JP3891161B2 - 電界吸収型光変調器 - Google Patents
電界吸収型光変調器 Download PDFInfo
- Publication number
- JP3891161B2 JP3891161B2 JP2003315712A JP2003315712A JP3891161B2 JP 3891161 B2 JP3891161 B2 JP 3891161B2 JP 2003315712 A JP2003315712 A JP 2003315712A JP 2003315712 A JP2003315712 A JP 2003315712A JP 3891161 B2 JP3891161 B2 JP 3891161B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light
- well layers
- well
- light absorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 66
- 230000031700 light absorption Effects 0.000 claims description 87
- 239000004065 semiconductor Substances 0.000 claims description 44
- 230000008859 change Effects 0.000 claims description 36
- 230000005684 electric field Effects 0.000 claims description 35
- 230000004888 barrier function Effects 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 12
- 238000013459 approach Methods 0.000 claims description 3
- 238000000862 absorption spectrum Methods 0.000 description 36
- 238000010521 absorption reaction Methods 0.000 description 24
- 238000005253 cladding Methods 0.000 description 24
- 238000005424 photoluminescence Methods 0.000 description 5
- 230000005701 quantum confined stark effect Effects 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Images
Landscapes
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Semiconductor Lasers (AREA)
Description
・n型クラッド層3m、13m :SiドープInP
・光ガイド層4m、14m :アンドープGaInAsP
・活性層5mおよび光吸収層15m:アンドープGaInAsP
・光ガイド層6m、16m :アンドープGaInAsP
・p型第1クラッド層7m、17m:ZnドープInP
n型クラッド層3m、13mおよびp型第1クラッド層7m、17mは、活性層5m、光吸収層15mおよび光ガイド層4m、14mよりも低い屈折率を有する。このため、レーザ光は、活性層5m、光吸収層15mおよび光ガイド層4m、14mに閉じ込められる。
Claims (5)
- 光吸収層ならびに前記光吸収層の両側に設けられたp型半導体層およびn型半導体層を備え、前記光吸収層、p型半導体層およびn型半導体層を有するpn接合構造に印可される逆方向電界の変化に応じて、0〜100℃の温度範囲にわたって前記光吸収層中の被変調光の強度を変調する電界吸収型光変調器であって、
前記被変調光は、1.260〜1.625μmの波長を有しており、
前記光吸収層は、交互に積層された複数の井戸層および複数の障壁層を含んでおり、
前記複数の井戸層は、互いに異なるバンドギャップエネルギーを有する第1および第2の井戸層を含んでおり、
前記第1井戸層と前記第2井戸層の間に前記障壁層が配置されており、
前記第1および第2井戸層は、InGaAsPまたはInPから構成されており、
前記第1および第2井戸層のバンドギャップエネルギーの差が35meV以下である
電界吸収型光変調器。 - 前記光吸収層の厚みを実質的に2等分する中央面に最も近い前記井戸層が前記複数の井戸層のなかで最大の屈折率を有している、請求項1に記載の電界吸収型光変調器。
- 前記複数の井戸層は、前記光吸収層の厚みを実質的に2等分する中央面に近いほど高い屈折率を有している、請求項1または2に記載の電界吸収型光変調器。
- 前記複数の井戸層は、偶数個の前記第1井戸層および偶数個の前記第2井戸層を含んでおり、
偶数個の前記第1井戸層は、前記中央面に対して対称に配置されており、
偶数個の前記第2井戸層は、前記中央面に対して対称に配置されている
請求項2または3に記載の電界吸収型光変調器。 - 半導体レーザ素子と同一の基板上に集積された請求項1〜4のいずれかに記載の電界吸収型光変調器であって、
前記被変調光は、前記半導体レーザ素子の出力光であり、
前記光吸収層は、前記半導体レーザ素子の出力光を受け取るように配置されている
請求項1〜4のいずれかに記載の電界吸収型光変調器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003315712A JP3891161B2 (ja) | 2003-09-08 | 2003-09-08 | 電界吸収型光変調器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003315712A JP3891161B2 (ja) | 2003-09-08 | 2003-09-08 | 電界吸収型光変調器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005084333A JP2005084333A (ja) | 2005-03-31 |
JP3891161B2 true JP3891161B2 (ja) | 2007-03-14 |
Family
ID=34415890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003315712A Expired - Lifetime JP3891161B2 (ja) | 2003-09-08 | 2003-09-08 | 電界吸収型光変調器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3891161B2 (ja) |
-
2003
- 2003-09-08 JP JP2003315712A patent/JP3891161B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2005084333A (ja) | 2005-03-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7809038B2 (en) | Electro-absorption optical modulator integrated with a laser to produce high speed, uncooled, long distance, low power, 1550 nm optical communication device with optimized parameters | |
US7859745B2 (en) | Semiconductor optical amplifying device, semiconductor optical amplifying system and semiconductor optical integrated element | |
US8787420B2 (en) | Integrated semiconductor laser element | |
JP3238760B2 (ja) | 密結合超格子レーザ−変調器一体化素子 | |
JP2004536459A (ja) | 波長分割多重光波長変換器 | |
JP2019008179A (ja) | 半導体光素子 | |
JP6939411B2 (ja) | 半導体光素子 | |
WO2024069755A1 (ja) | 光半導体装置 | |
US20220360038A1 (en) | Systems and methods for external modulation of a laser | |
JP3891161B2 (ja) | 電界吸収型光変調器 | |
JP2006203100A (ja) | 半導体レーザおよび光送信器モジュール | |
JP2014165377A (ja) | 集積型半導体レーザ素子、および、半導体レーザ装置 | |
JP4550371B2 (ja) | 電界吸収型光変調器、電界吸収型光変調器付き半導体集積素子、それらを用いたモジュール及び電界吸収型光変調器付き半導体集積素子の製造方法 | |
US20210184421A1 (en) | Semiconductor Optical Element | |
JP4117778B2 (ja) | 半導体光素子 | |
JP2007208062A (ja) | 半導体レーザ素子 | |
JP2001013472A (ja) | 光半導体素子および光通信装置 | |
JP3951935B2 (ja) | 電界吸収型光変調器および光半導体素子 | |
JPH10228005A (ja) | 電界吸収型光変調器と光変調器集積型半導体レーザダイオード | |
JP4103490B2 (ja) | 光変調器 | |
JP2006108278A (ja) | 半導体レーザ装置 | |
US8654430B2 (en) | Electro-absorption modulator and optical semiconductor device | |
WO2023228346A1 (ja) | 半導体光集積素子および製造方法 | |
JP6320138B2 (ja) | 電界吸収型半導体光変調器 | |
JP2002204039A (ja) | 半導体発光素子と半導体発光装置及び半導体発光素子の変調方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050620 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20051025 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20051130 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20061114 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20061127 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 3891161 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101215 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101215 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111215 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111215 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121215 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121215 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131215 Year of fee payment: 7 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |