TW569528B - Electrically-coupled mechanical band-pass filter - Google Patents
Electrically-coupled mechanical band-pass filter Download PDFInfo
- Publication number
- TW569528B TW569528B TW091111267A TW91111267A TW569528B TW 569528 B TW569528 B TW 569528B TW 091111267 A TW091111267 A TW 091111267A TW 91111267 A TW91111267 A TW 91111267A TW 569528 B TW569528 B TW 569528B
- Authority
- TW
- Taiwan
- Prior art keywords
- mass
- input
- frequency
- masses
- output
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000001914 filtration Methods 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000003491 array Methods 0.000 abstract 1
- 230000006870 function Effects 0.000 description 9
- 230000008859 change Effects 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 6
- 230000035699 permeability Effects 0.000 description 6
- 230000004044 response Effects 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 238000013016 damping Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 238000013500 data storage Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/48—Coupling means therefor
- H03H9/52—Electric coupling means
- H03H9/525—Electric coupling means for microelectro-mechanical filters
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Micromachines (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Filters And Equalizers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/896,472 US6549099B2 (en) | 2001-06-29 | 2001-06-29 | Electrically-coupled mechanical band-pass filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW569528B true TW569528B (en) | 2004-01-01 |
Family
ID=25406272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW091111267A TW569528B (en) | 2001-06-29 | 2002-05-28 | Electrically-coupled mechanical band-pass filter |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6549099B2 (https=) |
| EP (1) | EP1271775B1 (https=) |
| JP (1) | JP3942967B2 (https=) |
| KR (1) | KR20030003102A (https=) |
| CN (1) | CN1316737C (https=) |
| DE (1) | DE60200108T2 (https=) |
| TW (1) | TW569528B (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100473524B1 (ko) * | 2002-03-21 | 2005-03-09 | 한국과학기술원 | 비선형 기계적 변조기 및 이를 이용한 구동장치 |
| WO2004027833A2 (en) * | 2002-09-23 | 2004-04-01 | Georgia Tech Research Corporation | Electrically-coupled micro-electro-mechanical filter systems and methods |
| US6874363B1 (en) * | 2003-10-31 | 2005-04-05 | Honeywell International, Inc. | Trapped charge field bias vibrating beam accelerometer |
| FR2924856B1 (fr) * | 2007-12-11 | 2012-02-10 | Memscap | Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur |
| JP4538503B2 (ja) * | 2008-01-18 | 2010-09-08 | Ｏｋｉセミコンダクタ株式会社 | 共振器 |
| JP5115244B2 (ja) * | 2008-03-05 | 2013-01-09 | セイコーエプソン株式会社 | 静電振動子及びその使用方法 |
| US20100171569A1 (en) * | 2008-11-18 | 2010-07-08 | Ecole Polytechnique Federale De Lausanne (Epfl) | Active double or multi gate micro-electro-mechanical device with built-in transistor |
| CN102185577A (zh) * | 2011-05-10 | 2011-09-14 | 北京埃德尔黛威新技术有限公司 | 一种数字带通滤波器 |
| FI130145B (en) | 2019-04-15 | 2023-03-13 | Tikitin Oy | Microelectromechanical resonator |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1277614A (en) | 1969-03-07 | 1972-06-14 | Standard Telephones Cables Ltd | An electromechanical resonator |
| CH566091A5 (https=) * | 1972-06-12 | 1975-08-29 | Elresor Sa | |
| US5349855A (en) * | 1992-04-07 | 1994-09-27 | The Charles Stark Draper Laboratory, Inc. | Comb drive micromechanical tuning fork gyro |
| AU5869994A (en) * | 1992-12-11 | 1994-07-04 | Regents Of The University Of California, The | Microelectromechanical signal processors |
| US5640133A (en) * | 1995-06-23 | 1997-06-17 | Cornell Research Foundation, Inc. | Capacitance based tunable micromechanical resonators |
| US6393913B1 (en) * | 2000-02-08 | 2002-05-28 | Sandia Corporation | Microelectromechanical dual-mass resonator structure |
-
2001
- 2001-06-29 US US09/896,472 patent/US6549099B2/en not_active Expired - Lifetime
-
2002
- 2002-05-28 TW TW091111267A patent/TW569528B/zh not_active IP Right Cessation
- 2002-06-28 CN CNB021251509A patent/CN1316737C/zh not_active Expired - Fee Related
- 2002-06-28 EP EP02254600A patent/EP1271775B1/en not_active Expired - Lifetime
- 2002-06-28 DE DE60200108T patent/DE60200108T2/de not_active Expired - Fee Related
- 2002-06-28 KR KR1020020037001A patent/KR20030003102A/ko not_active Ceased
- 2002-07-01 JP JP2002191984A patent/JP3942967B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20030003102A (ko) | 2003-01-09 |
| CN1316737C (zh) | 2007-05-16 |
| DE60200108T2 (de) | 2004-10-28 |
| DE60200108D1 (de) | 2004-01-15 |
| EP1271775B1 (en) | 2003-12-03 |
| US20030006861A1 (en) | 2003-01-09 |
| EP1271775A1 (en) | 2003-01-02 |
| JP3942967B2 (ja) | 2007-07-11 |
| CN1395366A (zh) | 2003-02-05 |
| US6549099B2 (en) | 2003-04-15 |
| JP2003092524A (ja) | 2003-03-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |