JP3877383B2 - Method for manufacturing flat display device, display panel transport instrument therefor, and method for manufacturing electronic device or optical device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method of manufacturing a flat display device used for a notebook PC, a TV monitor, and the like, and a display panel transport device therefor.
[0002]
[Prior art]
A method and apparatus for manufacturing a conventional flat display device will be described with reference to FIGS.
[0003]
A display panel that forms a display area of a flat display device includes a plurality of pixels that can adjust the degree of light transmission or reflection between two insulating substrates in accordance with external control. An electrode region, a color filter, and the like are formed on one surface of each insulating substrate by a number of processing steps, and then a cell structure, that is, a display panel, sandwiching a liquid crystal substance or the like in a sandwich shape is formed. Next, a drive circuit and the like are electrically connected to the edge of the display panel through a number of processes.
[0004]
Thus, in order to manufacture a flat display device, the display panel and the insulating substrate must be processed in a number of processing steps and process devices.
[0005]
First, alignment of a display panel or an insulating substrate and a processing unit of a process apparatus in the conventional technique will be described with reference to conceptual diagrams of FIGS. In the following description, the display panel is a liquid crystal cell.
[0006]
FIG. 11 shows the coarse alignment. The liquid crystal cell 101 is transported on the roller conveyor 103 or is carried by the operator's hand and is carried onto the processing stage 134 of the processing apparatus. At this time, the liquid crystal cell 101 is guided by the guide roller 132 and It is pushed in until it comes into contact with the guide pin 133. Coarse alignment is performed by such abutment. The alignment accuracy is about 0.3 mm or coarser. Even if the size of the guide pin and the accuracy of the abutment are improved, the dimensional accuracy of the glass substrate used in the liquid crystal cell 101 varies, and further, the positional accuracy between the edge of the glass substrate and the electrode terminal varies. This is because it is difficult to perform alignment with higher accuracy. Further, if the guide pin 133 is made of a relatively rigid material in order to ensure dimensional accuracy, the edge of the glass substrate may be damaged at the time of abutment.
[0007]
FIG. 12 shows the precise alignment. Precise alignment is performed by an image processing apparatus including a CCD camera 106 and an NC (numerical control) table 103.
[0008]
A liquid crystal cell 101 having alignment marks 111 at the corners of a substantially rectangular shape is placed on the NC table. When the alignment mark 111 enters the field of view of the CCD camera 106, the image processing control device calculates the direction and distance of the positional deviation, and calculates the motion of the NC table 103 necessary for alignment. Accordingly, the NC table 103 is driven by the motor driver 130 and the liquid crystal cell 101 is aligned. When two CCD cameras 106 are used, precise alignment is possible, and usually an accuracy of about 0.01 to 0.02 mm (10 to 20 μm), even in the roughest case, about 0.05 mm (50 μm) is easy. can get. Such precise alignment is required, for example, in the TCP temporary press-bonding process described later.
[0009]
In the conventional technology, there is no simple alignment method suitable for a case where the required accuracy is 0.05 mm to 0.3 mm (for example, an ACF heating process described later), and in this case as well, an expensive image processing apparatus is used. The capital investment was excessive and it was not easy to change the equipment.
[0010]
Next, the flow of the manufacturing process of the flat display device in the prior art will be described by taking as an example a series of steps for mounting a TCP (also called Tape Carrier Package, TAB) on the liquid crystal cell. FIG. 13 shows a process diagram.
[0011]
The TCP is configured by mounting a driving IC for supplying a driving voltage or the like to a liquid crystal cell on a flexible substrate.
[0012]
As shown in the figure, the process of attaching TCP to the liquid crystal cell consists of five processes: ACF (Anisotropic Conductive Film) bonding, ACF heating, TCP temporary pressure bonding, TCP main pressure bonding, and PCB (printed circuit board) soldering. The above rough alignment is performed. Since the transfer to the next apparatus between processes is carried by a rubber roller or a manual operation by a liquid crystal cell alone, it has been necessary to repeatedly perform an alignment operation.
[0013]
The positioning operation in the TCP temporary press-bonding process that requires precise positioning in the above five processes also has the following problems.
[0014]
As shown in FIG. 14, the liquid crystal cell 101 is carried onto the cell mounting table 163 of the temporary pressure bonding apparatus, and at this time, rough alignment is performed. The liquid crystal cell 101 is mounted so as to protrude from the cell mounting table 163 to the front. Two CCD cameras are installed below the shelf-like portion, and a light source 160 and two monitor displays 161 are provided behind the cell mounting table 163.
