JP3928014B2 - X-ray fluorescence analyzer - Google Patents

X-ray fluorescence analyzer Download PDF

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JP3928014B2
JP3928014B2 JP2004015496A JP2004015496A JP3928014B2 JP 3928014 B2 JP3928014 B2 JP 3928014B2 JP 2004015496 A JP2004015496 A JP 2004015496A JP 2004015496 A JP2004015496 A JP 2004015496A JP 3928014 B2 JP3928014 B2 JP 3928014B2
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繁生 鎌田
弘諮 住居
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理学電機工業株式会社
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Description

本発明は、真空引きされるチャンバー内で試料に１次Ｘ線を照射して、あらかじめ指定された測定部位から発生する蛍光Ｘ線の強度を測定する蛍光Ｘ線分析装置に関する。   The present invention relates to a fluorescent X-ray analyzer that irradiates a sample with primary X-rays in a vacuum-evacuated chamber and measures the intensity of fluorescent X-rays generated from a predetermined measurement site.

例えば、試料ホルダに装着された試料を、試料ホルダの交換が行われる投入位置から、１次Ｘ線を照射する照射位置へ、ｒ駆動手段により搬送し、その照射位置でｒ駆動手段およびθ駆動手段により試料の測定部位（測定部分とも呼ぶ）を位置決めし、任意の微小部位の分析を行う蛍光Ｘ線分析装置がある。分析は、真空引きされるチャンバーを有し、そのチャンバー内で試料に１次Ｘ線を照射して測定部位から発生する蛍光Ｘ線の強度を測定する測定部（蛍光Ｘ線分析装置本体）において行われる。このような装置では、位置決めと測定を繰り返して複数の測定部位について分析することにより、マッピング分析（分布分析）を行うことができる。測定部位の指定は、例えば、投入位置と照射位置の間の適切な位置にＣＣＤカメラなどの撮像手段を設置してその位置を撮像位置（指定位置とも呼ぶ）とし、搬送中に試料ホルダを撮像位置で一旦停止させ、撮像手段で撮像した試料表面を見ながら操作者が画面上で行う（特願２００２−３２５１４４参照）。   For example, the sample mounted on the sample holder is transported by the r driving means from the loading position where the sample holder is exchanged to the irradiation position for irradiating the primary X-rays, and the r driving means and the θ drive at the irradiation position. There is a fluorescent X-ray analysis apparatus that positions a measurement site (also called a measurement portion) of a sample by means and analyzes an arbitrary micro site. Analysis is performed in a measurement unit (fluorescence X-ray analyzer main body) having a chamber that is evacuated and measuring the intensity of fluorescent X-rays generated from the measurement site by irradiating the sample with primary X-rays in the chamber. Done. In such an apparatus, mapping analysis (distribution analysis) can be performed by analyzing a plurality of measurement sites by repeating positioning and measurement. To specify the measurement site, for example, an imaging means such as a CCD camera is installed at an appropriate position between the input position and the irradiation position, and that position is set as the imaging position (also referred to as a specified position), and the sample holder is imaged during transportation. The operator temporarily stops at the position and performs the operation on the screen while viewing the sample surface imaged by the imaging means (see Japanese Patent Application No. 2002-325144).

また、撮像位置はｒ駆動手段による搬送経路外でもよく、例えば、測定部の外に撮像手段を設置してもよい（同出願の段落００３５参照）。他に、装置の測定部の外に撮像手段を設置した蛍光Ｘ線分析装置は、特許文献１、２にも記載されている。   Further, the imaging position may be outside the conveyance path by the r driving means, and for example, the imaging means may be installed outside the measurement unit (see paragraph 0035 of the same application). In addition, Patent Documents 1 and 2 describe a fluorescent X-ray analyzer in which an imaging unit is installed outside the measurement unit of the apparatus.

