JP3854811B2

JP3854811B2 - Electrical connection device

Info

Publication number: JP3854811B2
Application number: JP2001078298A
Authority: JP
Inventors: 衛知大里
Original assignee: Micronics Japan Co Ltd
Current assignee: Micronics Japan Co Ltd
Priority date: 2001-03-19
Filing date: 2001-03-19
Publication date: 2006-12-06
Anticipated expiration: 2021-03-19
Also published as: JP2002280137A

Description

【０００１】
【発明の属する技術分野】
本発明は、配線基板のような基板の導電性部と、集積回路のような被検査体の電極部とを電気的に接続する装置に関する。
【０００２】
【従来の技術】
集積回路の通電試験は、一般に、配線基板の配線パターンのような導電性部と、集積回路のリード電極、パッド電極、バンプ電極、突起電極等の電極部とを電気的に接続する装置を用いて行われる。
【０００３】
この種の電気的接続装置の１つとして、弧状、Ｊ字状、Ｓ又はＺ字状、Ｉ字状をした複数の接触子を用いるものがある（例えば、特開平１０−１７７８８６号公報、特開平１１−３１５６６号公報、特開平１１−１６２６０５号公報）。
【０００４】
これらの電気的接続装置は、いずれも、合成樹脂で製造された板状のハウジングにこれの厚さ方向に貫通する複数の長穴を少なくとも一列に形成し、このハウジングを配線基板の一方の面側に組み付け、配線基板の導電性部と集積回路の電極部とを電気的に接続する複数の接触子をハウジングの長穴に配置し、弾性体をハウジング内に配置している。
【０００５】
上記の電気的接続装置において、集積回路の電極部が接触子に押圧されると、接触子が弾性体を弾性変形させると共に配線基板の導電性部に押圧される。これにより、配線基板の導電性部と集積回路の電極部とが電気的に接続されるから、その状態で集積回路の通電試験が行われる。
【０００６】
【解決しようとする課題】
しかし、従来の電気的接続装置では、接触子を樹脂製のハウジングの穴に該穴を貫通した状態に配置しているから、接続装置の厚さ寸法が大きく、したがって接触子の有効長さ寸法（電流が流れる領域の長さ寸法）が大きく、その結果高周波試験に適さない。
【０００７】
本発明の目的は、電気的接続装置の厚さ寸法を小さくして、接触子の有効長さ寸法を小さくすることにある。
【０００８】
【解決手段、作用、効果】
本発明に係る電気的接続装置は、弾性板と、該弾性板に重ねられてその一方の側に配置された電気的絶縁板と、前記弾性板及び前記電気的絶縁板に配置された複数の接触子と、枠状のガイドとを含む。各接触子は、湾曲された外面を有する変形部と、該変形部の一端に続きかつ前記弾性板を貫通する針先部と、前記変形部の他端に続きかつ前記電気的絶縁板内で終端する針後部とを有する。前記ガイドは、前記弾性板および前記電気絶縁板の縁部を受け入れる段部によって形成された収容部を有し、前記弾性板の前記他方の側の面は、該面の縁部を除く領域の全面で前記ガイドの開口に露出して配置されており、前記弾性板および前記電気絶縁板は前記ガイドの前記収容部を経て突出するガイドピンで前記ガイドに位置決められ、前記弾性板の前記ガイド開口に露出する領域で前記接触子の針先部が前記弾性板を貫通する。
【０００９】
接触子が変形部と針後部との境界付近において基板の導電性部に接触する状態に基板に組み付けられる。この状態において、被検査体が電気的接続装置に配置され、被検査体の電極と接触子の針先（先端）とが相対的に押圧される。これにより、接触子は被検査体の電極と基板の導電性部とに押圧される。
【００１０】
接触子の針先部が弾性板を貫通し、針後部が電気的絶縁板内に位置する電気的接続装置は、弾性板及び電気的絶縁板が従来のハウジングの機能を果たすから、厚さ寸法が小さくなり、接触子の有効長さ寸法が小さくなる。
【００１１】
前記弾性板は前記接触子の針先部が貫通する第１の穴を有し、前記電気的絶縁板は前記接触子の針後部が収容された第２の穴を有することができる。そのようにすれば、弾性板及び電気的絶縁板に対する接触子の位置及び姿勢が安定する。
【００１２】
前記接触子は、前記電気的絶縁板の前記第２の穴を形成している壁に当接された後端を有することができる。そのようにすれば、被検査体の電極と接触子の針先とが相対的に押圧されたときに、電気的絶縁板の壁が接触子の後退を阻止するから、接触子が基板の導電性部と被検査体の電極部とに確実に接触する。
【００１３】
前記弾性板及び前記電気的絶縁板は重ねられていてもよい。そのようにすれば、弾性板と電気的絶縁板とが離されている場合に比べ、電気的接続装置の厚さ寸法をより小さくすることができる。
【００１４】
電気的接続装置は、さらに、前記被検査体を前記接触子の針先に案内する枠状のガイドを含み、前記弾性板及び前記電気的絶縁板は前記ガイド内に配置されていてもよい。そのようにすれば、被検査体の電極部を接触子の針先に容易にかつ確実に接触させることができる。
【００１５】
前記接触子の針後部は前記電気的絶縁板内を伸びており、前記接触子の針先部は少なくとも前記針後部が伸びる方向と反対側の箇所を前記弾性板に接触させていてもよい。そのようにすれば、被検査体の電極と接触子の針先とが相対的に押圧されたときに、接触子が弾性板を弾性変形させつつ変位するから、基板の導電性部及び被検査体の電極部と接触子との接触圧が大きくなり、基板の導電性部及び被検査体の電極部に接触子がより確実に接触する。
【００１６】
前記接触子の針後部は前記電気的絶縁板内を伸びており、前記接触子の針先は前記針後部が伸びる方向に湾曲された弧面とされていてもよい。そのようにすれば、被検査体の電極と接触子の針先とが相対的に押圧されたとき、接触子の針先が電極部に対して滑るから、電極部の酸化膜が擦り取られる。
【００１７】
前記接触子は、前記針後部が一方側へ伸びる第１の接触子群と、前記針後部が他方側へ伸びる第２の接触子群とに分けられていてもよい。そのようにすれば、被検査体の電極と接触子の針先とが相対的に押圧されたときに接触子に作用する力の方向が第１及び第２の接触子群で逆方向になるから、そのような力が相殺される。
【００１８】
【発明の実施の形態】
図１〜図８を参照するに、電気的接続装置１０は、平板状被検査体１２の通電検査すなわち通電試験に用いるソケットとして基板１４と共に用いられる。
【００１９】
被検査体１２は、図示の例では、集積回路チップのような半導体デバイスであり、長方形の板の形を有する本体部１６の一方の面（図示の例では、下面）に平板状の複数の電極部１８を有している。
【００２０】
基板１４は、配線パターンを電気絶縁性の材料から形成された板部材２０に印刷配線技術により形成した配線基板であり、また配線パターンの一部を露出させて被検査体１２の電極部１８に個々に対応された導電性部２２としている。
【００２１】
ソケットすなわち電気的接続装置１０は、枠状のガイド２４と、ガイド２４内に配置された弾性板２６と、弾性板２６の下側に配置されたの電気的絶縁板２８と、被検査体１２の電極部１８及び基板１４の導電性部２２の組に個々に対応された複数の接触子３０とを含む。
【００２２】
ガイド２４は、合成樹脂のような適宜な材料により矩形の短い筒の形に形成されている。ガイド２４の開口３２は、接続装置１０に対する被検査体１２の位置を規制する規制部と、規制部の上方にあって被検査体１２を接触子３０に案内する傾斜部と、開口３２の下方にあって弾性板２６及び絶縁板２８を配置する収容部とを有している。規制部と収容部との境界は、収容部の平面形状が規制部のそれより大きくなる下向きの段部とされている。
【００２３】
弾性板２６は、シリコーンゴムのように三次元的に弾性変形可能のゴム材から製造されており、また接触子３０が貫通する複数の穴３４を有している。各穴３４は、被検査体１２の電極部に対応されている。各穴３４の下部は、上部より大きい座ぐり部３６とされている。
【００２４】
絶縁板２８は、ポリイミドのような合成樹脂材から製造されており、また複数の長穴３８を有している。各長穴３８は、絶縁板２８を厚さ方向に貫通して弾性板２６の穴３４に連通しており、また同じ方向に伸びている。絶縁板２８は、シート状、フィルム状、板状等、ある程度の厚さ、剛性、ばね性等を有することが好ましい。
【００２５】
各接触子３０は、湾曲された外面を有する変形部４０と、変形部４０の一端（図示の例では、上端）に続く針先部４２と、変形部４０の他端（図示の例では、下端）に続く針後部４４とを有しており、また矩形の断面形状を有している。
【００２６】
各接触子３０の針先（先端）は、針後部４４が伸びる方向に湾曲された弧面とされている。弾性板２６の各穴３４の横断面は接触子３０の針先部４２の横断面より小さく、これにより各接触子３０は弾性板２６に維持されている。接触子３０は、針後部４４が変形部４０から一方側へ伸びる第１の接触子群と、針後部４４が変形部４０から他方側へ伸びる第２の接触子群とに分けられている。
【００２７】
電気的接続装置１０の組み立て時、先ず、弾性板２６と絶縁板２８とが重ね合わされて、接着される。しかし、弾性板２６と絶縁板２８とを接着しなくてもよい。
【００２８】
次いで、針先部４２が弾性板２６の穴３４を貫通しかつ接触子３０の針後部４４が絶縁板２８の長穴３８内に位置する状態に、各接触子３０が弾性板２６及び絶縁板２８に組み付けられる。その状態において、弾性板２６が絶縁板２８の上となる状態に、弾性板２６及び絶縁板２８がガイド２４の開口３２の収容部に配置される。
【００２９】
弾性板２６及び絶縁板２８は、ガイド２４からその開口３２の収容部を経て突出する複数のガイドピン４６を弾性板２６及び絶縁板２８に貫通させることにより、ガイド２４に組み付けられて、ガイド２４に対して位置決められる。
【００３０】
