JP3910423B2 - Package structure of SAW device - Google Patents

Package structure of SAW device Download PDF

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Publication number
JP3910423B2
JP3910423B2 JP2001366032A JP2001366032A JP3910423B2 JP 3910423 B2 JP3910423 B2 JP 3910423B2 JP 2001366032 A JP2001366032 A JP 2001366032A JP 2001366032 A JP2001366032 A JP 2001366032A JP 3910423 B2 JP3910423 B2 JP 3910423B2
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JP
Japan
Prior art keywords
saw device
container
conductive
lid
shielded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001366032A
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Japanese (ja)
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JP2003168954A (en
Inventor
平 千田
満彦 根岸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP2001366032A priority Critical patent/JP3910423B2/en
Publication of JP2003168954A publication Critical patent/JP2003168954A/en
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Publication of JP3910423B2 publication Critical patent/JP3910423B2/en
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Expired - Fee Related legal-status Critical Current

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Description

【0001】
【発明の属する技術の分野】
本発明は、SAWデバイスについて、特にSAWデバイス内部に搭載される素子の効果的な新しいシールド構造を提供するSAWデバイスのパッケージ構造に関するものである。
【従来の技術】
【0002】
従来のSAWデバイスにおいては、SAWデバイスの内部に搭載される素子の特性に影響を与える高周波ノイズを低減する手段として、図8の様にSAWデバイスの上面と側面、及び下面を導電性の材料を用いてシールドする構成となっていた。
【0003】
その為、SAWデバイスの上面と側面、及び下面を導電性の材料を用いてシールドする為に、従来においてはSAWデバイスの容器の基板材質をセラミックなどを用い、図8の様にセラミック基板上に導電性の金属メタライズ層を容器の内面の底板と側面に形成して、加えてろう材や半田や導電性接着剤といった導電性の封止材を用いて、リッドと呼ばれる金属製の蓋を搭載してSAWデバイスの容器を封止するのが一般的であった。
【0004】
即ち、従来の方法ではSAWデバイスの内部に搭載される素子の上面と側面、及び下面の3方向を導電性の材料で囲うことでシールドすると同時に、SAWデバイスの容器と蓋との接合に導電性の封止材を用いて封止を行っていた。
【0005】
従来のSAWデバイスの構成を図8に示す。図8のように、従来のSAWデバイスにおいては、SAWデバイスの内部に搭載される素子1の特性に影響を与える高周波ノイズの低減の手段として、SAWデバイスの上面と側面、及び下面を導電性の材料を用いてシールドする構成となっていた。即ち図8において、SAWデバイス内部の素子1の上面と、容器の側面、及び下面を導電性の材料を用いてシールドする為に、SAWデバイスの容器2の基板材質がセラミックの場合、図8の様にセラミック基板上に導電性の金属メタライズ層6によって内面の底板と側面を形成して、さらにろう材や半田や導電性接着剤といった導電性の封止材5を用いて、リッドと呼ばれる金属製の蓋3を搭載してSAWデバイスの容器2を封止するのが一般的であった。
【発明が解決しようとする課題】
しかしながら近年、電子部品は搭載して使用される機器の小型化に伴って、極めて急激なその容器形状の外形サイズの小型化、及び低背化の市場からの要求がある。
【0006】
先に述べたような、従来のSAWデバイスの構造においては、容器の底板や側面、及び蓋には金属のリッドを用いるなどして、内部の素子の全方向を導電性の材料で囲んだシールド構造とする必要があった。加えてこの従来の構造においては、上面のシールドの為に容器の封止面と蓋が導電性の材料であったがために、使用出来る封止材にも制約があり、封止もコストの高い封止材を使用する必要があり、結果的に総体として原価的にコストを下げるのに限界があった。
【0007】
本発明は、以上の問題を解決し、容器の部分が従来のセラミック製にくらべてコスト的に安価なプラスチックといった素材を使用することが出来、かつ金属といった導電性材料から成る蓋を必要とせず、安価な非導電性の蓋を使用して、封止材を導電性の材料に制約されない、従来と比較して安価なSAWデバイスのパッケージ構造を提供するものである。
【0008】
【本発明の実施の形態】
以下、添付の図面に従がってこの発明の実施例を説明する。なお各図においての同一の符号は同じ対象を示すものとする。
【0009】
図1はSAWデバイス内部の素子の上面と下面をシールドした場合の耐高周波ノイズ特性図である。図1から図3において丸のついた矢印で示すレベルをノイズフロアレベルと呼ぶ。図1でノイズフロアレベルは約75dBとなっている。 図2は同じくSAWデバイス内部の素子の下面のみをシールドした場合の耐高周波ノイズ特性図である。高周波ノイズによりノイズフロアレベルが図1に比べて上昇し約60dBと悪化している。図3は同様にSAWデバイス内部の素子の下面及び側面をシールドした場合の耐高周波ノイズ特性図である。以上の結果から、素子の下面および側面のみをシールドすることによって図1と同等のノイズフロアレベル約75dBが得られていることが判る。図1、図2と比較して図3では耐高周波ノイズ特性を測定したサンプル数が復数ではないように示されているが、実際には図1と同等の耐高周波ノイズ特性が、素子の下面および側面のみをシールドする条件で、複数のサンプル測定においても得られている。
【0010】
以上の結果より、SAWデバイス内部の素子の側面をシールドした場合のシールド効果が高く、従がって下面及び側面のみをシールドすることによって、従来のSAWデバイスと同等の耐高周波ノイズ特性が得られることが判った。
【0011】
図4から図7は、本発明の実施例を示した図である。いずれもSAWデバイス内部の素子1の側面及び下面を導電性の金属によりシールドした実施例である。
【0012】
図4は素子1が搭載されるSAWデバイス容器2の内面の側面及び下面に導電性金属層6を形成した構造である。図4においてワイヤー4を経て、素子1と容器2の外部表面に構成される、図には示されていないがSAWデバイスの外部端子とが電気的に接続される。図4から、図7に至る本発明の実施例において、容器2を封止する封止材7は従来のように、導電性の材料である必要はなく、従がって蓋8は容器2と導電性を必要としない接合を成す。
【0013】
言い換えれば、素子1の上面をシールドすることを必要としない本発明により、封止材7は導電性の材料であることに制約されることがなく、また蓋8は従来のように高価な金属製のリッドである必要がなく、例えばプラスチックやセラミックといった材料で構成することが可能となる。
【0014】
図5は本発明の別の実施例である。容器2の内面の下面と容器2の内面の側面内部に導電性金属層6をインサート成形したものである。図6及び図7も同様に、本発明の別の実施例であり図6では容器2の内面の下面及び側面に導電性金属層6を形成した例であり、図7は容器2の内部でかつ素子1の下面及び側面に導電性金属層6または導電性金属板6を形成した例である。図6及び図7において素子は図中に丸で描かれているバンプ9を経て、図には示していないがSAWデバイスの外部入出力端子RFINあるいはRFOUT端子に電気的に接続する構成と成っている。これら本発明の実施例における素子1の下面及び側面をシールドする導電性金属層6または導電性金属板6は、セラミック上に多層の金属メタライズ層を形成したり、プラスチック上に蒸着により金属膜を形成したり、またはプラスチック製の容器の中に埋設する導電性金属板6により構成される。また導電性金属層と導電性金属板はひとつのパッケージにおいて併用しても何ら構わない。