ところで、従来、複数の試料について分析する場合、測定部位の指定は、試料ごとにその測定前になされるように、装置の制御手段が構成されている（前記出願の段落００２８〜００３０参照）。つまり、測定部位が操作者により指定された後、その測定部位についての測定が制御手段により自動的になされる、というプロセスが試料の数だけ繰り返されて、複数の試料についての分析がなされる。例えば、撮像位置が測定部の外である場合には、図４のフローチャートに示すようなシーケンスになる。
特開２０００−２４９６６７号公報（図５） 特開２００２−３９９７２号公報 By the way, conventionally, when analyzing a plurality of samples, the control means of the apparatus is configured so that the measurement site is specified for each sample before the measurement (see paragraphs 0028 to 0030 of the application). That is, after the measurement site is designated by the operator, the process that the measurement for the measurement site is automatically performed by the control means is repeated by the number of samples, and analysis for a plurality of samples is performed. For example, when the imaging position is outside the measurement unit, the sequence is as shown in the flowchart of FIG.
JP 2000-249667 A (FIG. 5) JP 2002-39972 A

しかし、これでは、操作者は、分析対象の試料が交換されるたびに測定部位を指定しなければならず、結局、複数の試料についての分析時間のほとんど全体にわたって、装置から離れることができない。   However, this requires the operator to specify the measurement site each time the sample to be analyzed is exchanged, and eventually, the operator cannot leave the apparatus for almost the entire analysis time for multiple samples.

本発明は、このような問題に鑑みてなされたもので、複数の試料について、操作者が測定部位の指定をまとめてすることができ、指定した測定部位についての測定がまとめて自動的になされる蛍光Ｘ線分析装置を提供することを目的とする。   The present invention has been made in view of such a problem, and the operator can collectively specify the measurement site for a plurality of samples, and the measurement for the specified measurement site is automatically performed collectively. An object of the present invention is to provide a fluorescent X-ray analyzer.

前記目的を達成するために、本発明の蛍光Ｘ線分析装置は、真空引きされるチャンバー内で試料に１次Ｘ線を照射して測定部位から発生する蛍光Ｘ線の強度を測定する測定部と、大気雰囲気で複数の試料がそれぞれの待機位置に置かれる試料保持ステージと、その試料保持ステージと前記測定部との間で試料を移動させる試料交換機と、前記測定部の外の撮像位置に置かれた試料の表面を撮像して画像を生成する撮像手段と、その撮像手段が生成した画像に基づいて操作者により指定された測定部位を記憶して、その記憶した測定部位について測定するように前記測定部を制御する制御手段とを備えている。   In order to achieve the above object, an X-ray fluorescence analyzer of the present invention is a measurement unit that measures the intensity of X-ray fluorescence generated from a measurement site by irradiating a sample with primary X-rays in a vacuum-evacuated chamber. A sample holding stage in which a plurality of samples are placed at respective standby positions in an air atmosphere, a sample exchanger for moving the sample between the sample holding stage and the measurement unit, and an imaging position outside the measurement unit An imaging unit that images the surface of the placed sample and generates an image, and a measurement site designated by the operator based on the image generated by the imaging unit is stored, and the stored measurement site is measured And a control means for controlling the measuring section.

ここで、前記制御手段が、前記それぞれの待機位置に置かれた複数の試料について、前記指定された測定部位をまとめて記憶し、測定部位を記憶した複数の試料について所定の順に、前記それぞれの待機位置から測定部へ移動されて測定され、もとの待機位置へ戻されるように前記試料交換機および測定部を制御する。   Here, the control means collectively stores the designated measurement sites for the plurality of samples placed in the respective standby positions, and the plurality of samples storing the measurement sites in a predetermined order for the respective samples. The sample changer and the measurement unit are controlled so that they are moved from the standby position to the measurement unit, measured, and returned to the original standby position.

本発明の蛍光Ｘ線分光装置によれば、かかる制御手段を備えることにより、複数の試料について、操作者が測定部位の指定をまとめてすることができ、その後装置から離れても、指定した測定部位についての測定がまとめて自動的になされる。   According to the fluorescent X-ray spectroscopic apparatus of the present invention, by providing such a control means, the operator can collectively specify measurement sites for a plurality of samples, and the specified measurement can be performed even after leaving the apparatus. Measurements about the part are automatically performed collectively.

本発明においては、前記撮像手段を、前記試料交換機において試料を把持する把持部に取り付けて、前記各待機位置をそのまま試料それぞれの撮像位置にする。 In the present invention, the pre-Symbol imaging means, said mounting the gripper to grip the sample at sample changer, to directly sample the respective imaging position each of said stand-by position.

以下、本発明の第１実施形態の蛍光Ｘ線分析装置について、構成から説明する。この装置は、図１の正面概略図（ハッチングを施した部分は断面である）に示すように、測定部１と、試料保持ステージ１１と、試料交換機１２と、撮像手段１４と、制御手段１６とを備えている。   Hereinafter, the configuration of the X-ray fluorescence spectrometer according to the first embodiment of the present invention will be described. As shown in the schematic front view of FIG. 1 (the hatched portion is a cross section), this apparatus has a measuring unit 1, a sample holding stage 11, a sample changer 12, an imaging unit 14, and a control unit 16. And.

測定部１は、図示しない真空引きされるチャンバー内で、Ｘ線管などのＸ線源４から試料２Ａに１次Ｘ線５を照射して、測定部位から発生する蛍光Ｘ線６の強度を検出器などの検出手段７で測定する。試料２は、例えば円板状で、円筒状の試料ホルダ３に収納されて把持、搬送されるが、試料ホルダを用いず、試料そのものを直接把持、搬送するようにしてもよい。測定部１は、試料２を載せて中心軸Ｃr まわりに公転させるターレット１０などを含むｒ駆動手段８と、試料２Ａを自転させるθ駆動手段９とを有し、投入された試料２Ｂを１次Ｘ線５が照射される照射位置へｒ駆動手段８により搬送し、その照射位置でｒ駆動手段８およびθ駆動手段９により試料２Ａの測定部位を位置決めする。試料２Ａへの１次Ｘ線５の照射、測定部位からの蛍光Ｘ線６の検出は、ターレット１０に設けられた窓１０ａとしての孔を介してなされる。   The measurement unit 1 irradiates the sample 2A with primary X-rays 5 from an X-ray source 4 such as an X-ray tube in a vacuum chamber (not shown), thereby increasing the intensity of the fluorescent X-rays 6 generated from the measurement site. Measurement is performed by detection means 7 such as a detector. The sample 2 is, for example, a disk and is held and transported while being stored in the cylindrical sample holder 3. However, the sample itself may be directly gripped and transported without using the sample holder. The measuring section 1 has an r driving means 8 including a turret 10 for revolving around the central axis Cr by placing the sample 2 and a θ driving means 9 for rotating the sample 2A. The r drive unit 8 transports the X-ray 5 to the irradiation position where the X-ray 5 is irradiated. The irradiation of the primary X-ray 5 to the sample 2A and the detection of the fluorescent X-ray 6 from the measurement site are performed through a hole as a window 10a provided in the turret 10.

試料保持ステージ１１は、大気雰囲気にあり、複数の試料２がそれぞれの待機位置に置かれる台である。試料２は、図１の紙面奥方向にも置かれ、つまり、平面視で縦横に並べて置かれる。試料交換機１２は、例えばロボットハンドなどの把持部を含み、試料保持ステージ１１と測定部１との間で試料２を把持して搬送し、移動させる。   The sample holding stage 11 is a table that is in an air atmosphere and on which a plurality of samples 2 are placed at respective standby positions. The sample 2 is also placed in the depth direction of the sheet of FIG. 1, that is, it is placed side by side in a plan view. The sample changer 12 includes a gripping unit such as a robot hand, for example, and grips, conveys, and moves the sample 2 between the sample holding stage 11 and the measurement unit 1.

測定部１の外で、試料保持ステージ１１の周辺に、窓１３ａとしての孔をもつ撮像ステージ１３が設けられ、その窓１３ａの下方に撮像手段１４が配置されている。撮像ステージの窓１３ａの上が試料２Ｃの撮像位置になる。撮像手段１４は、例えばＣＣＤであり、撮像位置に置かれた試料２Ｃの表面（分析すべき面）を撮像して画像を生成し、生成された画像は、ＣＲＴなどの表示器１５に表示される。つまり、撮像位置は、試料保持ステージ１１の周辺に、複数の試料２について共通に１箇所設定されている。また、試料交換機１２が、各待機位置と撮像位置との間においても試料２を移動させる。撮像位置を測定部１の外にするのは、測定部１の中にすると、つまり真空引きされるチャンバー内にすると、大気雰囲気である待機位置との間での試料の搬送が複雑になるからである。   Outside the measuring unit 1, an imaging stage 13 having a hole as a window 13a is provided around the sample holding stage 11, and an imaging means 14 is disposed below the window 13a. The image capturing position of the sample 2C is above the window 13a of the image capturing stage. The imaging unit 14 is a CCD, for example, and generates an image by imaging the surface (surface to be analyzed) of the sample 2C placed at the imaging position, and the generated image is displayed on a display 15 such as a CRT. The That is, one imaging position is set in common around the plurality of samples 2 around the sample holding stage 11. The sample exchanger 12 also moves the sample 2 between each standby position and the imaging position. The reason why the imaging position is outside the measurement unit 1 is that if the sample is placed in the measurement unit 1, that is, in a chamber that is evacuated, the transportation of the sample to and from the standby position that is an atmospheric atmosphere becomes complicated. It is.

制御手段１６は、撮像手段１４が生成した画像に基づいて操作者により指定された測定部位を記憶して、その記憶した測定部位について測定するように測定部１を制御する。ここで、制御手段１６は、それぞれの待機位置に置かれた複数の試料２について、指定された測定部位をまとめて記憶し、測定部位を記憶した複数の試料２について所定の順に、それぞれの待機位置から測定部１へ移動されて測定され、もとの待機位置へ戻されるように試料交換機１２および測定部１を制御する。なお、この実施形態の装置は、試料２Ａに下方から１次Ｘ線５を照射する下面照射型であるが、上方から照射する上面照射型であってもよい。   The control unit 16 stores the measurement site designated by the operator based on the image generated by the imaging unit 14 and controls the measurement unit 1 so as to measure the stored measurement site. Here, the control means 16 collectively stores the designated measurement parts for the plurality of samples 2 placed at the respective standby positions, and waits for each of the plurality of samples 2 storing the measurement parts in a predetermined order. The sample changer 12 and the measurement unit 1 are controlled so as to be moved from the position to the measurement unit 1 and measured and returned to the original standby position. The apparatus of this embodiment is a bottom surface irradiation type that irradiates the sample 2A with the primary X-ray 5 from below, but may be a top surface irradiation type that irradiates from above.

次に、この装置の動作について説明する。装置を動作させるのに先立ち、操作者は、それぞれ試料ホルダ３に収納された分析すべき複数の試料２を、試料保持ステージ１１上の所定の各待機位置に置いておく。そして、測定部位を指定する旨を制御手段１６に入力すると、所定の順に、例えば平面視でより手前側の列のより左側に置かれた試料２Ｄから順に、以下のように、測定部位の指定がなされる。   Next, the operation of this apparatus will be described. Prior to operating the apparatus, the operator places a plurality of samples 2 to be analyzed, respectively stored in the sample holder 3, at predetermined standby positions on the sample holding stage 11. When the control unit 16 inputs that the measurement site is to be specified, the measurement site is specified in a predetermined order, for example, in order from the sample 2D placed on the left side of the front row in plan view as follows. Is made.