上記のように組み立てられた電気的接続装置１０は、ガイドピン４６を基板１４に形成されたガイド穴４８に上方から通すことにより基板１４に対して位置決められ、その状態で複数のねじ部材５０を基板１４に螺合させることにより基板１４の上面に組み付けられる。これにより、各接触子３０は変形部４０と針後部４４との境界付近において基板１４の導電性部２２に接触可能になる。
【００３１】
通電試験時、被検査体１２がその電極部１８を下方とした状態で、ガイド２４の開口３２に上方から配置される。これにより、被検査体１２の電極部１８が接触子３０の針先に接触される。この際、被検査体１２は、ガイド１４の傾斜部により案内されて、規制部に達するから、被検査体１２の電極部１８と接触子３０の針先とを容易にかつ確実に接触させることができる。
【００３２】
上記状態で、電気的接続装置１０と被検査体１２とが相対的に接近されて、接触子３０の針先と被検査体１２の電極部１８とが相対的に押圧される。これにより、接触子３０は被検査体１２の電極１８と基板１４の導電性部２２とに押圧される。
【００３３】
上記状態で、被検査体１２の通電試験が行われる。通電試験時に電流が流れる接触子３０の有効範囲は、針先から基板１４の導電性部２２への接触箇所までの領域である。
【００３４】
接触子３０の針先と被検査体１２の電極部１８とが相対的に押圧されると、接触子３０は、絶縁板２８の長穴３８を形成している壁面に後端を当接されて後退を阻止された状態で、図８に点線で示す状態から実線で示す状態に角度的に回転移動する。このため、接触子３０は基板１４の導電性部２２と被検査体１２の電極部１８とに確実に接触する。
【００３５】
また、接触子３０の針先と被検査体１２の電極部１８とが相対的に押圧されると、接触子３０が弾性板２６を弾性変形させつつ変位するから、基板１４の導電性部２２及び被検査体１２の電極部１８と接触子３０との接触圧が大きくなり、基板１４の導電性部２２及び被検査体１２の電極部１８に接触子３０がより確実に接触する。
【００３６】
針後部４４の延在方向に湾曲する弧面とされた針先は、接触子３０の針先と被検査体１２の電極部１８とが相対的に押圧されたとき、電極部１８に対して滑って、電極部１８の酸化膜を擦り取る。
【００３７】
接触子３０の針先と被検査体１２の電極部１８とが相対的に押圧されたときに接触子３０に作用する力は、針後部４４が互いに反対方向へ伸びる第１及び第２の接触子群とで逆方向となることにより、相殺される。
【００３８】
弾性板２６及び絶縁板２８は、上記のように重ねられていることが好ましい。そのようにすれば、弾性板２６と絶縁板２８とが離されている場合に比べ、電気的接続装置の厚さ寸法をより小さくすることができる。しかし、弾性板２６及び絶縁板２８は、必ずしも重ねられていなくてもよい。
【００３９】
電気的接続装置１０においては、接触子３０の針先部４２が弾性板２６の穴３４を貫通し、針後部４４が絶縁板２８の長穴３８内に位置するから、弾性板２６及び絶縁板２８に対する接触子３０の位置及び姿勢が安定する。また、弾性板２６及び絶縁板２８が従来のハウジングの機能を果たすから、従来の装置に比べ、電気的接続装置１０の厚さ寸法が小さくなり、接触子３０の有効長さ寸法が小さくなり、高周波試験に適する。
【００４０】
本発明は、本体部１６の一方の面に複数の電極部１８を有する被検査体のみならず、パッケージ又はモールドされた集積回路のように本体部から並列的に突出するリード電極のような複数の電極部を有する被検査体の通電試験に用いる電気的接続装置にも適用することができる。
【００４１】
本発明は、上記実施例以外の形状を有する接触子を用いる電気的接続装置にも適用することができるし、また液晶表示パネルのような他の平板状被検査体の通電試験用の電気的接続装置にも適用することができ、さらに上下の側を上記した実施例と逆にした状態で用いる電気的接続装置にも適用することができる。
【００４２】
本発明は、上記実施例に限定されず、その趣旨を逸脱しない限り、種々変更することができる。
【図面の簡単な説明】
【図１】本発明に係る電気的接続装置の一実施例を示す平面図である。
【図２】図１における２−２線に沿って得た断面図である。
【図３】図１に示す電気的接続装置における接触子の配置状態を拡大して示す平面図である。
【図４】図３に示す箇所の断面図である。
【図５】図３に示す箇所の基板を除いた底面図である。
【図６】図３に示す箇所の左側面図である。
【図７】図１に示す電気的接続装置における接触子近傍の拡大断面図である。
【図８】図１に示す電気的接続装置の動作を説明するための接触子近傍の拡大断面図である。
【符号の説明】
１０電気的接続装置
１２被検査体
１４基板
１８被検査体の電極部
２２基板の導電性部
２４ガイド
２６弾性板
２８電気的絶縁板
３０接触子
３２ガイドの開口
３４弾性板の穴
３８電気的絶縁板の長穴
４０接触子の変形部
４２接触子の針先部
４４接触子の針後部
４６ガイドピン
４８ガイド穴[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an apparatus for electrically connecting a conductive portion of a substrate such as a wiring board and an electrode portion of an object to be inspected such as an integrated circuit.
[0002]
[Prior art]
In general, a current-carrying test of an integrated circuit uses a device that electrically connects a conductive part such as a wiring pattern of a wiring board and an electrode part such as a lead electrode, a pad electrode, a bump electrode, and a protruding electrode of the integrated circuit. Done.
[0003]
As one of this type of electrical connection device, there is one using a plurality of contacts having an arc shape, J shape, S or Z shape, or I shape (for example, Japanese Patent Laid-Open No. 10-177886, (Kaihei 11-31566, JP-A-11-162605).
[0004]
In any of these electrical connection devices, a plurality of long holes penetrating in the thickness direction are formed in a plate-shaped housing made of synthetic resin in at least one row, and the housing is formed on one surface of the wiring board. A plurality of contacts that are assembled on the side and electrically connect the conductive portion of the wiring board and the electrode portion of the integrated circuit are disposed in the long hole of the housing, and the elastic body is disposed in the housing.
[0005]
In the above electrical connection device, when the electrode part of the integrated circuit is pressed by the contact, the contact causes the elastic body to be elastically deformed and is pressed by the conductive part of the wiring board. As a result, since the conductive portion of the wiring board and the electrode portion of the integrated circuit are electrically connected, an energization test of the integrated circuit is performed in that state.
[0006]
[Problems to be solved]
However, in the conventional electrical connection device, since the contact is arranged in a state of passing through the hole of the resin housing, the thickness of the connection device is large, and therefore the effective length of the contact is large. (The length dimension of the region through which the current flows) is large and, as a result, is not suitable for a high-frequency test.
[0007]
An object of the present invention is to reduce the thickness of the electrical connection device and reduce the effective length of the contact.
[0008]
[Solution, action, effect]
Multiple electrical connecting apparatus according to the present invention, an elastic plate, which is arranged on the electrical insulation plate is superimposed on the elastic plate arranged on one side of its, the elastic plate and the electrically insulating plate Contactor and a frame-shaped guide . Each contact includes a deformation portion having a curved outer surface, a tip portion that penetrates more and the elastic plate to one end of said alteration forms part, continued and by the electrically insulating plate to the other end of the flexible portion And a trailing needle end . The guide has a receiving portion formed by a step portion that receives an edge portion of the elastic plate and the electric insulating plate, and the surface on the other side of the elastic plate is a region excluding the edge portion of the surface. The elastic plate and the electrical insulating plate are arranged to be exposed to the opening of the guide over the entire surface, and are positioned on the guide by a guide pin protruding through the housing portion of the guide, and the guide opening of the elastic plate The needle tip portion of the contact penetrates the elastic plate in a region exposed to.
[0009]
The contact is assembled to the substrate so as to be in contact with the conductive portion of the substrate in the vicinity of the boundary between the deformed portion and the needle rear portion. In this state, the device under test is placed in the electrical connection device, and the electrode of the device under test and the needle tip (tip) of the contact are relatively pressed. Thereby, a contactor is pressed by the electrode of a to-be-inspected object, and the electroconductive part of a board | substrate.
[0010]
The electrical connection device in which the needle tip portion of the contactor penetrates the elastic plate and the needle rear portion is located in the electrical insulating plate has a thickness dimension because the elastic plate and the electrical insulating plate perform the functions of a conventional housing. Becomes smaller and the effective length of the contact becomes smaller.
[0011]
The elastic plate may have a first hole through which the needle tip portion of the contact passes, and the electrical insulating plate may have a second hole in which the needle rear portion of the contact is accommodated. If it does so, the position and attitude | position of a contact with respect to an elastic board and an electrical insulation board will be stabilized.
[0012]
The contact may have a rear end in contact with a wall forming the second hole of the electrical insulating plate. By doing so, when the electrode of the object to be inspected and the needle tip of the contactor are relatively pressed, the wall of the electrical insulating plate prevents the contactor from retreating. It is surely in contact with the sex part and the electrode part of the device under test.
[0013]
The elastic plate and the electrical insulating plate may be overlapped. By doing so, the thickness dimension of the electrical connection device can be made smaller than when the elastic plate and the electrical insulating plate are separated.
[0014]
The electrical connection device may further include a frame-shaped guide that guides the object to be inspected to the needle tip of the contact, and the elastic plate and the electrical insulating plate may be disposed in the guide. By doing so, the electrode part of the device under test can be easily and reliably brought into contact with the needle tip of the contact.
[0015]
The needle rear portion of the contact may extend in the electrical insulating plate, and the needle tip portion of the contact may be in contact with the elastic plate at least on the side opposite to the direction in which the needle rear portion extends. By doing so, when the electrode of the object to be inspected and the needle tip of the contactor are relatively pressed, the contactor is displaced while elastically deforming the elastic plate. The contact pressure between the electrode part of the body and the contact increases, and the contact comes into more reliable contact with the conductive part of the substrate and the electrode part of the object to be inspected.
[0016]
A needle rear portion of the contact may extend in the electrical insulating plate, and a needle tip of the contact may be an arc surface curved in a direction in which the needle rear portion extends. By doing so, when the electrode of the object to be inspected and the needle tip of the contact are pressed relatively, the needle tip of the contact slides with respect to the electrode portion, so that the oxide film of the electrode portion is scraped off. .
[0017]
The contact may be divided into a first contact group in which the needle rear part extends to one side and a second contact group in which the needle rear part extends to the other side. By doing so, the direction of the force acting on the contact when the electrode of the object to be inspected and the tip of the contact are relatively pressed is reversed between the first and second contact groups. Therefore, such power is offset.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Referring to FIGS. 1 to 8, the electrical connection device 10 is used together with the substrate 14 as a socket used for an energization inspection of the flat object 12, that is, an energization test.
