JP3923049B2 - Electrostatic motor - Google Patents

Description

  The present invention relates to an electrostatic motor using an electrostatic force as a drive source.

It has a stator and a mover formed in a film shape, and a multiphase AC voltage is applied to each of the stator and mover electrodes to move the mover film relative to the stator film. An electrostatic motor is developed as a drive source for a micromachine or the like (see, for example, Patent Document 1).
In a conventional electric motor that uses electromagnetic force, a member that generates a magnetic force, such as a magnetic coil or a permanent magnet, is required, and it is difficult to form a small size. However, since an electrostatic motor does not require a large-mass element such as a magnetic coil or a permanent magnet, an ultra-small motor can be formed and used as a drive source for a micromachine.
The electrostatic motor does not require a magnetic coil, a permanent magnet, or the like, and can form a stator and a mover by arranging electrodes in a planar shape. Therefore, the motor can be made smaller and lighter than the electromagnetic force type motor. In order to take advantage of this merit, the stator and the mover are formed in a film shape. For this reason, the film type electrode for the stator and the film type electrode for the mover are not rigid and the gap between them cannot be held by the film type electrode for the stator and the film type electrode for the mover itself. A configuration is adopted in which fine particles such as glass beads are dispersed between the electrode and the film electrode for the moving element to hold the gap (see Non-Patent Document 1).

  FIG. 1 is a schematic explanatory diagram of a direct acting electrostatic motor. FIG. 2 is a detailed explanatory view of a film-form electrode for a stator and a film-type electrode for a mover in a direct acting electrostatic motor. FIG. 3 is a cross-sectional view taken along the line A-A ′ of FIG. 2. The stator film-type electrode 1 is embedded with an electrode portion 3 of each phase formed of a conductive belt-like thin film or a thin wire in an insulator 4. A similar electrode portion 6 is also embedded in the insulator 5 in the film type electrode 2 for the mover. In the example shown in FIGS. 1 to 3, both the stator film-type electrode 1 and the mover film-type electrode 2 are connected to a three-phase AC power source and connected to terminals of each phase of the three-phase AC power source. Voltage input sections 7a, 7b, 7c and 8a, 8b, 8c. As shown in FIG. 2, in the film-type electrode 1 for a stator, each electrode for driving is connected to the voltage input portion 7a connected to the first phase terminal of the three-phase AC power source via a current path 3a ′. Are connected to the voltage input unit 7b connected to the terminal of the second phase, and the driving electrode units 3b, 3b,. .. Are connected to the voltage input section 7c connected to the terminals of the three phases through the current path 3c ′. The current path 3c ′ is arranged on the side opposite to the side where the electrode part is provided in order to prevent crossing and contacting with other electrode parts and current paths, and for driving through the through-hole conductive part 9. Are connected to the electrode portions 3c, 3c. Therefore, it is indicated by a broken line in FIG.

  Also in the film type electrode 2 for the mover, the arrangement of the electrode unit 6 is the same as the film type electrode 1 for the stator, and the voltage input unit 8a connected to the first phase terminal of the three-phase AC power supply The driving electrode portions 6a, 6a,... Are connected via the energization path 6a ′. In FIG. 2, the electrode portion 6 provided on the back surface of the film constituting the moving element film-type electrode 2 is indicated by a broken line, and the electrode portion 6 provided on the front side is indicated by a solid line. The voltage input unit 8b connected to the second phase terminal is connected to the driving electrode units 6b, 6b... Via the energization path 6b ′, and is connected to the third phase terminal. The drive electrodes 6c, 6c,... Are connected to 8c through the current path 6c ′ and the through-hole conductive portion 10.

  3 is a cross-sectional view taken along line AA in FIG. The stator film-type electrode 1 includes a base film 4b having a current path 3c 'formed by an adhesive, an etching process, etc., and a base film 4c that is bonded back to back on the base film 4b. 3a, 3b, 3c and current paths 3a ′, 3b ′ are formed by an adhesive, an etching process, or the like. And the outer side is covered with the cover film 4a, and the insulating layer is formed. That is, the stator film-type electrode 1 includes a cover film 4a layer, a current path 3c ′ and an adhesive layer, a base film 4b layer, an adhesive layer, a base film 4c layer, and a driving electrode portion 3a. , 3b, 3c, current paths 3a ', 3b, an adhesive layer, and a cover film 4a.

The same applies to the film-type electrode 2 for the mover. The base film 5c is formed on the base film 5b by an adhesive, an etching process, or the like, and the base film 5c bonded back to back on the base film 5b has a driving force. Each electrode part 6a, 6b, 6c and current paths 6a ′, 6b ′ are formed by an adhesive, an etching process, or the like. And the outer side is covered with the cover film 5a, and the insulating layer is formed. The film electrode 2 for the mover includes a cover film 5a layer, a current path 6c ′ and an adhesive layer, a base film 5b layer, an adhesive layer, a base film 5c layer, driving electrode portions 6a, 6b, 6c, current paths 6a ', 6b, an adhesive layer, and a cover film 5a.
Further, glass beads 11 are scattered between the film type electrode 1 for the stator and the film type electrode 2 for the mover to maintain a gap between the film type electrode 1 for the stator and the film type electrode 2 for the mover. ing.

  Each terminal of the film-type electrode 1 for the stator and the film-type electrode 2 for the mover is connected to each phase terminal of a multi-phase AC power source (three-phase AC power source in the example shown in the figure) by each voltage input unit 7a, 7b , 7c, 8a, 8b, and 8c to generate traveling wave electric fields, respectively, and move the moving film type electrode 2 relative to the stator film type electrode 1 by the difference of the traveling wave electric fields. .

FIG. 4 is a schematic explanatory diagram of a rotary electrostatic motor. In the stator film-type electrode 1, electrode portions 3 of respective phases formed of a conductive belt-like thin film or a thin wire are embedded in an insulator 4 in a radially arranged manner. Similarly, the phase electrode portions 6 are embedded in the insulator 5 in a radially arranged manner in the insulator film type electrode 2. Then, glass beads are dispersed between the stator film-type electrode 1 and the mover film-type electrode 2 so that the gap between the stator film-type electrode 1 and the mover film-type electrode 2 is maintained. It is configured. This rotary electrostatic motor is different from the direct acting electrostatic motor shown in FIGS. 1 to 3 only in that the phase electrode portions 3 and 6 are radially arranged. The configuration is the same as that of the motor, and the same reference numerals are assigned to the corresponding elements. In this rotary electrostatic motor, a multiphase AC power source is connected to each of the stator film-type electrode 1 and the mover film-type electrode 2 to generate traveling wave electric fields, respectively. The film type electrode is rotated relative to the stator film type electrode.
Further, in order to generate a large force, a plurality of sets are laminated as one set of the film type electrode for the stator and the film type electrode for the mover shown in FIG. 1 and FIG. The film type electrodes are connected to each other to form a laminated electrostatic motor that generates a large force.

Japanese Unexamined Patent Publication No. 6-78566 Yasuo Yamamoto, Toshiki Niino, Toshiro Higuchi “High-precision positioning control using high-power electrostatic linear motor”, Vol. 64. No. 9. 1998, A-152 to A-156

  The film electrode for the mover moves relative to the film electrode for the stator, and is distributed between the opposing surfaces to manage the gap between the film electrode for the stator and the film electrode for the mover. The glass beads of the fine particles thus formed are interposed between the film-type electrode for the stator and the film-type electrode for the mover in a free state. There was a problem that the phenomenon of uneven and uneven distribution occurred. If glass beads are unevenly distributed between the film electrode for the stator and the film electrode for the mover, the gap between the film electrode for the stator and the film electrode for the mover is not uniform and the motor characteristics change. become. However, conventionally, there is only a method for managing the gap using the glass beads. Further, when the glass beads are not used, the film of the stator film type electrode and the mover film type electrode come into contact with each other and slide, which causes a problem that the film is damaged.

  Accordingly, an object of the present invention is to eliminate the uneven distribution of glass beads so that the gap between the film electrode for the stator and the film electrode for the mover can be maintained at a predetermined value.

  The present invention comprises a film-form electrode for a stator and a film-type electrode for a mover, and fine particles such as glass beads between opposing surfaces of the film-type electrode for the stator and the film-type electrode for a mover In relation to an electrostatic motor in which a gap is formed between the film electrode for the stator and the film electrode for the mover, and either the film electrode for the stator or the film electrode for the mover A partition wall formed of a wall having a diameter smaller than the diameter of the microparticles is provided on the opposing surface, the opposing surface is divided into a plurality of sections, the microparticles are divided by the partition walls, and the microparticles are moved. By restricting the inside of the partition in each partition, the fine particles are disposed almost uniformly on the opposing surfaces of the stator film-type electrode and the slider film-type electrode to prevent uneven distribution and prevent the stator from being unevenly distributed. Film-type electrode and slider The gap between Lum type electrodes so as to entirely kept uniform. Moreover, the said partition is manufactured and comprised integrally with the film which forms the outer surface of the film type electrode for stators, or the film type electrode for movers.

  Even if the film type electrode for the mover moves relative to the film type electrode for the stator, the movement of the fine particles such as glass beads is always limited by the partition wall, so the fine particles are always the film type for the stator. The gap between the stator film-type electrode and the mover film-type electrode is kept uniform over the entire surface because the electrode and the mover film-type electrode are held almost uniformly on the entire surface. Be drunk.

  FIG. 5 is a front view of the film-type electrode 2 for a mover in one embodiment of the present invention. That is, it is the figure which looked at the surface which opposes the film-type electrode 1 for stators of the film-type electrode 2 for movers from the front. FIG. 6 is a cross-sectional view of the stator film-type electrode 1 and the mover film-type electrode 2. As shown in FIGS. 5 and 6, the moving film film electrode 2 is provided with a partition wall 20 that protrudes from the surface of the moving film film electrode 2 to form a wall and surround the glass beads 11. Yes. The height of the partition wall 20 is formed by a wall lower than the diameter of the glass beads 11 scattered in the gap between the stator film-type electrode 1 and the mover film-type electrode 2. The gap space between the stator film-type electrode 1 and the mover film-type electrode 2 is divided into a plurality of sections by the partition walls 20, and the glass beads 11 can freely move within the partition walls 20 of each section. Cannot move beyond 20.

  FIG. 7 is a cross-sectional view of a stator film-type electrode 1 and a mover film-type electrode 2 in a conventional electrostatic motor for comparison with the embodiment of the present invention. As clearly shown in FIG. 7 and FIG. 6 which is an embodiment of the present invention, the glass beads 11 dispersed between the stator film-type electrode 1 and the mover film-type electrode 2 are shown in FIG. There is nothing that restricts the movement, and as the film electrode 2 for the mover moves relative to the film electrode 1 for the stator, the glass beads 11 are likely to move and be unevenly distributed.

  However, as shown in FIG. 6, in the embodiment of the present invention, the movement of the glass beads 11 is regulated by the partition walls 20, so that the moving film film electrode 2 moves, and the movement causes the glass beads 11 to move. Even if it tries to move, the moving range is limited by the partition wall 20, so that the glass beads 11 are not biased and are almost uniform on the opposing surfaces of the stator film type electrode 1 and the mover film type electrode 2. Will be distributed. As a result, the gap between the stator film-type electrode 1 and the mover film-type electrode 2 is maintained uniformly over the entire surface.

In addition, in embodiment mentioned above, although the partition 20 was arrange | positioned in the opposing surface side with the film type electrode 1 for stators of the film type electrode 1 for movers, you may provide in the film type electrode 1 for stators. That is, even if a partition is provided on the surface of the stator film-type electrode 1 facing the mover film-type electrode 2, the same effect can be obtained. In the present embodiment, the partition wall 20 is formed of an independent closed wall. However, the partition wall 20 may be provided in a lattice shape to form a partition wall. Further, the partition wall 20 may be manufactured integrally with the cover films 4a and 5a when manufacturing the cover films 4a and 5a which are the outer skins of the stator film type electrode or the moving film type electrode. The partition wall 20 can be easily formed.
In the above-described embodiment, the glass beads are dispersed and arranged between the stator film type electrode and the mover film type electrode. However, instead of the glass beads, fine particles of other materials may be used. .

It is a schematic explanatory drawing of the direct acting electrostatic motor to which this invention is applied. It is a detailed explanatory view of a film-form electrode for a stator and a film-type electrode for a mover in the direct acting electrostatic motor. It is A-A 'sectional drawing in FIG. It is a schematic explanatory drawing of the rotary electrostatic motor to which this invention is applied. It is a front view of the film type electrode for movers in one embodiment of the present invention. It is sectional drawing of the electrostatic motor comprised by the film-type electrode for stators and the film-type electrode for movers in the embodiment. It is sectional drawing of the conventional electrostatic motor.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Film type electrode for stator 2 Film type electrode for mover 3, 6 Electrode part 4, 5 Insulator 7a, 7b, 7c, 8a, 8b, 8c Voltage input part 9, 10 Through-hole conductive part 11 Glass bead 20 Bulkhead

Claims (3)

  A film-type electrode for a stator and a film-type electrode for a mover, and a stator in which fine particles are dispersed between opposing surfaces of the film-type electrode for the stator and the film-type electrode for a mover. In the electrostatic motor in which a gap is formed between the film type electrode for moving and the film type electrode for moving element, either one of the film type electrode for stator or the film type electrode for moving element is disposed on the opposite surface of the fine particle. Provided with a partition wall formed of a wall having a diameter lower than that, the facing surface was divided into a plurality of partitions, the microparticles were partitioned by the partition walls, and the movement of the microparticles was restricted within the partition walls in each partition. An electrostatic motor characterized by   The electrostatic motor according to claim 1, wherein the fine particles are glass beads. 3. The electrostatic motor according to claim 1, wherein the partition wall is manufactured and configured integrally with a film that forms an outer surface of the stator film type electrode or the mover film type electrode.

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