[0015]
First, if the terminals at both ends of the TCP mounting position on the edge of the liquid crystal cell 101 are in the field of view of the two CCD cameras, respectively, it is confirmed by the monitor display 161, and if it does not enter the field of view, coarse alignment is repeated. Become. Next, both end terminals are adjusted by the pitch feed plate 162 provided on the cell mounting table 163 so as to be near the center of the visual field of each CCD camera.
[0016]
The TCP is set at the front end of a TCP mounting arm 113 that is rotatably mounted on the TCP NC table, and is carried to the edge of the liquid crystal cell 101 by the rotation. Next, both ends of the TCP terminal portion and both end terminals of the mounting position of the liquid crystal cell are precisely aligned by movement of the NC table for TCP according to a command from the image processing apparatus. And after confirming precise alignment with a monitor display, a pressure head is applied to a TCP crimping | compression-bonding part.
[0017]
In such an alignment method, each liquid crystal cell 101 is highly functional with an accuracy of about 0.01 to 0.02 mm (10 to 20 μm) after the alignment of about 0.3 mm by the rough alignment. Since the alignment is further performed by this apparatus, the processing time becomes longer. Moreover, it is necessary to take a large field of view of the CCD camera of the precise alignment device.
[0018]
[Problems to be solved by the invention]
In the conventional technique as described above, since the rough alignment between the display panel and the processing unit of the process apparatus must be repeatedly performed in each process, the process steps and the process time increase accordingly.
[0019]
Even when precise alignment is not necessary, a complicated and expensive apparatus such as an image processing apparatus is used, so that the equipment cost related to alignment is excessive. If the image processing apparatus stops due to some trouble, the flow of the manufacturing process stops during this time.
[0020]
In addition, since the rough alignment is performed by abutting the outer edge of the display panel and the guide pin, the edge of the display panel may be damaged, especially in the case of a glass display panel. Increases costs. Further, when the width of the substrate is changed, it is necessary to stop the conveyance and change the guide roller or its width setting, which hinders improvement in production efficiency.
[0021]
In view of the above problems, the present invention provides a manufacturing method and apparatus capable of improving the manufacturing efficiency of a flat display device and reducing the capital investment. Further, the present invention provides a product that can be continuously manufactured even if the specifications such as the width of the substrate change.
[0022]
The present invention is also capable of safely and easily transporting a display panel or its electrode substrate, and capable of reproducing a predetermined positional relationship related to the alignment state by fitting or contacting with a process device. Is also provided.
[0023]
[Means for Solving the Problems]
According to the method for manufacturing a flat display device according to claim 1, in the method for manufacturing a flat display device in which the electrode substrate needs to be transferred between the process devices in a series of steps including at least two steps, the electrode substrate is transferred. The electrode substrate is mounted in a removable and non-displaceable manner, and in this mounted state, the electrode substrate is transported between the process devices and processed by the process device.
[0024]
With the above configuration, the electrode substrate can be easily transferred, and the process apparatus can be easily carried into and from the electrode substrate processing table. Further, it is possible to prevent damage during conveyance.
[0025]
According to the flat display device manufacturing method of claim 2, the alignment of the electrode substrate and each of the process devices is required in at least two steps of the series of steps. In the manufacturing method, the mounting is performed after the electrode substrate and the transport unit are aligned in a predetermined positional relationship before the series of steps, and the transport unit is used in each step requiring alignment. Is arranged in a state of being aligned with respect to each of the process devices, so that the electrode substrate and each of the process devices are disposed in a aligned state.
[0026]
With the above configuration, the process equipment and process time required for repeated alignment are not required. Therefore, manufacturing time and capital investment can be reduced.
[0027]
According to the manufacturing method of the flat display device according to claim 3, in the manufacturing method of the flat display device according to claim 2, the conveying means and each of the process devices are fitted or brought into contact with each other so that they are aligned. It is characterized by being arranged in the state where it was made.
[0028]
With the configuration as described above, the alignment between the transfer means and the process apparatus is completed almost simultaneously with the transfer operation.
[0029]
According to a method for manufacturing a flat display device according to a fourth aspect, in the method for manufacturing a flat display device according to the third aspect, the electrode substrate is mounted on the transfer means by a vacuum chuck.
