JP3942967B2 - 電気的に結合されたメカニカルバンドパスフィルタ - Google Patents

電気的に結合されたメカニカルバンドパスフィルタ Download PDF

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Publication number
JP3942967B2
JP3942967B2 JP2002191984A JP2002191984A JP3942967B2 JP 3942967 B2 JP3942967 B2 JP 3942967B2 JP 2002191984 A JP2002191984 A JP 2002191984A JP 2002191984 A JP2002191984 A JP 2002191984A JP 3942967 B2 JP3942967 B2 JP 3942967B2
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JP
Japan
Prior art keywords
mass body
mass
input
frequency
bandpass filter
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Expired - Fee Related
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JP2002191984A
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English (en)
Japanese (ja)
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JP2003092524A5 (https=
JP2003092524A (ja
Inventor
カール・ピー・タウシグ
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HP Inc
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Hewlett Packard Co
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Publication of JP2003092524A publication Critical patent/JP2003092524A/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/52—Electric coupling means
    • H03H9/525—Electric coupling means for microelectro-mechanical filters

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Filters And Equalizers (AREA)
JP2002191984A 2001-06-29 2002-07-01 電気的に結合されたメカニカルバンドパスフィルタ Expired - Fee Related JP3942967B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/896,472 US6549099B2 (en) 2001-06-29 2001-06-29 Electrically-coupled mechanical band-pass filter
US09/896472 2001-06-29

Publications (3)

Publication Number Publication Date
JP2003092524A JP2003092524A (ja) 2003-03-28
JP2003092524A5 JP2003092524A5 (https=) 2005-04-14
JP3942967B2 true JP3942967B2 (ja) 2007-07-11

Family

ID=25406272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002191984A Expired - Fee Related JP3942967B2 (ja) 2001-06-29 2002-07-01 電気的に結合されたメカニカルバンドパスフィルタ

Country Status (7)

Country Link
US (1) US6549099B2 (https=)
EP (1) EP1271775B1 (https=)
JP (1) JP3942967B2 (https=)
KR (1) KR20030003102A (https=)
CN (1) CN1316737C (https=)
DE (1) DE60200108T2 (https=)
TW (1) TW569528B (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100473524B1 (ko) * 2002-03-21 2005-03-09 한국과학기술원 비선형 기계적 변조기 및 이를 이용한 구동장치
WO2004027833A2 (en) * 2002-09-23 2004-04-01 Georgia Tech Research Corporation Electrically-coupled micro-electro-mechanical filter systems and methods
US6874363B1 (en) * 2003-10-31 2005-04-05 Honeywell International, Inc. Trapped charge field bias vibrating beam accelerometer
FR2924856B1 (fr) * 2007-12-11 2012-02-10 Memscap Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur
JP4538503B2 (ja) * 2008-01-18 2010-09-08 Ｏｋｉセミコンダクタ株式会社 共振器
JP5115244B2 (ja) * 2008-03-05 2013-01-09 セイコーエプソン株式会社 静電振動子及びその使用方法
US20100171569A1 (en) * 2008-11-18 2010-07-08 Ecole Polytechnique Federale De Lausanne (Epfl) Active double or multi gate micro-electro-mechanical device with built-in transistor
CN102185577A (zh) * 2011-05-10 2011-09-14 北京埃德尔黛威新技术有限公司 一种数字带通滤波器
FI130145B (en) 2019-04-15 2023-03-13 Tikitin Oy Microelectromechanical resonator

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1277614A (en) 1969-03-07 1972-06-14 Standard Telephones Cables Ltd An electromechanical resonator
CH566091A5 (https=) * 1972-06-12 1975-08-29 Elresor Sa
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
AU5869994A (en) * 1992-12-11 1994-07-04 Regents Of The University Of California, The Microelectromechanical signal processors
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
US6393913B1 (en) * 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure

Also Published As

Publication number Publication date
KR20030003102A (ko) 2003-01-09
TW569528B (en) 2004-01-01
CN1316737C (zh) 2007-05-16
DE60200108T2 (de) 2004-10-28
DE60200108D1 (de) 2004-01-15
EP1271775B1 (en) 2003-12-03
US20030006861A1 (en) 2003-01-09
EP1271775A1 (en) 2003-01-02
CN1395366A (zh) 2003-02-05
US6549099B2 (en) 2003-04-15
JP2003092524A (ja) 2003-03-28

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