JP3924855B2 - Image measuring machine and method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a coordinate measuring machine that measures the size of a test object, and more particularly to an image measuring machine that measures the size of a test object from an image obtained by capturing the test object with a camera.
[0002]
[Prior art]
The image measuring machine captures a test object placed on a movable stage with a CCD camera or the like, processes the image, and measures the size of the test object. That is, on the monitor screen of the image measuring machine, a caliper that is an edge detection area on the monitor is displayed together with the object to be measured, and the edge coordinates of the place where the caliper is displayed are measured.
[0003]
In addition, when the operator specifies the edge position to be measured and the measurement conditions in advance in the teaching process, the caliper automatically scans the specified edge position of the specimen, and coordinates of each edge position are automatically scanned. An automatic measurement mode for measuring is known. That is, measurement procedure data for designating the measurement location, measurement conditions, measurement order, etc. of the test object is created in the teaching process, and the caliper is automatically scanned according to the measurement procedure data in the automatic measurement mode to perform measurement.
[0004]
In this measurement procedure data creation step, the operator manually moves the caliper at each location necessary for measuring the test object, and specifies the measurement conditions while confirming whether the edge coordinates can be measured.
[0005]
As another method of creating measurement procedure data, there is a method of creating offline using design data of the test object. In this case, instead of creating measurement procedure data while measuring the measurement location of the test object with an image measuring machine, while specifying the measurement location, measurement conditions, etc. of the test object according to the design data offline, ie on a desk Create measurement procedure data.
[0006]
[Problems to be solved by the invention]
Thus, conventionally, in order to create measurement procedure data for automatically measuring a test object, the measurement location, measurement conditions, measurement order, etc. of the test object have been designated one by one manually. In other words, the XY stage is moved so that the measurement location of the test object is displayed on the monitor screen under the conditions of the predetermined optical system of the CCD camera, and the caliper is set to be perpendicular to the edge of the measurement location of the test object. Furthermore, it is confirmed whether or not edge detection can be performed under predetermined illumination conditions and image processing conditions, and the optical system, illumination system conditions, image processing conditions, and edge positions at that time are used as measurement procedure data. Remember.
[0007]
Therefore, when there are many measurement locations on the test object, it is necessary to set measurement conditions and the like at each location, and it takes a very long time to create all measurement procedure data.
[0008]
In addition, when creating measurement procedure data offline, measurement procedure data can be created in a relatively short time, but since the measurement procedure data is not created by actually measuring the test object, the optical system, The illumination system conditions, image processing conditions, and the like may be incompatible with the test object, and the entire creation time is often increased due to the correction.
[0009]
Therefore, an object of the present invention is to solve the above-described problems, and to prepare a measurement procedure data that provides measurement conditions suitable for a test object in a short time even when there are many measurement points of the test object, and The object is to provide an image measuring machine to be implemented.
[0010]
[Means for Solving the Problems]
According to the present invention, the above object is to process image data obtained by imaging a test object, detect an edge of the test object in a set edge detection region, and measure the position of the edge In the measuring machine, the graphic element data table storing graphic element data forming the edge of the test object, the position and angle of the edge detection area are determined from the graphic element data, and the position of the edge detection area And measurement procedure data creation unit for creating measurement procedure data by adding measurement condition data at arbitrary points of a plurality of graphic elements to angle data, and automatically measuring the edge position of the test object according to the measurement procedure data This is achieved by providing an image measuring machine including a measuring unit.
[0011]
According to the present invention, the measurement procedure data is automatically created from the data of the graphic elements forming the edge of the test object and the measurement conditions that can be measured at any one of the measurement points. Can be provided in a short time.
[0012]
Further, the above object is to select a plurality of graphic elements in the test object that can be measured under the same measurement conditions, and to set measurement conditions for edges at arbitrary positions of the selected plurality of graphic elements. A step of determining a position and an angle of an edge detection area of the selected plurality of graphic elements from design data of the graphic element; a measurement procedure including the position and angle data of the edge detection area and the measurement condition; It is also achieved by providing an image measurement method including a step of automatically measuring an edge position of the test object according to data.
[0013]
According to the image measurement method of the present invention, the measurement conditions that can be measured at any one of the measurement points are commonly used as the measurement conditions for all the other measurement points. Can be created. Further, since the measurement procedure data is created from the measurement conditions that can be actually measured at one point of the edge of the test object, the measurement procedure data that can be reliably measured can be created.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an example of an embodiment of the present invention will be described with reference to the drawings. However, such an embodiment does not limit the technical scope of the present invention.