まず、試料交換機１２が、試料２を試料ホルダ３を介して把持部１２ａ（図２）で把持し、待機位置から撮像位置すなわち撮像ステージ１３の窓１３ａ上へ移動させる。すると、その試料２Ｃの表面を撮像手段１４が撮像して、その画像が表示器１５に表示される。そこで、操作者は、例えばマウスで画面１５ａ上のポインタを所望の測定すべき部位まで移動させ、そこをクリックすることにより、測定部位を指定する。試料ごとの測定部位は、単数でも複数でもよい。指定された測定部位は、試料２Ｃ表面の中心（画面１５ａの中心でもある）を原点とする座標値（ｒθ座標値やＸＹ座標値）の形で、測定条件の一部として、他の測定条件である測定すべき蛍光Ｘ線の波長などとともに、制御手段１６に記憶、保存される。次に、試料交換機１２が、試料２Ｃを撮像位置からもとの待機位置へ戻す。このような測定部位の指定作業が、分析すべき試料２の数だけ繰り返される。   First, the sample exchanger 12 grips the sample 2 with the grip portion 12a (FIG. 2) via the sample holder 3, and moves the sample 2 from the standby position onto the imaging position, that is, onto the window 13a of the imaging stage 13. Then, the imaging means 14 images the surface of the sample 2C, and the image is displayed on the display 15. Therefore, the operator moves the pointer on the screen 15a to a desired site to be measured with, for example, a mouse, and clicks to specify the measurement site. The measurement site for each sample may be singular or plural. The designated measurement site is in the form of coordinate values (rθ coordinate value or XY coordinate value) whose origin is the center of the surface of the sample 2C (also the center of the screen 15a), and other measurement conditions as part of the measurement conditions. Is stored and stored in the control means 16 together with the wavelength of the fluorescent X-ray to be measured. Next, the sample exchanger 12 returns the sample 2C from the imaging position to the original standby position. Such an operation of specifying the measurement site is repeated by the number of samples 2 to be analyzed.

測定部位の指定が終了して、操作者が、測定部位の測定を開始する旨を制御手段１６に入力すると、所定の順に、例えば測定部位の指定をしたのと同様に、平面視でより手前側の列のより左側に置かれた試料２Ｄから順に、以下のように、測定部位の測定がなされる。これ以降、操作者による操作は不要である。   When the specification of the measurement site is completed and the operator inputs to the control means 16 that measurement of the measurement site is to be started, for example, in the same way as the measurement site is specified in the predetermined order, the plan view is closer to the front. The measurement site is measured in the following order from the sample 2D placed on the left side of the side column. Thereafter, no operation by the operator is necessary.

まず、制御手段１６が、これから分析する試料２について、記憶してある測定条件（指定された測定部位を含む）を読み込む。続いて、試料交換機１２が、試料２を試料ホルダ３を介して把持部１２ａ（図２）で把持し、待機位置から測定部１へ移動させて投入する。続いて、ｒ駆動手段８が、ターレット１０の回転により、投入位置（図１における試料２Ｂの位置）にある試料２を照射位置（図１における試料２Ａの位置）へ移動させる。   First, the control means 16 reads the stored measurement conditions (including the designated measurement site) for the sample 2 to be analyzed. Subsequently, the sample exchanger 12 grips the sample 2 with the grip portion 12a (FIG. 2) via the sample holder 3, moves the sample 2 from the standby position to the measurement portion 1, and loads it. Subsequently, the r driving means 8 moves the sample 2 at the loading position (the position of the sample 2B in FIG. 1) to the irradiation position (the position of the sample 2A in FIG. 1) by the rotation of the turret 10.