[0030]
Since the vacuum chuck is used, it is very easy to attach and detach, and since it can be fixed to the conveying means using only one surface of the electrode substrate, the entire surface of the other surface can be processed or inspected.
[0031]
According to the method for manufacturing a flat display device according to claim 5, in the method for manufacturing a flat display device according to claim 3, the transport means includes a mounting portion for mounting the electrode substrate, and an electrode substrate together with the mounting portion. A pressing tool for clamping is provided, and the electrode substrate is mounted on the transfer means so as to be detachable and not misaligned by the pressing of the pressing tool.
[0032]
According to the method for manufacturing a flat display device according to claim 6, in the method for manufacturing a flat display device according to claim 5, the pressing is performed by a spring provided in the pressing tool. .
[0033]
With the configuration as described above, there is no need to connect a compressed air or decompressed air piping hose or an electrical wiring cord to the transport device. Therefore, it can be freely transferred without being restricted by the piping hose or the wiring cord.
[0034]
According to the method for manufacturing a flat display device according to claim 7, in the method for manufacturing a flat display device that requires alignment between the electrode substrate and the process device, the alignment mark is placed at a predetermined position on the electrode substrate and the electrode substrate mounting table. Is provided, and the alignment is performed by aligning the indication positions of both alignment marks by visual inspection.
[0035]
With the configuration as described above, alignment of the display panel with an accuracy of about 50 to 100 μm can be performed simply, reliably and quickly.
[0036]
According to the flat display device manufacturing method of claim 8, in the flat display device manufacturing method of claim 2, alignment marks are provided at predetermined positions of the electrode substrate and the electrode substrate mounting table, and By aligning the indication positions of both the alignment marks, the electrode substrate and the transfer means are aligned.
[0037]
According to the method for manufacturing a flat display device according to claim 9, in the method for manufacturing a flat display device according to claim 8, at least a part of the electrode substrate mounting table is at least a part of the transfer means. It is a feature.
[0038]
With the configuration as described above, mounting can be easily performed with the positional relationship being aligned, and the transition from the alignment operation to the transport operation is extremely easy.
[0039]
According to the method for manufacturing a flat display device according to claim 10, in the method for manufacturing a flat display device according to claim 7 or 8, the electrode substrate is light transmissive, and the electrode substrate is used as the electrode substrate mounting table. On the other hand, the alignment mark on the electrode substrate and the alignment mark on the mounting table are overlapped by horizontally moving.
[0040]
According to the method for manufacturing a flat display device according to claim 11, in the method for manufacturing a flat display device according to claim 7, the electrode substrate includes an electrode terminal, and the electrode terminal and the alignment mark are in the same process. It is characterized by comprising a light opaque material formed.
[0041]
According to the transport device of claim 12, the transport device for the display panel or its electrode substrate used for manufacturing the flat display device, wherein the electrode substrate can be detached and positioned after aligning the transport device and the electrode substrate. In order to place the electrode substrate and the process device in an aligned state by fitting or abutting with a mounting holding unit for mounting without displacement and a process device related to a process that requires alignment And a fitting contact portion.
[0042]
According to the transport device of claim 13, in the transport device of claim 12, the mounting holder includes a vacuum chuck.
[0043]
According to the transport instrument of claim 14, in the transport instrument according to claim 13, the vacuum chuck is provided in a mounting portion on which the electrode substrate is mounted, and sucks the electrode substrate from below. Yes.
[0044]
According to the transport device according to claim 15, in the transport device according to claim 12, the mounting holder includes a mounting portion on which the electrode substrate is mounted, and a pressure clamp for sandwiching the electrode substrate together with the mounting portion. It is characterized by consisting of.
[0045]
According to the transport device of the sixteenth aspect, in the transport device according to the twelfth aspect of the present invention, a handle for grasping and lifting the transport device with a human hand is provided.
[0046]
According to the method for manufacturing an electronic device or an optical device according to claim 17, the electronic device or the optical device needs to be aligned with each process apparatus in at least two processes in the series of processes, and is transported between the process apparatuses. In the manufacturing method of an electronic device or an optical device that needs to be performed, the electronic device or the optical device is detachably and non-displaceably mounted on a conveying means in the previous stage of the series of steps. The optical device and the transport unit are aligned, and the transport unit and the process device are arranged in a predetermined positional relationship by fitting or abutting in each step that requires the alignment, so that the electronic device Alternatively, the optical device and the process apparatus are arranged in an aligned state.