[0015]
FIG. 1 shows a schematic configuration of an image measuring machine according to an embodiment of the present invention. An image measuring machine 1 according to an embodiment of the present invention includes an XY stage 2 that can be driven in two horizontal axes. A test object 3 having graphic elements such as straight lines, circles, and arcs is placed on the XY stage 2 and illuminated by the transmission illumination optical system 4 or the epi-illumination optical system 5.
[0016]
Above the XY stage 2, an imaging unit 7 that images the test object 3 placed on the XY stage 2 is provided. The image pickup unit 7 includes an optical system 6 having a variable optical magnification for forming an image of the test object 3 and a CCD camera 8 for picking up the formed image.
[0017]
The image picked up by the CCD camera 8 is taken into the image processing unit 9 and the obtained image is displayed on the monitor 10. On the screen of the monitor 10, a caliper indicating an edge detection area that can be arbitrarily moved and rotated together with the test object 3 is displayed, and the coordinate value of the edge of the image of the test object 3 on the caliper is detected. .
[0018]
The image measuring machine 1 having the above configuration moves the XY stage 2 and images the test object 3 with the CCD camera 8. Then, the edge of the test object 3 is displayed on the screen of the monitor 10, the caliper is aligned with the edge, and the coordinates are measured. The measurement of the test object 3 is performed by repeating the measurement of the edge coordinates by the number of points designated for each graphic element such as a straight line, a circle, or an arc.
[0019]
The above measurement is performed by automatic measurement according to measurement procedure data created in advance. In this embodiment, the measurement procedure data is created by a novel method. The measurement procedure data includes the XY stage 2 position, caliper position and angle, illumination system and optical system conditions for setting the area to be displayed on the monitor screen for the graphic element included in the object 3 to be measured. And image processing conditions.
[0020]
FIG. 2 shows an example of an object to be measured with an image measuring machine. The test object 3 is a plate-like body such as a plate punched out by pressing or a printed board, and is processed into a required dimensional shape. The test object 3 is processed in accordance with the data of graphic elements such as straight lines, circles, arcs, etc., and the image measuring machine measures whether or not the test object 3 is processed into a specified dimension for each of these graphic elements. .
[0021]
FIG. 3 shows a state in which the test object 3 of FIG. 2 is displayed on the monitor screen 20 of the image measuring machine in the present embodiment. On the monitor screen 20, calipers 21 to 29 are displayed together with the test object 3. Although it is possible to arbitrarily specify which part of the test object 3 is to be measured, FIG. 3 shows a case where nine edge coordinates on which calipers are displayed are measured.
[0022]
In the example of FIG. 3, edge coordinates are measured at two points of the calipers 21 and 22 for the straight line 30. For the circle 31, edge coordinates are measured at four points of calipers 23, 24, 25, and 26, and for the arc 32, edge coordinates are measured at three points of calipers 27, 28, and 29. Done.
[0023]
FIG. 4 shows a functional block diagram of the image measuring device 1 in the embodiment of the present invention. The image measuring machine 1 includes a graphic element data table 50 storing design values of graphic elements included in the test object, a measurement condition input unit 51 for inputting measurement conditions such as illumination conditions, and a measurement condition input unit 51. A measurement condition setting unit 52 that outputs the input measurement conditions to the measurement procedure data creation unit 53;
[0024]
Further, the measurement procedure data creating unit 53 for creating measurement procedure data from the graphic element data output from the graphic element data table 50 and the measurement conditions set by the measurement condition setting unit 52, and the created measurement procedure data And a measurement procedure data table 54 to be stored.
[0025]
Further, the replay measuring unit 55 that repeats the measurement of the test object according to the measurement procedure data stored in the measurement procedure data table 54, and the image of the test object on the caliper portion displayed on the monitor screen are processed to measure the edge coordinates. And an image processing unit 56.
[0026]
Further, each block will be described in detail. The graphic element data table 50 is a table in which design values of graphic elements such as circles, straight lines, and arcs included in the test object are stored. These design values have a center and a diameter for a circular element, a start point and an end point for a linear element, and a center, a radius, a start angle, and an end angle for an arc element. The specimen is processed according to these design values.