[0019]
In the illustrated example, the device under test 12 is a semiconductor device such as an integrated circuit chip, and a plurality of flat plate-like members are formed on one surface (the lower surface in the illustrated example) of the main body 16 having a rectangular plate shape. It has an electrode part 18.
[0020]
The substrate 14 is a wiring substrate in which a wiring pattern is formed on a plate member 20 formed of an electrically insulating material by a printed wiring technique, and a part of the wiring pattern is exposed to the electrode portion 18 of the inspection object 12. It is set as the electroconductive part 22 corresponding to each.
[0021]
The socket, that is, the electrical connection device 10 includes a frame-shaped guide 24, an elastic plate 26 disposed in the guide 24, an electrical insulating plate 28 disposed below the elastic plate 26, and the device under test 12. A plurality of contacts 30 individually corresponding to the set of the electrode portion 18 and the conductive portion 22 of the substrate 14.
[0022]
The guide 24 is formed in the shape of a rectangular short cylinder with an appropriate material such as a synthetic resin. The opening 32 of the guide 24 includes a restricting portion that restricts the position of the device under test 12 relative to the connection device 10, an inclined portion that is above the restricting portion and guides the device under test 12 to the contact 30, and below the opening 32. And an accommodating portion in which the elastic plate 26 and the insulating plate 28 are disposed. The boundary between the restricting portion and the accommodating portion is a downward step portion in which the planar shape of the accommodating portion is larger than that of the restricting portion.
[0023]
The elastic plate 26 is manufactured from a rubber material that can be elastically deformed three-dimensionally, such as silicone rubber, and has a plurality of holes 34 through which the contact 30 passes. Each hole 34 corresponds to an electrode portion of the device under test 12. The lower part of each hole 34 is a counterbore part 36 larger than the upper part.
[0024]
The insulating plate 28 is manufactured from a synthetic resin material such as polyimide, and has a plurality of long holes 38. Each long hole 38 penetrates the insulating plate 28 in the thickness direction, communicates with the hole 34 of the elastic plate 26, and extends in the same direction. The insulating plate 28 preferably has a certain thickness, rigidity, springiness, etc., such as a sheet shape, a film shape, and a plate shape.
[0025]
Each contact 30 includes a deformed portion 40 having a curved outer surface, a needle tip portion 42 following one end of the deformable portion 40 (the upper end in the illustrated example), and the other end of the deformed portion 40 (in the illustrated example, And a needle rear portion 44 following the lower end), and has a rectangular cross-sectional shape.
[0026]
The needle tip (tip) of each contact 30 is an arc surface curved in the direction in which the needle rear portion 44 extends. The cross section of each hole 34 of the elastic plate 26 is smaller than the cross section of the needle tip portion 42 of the contact 30, so that each contact 30 is maintained on the elastic plate 26. The contact 30 is divided into a first contact group in which the needle rear portion 44 extends from the deformation portion 40 to one side and a second contact group in which the needle rear portion 44 extends from the deformation portion 40 to the other side.
[0027]
When the electrical connection device 10 is assembled, first, the elastic plate 26 and the insulating plate 28 are overlapped and bonded. However, the elastic plate 26 and the insulating plate 28 may not be bonded.
[0028]
Next, each contact 30 is placed in a state where the needle tip portion 42 penetrates the hole 34 of the elastic plate 26 and the needle rear portion 44 of the contact 30 is located in the long hole 38 of the insulating plate 28. 28 is assembled. In this state, the elastic plate 26 and the insulating plate 28 are disposed in the accommodating portion of the opening 32 of the guide 24 so that the elastic plate 26 is on the insulating plate 28.
[0029]
The elastic plate 26 and the insulating plate 28 are assembled to the guide 24 by passing through the elastic plate 26 and the insulating plate 28 a plurality of guide pins 46 protruding from the guide 24 through the accommodating portion of the opening 32. Is positioned against.
[0030]
The electrical connecting device 10 assembled as described above is positioned with respect to the substrate 14 by passing the guide pins 46 from above through the guide holes 48 formed in the substrate 14. In this state, the plurality of screw members 50 are moved. It is assembled to the upper surface of the substrate 14 by being screwed to the substrate 14. Thereby, each contact 30 can contact the conductive portion 22 of the substrate 14 in the vicinity of the boundary between the deformable portion 40 and the needle rear portion 44.