【0015】
【発明の効果】
本発明により、容器の材料がプラスチックまたはセラミックといった材料で構成され内部に導電性金属板をインサート成形したり、導電性金属層を形成したコスト的に安価なSAWデバイスの容器の材料が使用でき、加えて上面をシールドする為の金属製のリッドといった導電性材料から成るコスト的に高い蓋を必要とせず、非導電性の蓋を使用することにより封止材が同じくコスト的に高い導電性材料を使用することに制約されず、プラスチックまたはセラミックといった材料で構成された蓋を使用した、結果としてコスト的に安価なSAWデバイスのパッケージ構造を実現することが出来た。
【図面の簡単な説明】
【図1】従来のSAWデバイスの耐高周波ノイズ特性を示す図である。
【図2】SAWデバイス内部の素子の下面のみをシールドした場合の耐高周波ノイズ特性を示す図である。
【図3】SAWデバイス内部の素子の下面及び側面をシールドした場合の耐高周波ノイズ特性を示す図である。
【図4】本発明であるSAWデバイス内部の素子の下面及び側面をシールドした、側面からみたパッケージ断面図である。
【図5】本発明の別の実施例であるSAWデバイス内部の素子の下面及び側面をシールドした、側面からみたパッケージ断面図である。
【図6】本発明の別の実施例であるSAWデバイス内部の素子の下面及び側面をシールドした、側面からみたパッケージ断面図である。
【図7】本発明の別の実施例であるSAWデバイス内部の素子の下面及び側面をシールドした、側面からみたパッケージ断面図である。
【図8】従来のSAWデバイスのパッケージを側面からみた断面図である
【符号の説明】
1 素子
2 SAWデバイスの容器
3 金属製の蓋
4 ワイヤー
5 導電性の封止材
6 導電性金属層または導電性金属板
7 非導電性の封止材
8 非導電性材質の蓋
9 バンプ
[0001]
[Field of the Invention]
The present invention relates to a SAW device, and more particularly to a SAW device package structure that provides an effective new shield structure for elements mounted inside the SAW device.
[Prior art]
[0002]
In a conventional SAW device, as a means for reducing high-frequency noise that affects the characteristics of elements mounted inside the SAW device, a conductive material is used for the upper surface, side surface, and lower surface of the SAW device as shown in FIG. It used to be shielded.
[0003]
Therefore, in order to shield the upper surface, side surface, and lower surface of the SAW device with a conductive material, conventionally, the substrate material of the container of the SAW device is ceramic or the like, as shown in FIG. A conductive metal metallization layer is formed on the bottom plate and side surfaces of the inner surface of the container, and a metal lid called a lid is mounted using a conductive sealing material such as brazing material, solder, or conductive adhesive. In general, the container of the SAW device is sealed.
[0004]
In other words, in the conventional method, the upper surface, the side surface, and the lower surface of the element mounted inside the SAW device are shielded by enclosing the three directions with the conductive material, and at the same time, the conductive material is used for joining the container and the lid of the SAW device. Sealing was performed using this sealing material.
[0005]
The configuration of a conventional SAW device is shown in FIG. As shown in FIG. 8, in the conventional SAW device, the upper surface, the side surface, and the lower surface of the SAW device are made conductive as means for reducing high-frequency noise that affects the characteristics of the element 1 mounted inside the SAW device. It was the structure which shields using material. That is, in FIG. 8, in order to shield the upper surface of the element 1 inside the SAW device and the side and lower surfaces of the container with a conductive material, the substrate material of the SAW device container 2 is ceramic. In the same manner, the bottom plate and the side surface of the inner surface are formed on the ceramic substrate by the conductive metal metallization layer 6, and the conductive sealing material 5 such as brazing material, solder, or conductive adhesive is used to form a metal called a lid. It was common to seal the container 2 of the SAW device by mounting a lid 3 made of the product.
[Problems to be solved by the invention]
However, in recent years, with the miniaturization of equipment used for mounting electronic components, there is a very rapid demand from the market for the reduction in the outer shape of the container shape and the reduction in height.
[0006]
In the structure of the conventional SAW device as described above, a shield in which all directions of internal elements are surrounded by a conductive material, such as using a metal lid for the bottom plate, side surface, and lid of the container. It was necessary to have a structure. In addition, in this conventional structure, the sealing surface of the container and the lid are made of a conductive material for shielding the upper surface, so there are restrictions on the sealing material that can be used, and sealing is also costly. It is necessary to use a high sealing material, and as a result, there is a limit in reducing the cost as a whole.