そして、前記読み込んだ測定条件で、つまりｒ駆動手段８およびθ駆動手段９により試料２の測定部位を位置決めして、１次Ｘ線５を照射して測定する。測定部位が複数ある場合は、例えば指定された順に測定する。この測定中に、次の試料２が、同様に測定条件を読み込まれて待機位置から投入位置まで移動される。測定が終了すると、照射位置まで移動されたのと逆の手順でもとの待機位置へ戻され、同時に次の試料２が照射位置へ移動される。このような測定部位の測定作業が、分析すべき試料２の数だけ繰り返され、すべての試料２について測定が終了すると、装置は動作を停止する。動作全体は、図３のフローチャートに示すようなシーケンスになる。   Then, measurement is performed by irradiating the primary X-ray 5 while positioning the measurement site of the sample 2 by the read measurement conditions, that is, by the r driving means 8 and the θ driving means 9. When there are a plurality of measurement sites, measurement is performed in the specified order, for example. During this measurement, the next sample 2 is similarly read the measurement conditions and moved from the standby position to the loading position. When the measurement is completed, the procedure returns to the original standby position in the reverse procedure of the movement to the irradiation position, and at the same time, the next sample 2 is moved to the irradiation position. Such measurement work of the measurement site is repeated for the number of samples 2 to be analyzed, and when the measurement is completed for all the samples 2, the apparatus stops operating. The entire operation is a sequence as shown in the flowchart of FIG.

以上のように、第１実施形態の装置によれば、複数の試料２について、操作者が測定部位の指定をまとめてすることができ、その後装置から離れても、指定した測定部位についての測定がまとめて自動的になされる。なお、撮像位置は、試料保持ステージ１１に設定してもよい。つまり、図１に二点鎖線で示すように、試料保持ステージ１１において１つの待機位置となるべきスペースを撮像位置とし、その部分に窓１１ａとしての孔を設け、その窓１１ａの下方に撮像手段１４を配置してもよい。   As described above, according to the apparatus of the first embodiment, the operator can collectively specify the measurement site for the plurality of samples 2, and the measurement for the specified measurement site can be performed even after leaving the apparatus. Are automatically done together. Note that the imaging position may be set on the sample holding stage 11. That is, as indicated by a two-dot chain line in FIG. 1, a space to be one standby position in the sample holding stage 11 is an imaging position, a hole as a window 11a is provided in that portion, and imaging means is provided below the window 11a. 14 may be arranged.

次に、本発明の第２実施形態の装置について説明する。この装置では、図２（ハッチングを施した部分は断面である）に示すように、撮像手段１４が、試料交換機１２の把持部１２ａに取り付けられており、前記各待機位置がそのまま試料２それぞれの撮像位置となる。ここで、把持部１２ａは試料２を上方から把持し、撮像手段１４も上方から試料２の表面を撮像するので、試料２の分析すべき面は上面であり、この装置は、試料２に上方から１次Ｘ線を照射する上面照射型である。撮像手段１４を、実線で示すように把持部１２ａの中心軸上に内蔵した場合には、把持する位置にある試料２Ｎの表面を撮像するが、二点鎖線で示すように把持部１２ａから側方に延長して取り付けた場合には、把持する位置にある試料２Ｎの隣の試料２Ｍの表面を撮像する。その他の構成は、前記第１実施形態の装置と同様である。   Next, an apparatus according to a second embodiment of the present invention will be described. In this apparatus, as shown in FIG. 2 (the hatched portion is a cross section), the imaging means 14 is attached to the gripping portion 12a of the sample changer 12, and the respective standby positions remain as they are for the respective samples 2. This is the imaging position. Here, since the gripping part 12a grips the sample 2 from above and the imaging means 14 also images the surface of the sample 2 from above, the surface to be analyzed of the sample 2 is the upper surface. Is a top surface irradiation type that irradiates primary X-rays. When the imaging means 14 is built on the central axis of the gripping part 12a as shown by the solid line, the surface of the sample 2N at the gripping position is picked up, but the side from the gripping part 12a as shown by the two-dot chain line In the case of being attached extending in the direction, the surface of the sample 2M adjacent to the sample 2N at the position to be gripped is imaged. Other configurations are the same as those of the apparatus of the first embodiment.