[0027]
FIG. 5 shows examples of design values of these graphic elements. FIG. 5 (1) shows the design value of the circle, which has center coordinates (x1, y1) and a diameter D1. FIG. 5 (2) shows a design value of a straight line, and has start point coordinates (x2, y2) and end point coordinates (x2 ′, y2 ′). FIG. 5 (3) shows the design value of the arc, which has the center coordinates (x3, y3), the radius R3, the start angle θ3, and the end angle θ3 ′.
[0028]
FIG. 6 shows an example of the graphic element data table 50 of the test object 3 shown in FIG. FIG. 6A shows the test object 3 shown in FIG. 2 as a set of three types of graphic elements, ie, a circle, a straight line, and an arc. Thus, the shape of the test object 3 is a set of circles 200 to 206, straight lines 300 to 330, and arcs 400 to 406.
[0029]
FIG. 6 (2) shows an example of the graphic element data table 50 of the test object 3. As described above, the graphic element data table 50 of the test object 3 includes the center coordinates and diameters from the circle 200 to the circle 206, the start point coordinates and the end point coordinates from the straight line 300 to the straight line 330, and the arc 400 to the arc 406. Stored are design values such as center coordinates, radius, start angle, and end angle.
[0030]
The image measuring machine according to the present embodiment uses the measurement procedure data creation unit 53 to determine the position and angle of the caliper, which is a part of the measurement procedure data, based on the data in the graphic element data table 50 using an algorithm described later. Create automatically. As a method for creating the graphic element data table 50, there are a method of inputting from CAD drawing data of a test object, a method of inputting each graphic element data by key, and the like.
[0031]
Next, the measurement condition setting unit 52 will be described. The measurement condition setting unit 52 outputs the measurement conditions input by the operator from the measurement condition input unit 51 to the measurement procedure data creation unit 53. Measurement conditions include an optical system used for measurement, an illumination system condition, an image processing condition for edge detection, and the like. Since the edge of the test object is detected by processing the image signal in the caliper on the monitor screen, the edge of the test object cannot be accurately detected unless the optical condition, illumination condition, and image processing condition are appropriate.
[0032]
Therefore, the operator finds and sets an optical condition, an illumination condition, and an image processing condition capable of detecting an edge with respect to an arbitrary representative edge among a plurality of graphic elements whose edges can be detected under the same measurement condition. The set condition becomes the measurement condition data of the measurement procedure data.
[0033]
The optical system condition includes, for example, a magnification when an object is imaged with a CCD camera. The accuracy of edge detection changes depending on the magnification, the depth of focus changes when the magnification is changed, and the edge detection sensitivity of the test object changes when the test object has a thickness in the z direction.
[0034]
The illumination system conditions include transmitted illumination, epi-illumination, four-direction oblique illumination, and their light amounts. Since edge detection detects a point where the edge image on the monitor screen changes from black to white or the like, whether or not the edge can be detected is determined by these illumination conditions.
[0035]
The image processing conditions include caliper size, threshold Vth specification, enhancement processing specification, and the like. The caliper is set at a right angle to the edge to be measured on the monitor screen, but its size also affects the sensitivity of edge detection. The edge detection is performed at the peak position of the differential waveform of the change in the amount of light received by the CCD camera. By adjusting the threshold value Vth that determines the minimum height of the peak detected according to the surface condition of the test object, Noise due to scratches on the surface of the test object can be removed. The enhancement process (enhancement mode) is an image process that makes black on the monitor screen blacker and whiter whiter. By performing enhancement processing on edges with low contrast, the detection sensitivity of the edges is improved. Can do.
[0036]
Next, the measurement procedure data creation unit 53 will be described. The measurement procedure data creation unit 53 loads graphic element data from the graphic element data table 50, loads the optical system used for measurement, the illumination system conditions, and the image processing conditions from the measurement condition setting unit 52, and measures the measurement procedure data. Create automatically.
[0037]
When an object having a large number of graphic elements processed under the same processing conditions is automatically measured by an image measuring machine, the large number of graphic elements can often be measured under the same measurement conditions. The measurement procedure data creation method according to the present embodiment pays attention to this point.
[0038]
In order to create measurement procedure data, first, a plurality of graphic elements that can be measured under the same measurement conditions are made into one group. Then, an arbitrary edge in the group is selected, and measurement is actually performed to confirm whether or not the edge coordinates can be measured under the measurement condition set by the measurement condition setting unit 52. If measurement is not possible, change the measurement conditions and find the measurement conditions that can reliably measure the edge coordinates.
