JP3900069B2 - 3-axis moving table - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a three-axial moving table and a uniaxial moving table that can move a working head at a high speed in a complicated path. <P>SOLUTION: The three-axial moving table used for a paste coating device which coats a substrate 3 with paste for drawing by moving a coating head 5 in respective axial directions X, Y, and Z is constituted by fixing and arranging all of an X-axial motor 11, a Y-axial motor 21, and a Z-axial motor 31 as driving sources for the respective axes on a base member 10, and movable parts which move in the respective axial directions are reduced in mass as much as possible. Then the uniaxial moving table which moves a spline axis 15 in the X-axial direction is configured to drive a slider 13 which is slidable along a guide rail 12 in parallel by a belt 18 driven by the X-axial motor 11. Consequently, the three-axial moving table and uniaxial moving table are realized which are fast and have superior response. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention is, for example, relates to a three-axis moving table used in the electronic component mounting apparatus such as paste coating apparatus for applying a paste for chip bonded to the substrate.
[0002]
[Prior art]
In a die bonding process for manufacturing a semiconductor device, a paste for bonding a semiconductor chip to a substrate such as a lead frame is applied. The paste is applied by guiding the paste discharged from the dispenser to the application nozzle and applying it in the application area of the substrate. As one of the coating methods, drawing coating is known in which paste coating is performed by drawing a coating line with a coating nozzle. In this drawing application, an application nozzle as a work head is moved in accordance with a paste application pattern set according to the shape and size of the chip to be bonded.
[0003]
As a mechanism for moving the coating nozzle, a three-axis movement table that performs three-dimensional movement by combining three uniaxial movement tables has been conventionally used. As a uniaxial moving table used in such a three-axis moving table, when the movable part that is driven and moved has an elongated shape in a direction orthogonal to the moving axis direction, it is necessary to ensure smooth driving, so that it can be moved. There is known a configuration in which the part is driven from both sides by two servo motors (see, for example, Patent Document 1).
[0004]
[Patent Literature]
Japanese Patent Laid-Open No. 2000-117171
[Problems to be solved by the invention]
However, since the single-axis moving table having the above-described configuration uses two motors, the drive mechanism is complicated and it is difficult to make the single-axis table itself compact. Further, when a three-axis moving table is configured, it is necessary to incorporate another one-axis moving table into one movable part, so that the weight of the movable part inevitably increases and high-speed movement is difficult. I was trying. As a result, it is difficult to draw and apply a complicated application pattern at high speed with a three-axis moving table configured by combining such one-axis tables.
[0006]
Accordingly, the present invention aims at providing a three-axis moving table that can move the working head a complex path at high speed.
[0007]
[Means for Solving the Problems]
The three-axis moving table according to claim 1 is a three-axis moving table for moving a work head by a moving mechanism in the electronic component mounting apparatus, and the moving mechanism is movable in a first direction with a first moving stroke. A first movable part attached to the first movable part, and the first movable part moves in the first direction together with the first movable part, and is longer than the first movement stroke in the second direction perpendicular to the first direction with respect to the first movable part. A second movable part that is movably attached with two movement strokes, and moves in the first direction and the second direction together with the second movable part, and moves in the first direction and the second direction with respect to the second movable part. A third movable part that is movably mounted in a direction orthogonal to each other and holds the working head; a first movement mechanism that is driven by a first drive source to move the first movable part in the first direction; 2 drive sources Therefore, the second movement mechanism that is driven to move the second movable part in the second direction, the third movement mechanism that is driven by a third drive source to move the third movable part in the third direction, and And a base member to which the first drive source, the second drive source, and the third drive source are fixedly attached, and the first moving mechanism is a parallel region that performs linear reciprocation in the first direction, and is a first movable An endless belt disposed in a circular path having two parallel regions located on both sides of the unit and driven forward and reverse by the first drive source, and a connecting unit that connects the endless belt to the first movable unit in the parallel region And have.
[0009]
According to the present invention, an endless belt disposed on the base member through a circular path having two parallel regions that are parallel regions that perform linear reciprocation in the first direction and that are located on both sides of the first movable part; Three-axis movement with high speed and excellent responsiveness by having a motor that is arranged on the base member and drives the endless belt forward and reverse and a connecting part that connects the endless belt to the first movable part in the parallel region A table can be realized.
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described with reference to the drawings. 1 is a plan view of a paste coating apparatus according to an embodiment of the present invention, FIG. 2 is a partial plan view of a paste coating apparatus according to an embodiment of the present invention, and FIG. 3 is a paste coating apparatus according to an embodiment of the present invention. FIG. 4 and FIG. 5 are partial cross-sectional views of a paste coating apparatus according to an embodiment of the present invention.
[0011]
First, with reference to FIGS. 1 and 2, the configuration of the paste application apparatus 1 in which the triaxial moving table is incorporated will be described. In FIG. 1, a paste coating apparatus 1 which is an electronic component mounting apparatus includes a transport conveyor 2 disposed in the X direction (first direction), and the transport conveyor 2 transports a substrate 3 in the direction of arrow a. . The paste coating apparatus 1 applies a chip bonding paste 4 to a substrate 3 that is transported and positioned by a transport conveyor 2.
[0012]
Paste application to the substrate 3 is performed by the application nozzle 6 held in the plate-like nozzle holding portion 5a of the application head 5 (working head), and from a paste discharge mechanism (not shown) connected to the application nozzle 6. By feeding the paste, a predetermined amount of paste is discharged from the coating nozzle 6 onto the coating surface of the substrate 3. At this time, the paste 4 is applied to the substrate 3 in a predetermined drawing pattern by moving the application head 5 along the predetermined path with respect to the substrate 3.
[0013]
Next, the movement mechanism of the three-axis movement table that moves the coating head 5 to perform a predetermined drawing coating operation in the paste coating apparatus will be described. In FIG. 1, the base member 10 is provided with a first movement mechanism, a second movement mechanism, and a third movement mechanism for moving the coating head 5 in the X direction, the Y direction, and the Z direction, respectively. The base member 10 is provided with a cutout portion 10a in which the width range of the conveyor 2 is cut out, and the coating head 5 is drawn by moving horizontally in the X and Y directions within the cutout portion 10a. Apply.
[0014]
First, the first movable part and the first moving mechanism will be described. The first moving mechanism is driven by the first drive source and moves the first movable part that is movably attached in the first direction with the first movement stroke in the X direction (first direction). Guide rails 12 are disposed in the X direction on the upper surface of the base member 10 along both ends in the X direction of the notch 10a.
[0015]
A slider 13 is slidably fitted to the guide rail 12 with a first movement stroke S <b> 1, and a bearing block 14 is fixed to the upper surface of the slider 13. The two left and right bearing blocks 14 support both ends of the spline shaft 15, and the spline shaft 15 is inserted in the Y direction through the moving block 16 on which the coating head 5 is mounted.
[0016]
Here, the moving block 16 is slidable in the X direction along a guide shaft 25 inserted therethrough. Therefore, when the spline shaft 15 reciprocates in the X direction along the guide rail 12 and the slider 13, the coating head 5 reciprocates in the X direction (see arrow d in FIG. 2). In the above configuration, the bearing block 14 and the spline shaft 15 serve as a first movable portion that is movably attached in the first direction with the first movement stroke S1.
[0017]
The base member 10 is located on the outer side of the guide rail 12 on one side (right side in the example shown in FIG. 1), and the X-axis motor 11 as the first driving source penetrates the output shaft from the lower surface side to the upper surface. It is arranged vertically in the posture. A drive pulley 17a is coupled to the output shaft of the X-axis motor 11, and a driven pulley 17b is disposed at a substantially symmetrical position across the drive pulley 17a and the notch 10a.
[0018]
A metal belt 18 (endless belt) is tuned to the driving pulley 17a and the driven pulley 17b. The belt 18 is guided by four idlers 17c, and is arranged in a substantially U shape around the notch 10a. Here, the idler 17c is located on both sides of the first movable part (the bearing block 14 and the spline shaft 15) between the drive pulley 17a and the longitudinally moving pulley 17b, and each linearly reciprocates in the first direction. It arrange | positions so that the parallel area | region which performs a motion may be formed. That is, the belt 18 is disposed in a parallel path that performs linear reciprocation in the first direction and has two parallel areas positioned on both sides of the first movable portion, and is driven forward and reverse by the first drive source. Has become an endless belt.
[0019]
The two sliders 13 on the left and right are connected to the belt 18 via belt connecting members 19a and 19b in parallel regions located on the outer sides thereof. The belt connecting members 19a and 19b are connecting portions that connect the endless belt to the first movable portion in the parallel region. Here, the left slider 13 is connected to the inner belt 18, and the right slider 13 is connected to the outer belt 18.
[0020]
Therefore, by rotating the X-axis motor 11 forward and backward to drive the belt 18 forward and backward, the slider 13 connected to the belt 18 performs linear reciprocation (see arrow b) in the X direction in the parallel region described above. In this linear reciprocating motion, when the elongated movable portion is driven in a direction orthogonal to the longitudinal direction, such as the spline shaft 15 disposed across the notch portion 10a, the first configuration configured as described above is used. By using the moving mechanism, the long and narrow movable part can be supported in a so-called manner, and the driving force in the same direction can be transmitted to both ends of the spline shaft 15, thereby realizing a stable linear operation. In this case, it is desirable to employ a metal belt that has a small lengthwise extension as the belt 18, so that the displacement of the left and right ends of the spline shaft 15 can be minimized. Of course, other materials such as resin can be used.
[0021]
Next, a 2nd movable part and a 2nd moving mechanism are demonstrated with reference to FIG.1, FIG.2, FIG.3. FIG. 3 shows an AA cross section of FIG. The second moving mechanism is driven by the second drive source, moves in the first direction together with the first movable portion described above, and is movable in a second direction (Y direction) perpendicular to the first direction with respect to the first movable portion. The second movable part attached to the is moved in the Y direction (second direction).
[0022]
In FIG. 1, the guide rail 22 is arrange | positioned in the Y direction on the upper surface of the base member 10 along the edge part of the notch part 10a. A slider 23 is slidably fitted to the guide rail 22 with a second stroke S <b> 2, and a Y moving block 24 is fixed to the upper surface of the slider 23. The second stroke S2 is determined corresponding to the application range of the substrate 3, and is set longer than the first movement stroke S1.
[0023]
As shown in FIGS. 2 and 3, the guide shaft 25 is fixed to the upper portion of the Y moving block 24. The moving block 16 is slidable in the X direction along the guide shaft 25 and slidable in the Y direction along the spline shaft 15. That is, when the slider 13 and the slider 23 move in the X direction and the Y direction, respectively, the moving block 16 moves simultaneously in the X direction and the Y direction. In the above configuration, the moving block 16 is movable in the second direction perpendicular to the first direction with the second moving stroke S2 longer than the first moving stroke S1 with respect to the spline shaft 15 as the first movable portion. It becomes the 2nd movable part attached to.
[0024]
In FIG. 1, the base member 10 is located at the end of one side (left side in the example shown in FIG. 1) of the notch 10a, and the Y-axis motor 21 as the second drive source has the output shaft from the lower surface side. It is vertically arranged in a posture penetrating the upper surface. A drive pulley 27a is coupled to the output shaft of the Y-axis motor 21, and a driven pulley 27b is disposed at a substantially symmetrical position in the Y direction with respect to the drive pulley 27a.
[0025]
A belt 28 is tuned to the driving pulley 27 a and the driven pulley 27 b, and the slider 23 is connected to the belt 28 via a belt connecting member 29. By rotating the Y-axis motor 21 forward and backward to drive the belt 28 forward and backward, the slider 23 connected to the belt 28 linearly reciprocates in the Y direction (see arrow c). Move in the direction. Therefore, by driving the Y-axis motor 21, the moving block 16 moves in the Y direction. At this time, by simultaneously driving the X-axis motor 11, the moving block 16 simultaneously moves in the X direction and the Y direction.
