical Field

The utility model relates to a TRP annealing stove technical field that generates heat, concretely relates to be applied to 82V520W heat source lamp of RTP annealing equipment.

Background

RTP rapid annealing furnaces are a process used in the manufacture of semiconductor devices, and currently, in foreign rapid annealing furnace facilities, furnace chambers are mostly of symmetrical design, generally circular or hexagonal, and thus most of the heating lamp arrangements are in the form of concentric circles. The existing annealing furnace usually uses a halogen lamp as a heat source, when the halogen lamp works, current is transmitted to a filament through an electrode plate, and large heat is generated at the connection position of the filament and the electrode plate, so that the temperature of a packaging part exceeds an allowable range (350 ℃), further the electrode plate is oxidized and expanded, even the packaging part is cracked, and the halogen lamp fails; in addition, the halogen light source in the prior art is low in installation stability and easy to fall off and damage. Therefore, how to enhance the heat dissipation performance and the installation stability of the halogen lamp is a technical problem to be solved urgently by those skilled in the art.

SUMMERY OF THE UTILITY MODEL

To the defect among the prior art, the utility model provides a be applied to 82V520W heat source lamp of RTP annealing equipment has that the radiating effect is good, generate heat characteristics such as stable, the installation is stable.

The utility model adopts the technical proposal that: A82V 520W heat source lamp applied to RTP annealing equipment comprises a packaging lamp tube and a radiating tube, wherein the radiating tube is sleeved on the packaging lamp tube, one end of the packaging lamp tube extends out of the radiating tube to form a heat release part, the other end of the packaging lamp tube is connected with a mounting seat, and a heating lamp core is arranged in the heat release part; the radiating tube is characterized in that a radiating guide groove which surrounds the packaging lamp tube and is arranged along the length direction of the packaging lamp tube is arranged on the inner wall of the radiating tube, the end part of the radiating tube is also in plug-in fit with the mounting seat, and a conductive pin which is in conductive connection with the heating lamp core is arranged on the mounting seat.

In the technical scheme; the radiating tubes are arranged on the packaging lamp tubes, so that the heating lamp core is ensured to be fully radiated after being electrified, and the heating is more stable; a heating wick is arranged in the heat release part extending out of one end of the radiating pipe, the heat release part can release heat in a centralized manner, and the temperature in the annealing furnace can be quickly increased after the heating wick is electrified; because the radiating pipe extends to the mounting seat area, the plurality of radiating guide grooves positioned in the radiating pipe are arranged around the packaging lamp tube, the radiating guide grooves can play a good radiating role, heat is prevented from being conducted to one end of the mounting seat, and the mounting seat is prevented from being overheated; when the halogen lamp is installed on the RTP annealing equipment, the halogen lamp is in conductive connection with the equipment through the conductive pins, so that the convenience of installation and replacement is improved.

Further, the end face of the heat release body is arranged in an arc-shaped face.

Furthermore, the mounting seat is provided with a pair of insertion parts, the insertion parts are provided with conductive pins which are in conductive connection with the heating lamp core, and the two insertion parts are also provided with flexible O-shaped rings which are arranged in a staggered mode.

Furthermore, the periphery of the insertion parts is provided with embedded grooves for embedding the flexible O-shaped rings, and the embedded grooves on the two insertion parts are arranged in a staggered mode.

Furthermore, the mounting base comprises an inserting section and a connecting section, the inserting section is in inserting fit with the radiating pipe, and the inserting portion is arranged on the connecting section.

Furthermore, the edge of the end part of the radiating pipe is provided with a fixing sheet arranged around the insertion section, and the fixing sheet is clamped into the end face connected with the insertion section and the connecting section.

Furthermore, the periphery of one end of the inserting section connected with the connecting section is provided with a plurality of fixing grooves matched with the fixing pieces in a clamping manner.

Furthermore, the heating lamp wick is spiral and is arranged along the length direction of the packaging lamp tube.

Furthermore, the packaging lamp tube is a high-temperature-resistant quartz glass tube.

The utility model has the advantages that: the radiating tube is arranged on the packaging lamp tube, so that the heating lamp core is ensured to be fully radiated after being electrified, and the heating is more stable; after the light source is powered on, the heat dissipation guide groove can play a good role in heat dissipation, heat is prevented from being conducted to one end of the mounting seat, and the mounting seat is prevented from being overheated; the utility model is provided with the flexible O-shaped rings which are arranged in a staggered way on the insertion part, thereby not only facilitating the plugging and the replacement of the halogen lamp, but also being more stable after installation; has higher practical value and popularization value.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.

Fig. 1 is a schematic diagram of a 82V520W heat source lamp applied to an RTP annealing apparatus according to an embodiment of the present invention.

Reference numerals: the heat pipe comprises a packaging lamp tube 100, a heat radiating part 110, a heat radiating pipe 200, a heat radiating guide groove 210, a mounting seat 300, an inserting part 310, an inserting section 320, a fixing groove 321, a connecting section 330, a heat radiating lamp core 400, a conductive pin 500 and a flexible O-shaped ring 600.

Detailed Description

Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and therefore are only examples, and the protection scope of the present invention is not limited thereby.

It is to be noted that unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which the present invention belongs.

As shown in fig. 1, an embodiment of the present invention provides an 82V520W heat source lamp applied to an RTP annealing apparatus, which has a good heat dissipation effect and a stable heat generation effect; the radiating tube 200 is sleeved on the packaging lamp tube 100, one end of the packaging lamp tube 100 extends out of the radiating tube 200 to form a heat releasing part 110, the other end of the packaging lamp tube 100 is connected with a mounting seat 300, and a heating lamp wick 400 is arranged in the heat releasing part 110; the inner wall of the heat dissipation pipe 200 is provided with a heat dissipation guide groove 210 surrounding the packaging lamp tube 100 and arranged along the length direction of the packaging lamp tube 100, the end part of the heat dissipation pipe 200 is also inserted and adapted with the mounting seat 300, and the mounting seat 300 is provided with a conductive pin 500 electrically connected with the heating lamp wick 400.

As shown in fig. 1, the heat dissipation tube 200 is disposed on the light tube 100 to ensure that the heat wick 400 is fully dissipated after being powered on, so that the heat generated by the heat wick is more stable; the heat release part extending out of one end of the heat dissipation pipe 200 is internally provided with the heat dissipation lamp wick 400, the heat release part can release heat in a centralized manner, and the temperature in the annealing furnace can be quickly increased after the heat dissipation lamp wick 400 is electrified; since the heat dissipation pipe 200 extends to the region of the mounting seat 300, and the plurality of heat dissipation guide grooves 210 located in the heat dissipation pipe 200 are arranged around the packaging lamp tube 100, the heat dissipation guide grooves 210 can play a good role in heat dissipation, thereby preventing heat from being conducted to one end of the mounting seat 300, and preventing the mounting seat 300 from overheating and the like; when the halogen lamp is installed on the RTP annealing equipment, the halogen lamp is in conductive connection with the equipment through the conductive pins 500, so that the convenience of installation and replacement is improved.

As shown in fig. 1, the end surface of the heat release member in this embodiment is arranged in an arc-shaped plane. The core heat release area can be increased. The heating lamp core 400 in the packaging lamp tube 100 is spiral and is arranged along the length direction of the packaging lamp tube 100, and the material is selected from a halogen heating wire which has the advantages of high thermal efficiency, no oxidation when being heated and the like; when in use, the temperature rise is fast, the thermal inertia is small, the stability of the thermochemical property is good, the service life is long, and the insulating strength is high; the use effect is good.

As shown in fig. 1, in order to improve the convenience of installation and replacement, in this embodiment, a pair of insertion parts 310 are provided on the installation base 300, the insertion parts 310 are provided with conductive pins 500 electrically connected to the heating wick 400, and the two insertion parts 310 are further provided with flexible O-rings 600 arranged in a staggered manner. Be equipped with staggered arrangement's flexible O type circle 600 on grafting portion 310, the mode through staggered arrangement flexible O type circle 600 not only makes things convenient for plug and change halogen lamp to it is more stable after the installation, and flexible O type circle 600 can select the silica gel material preparation, and is flexible better, and the stability of installation is improved simultaneously in the dismantlement of more easy to assemble. In addition, the outer circumference of the insertion part 310 is provided with insertion grooves for inserting the flexible O-rings 600, and the insertion grooves of the two insertion parts 310 are arranged in a staggered manner. Thus, each flexible O-ring 600 can be stably mounted in the insertion groove, preventing the flexible O-ring 600 from falling off.