[0039]
When the edge coordinates can be measured, the measurement conditions at that time are taken into the measurement procedure data creation unit 53 and are commonly used as measurement conditions for the measurement points of all the graphic elements in the same group of the test object. Therefore, there is no need to set measurement conditions for each measurement location as in the prior art, and measurement procedure data can be created in a short time. In addition, since the measurement conditions are conditions under which the edge coordinates of the test object can be actually measured, it is possible to reliably measure the edge coordinates that match the processing state and shape of the test object.
[0040]
Once the measurement conditions are set, the caliper position and angle are then set corresponding to the measurement location of the test object. In the present embodiment, the position and angle of the caliper are automatically created from the graphic element data in the graphic element data table 50 described above by an algorithm described later.
[0041]
FIG. 7 is an explanatory diagram of an algorithm for automatically creating the position and angle of the caliper for each graphic element from the design value of the graphic element. FIG. 7 (1) shows the positions and angles of the calipers 80, 81, 82 for measuring the edge of the circle 60. The automatic creation algorithm creates calipers having the same conditions as the above-described measurement conditions (optical system, illumination system conditions, image processing conditions) at equally spaced positions obtained by dividing the circle 60 by the number necessary for measurement. At this time, the direction of the caliper is set so as to go in the radial direction from the center of the circle. The number of calipers required for one circle is usually three points as shown in FIG. 7 (1), but can be arbitrarily specified, and a larger number of calipers can be used for measuring roundness and the like. Is required.
[0042]
FIG. 7 (2) shows the positions and angles of the calipers 83 and 84 for measuring the edge of the straight line 63. The automatic creation algorithm removes the measurable margin of 1/10 of the total length from both ends of the straight line 63, for example, and places the same conditions as the above measurement conditions at equally spaced positions divided by the number required for measurement. Create a caliper with At this time, the direction of the caliper is set to be leftward with respect to the traveling direction of the straight line 63. The number of calipers required for one straight line is usually two points, but can be arbitrarily specified, and a larger number of calipers are required for measuring linearity and the like.
[0043]
FIG. 7 (3) shows the positions and angles of the calipers 85, 86, 87 for measuring the edge of the arc. The automatic creation algorithm creates calipers that have the same conditions as the measurement conditions described above at equally spaced positions by dividing the area by the number required for measurement, excluding the measurable margin of 1/10 of the total length from both ends of the arc. To do. At this time, the direction of the caliper is set so as to be radial from the center of the arc. The number of calipers required for one arc is usually three points, but can be arbitrarily specified. As described above, for each graphic element, caliper position and angle data is automatically created from the design data, and the measurement procedure data for each graphic element is obtained together with the corresponding measurement conditions.
[0044]
FIG. 8 shows a part of measurement procedure data for each graphic element of FIG. As described above, the position and angle of the caliper for each graphic element are automatically created from the graphic element data stored in the graphic element data table 50, and the optical condition, illumination condition, and image processing condition are measured by the measurement condition setting unit 52. Measurement conditions set for each group are commonly used. Measurement procedure data is created by further adding the position data of the XY stage 2 to the data shown in FIG.
[0045]
FIG. 9 shows an example of specifying the measurement location of the test object 3. The measurement locations are designated in advance by the operator for each group that can be measured under the same measurement conditions. In FIG. 9, circles 200 to 206 and straight lines 305, 313, and 328 are designated as group 500, and straight line 315 is designated as group 501. A case where arcs 403 and 404 are designated is shown.
[0046]
Since the measurement of the edge coordinates in the same group is performed under the same measurement conditions, measurement in another group is required depending on the processing conditions of the edge of the test object and the required measurement accuracy. For example, when there is a step on the edge of the test object and it is necessary to change the conditions of the optical system, or when changing the detection sensitivity according to the size of the graphic element, measurement in another group with different measurement conditions Is done.
[0047]
In FIG. 9, the edge measurement is specified to be performed with four calipers for a circle, two calipers for a straight line, and three calipers for an arc. It is possible to arbitrarily specify the number of calipers to be measured with respect to the graphic element. Even in that case, it is necessary to divide into different groups and specify each.
[0048]
FIG. 10 shows an example of measurement procedure data in the embodiment of the present invention. As described above, the measurement procedure data includes the XY stage position coordinates, caliper position coordinates and angles, optical magnification, etc., for automatic measurement by the image measuring machine with respect to the graphic elements included in the object to be measured. It consists of optical conditions, illumination conditions such as illumination type and light quantity, image processing conditions, and the like.