[0026]
Next, a 3rd movable part and a 3rd moving mechanism are demonstrated with reference to FIGS. 4 and 5 show a BB cross section and a CC cross section of FIG. 1, respectively. The third moving mechanism is driven by the third drive source and moves the third movable part attached to the above-described second movable part so as to be movable in the Z direction in the Z direction (third direction).
[0027]
In FIG. 3, a guide rail 35 is vertically disposed on the front side surface (substrate 3 position side) of the moving block 16, and an elevating member 37 is disposed on the slider 36 slidably fitted to the guide rail 35. Are combined. A nozzle holding portion 5a constituting the coating head 5 is coupled to the lower end portion of the elevating member 37, and the coating nozzle 6 is mounted on the nozzle holding portion 5a. Therefore, the elevating member 37 is a third movable portion that holds the coating head 5 that is a work head.
[0028]
As shown in FIG. 1, the third moving mechanism drives the third movable portion in the Z direction using the Z-axis motor 31 as a third drive source, and includes the first Z transmission unit 32, the spline shaft 15, and the second Z transmission unit 33. The system which drives the raising / lowering member 37 via this is employ | adopted. First, the first Z transmission unit 32 will be described. 4 and 5, a Z-axis motor 31 is disposed in a horizontal posture on a bracket 41 erected on the base member 10, and a disc cam 46 is coupled to an output shaft 31 a of the Z-axis motor 31. ing.
[0029]
A guide rail 42 is vertically disposed on the side surface of the bracket 41, and a Z transmission plate 44 is fixed to a slider 43 slidably fitted to the guide rail 42. A cam follower 45 is mounted on the upper portion of the Z transmission plate 44, and the cam follower 45 is in contact with the lower surface side of the disc cam 46.
[0030]
A substantially L-shaped drive arm 48 is coupled to the spline shaft 15 by a fastening block 49. A cam follower 47 is attached to the tip of the drive arm 48, and the cam follower 47 is in contact with the lower end surface 44 a of the Z transmission plate 44. A spring 51 (tensile spring) is stretched between a spring receiving portion 48 a at the other end of the drive arm 48 and a spring bracket 50 fixed to the slider 13. The spring 51 urges the spring receiving portion 48a in the direction of arrow j, whereby the cam follower 47 is always pressed against the lower end surface 44a.
[0031]
When the Z-axis motor 31 is driven to rotate forward and backward in the above-described configuration to rotate the disk cam 46 forward and backward (arrow g), the Z transmission plate 44 reciprocates in the Z direction according to the cam characteristics of the disk cam 46 (arrow h). ). As a result, the rotational displacement (arrow i) around the spline shaft 15 is transmitted to the drive arm 48 via the cam follower 47 in contact with the lower end surface 44 a, and this rotational displacement is transmitted to the spline shaft 15 via the fastening block 49. Rotate and displace.
[0032]
Here, the spline shaft 15 moves in the X direction along the guide rail 12, but the cam follower 47 keeps contacting the lower end surface 44 a of the Z transmission plate 44 even if the spline shaft 15 moves in the X direction. Thereby, the above-mentioned rotational displacement can be transmitted regardless of the position of the spline shaft 15 in the X direction.
[0033]
Next, the 2nd Z transmission part 33 is demonstrated with reference to FIG. 2, FIG. The spline shaft 15 is inserted through the lower portion of the moving block 16, and the moving block 16 includes a lifting arm member 39 that moves integrally with the moving block 16 in the Y direction on the side surface. The lifting arm member 39 is mounted on the spline shaft 15 via a spool block 40, and the spool block 40 transmits rotation to the spline shaft 15 so as to be slidable in the axial direction.
[0034]
In the integral movement of the elevating arm member 39 with the moving block 16, the moving block 16 simply moves along the spline shaft 15, but the elevating arm member 39 is connected to the spline shaft 15 by the first Z transmission portion 32. The rotational displacement transmitted to is transmitted. Thereby, the rotational displacement from the 1st Z transmission part 32 is transmitted to the raising / lowering arm member 39 irrespective of the position of the movement block 16 in the Y direction.
[0035]
The elevating arm member 39 extends to the side surface of the elevating member 37, and the cam follower 38 attached to the tip of the elevating arm member 39 is in contact with an abutting portion 37 a provided on the elevating member 37. Therefore, when the spline shaft 15 is rotationally displaced (arrow e), the cam follower 38 is displaced in the Z direction (arrow f). As a result, the coating nozzle 6 of the coating head 5 coupled to the lifting member 37 moves up and down with respect to the substrate 3.
[0036]
As described above, the three-axis movement table shown in the present embodiment includes the first movement mechanism, the second movement mechanism, and the third movement mechanism that move the coating head 5 in the X, Y, and Z axial directions. In the configuration, the X-axis motor 11, the Y-axis motor 21, and the Z-axis motor 31 that are the respective drive sources are all fixedly arranged on the base member 10, and the mass of the movable part that moves in the direction of each axis is reduced as much as possible. Yes. Thereby, in the drawing coating operation in which it is necessary to move the coating head 5 along a complicated trajectory, the operation responsiveness can be improved, and high-speed and high-precision drawing coating is realized.
[0037]
In the above-described drawing application, the required stroke in the X direction (first stroke S1) is often smaller than the stroke in the Y direction (second stroke S2) determined based on the substrate width. In such an orthogonal type moving table having greatly different strokes in two orthogonal directions, a moving mechanism as shown in the present embodiment is adopted as the configuration of the single axis moving table that moves in the X direction. The elongated movable part can be stably moved by the driving source, and a lighter and more compact single-axis moving table is realized as compared with the conventional moving mechanism that requires two driving sources.
[0038]
In the present embodiment, an example of a paste application device is shown as a preferable target for which a three-axis movement table is used. However, the present invention is not limited to this, and a lightweight work head such as an electronic component mounting device is used. Any device that requires high-speed operation can be applied.
[0039]
【The invention's effect】
According to the present invention, an endless belt disposed on the base member through a circular path having two parallel regions that are parallel regions that perform linear reciprocation in the first direction and that are located on both sides of the first movable part; Three-axis movement with high speed and excellent responsiveness by having a motor that is arranged on the base member and drives the endless belt forward and reverse and a connecting part that connects the endless belt to the first movable part in the parallel region it is possible to realize a table.
[Brief description of the drawings]
FIG. 1 is a plan view of a paste coating apparatus according to an embodiment of the present invention. FIG. 2 is a partial plan view of a paste coating apparatus according to an embodiment of the present invention. FIG. 4 is a partial sectional view of a paste coating apparatus according to an embodiment of the present invention. FIG. 5 is a partial sectional view of a paste coating apparatus according to an embodiment of the present invention.
DESCRIPTION OF SYMBOLS 1 Paste coating apparatus 3 Substrate 4 Paste 5 Coating head 6 Coating nozzle 10 Base member 11 X-axis motor 15 Spline shaft 16 Moving blocks 18, 28 Belts 19a, 19b, 29 Belt connecting member 21 Y-axis motor 31 Z-axis motor 32 1Z Transmitter 33 Second Z Transmitter 37 Lifting Member

Claims (1)

In the electronic component mounting apparatus, a three-axis movement table for moving a work head by a movement mechanism, the movement mechanism including a first movable portion that is movably attached in a first direction with a first movement stroke; The first movable part moves in the first direction and is movably attached to the first movable part in a second direction that is longer than the first movement stroke in a second direction orthogonal to the first direction. The second movable portion is moved in the first direction and the second direction together with the second movable portion, and is attached to the second movable portion so as to be movable in a direction orthogonal to both the first direction and the second direction. A third movable part that holds the working head; a first moving mechanism that is driven by a first drive source to move the first movable part in the first direction; and a second movable part that is driven by a second drive source. Before A second moving mechanism that moves in the second direction; a third moving mechanism that is driven by a third driving source to move the third movable portion in the third direction; the first driving source, the second driving source, and the second driving source; A base member for fixedly mounting three drive sources;
The first moving mechanism is a parallel region that performs linear reciprocation in the first direction and is arranged in a circular path having two parallel regions located on both sides of the first movable part, and is provided by the first drive source. A three-axis moving table, comprising: an endless belt that is driven forward and backward; and a connecting portion that connects the endless belt to the first movable portion in the parallel region.

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