[0007]
The present invention solves the above problems, and can use a material such as plastic whose container portion is less expensive than a conventional ceramic, and does not require a lid made of a conductive material such as metal. The present invention provides a package structure for a SAW device that is inexpensive compared to the prior art and uses an inexpensive non-conductive lid and the sealing material is not limited to a conductive material.
[0008]
[Embodiments of the Invention]
Embodiments of the present invention will be described below with reference to the accompanying drawings. In addition, the same code | symbol in each figure shall show the same object.
[0009]
FIG. 1 is a high-frequency noise resistance diagram when the upper and lower surfaces of the elements inside the SAW device are shielded. A level indicated by a circled arrow in FIGS. 1 to 3 is called a noise floor level. In FIG. 1, the noise floor level is about 75 dB. FIG. 2 is a high-frequency noise characteristic diagram when only the lower surface of the element inside the SAW device is shielded. The noise floor level rises compared to FIG. 1 due to the high frequency noise, and deteriorates to about 60 dB. FIG. 3 is a graph showing high-frequency noise resistance when the lower and side surfaces of the elements inside the SAW device are similarly shielded. From the above results, it can be seen that a noise floor level of about 75 dB equivalent to that in FIG. 1 is obtained by shielding only the lower and side surfaces of the element. Compared to FIGS. 1 and 2, FIG. 3 shows that the number of samples for which high-frequency noise resistance is measured is not a reciprocal, but actually the high-frequency noise resistance equivalent to FIG. It is also obtained in a plurality of sample measurements under the condition that only the lower and side surfaces are shielded.
[0010]
From the above results, the shielding effect is high when the side surfaces of the elements inside the SAW device are shielded. Accordingly, by shielding only the lower surface and side surfaces, high-frequency noise resistance equivalent to that of the conventional SAW device can be obtained. I found out.
[0011]
4 to 7 are diagrams showing an embodiment of the present invention. Both are examples in which the side surface and the lower surface of the element 1 inside the SAW device are shielded by a conductive metal.
[0012]
FIG. 4 shows a structure in which a conductive metal layer 6 is formed on the side surface and the bottom surface of the inner surface of the SAW device container 2 on which the element 1 is mounted. In FIG. 4, the element 1 and the external terminal of the SAW device (not shown in the figure), which are configured on the outer surface of the container 2, are electrically connected via the wire 4. In the embodiment of the present invention from FIG. 4 to FIG. 7, the sealing material 7 for sealing the container 2 does not need to be a conductive material as in the prior art, and therefore the lid 8 is the container 2. And a joint that does not require electrical conductivity.
[0013]
In other words, according to the present invention that does not require the upper surface of the element 1 to be shielded, the sealing material 7 is not restricted to be a conductive material, and the lid 8 is an expensive metal as in the prior art. It is not necessary to be a lid made of metal, and can be made of a material such as plastic or ceramic.
[0014]
FIG. 5 shows another embodiment of the present invention. The conductive metal layer 6 is insert-molded on the lower surface of the inner surface of the container 2 and the inner surface of the inner surface of the container 2. 6 and 7 also show another embodiment of the present invention. FIG. 6 shows an example in which the conductive metal layer 6 is formed on the lower surface and the side surface of the inner surface of the container 2, and FIG. In this example, the conductive metal layer 6 or the conductive metal plate 6 is formed on the lower surface and side surfaces of the element 1. In FIG. 6 and FIG. 7, the element is electrically connected to the external input / output terminal RF IN or RF OUT terminal of the SAW device, though not shown in the figure, via bumps 9 drawn in circles in the figure. It is made up. In the embodiment of the present invention, the conductive metal layer 6 or the conductive metal plate 6 that shields the lower surface and the side surface of the element 1 is formed by forming a multilayer metal metallized layer on the ceramic or depositing a metal film on the plastic by vapor deposition. The conductive metal plate 6 is formed or embedded in a plastic container. The conductive metal layer and the conductive metal plate may be used in combination in one package.
[0015]
【The invention's effect】
According to the present invention, the material of the container is made of a material such as plastic or ceramic, and a conductive metal plate is insert-molded therein, or the material of the container of the SAW device, which is inexpensive in cost, in which a conductive metal layer is formed can be used. In addition, there is no need for a costly lid made of a conductive material such as a metal lid for shielding the upper surface, and by using a non-conductive lid, the sealing material is also costly conductive. As a result, it was possible to realize a SAW device package structure that is inexpensive in terms of cost, using a lid made of a material such as plastic or ceramic.
[Brief description of the drawings]
FIG. 1 is a diagram showing high-frequency noise resistance characteristics of a conventional SAW device.
FIG. 2 is a diagram showing high-frequency noise resistance characteristics when only the lower surface of the element inside the SAW device is shielded.
FIG. 3 is a diagram showing high-frequency noise resistance when the lower surface and side surfaces of elements inside the SAW device are shielded.
FIG. 4 is a package cross-sectional view seen from the side, with the lower and side surfaces of the elements inside the SAW device according to the present invention shielded.
FIG. 5 is a package cross-sectional view as seen from the side, with the lower and side surfaces of the elements inside the SAW device according to another embodiment of the present invention shielded.
FIG. 6 is a package cross-sectional view as seen from the side, with the lower and side surfaces of the elements inside the SAW device according to another embodiment of the present invention shielded.
FIG. 7 is a cross-sectional view of a package as seen from the side, with the lower and side surfaces of elements inside the SAW device according to another embodiment of the present invention shielded.
FIG. 8 is a sectional view of a conventional SAW device package as viewed from the side.
DESCRIPTION OF SYMBOLS 1 Element 2 SAW device container 3 Metal lid 4 Wire 5 Conductive sealing material 6 Conductive metal layer or conductive metal plate 7 Nonconductive sealant 8 Nonconductive lid 9 Bump

Claims (1)

SAWデバイスにおいて、該SAWデバイス容器がプラスチックで構成され、該SAWデバイス容器の内部に埋設され該SAWデバイスの内部に搭載される素子の側面及び下面をシールドする導電板を具備することを特徴とするSAWデバイスのパッケージ構造。      In the SAW device, the SAW device container is made of plastic, and includes a conductive plate that is embedded in the SAW device container and shields a side surface and a lower surface of an element mounted in the SAW device. Package structure of SAW device.
JP2001366032A 2001-11-30 2001-11-30 Package structure of SAW device Expired - Fee Related JP3910423B2 (en)

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JP3910423B2 true JP3910423B2 (en) 2007-04-25

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JP2020115616A (en) * 2019-01-17 2020-07-30 太陽誘電株式会社 Filter and multiplexer

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