[0047]
According to the method for manufacturing an electronic device or an optical device according to claim 18, in the method for manufacturing an electronic device or an optical device according to claim 17, the transport means includes a mounting portion on which an electrode substrate is mounted, and the mounting portion. There is provided a pressing tool for sandwiching the electrode substrate, and the electrode substrate is mounted on the transfer means so as to be detachable and not misaligned by the pressing of the pressing tool.
[0048]
DETAILED DESCRIPTION OF THE INVENTION
A first embodiment of the present invention will be described with reference to FIGS.
[0049]
FIG. 1 shows a transfer device 2 and an alignment stage 3 for a liquid crystal cell 1 according to this embodiment.
[0050]
The substantially rectangular liquid crystal cell 1 has a substantially cross-shaped alignment mark 11 having a length of 1 mm at its four corners. Since the alignment mark 11 is made of a light-opaque metal thin film formed with the same mask as that of the electrode terminal on the electrode substrate of the liquid crystal cell 1, the positional relationship with respect to the electrode terminal is precise and constant. In this embodiment, the substantially cross-shaped alignment mark 11 is used, but various marks can be used.
[0051]
The transport device 2 has a mounting portion 2a made of a flat rectangular parallelepiped, and a flexible vacuum pipe 22 is connected through a connection port 24 from one side surface of the mounting portion 2a. A plurality of vacuum chucks 21 are opened on the upper surface of the mounting portion 2a, and the liquid crystal cell 1 mounted on the upper surface of the mounting portion 2a is sucked and fixed by the suction force from the vacuum pipe 22. Further, an inverted L-shaped handle 23 protrudes from the upper end portion of the mounting portion 2a, so that the transport device 2 can be carried by the operator's hand.
[0052]
The alignment stage 3 is formed of a substantially rectangular thick plate having vertical and horizontal dimensions larger than those of the liquid crystal cell 1 and has a black ring shape of φ1.2 mm corresponding to the alignment mark 11 of the liquid crystal cell 1 on its upper surface. For example, an alignment mark 31 colored in white is embedded. Here, the alignment mark 31 is formed in a ring shape in consideration of the relationship with the alignment mark 11, processing accuracy, ease of alignment, and the like, but various shapes can be used in relation to the alignment mark 11. Various colors may be used so as to obtain a high contrast.
[0053]
And it has the conveyance instrument receiving part 32 which fits the outer surface of the conveyance instrument 2, and accommodates the conveyance instrument 2, and when the conveyance instrument 2 is inserted in this way, the upper surface and the stage for alignment 3 forms a continuous plane. In order to further ensure the fitting between the transfer device 2 and the alignment stage 3, a cylindrical protrusion 33 is formed on the bottom surface of the transfer device receiving portion 32, and the corresponding cylinder is fitted on the bottom surface of the transfer device 2. Two concave portions 24 are provided.
[0054]
An alignment operation between the liquid crystal cell 1, the alignment stage 3 and the transfer device 2 in this embodiment will be described with reference to FIGS.
[0055]
The liquid crystal cell is placed by the operator on the upper surface of the substantially horizontal alignment stage on which the transfer device 2 is inserted, and at this time, the position of the alignment mark 11 of the liquid crystal cell and the position of the alignment stage are visually observed. The position of the alignment mark 31 is confirmed, and the displacement is recognized (FIG. 2). Since the liquid crystal cell 1 is transparent, the mark 11 is opaque, and the mark 31 is colored white in the black ring and clearly marked with a good contrast color, the operator can easily recognize the displacement. The operator quickly corrects the position of the liquid crystal cell 1 with both hands so that the alignment mark 11 is placed in the alignment mark 31. If it is an operator who has undergone several hours of training, the positioning operation can be performed with an accuracy of 0.05 to 0.07 mm (50 to 70 μm) and further 0.03 mm (30 μm) within a work time of about 1 to 3 seconds. It can be carried out.
[0056]
With the alignment method as described above, alignment with an accuracy of 50 to 100 μm can be achieved quickly with an inexpensive and highly reliable apparatus without using an expensive and complicated apparatus for precise alignment.
[0057]
The alignment mark preferably has the color and shape as described above. However, for example, a combination of wedge shapes or other shapes suitable for position designation may be used, or a color with strong contrast such as dark blue may be used.
[0058]
Immediately after completion of the alignment, the vacuum mechanism of the transfer device 2 is operated and the liquid crystal cell 1 is fixed to the mounting portion 2 a of the transfer device 2 by the vacuum chuck 21. In this state, the handle 23 is grasped, and the transfer device on which the liquid crystal cell 1 is mounted is transferred to the process apparatus.
[0059]
As shown in the example of FIG. 4, the upper surface of the cell stage 4 of the process apparatus 40 is formed in a congruent shape with the shape of the upper surface of the alignment stage 3, and is conveyed by the receiving portion 42 and the cylindrical protrusion 43. Mates with. Since the predetermined positional relationship between the liquid crystal cell 1 and the transfer device 2 is maintained in the state when the above alignment is performed, when the transfer device 2 is inserted into the cell stage 4 of the process apparatus, The liquid crystal cell 1 is disposed at a predetermined position on the cell stage 4. That is, the liquid crystal cell 1 and the process apparatus 40 are arranged in a state of being aligned (accuracy of 50 to 100 μm).
[0060]
Such a positioning method will be described with reference to FIG. 5 in the case where the preliminary positioning is performed before precise positioning for the TCP temporary press-bonding process. Since alignment with 50 to 100 μm accuracy has already been made, both ends of the terminal group 15 of the liquid crystal cell 1 are not deviated from the field of view of the CCD camera 6 even when the CCD camera 6 having a narrow field of view is used. Since the alignment between the liquid crystal cell 1 and the cell stage 4 becomes unnecessary, the alignment can be performed quickly. It is only necessary to perform precise alignment of both terminal groups 15 and 16 after the TCP 13 is transported by the TCP arm.
[0061]
Next, a manufacturing process diagram of the flat display device in this embodiment will be described by taking as an example a series of processes for mounting the TCP on the liquid crystal display panel. First, the schematic diagram of FIG. 6 conceptually shows this series of steps.
[0062]
In the first step, after rough alignment, a tape-like ACF 12 (Anisotropic conductive film) is attached to the connection terminal portion on the upper surface of the edge of the liquid crystal cell 1, and in the second step, the heater tool 41 abuts. As a result, the ACF 12 is heated. In the third step and the fourth step, the temporary pressure bonding and the main pressure bonding of the TCP 13 are performed. Temporary pressure bonding is performed by a simple pressure head, and main pressure bonding is performed by a heater tool 51 controlled by a pulse current. Finally, in the fifth step, the TCP 13 and the driver PCB 14 are soldered by the heat pressure of another heater tool 41. Solder is previously applied to the PCB 14 as a pre-solder.
[0063]
FIG. 7 shows a process chart of the present embodiment relating to the above series of processes.
[0064]
The alignment operation according to the method of the present embodiment as described above is performed in the previous stage of the above five steps, and the same is applied in each step of ACF bonding and heating, TCP temporary pressing and main pressing, and PCB soldering. Do not align. Image recognition and precise positioning by the NC table are performed only in the TCP pre-bonding and PCB soldering processes that require higher accuracy. The liquid crystal cell is removed from the transport device after a series of steps.
[0065]
According to the manufacturing method of the present embodiment, it is sufficient to perform the alignment operation only in the previous stage of the series of processes, and it is not necessary to perform the alignment operation other than the alignment that requires higher accuracy in each process. For this reason, the apparatus and time for a series of steps can be saved as compared with the conventional technique in which the alignment operation with substantially the same accuracy is repeatedly performed.
[0066]
In this embodiment, if the transport device is made of a transparent material, it is possible to perform a lighting test of the pixels of the liquid crystal cell while the transport device is mounted.
[0067]
In this example, the alignment was performed by touching and shifting by hand under visual inspection, but it can also be performed under observation with a stereomicroscope according to the required accuracy or the level of the operator, and is a micrometer type screw-type It can also be performed by a movable stage provided with a mechanism pressing or position adjustment knob. Also, an automatic alignment apparatus can be used. In this case as well, a single use is sufficient for a series of steps, which is advantageous compared to a conventional method using a repeated automatic alignment apparatus.