As shown in fig. 1, as described above, the mounting socket 300 is used for connecting the radiating pipe 200 on one hand and for mounting the light source on the other hand; the mounting seat 300 in this embodiment includes an insertion section 320 and a connection section 330, wherein the insertion section 320 is adapted to be inserted into the heat dissipating pipe 200, and the insertion portion 310 is disposed on the connection section 330. Thus, after the heat dissipation tube 200 is sleeved on the packaging lamp tube 100, it can be inserted and adapted with the insertion section 320, and the connection section 330 can be connected with the insertion part 310; in addition, in order to improve the mounting stability of the radiating pipe 200, the edge of the end of the radiating pipe 200 is provided with a fixing piece arranged around the socket section 320, the fixing piece being snapped into the end surface of the socket section 320 connected to the connection section 330. The periphery of one end of the insertion section 320 connected with the connection section 330 is provided with a plurality of fixing grooves 321 which are matched with the fixing pieces in a clamping manner. Thus, after the heat dissipation pipe 200 is inserted into the insertion portion 310, the fixing pieces can be inserted into the fixing grooves 321, so that the installation stability of the heat dissipation pipe 200 is improved, and the heat dissipation pipe 200 is prevented from falling off.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the scope of the embodiments of the present invention, and are intended to be covered by the claims and the specification.

Claims

1. An 82V520W heat source lamp applied to an RTP annealing device, which is characterized in that;

the heat dissipation lamp comprises a packaging lamp tube (100) and a heat dissipation tube (200), wherein the heat dissipation tube (200) is sleeved on the packaging lamp tube (100), one end of the packaging lamp tube (100) extends out of the heat dissipation tube (200) to form a heat dissipation part (110), the other end of the packaging lamp tube is connected with a mounting seat (300), and a heating lamp wick (400) is arranged in the heat dissipation part (110);

the radiating pipe (200) inner wall is equipped with and encircles encapsulation fluorescent tube (100) and along the heat dissipation guide slot (210) that encapsulation fluorescent tube (100) length direction arranged, the adaptation of pegging graft is still gone up with mount pad (300) to radiating pipe (200) tip, be equipped with on mount pad (300) with the electrically conductive base pin (500) of generating heat wick (400) conductive connection.

2. The 82V520W heat source lamp applied to the RTP annealing apparatus according to claim 1, wherein; the end face of the heat release part (110) is arranged in an arc-shaped surface.

3. The 82V520W heat source lamp applied to the RTP annealing apparatus according to claim 1, wherein; the heating lamp is characterized in that a pair of inserting parts (310) are arranged on the mounting seat (300), conductive pins (500) which are in conductive connection with the heating lamp core (400) are arranged on the inserting parts (310), and flexible O-shaped rings (600) which are arranged in a staggered mode are further arranged on the two inserting parts (310).

4. The 82V520W heat source lamp applied to the RTP annealing equipment according to claim 3, wherein; the periphery of the insertion parts (310) is provided with embedded grooves for embedding the flexible O-shaped rings (600), and the embedded grooves on the two insertion parts (310) are arranged in a staggered mode.

5. The 82V520W heat source lamp applied to the RTP annealing equipment according to claim 3, wherein; the mounting seat (300) comprises an inserting section (320) and a connecting section (330), the inserting section (320) is inserted and matched with the radiating pipe (200), and the inserting part (310) is arranged on the connecting section (330).

6. The 82V520W heat source lamp applied to the RTP annealing equipment according to claim 5, wherein; the edge of the end part of the radiating pipe (200) is provided with a fixing sheet arranged around the plug-in section (320), and the fixing sheet is clamped into the end face connected with the plug-in section (320) and the connecting section (330).

7. The 82V520W heat source lamp applied to the RTP annealing equipment according to claim 6, wherein; the periphery of one end of the inserting section (320) connected with the connecting section (330) is provided with a plurality of fixing grooves (321) matched with the fixing pieces in a clamping manner.

8. The 82V520W heat source lamp applied to the RTP annealing apparatus according to claim 1, wherein; the heating lamp wick (400) is spiral and is arranged along the length direction of the packaging lamp tube (100).

9. The 82V520W heat source lamp applied to the RTP annealing apparatus according to claim 1, wherein; the packaging lamp tube (100) is a high-temperature-resistant quartz glass tube.