[0049]
The measurement procedure data in the present embodiment is created for each group to be measured under the same measurement conditions, and the XY stage position coordinates, caliper position coordinates and angles are automatically created from the graphic element data in the graphic element data table 50. As the optical conditions, illumination conditions, and image processing conditions, the measurement conditions set by the measurement condition setting unit 52 are commonly used in the same group. In the example of FIG. 10, the measurement conditions for the graphic elements of the first group 500 are K, L, and M, and the measurement conditions for the graphic elements of the second group 501 are P, Q, and R.
[0050]
The measurement procedure data created by the measurement procedure data creation unit 53 is stored in the measurement procedure data table 54. Then, the replay measurement unit 55 sequentially measures the dimensions of the test object according to the measurement procedure data in the measurement procedure data table 54.
[0051]
FIG. 11 shows a flowchart of a process for creating measurement procedure data according to the embodiment of the present invention. In step 101, all graphic elements that are to be measured and that can be measured under the same measurement conditions are selected from the graphic element data table 50. For example, as shown in FIG. 9, circles 200 to 206 and straight lines 305, 313, and 328 are selected as the group 500, or straight lines 315 and arcs 403 and 404 are selected as the group 501.
[0052]
In step 102, in the measurement condition setting unit 52, an optical system, an illumination system condition, an image processing condition, etc. that can measure the edge coordinates of the test object for any one of the measurement points of the test object in the same group. Set the measurement conditions and measure the edge coordinates.
[0053]
In step 103, the operator confirms whether or not the edge coordinates can be measured under the measurement conditions set in step 102. If the edge coordinates cannot be measured due to the measurement conditions, the edge coordinates are measured again at step 104 while changing the measurement conditions (step 102). The operator manually adjusts the caliper to the appropriate edge of the test object in the same group and measures the edge coordinates.
[0054]
In step 105, the measurement conditions for which the edge coordinates can be measured in step 103 are input from the measurement condition setting unit 52 to the measurement procedure data creation unit 53. This measurement condition becomes the measurement condition at all other measurement locations in the same group.
[0055]
From step 106, creation of measurement procedure data for the selected graphic element from the graphic elements in the graphic element data table 50 is started. First, in step 106, when a circle, a straight line, or an arc is selected as the group 1 in step 101 in step 101, a circle in the group is first selected.
[0056]
In step 107, it is determined whether or not there is a selected graphic element in the test object. If there is, the process proceeds to step 109, and if not, the process proceeds to step. In this case, since there is a selected graphic element since it is the first, the process proceeds to step 109.
[0057]
In step 109, the caliper position and angle are automatically created from the design data for the selected graphic element, and the measurement procedure given in step 105 is added to create measurement procedure data. This process will be described with reference to the flowchart of FIG.
[0058]
FIG. 12 shows a detailed flowchart of step 109 in FIG. In step 121, it is determined whether or not the graphic element to be used is a circle. If it is a circle, the process proceeds to step 122. If it is not a circle, the process proceeds to step 123. In step 122, circle measurement procedure data is created and the process returns to the flowchart of FIG.
[0059]
As shown in FIG. 7 (1), the measurement procedure data for the circle has a radial angle at equally spaced positions obtained by dividing the circle by the number necessary for the measurement, and the measurement conditions (optical system, illumination) described above are used. Set calipers that have the same conditions as the system conditions and image processing conditions. Similarly, calipers are similarly set for all the circles that need to be measured within the same group, and measurement procedure data is created.
[0060]
In step 123, it is determined whether or not the graphic element to be used is a straight line. If it is a straight line, the process proceeds to step 124, and if it is not a straight line, the process proceeds to step 125. In step 124, straight line measurement procedure data is created, and the flow returns to the flowchart of FIG.
[0061]
In creating the measurement procedure data for a straight line, as shown in FIG. 7 (2), the measurable margin is removed from both ends of the straight line, and the area is divided by the number required for measurement, and the start point of the straight line is obtained. A caliper that has an angle in the left direction with respect to the direction from the end point to the end point and that has the same conditions as those described above is set. Similarly, calipers are similarly set for all straight lines that need to be measured within the same group, and measurement procedure data is created.
[0062]
In step 125, it is determined whether or not the graphic element to be used is an arc. If it is an arc, the process proceeds to step 126. If it is not an arc, measurement procedure data cannot be created and the process returns to the flowchart of FIG. In step 126, arc measurement procedure data is created and the process returns to the flowchart of FIG.
[0063]
In creating the measurement procedure data for the arc, as shown in FIG. 7 (3), the measurable margin is removed from both ends of the arc, and the area is divided by the number required for measurement, and the outside of the arc is set. A caliper having an angle of direction and having the same conditions as those described above is set. Similarly, calipers are similarly set for all arcs that need to be measured within the same group, and measurement procedure data is created.
[0064]
Thus, after creating the measurement procedure data of the graphic element to be measured in step 109 of FIG. 11, the created measurement procedure data is stored in the measurement procedure data table 54 in step 110. In step 111, the measurement procedure data creation target is changed to the next selected graphic element in the graphic element data table 50, and the process returns to step 107.
[0065]
In step 107, it is determined again whether there is a next graphic element, and as long as there is a selected graphic element, steps 107 to 111 are repeated, and measurement procedure data can be created for all selected graphic elements. Then go to step 108. In step 108, it is determined whether or not there is another group having different measurement conditions for edge detection. If so, the process returns to step 101;
[0066]
【The invention's effect】
As described above, according to the present invention, when creating measurement procedure data for automatically measuring the edge coordinates of a graphic element included in a test object, the caliper position, angle, etc. are the same as the graphic element data of the test object. Since the measurement conditions that are automatically created using the measurement conditions that can be measured at any one point of the test object are commonly used, the measurement procedure data can be created in a very short time.
[0067]
In addition, since measurement conditions that can actually be measured are taken in according to the state of the test object, measurement procedure data that can be reliably measured can be created.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of an image measuring machine according to an embodiment of the present invention.
FIG. 2 is a diagram showing an example of a test object.
FIG. 3 is a diagram of a monitor screen displaying a test object.
FIG. 4 is a functional block diagram of the image measuring machine in the embodiment of the present invention.
FIG. 5 is a diagram showing design values of graphic elements.
6 is a structural diagram of a graphic element data table of the test object 3. FIG.
FIG. 7 is an explanatory diagram of an algorithm for creating a caliper position and angle for each graphic element.
FIG. 8 is a diagram showing a part of measurement procedure data for each graphic element.
FIG. 9 is a diagram showing measurement points of a test object.
FIG. 10 is an example of measurement procedure data in the embodiment of the present invention.
FIG. 11 is a flowchart of measurement procedure data table creation processing in the embodiment of the present invention.
FIG. 12 is a detailed flowchart of step 109 in the embodiment of the present invention.
[Explanation of symbols]
1 Image measuring machine
2 XY table
3 Test object
8 CCD camera
10 Monitor
50 Graphic element data table
52 Measurement condition setting section
53 Measurement procedure data generator
54 Measurement procedure data table
55 Replay measurement unit
56 Image processing unit

Claims (6)

An imaging unit for imaging a test object;
An image processing unit that processes the image data captured by the imaging unit and measures the position of the edge of the test object in a set edge detection region;
A graphic element data table in which data of graphic elements forming the edge of the test object are stored;
Condition data when the test object is imaged by the imaging unit, a measurement condition input unit for inputting condition data when edge detection is confirmed by an operator at an arbitrary point of a plurality of graphic elements;
Obtaining the position and angle of the edge detection region from the data of the graphic element, comprising a measurement procedure data creation unit for creating measurement procedure data by adding the condition data to the position and angle data of the edge detection region,
The image processing unit, wherein the image processing unit automatically measures the position of the edge of the object according to the measurement procedure data. The image measuring machine according to claim 1,
An image measuring machine characterized in that the condition data when imaging the test object with the imaging unit is a magnification when imaging with the imaging unit. The image measuring machine according to claim 1,
An image measuring machine characterized in that the condition data when imaging the test object with the imaging unit is an illumination condition when imaging with the imaging unit. Selecting a plurality of graphic elements in the test object that can be measured under the same measurement conditions;
Setting measurement conditions when edge detection is confirmed by an operator for edges at arbitrary positions of the selected graphic elements;
Obtaining a position and an angle of an edge detection region of the selected plurality of graphic elements from design data of the graphic elements;
Automatically measuring the edge position of the test object from the imaged image of the test object according to the measurement procedure data having the position and angle data of the edge detection region and the measurement condition,
The image measurement method, wherein the measurement condition is a condition for imaging the test object. The image measurement method according to claim 4,
An image measuring method, wherein the condition for imaging the test object is a magnification for imaging. The image measurement method according to claim 4,
The image measurement method according to claim 1, wherein the condition for imaging the test object is an illumination condition for imaging.

Images