[0068]
In FIG. 8, it shows about the 1st modification from which the shape of the conveyance apparatus 2 and a cell stage differs. The stand on which the ACF heating process device 40 is placed projects to the right side to provide an alignment work space. In this work space, a transfer board 251 that is a transfer instrument also serving as an alignment stage is placed. The transfer board 251 has a vacuum chuck on the upper surface, and a vacuum pipe 22 from the process device 40 is connected thereto. As in the above embodiment, when the alignment mark 11 of the liquid crystal cell 1 is superimposed on the alignment mark 261 of the transport board 251, vacuum chucking is performed. Handles 23 are provided at the left and right ends of the transport board 251 and can be lifted with both hands by an operator. In addition, the lower surface of the transfer board 251 is provided with a cylindrical recess that fits with the two left and right cylindrical protrusions 43 provided on the cell stage 4 of the process apparatus 40.
[0069]
Although the conveyance board 251 is depicted as being attached to the process apparatus 40 in FIG. 8, the conveyance board 251 can also be used through a series of processes, as in the above-described embodiment.
[0070]
Also according to this modification, alignment is performed simply, reliably, and quickly.
[0071]
FIG. 9 shows a second modification. Instead of providing the projection 43 for fitting on the cell stage 4 in the first modification, guide rails 52a and 52b are provided at both front and rear ends, and an alignment line 53 is provided on the guide rail 52a on the back side, that is, on the processing portion side. It is drawn. The conveyance board 251 in this modification is the same as that of the first modification, and the accuracy of the front and rear end faces is taken instead of providing the fitting recesses on the bottom surface, and the upper edge of the rear edge is above. The alignment line 271 is drawn.
[0072]
A transport board 251 with the liquid crystal cell 1 fixed and mounted in an aligned state is set between the guide rails 52a and 52b. The alignment lines 271 and 53 on the guide rail side and the conveyance board side are aligned with each other. Also according to this modification, alignment is performed simply, reliably, and quickly in substantially the same manner as in the above-described embodiments and modifications.
[0073]
The apparatus shown in FIG. 9 is a TCP main pressure bonding apparatus 50, in which a pressure head 51 including a cylinder 55 and a pulse power supply 54 are depicted. However, the position of the pressure head 51 with respect to the liquid crystal cell 1 is shifted. If it is necessary to press-bond a plurality of times, it is only necessary to provide the second and third alignment lines 281 on the transport board 251.
[0074]
In this modification, the guide rail 52 can be extended to the front and rear process devices, and the conveyance board 251 can be guided between the guide rails and conveyed between the process devices.
[0075]
A second embodiment of the present invention will be described with reference to FIG.
[0076]
In the present embodiment, the transport apparatus 2 shown in FIG. 10 is used in the same configuration as that of the first embodiment.
[0077]
The transport device 2 in this embodiment includes a mounting portion 2a made of a flat rectangular parallelepiped, and a clamp rod holding member 26 that protrudes in an inverted L shape from the upper surface end of the mounting portion 2a.
[0078]
The clamp rod holding member 26 is provided with two vertical clamp rods 25 for pressing the liquid crystal cell 1 mounted on the mounting portion 2a from above and sandwiching the liquid crystal cell 1 together with the mounting portion 2a. Yes. The upper portions of the clamp rods 25, 25 arranged vertically are inserted through the through holes in the horizontal portion of the clamp rod holding member 26 and guided so as to be movable up and down. The lower part of the two clamp bars 25 penetrates one horizontal plate 29, and the horizontal plate 29 and the clamp bars 25, 25 are connected to each other so as not to move up and down. A coil spring 28 is wound around the clamp rods 25 and 25 and is compressed and held between the horizontal portion of the clamp rod holding member 26 and the horizontal plate 29. The clamp rod 25 is biased downward from the clamp rod holding member 26 by the coil spring 28, and the liquid crystal cell 1 mounted on the mounting portion 2a is pressed from above. A rubber sheet is affixed to the lower surface 25 a of the clamp rod 25 to prevent damage and lateral displacement of the liquid crystal cell 1.
[0079]
Bolts 27 are disposed at substantially equidistant positions from the two clamp rods 25 and pass through the screw holes provided in the clamp rod holding member 26 and the holes provided in the horizontal plate 29. The bolt 27 is for lifting the clamp rod 25, that is, for releasing the pressure-tight state of the liquid crystal cell 1. At the upper end of the bolt 27, a rotation lever 27a for rotating the bolt 27 by hand is provided. A flange 27b is attached to the lower end of the bolt 27 protruding downward from the horizontal plate 29. When the bolt 27 is pulled up by the rotation of the rotary lever 27a, the upper surface of the flange 27b engages with the lower surface of the horizontal plate 29. It becomes like this. When the bolt 27 is pulled down by rotation in the reverse direction, the engagement between the flange portion 27b at the lower end of the bolt and the horizontal plate 29 is released, and the spring force of the coil spring 28 acts on the liquid crystal cell 1 to be in a compressed state.
[0080]
The vertical portion of the clamp bar holding portion 26 forms a handle 23 so that the transport device 2 can be easily carried by the operator's hand.
[0081]
In addition, immediately after the alignment operation is completed, the rotation lever 27a of the transport device 2 is immediately rotated to lower the clamp rods 25 and 25. As a result, the clamp rods 25, 25 press the liquid crystal cell 1 with the spring force of the coil spring 28, and fix the liquid crystal cell 1 to the mounting portion 2 a of the transport device 2.
[0082]
In the present embodiment, since the clamping for preventing the displacement is performed by the spring force of the coil spring, it is not necessary to connect a compressed air or a decompressed air piping hose or an electric wiring cord to the conveying device. Therefore, it can be freely transferred without being restricted by the piping hose or the wiring cord, and can be freely stored in a shelf or box for temporary storage or transportation.
[0083]
Further, the pressure for clamping the liquid crystal cell does not vary depending on the operator or the number of operations, and can be kept constant by setting the spring. Therefore, reliability for preventing misalignment is ensured, and damage to the liquid crystal cell due to excessive pressing force is also reliably prevented.
[0084]
In this embodiment, the clamping for releasing the liquid crystal cell and the release thereof are performed by rotating the bolt, but can also be performed by a long lever and its locking tool.
[0085]
In addition, an air spring can be used instead of a mechanical spring, and pressing and releasing can be performed using a driving cylinder with compressed air.
[0086]
A handle for carrying the transport device 2 can be separately attached to the mounting portion 2a or the clamp bar holding portion 26 with an appropriate shape.
[0087]
【The invention's effect】
In the method for manufacturing a flat display device of the present invention, if alignment is performed in advance before a series of steps, it is not necessary to perform alignment operations in each step other than alignment that requires higher accuracy.
[0088]
If the display panel is aligned by the manufacturing method of the present invention, alignment with an accuracy of 50 to 100 μm can be achieved reliably and quickly without using a complicated and expensive apparatus used for precise alignment.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a transfer device and an alignment stage according to a first embodiment of the present invention.
FIG. 2 is a perspective view schematically showing overlay of alignment marks.
FIG. 3 is a perspective view schematically showing an alignment operation of a liquid crystal cell on an alignment stage.
FIG. 4 is a perspective view schematically showing the conveyance and arrangement of a liquid crystal cell with respect to a process apparatus.
FIG. 5 is a perspective view schematically showing precise positioning in the TCP temporary press-bonding step.
FIG. 6 is a schematic diagram conceptually showing a series of steps for attaching and connecting a TCP to a liquid crystal cell.
FIG. 7 is a process diagram of a series of processes for TCP attachment and connection in the embodiment.
FIG. 8 is a perspective view schematically showing alignment between a process device and a liquid crystal cell in a first modification.
FIG. 9 is a perspective view schematically showing alignment between a process device and a liquid crystal cell in a second modified example.
FIG. 10 is a perspective view showing a transfer device and an alignment stage according to a second embodiment of the present invention.
FIG. 11 is a perspective view schematically showing rough alignment of a liquid crystal cell in a conventional technique.
FIG. 12 is a perspective view schematically showing precise alignment in the prior art.
FIG. 13 is a process diagram of a series of processes for TCP attachment and connection in the prior art.
FIG. 14 is a perspective view schematically showing a TCP temporary press-bonding step.
[Explanation of symbols]
1 Liquid crystal cell
11 LCD cell alignment mark
2 Transport equipment
21 Vacuum chuck
22 Vacuum piping
23 Toride
25 Clamp bar
26 Clamp bar holding member
27 volts
27a Rotating lever
28 Coil spring
29 Horizontal plate
2a Mounted part
3 Positioning stage
31 Stage alignment mark
32 Transfer device receiving part
33 Mating protrusion
4 Cell stage of process equipment
42 Transfer device receiving part
43 Mating protrusion

Claims (16)

In a method for manufacturing a flat panel display device in which the electrode substrate needs to be transported between process devices in a series of steps composed of at least two steps, the electrode substrate is mounted on a transportable transportable device so as to be removable and not misaligned. In this mounted state, the electrode substrate is transported between the process devices and processed by the process device. 2. The method of manufacturing a flat display device according to claim 1, wherein alignment of the electrode substrate and each of the process devices is required in at least two steps of the series of steps. And the transfer device are aligned in a predetermined positional relationship, and then the loading is performed, and the portable transfer device is aligned with each of the process devices in each of the processes that require alignment. A method of manufacturing a flat display device, wherein the electrode substrate and each of the process devices are arranged in an aligned state by being arranged in a state. 3. The flat display device manufacturing method according to claim 2, wherein the transfer device and each of the process devices are arranged in a state of being aligned with each other by fitting or abutting with each other. Manufacturing method. 4. The method for manufacturing a flat display device according to claim 3, wherein the electrode substrate is mounted on the transfer device by a vacuum chuck. 4. The method of manufacturing a flat display device according to claim 3, wherein the transfer device includes a mounting portion on which an electrode substrate is mounted, and a pressing tool for sandwiching the electrode substrate together with the mounting portion. A flat display device manufacturing method, wherein the flat panel display device is mounted on the transfer device so as to be detachable and not misaligned by pressing the pressure clamp.   6. The method of manufacturing a flat display device according to claim 5, wherein the pressing is performed by a spring provided in the pressing tool. 3. The method of manufacturing a flat display device according to claim 2 , wherein an alignment mark is provided at a predetermined position of an electrode substrate and an electrode substrate mounting table partially including a mounting portion of the transfer device, and the both of the both are visually observed. A method of manufacturing a flat display device, wherein the electrode substrate and the transfer device are aligned by aligning the indicated position of the alignment mark. 8. The method for manufacturing a flat display device according to claim 7 , wherein the electrode substrate is light transmissive, and the alignment mark on the electrode substrate is moved horizontally with respect to the electrode substrate mounting table. A method of manufacturing a flat display device, characterized in that an alignment mark on a mounting table is overlaid.   8. The method for manufacturing a flat display device according to claim 7, wherein the electrode substrate includes an electrode terminal, and the electrode terminal and the alignment mark are made of a light opaque material formed in the same process. Manufacturing method of display device. A display device for use in the manufacture of a flat display device or a transport device that can carry the electrode substrate, and for mounting the electrode substrate so that the electrode substrate can be detached and not displaced after the transport device and the electrode substrate are aligned. A holding contact portion and a fitting contact portion for placing the electrode substrate and the process device in an aligned state by fitting or abutting with a process device relating to a process requiring alignment. A conveying device comprising: The transport device according to claim 10 , wherein the mounting holder includes a vacuum chuck. 12. The transport device according to claim 11 , wherein the vacuum chuck is provided in a mounting portion on which the electrode substrate is mounted, and sucks the electrode substrate from below. The transport device according to claim 10 , wherein the mounting holding portion includes a mounting portion on which an electrode substrate is mounted, and a pressing tool for sandwiching the electrode substrate together with the mounting portion. 11. The transport device according to claim 10 , further comprising a handle for gripping and lifting the transport device with a human hand. In the method of manufacturing an electronic device or an optical device, the electronic device or the optical device needs to be aligned with each process apparatus in at least two processes in the series of processes and needs to be transported between the process apparatuses. the array of electronic devices or optical devices in the preceding stage of the process is mounted so as not to removable and misalignment portable delivery device, this time with the electronic device or an optical device and the transport means are aligned, the position state to the conveying device at each step and the step apparatus by being disposed in a predetermined positional relationship by mating or abutting, with the electronic device or an optical device and the process device is aligned in need of combined A method for manufacturing an electronic device or an optical device, wherein 16. The method of manufacturing an electronic device or an optical device according to claim 15 , wherein the transport device includes a mounting portion on which an electrode substrate is mounted, and a pressing tool for sandwiching the electrode substrate together with the mounting portion. A method of manufacturing an electronic device or an optical device, wherein the electronic device or the optical device is mounted on the transport unit so as to be detachable and not misaligned by pressing the pressing tool.

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