第２実施形態の装置によれば、第１実施形態の装置と同様の作用効果がある上に、撮像のためには試料交換機１２の把持部１２ａを移動させるだけでよく、試料２を把持して、撮像位置へ移動させる必要がないという利点がある。   According to the apparatus of the second embodiment, there are the same effects as the apparatus of the first embodiment, and it is only necessary to move the grip portion 12a of the sample exchanger 12 for imaging. Thus, there is an advantage that it is not necessary to move to the imaging position.

本発明の第１実施形態の蛍光Ｘ線分析装置を示す正面概略図である。1 is a schematic front view showing a fluorescent X-ray analysis apparatus according to a first embodiment of the present invention. 本発明の第２実施形態の蛍光Ｘ線分析装置の特徴部分を示す正面図である。It is a front view which shows the characteristic part of the fluorescent X-ray-analysis apparatus of 2nd Embodiment of this invention. 前記第１実施形態の装置における動作シーケンスを示すフローチャートである。It is a flowchart which shows the operation | movement sequence in the apparatus of the said 1st Embodiment. 従来の装置における動作シーケンスを示すフローチャートである。It is a flowchart which shows the operation | movement sequence in the conventional apparatus.

符号の説明Explanation of symbols

１ 測定部
２ 試料
５ １次Ｘ線
６ 蛍光Ｘ線
１１ 試料保持ステージ
１２ 試料交換機
１２ａ 把持部
１４ 撮像手段
１６ 制御手段 DESCRIPTION OF SYMBOLS 1 Measuring part 2 Sample 5 Primary X-ray 6 Fluorescent X-ray 11 Sample holding stage 12 Sample exchange machine 12a Gripping part 14 Imaging means 16 Control means

Claims (1)

真空引きされるチャンバー内で試料に１次Ｘ線を照射して測定部位から発生する蛍光Ｘ線の強度を測定する測定部と、
大気雰囲気で複数の試料がそれぞれの待機位置に置かれる試料保持ステージと、
その試料保持ステージと前記測定部との間で試料を移動させる試料交換機と、
前記測定部の外の撮像位置に置かれた試料の表面を撮像して画像を生成する撮像手段と、
その撮像手段が生成した画像に基づいて操作者により指定された測定部位を記憶して、その記憶した測定部位について測定するように前記測定部を制御する制御手段とを備えた蛍光Ｘ線分析装置であって、
前記制御手段が、前記それぞれの待機位置に置かれた複数の試料について、前記指定された測定部位をまとめて記憶し、測定部位を記憶した複数の試料について所定の順に、前記それぞれの待機位置から測定部へ移動されて測定され、もとの待機位置へ戻されるように前記試料交換機および測定部を制御し、
前記撮像手段が、前記試料交換機において試料を把持する把持部に取り付けられており、前記各待機位置がそのまま試料それぞれの撮像位置となる蛍光Ｘ線分析装置。 A measuring unit that measures the intensity of fluorescent X-rays generated from the measurement site by irradiating the sample with primary X-rays in a vacuum-evacuated chamber;
A sample holding stage in which a plurality of samples are placed at respective standby positions in an air atmosphere;
A sample exchanger for moving the sample between the sample holding stage and the measurement unit;
Imaging means for imaging the surface of a sample placed at an imaging position outside the measurement unit to generate an image;
A fluorescent X-ray analysis apparatus comprising: a control unit that stores a measurement site designated by an operator based on an image generated by the imaging unit and controls the measurement unit so as to measure the stored measurement site Because
The control means collectively stores the designated measurement sites for the plurality of samples placed at the respective standby positions, and the plurality of samples storing the measurement sites from the respective standby positions in a predetermined order. Control the sample exchanger and the measurement unit so that it is moved to the measurement unit and measured, and returned to the original standby position ,
An X-ray fluorescence analyzer in which the imaging means is attached to a gripping part for gripping a sample in the sample exchanger, and the standby positions are directly used as imaging positions for the sample .
JP2004015496A 2004-01-23 2004-01-23 X-ray fluorescence analyzer Expired - Fee Related JP3928014B2 (en)

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