[0031]
During the energization test, the device under test 12 is disposed from above in the opening 32 of the guide 24 with the electrode portion 18 facing downward. As a result, the electrode portion 18 of the device under test 12 is brought into contact with the needle tip of the contact 30. At this time, since the inspection object 12 is guided by the inclined portion of the guide 14 and reaches the restriction portion, the electrode portion 18 of the inspection object 12 and the needle tip of the contact 30 can be contacted easily and reliably. Can do.
[0032]
In the above state, the electrical connecting device 10 and the device under test 12 are relatively approached, and the needle tip of the contact 30 and the electrode portion 18 of the device under test 12 are relatively pressed. As a result, the contact 30 is pressed against the electrode 18 of the device under test 12 and the conductive portion 22 of the substrate 14.
[0033]
In the above state, an energization test of the device under test 12 is performed. The effective range of the contact 30 through which a current flows during the energization test is a region from the needle tip to the contact portion with the conductive portion 22 of the substrate 14.
[0034]
When the needle tip of the contact 30 and the electrode portion 18 of the device under test 12 are relatively pressed, the contact 30 is brought into contact with the wall surface forming the long hole 38 of the insulating plate 28 at the rear end. In a state where the backward movement is prevented, the rotational movement is angularly performed from the state indicated by the dotted line in FIG. 8 to the state indicated by the solid line. For this reason, the contact 30 reliably contacts the conductive portion 22 of the substrate 14 and the electrode portion 18 of the device under test 12.
[0035]
Further, when the needle tip of the contact 30 and the electrode portion 18 of the device under test 12 are relatively pressed, the contact 30 is displaced while elastically deforming the elastic plate 26. In addition, the contact pressure between the electrode portion 18 of the device under test 12 and the contact 30 increases, and the contact 30 more reliably contacts the conductive portion 22 of the substrate 14 and the electrode portion 18 of the device under test 12.
[0036]
When the needle tip of the contact 30 and the electrode portion 18 of the device under test 12 are relatively pressed against each other, the needle tip that is curved in the extending direction of the needle rear portion 44 is opposed to the electrode portion 18. It slips and scrapes off the oxide film of the electrode part 18.
[0037]
The force acting on the contact 30 when the needle tip of the contact 30 and the electrode portion 18 of the device under test 12 are relatively pressed is the first and second contact in which the needle rear portion 44 extends in the opposite direction. It cancels out by going in the opposite direction with the child group.
[0038]
The elastic plate 26 and the insulating plate 28 are preferably overlapped as described above. By doing so, the thickness dimension of the electrical connecting device can be made smaller than when the elastic plate 26 and the insulating plate 28 are separated. However, the elastic plate 26 and the insulating plate 28 do not necessarily have to be overlapped.
[0039]
In the electrical connection device 10, the needle tip portion 42 of the contact 30 passes through the hole 34 of the elastic plate 26, and the needle rear portion 44 is located in the long hole 38 of the insulating plate 28. The position and posture of the contact 30 with respect to 28 are stabilized. In addition, since the elastic plate 26 and the insulating plate 28 function as a conventional housing, the thickness dimension of the electrical connection device 10 is reduced compared to the conventional device, and the effective length dimension of the contact 30 is reduced. Suitable for high frequency testing.
[0040]
The present invention is not limited to an object to be inspected having a plurality of electrode portions 18 on one surface of the main body portion 16, and a plurality of lead electrodes such as a lead electrode protruding in parallel from the main body portion like a package or a molded integrated circuit. The present invention can also be applied to an electrical connection device used for an energization test of an object to be inspected having a plurality of electrode portions.
[0041]
The present invention can also be applied to an electrical connection device using a contact having a shape other than that of the above-described embodiment, and is also used for an electrical current test for other flat test objects such as a liquid crystal display panel. The present invention can also be applied to a connection device, and can also be applied to an electrical connection device used in a state where the upper and lower sides are reversed from the above-described embodiment.
[0042]
The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.
[Brief description of the drawings]
FIG. 1 is a plan view showing an embodiment of an electrical connection device according to the present invention.
2 is a cross-sectional view taken along line 2-2 in FIG.
3 is an enlarged plan view showing an arrangement state of contacts in the electrical connection device shown in FIG. 1. FIG.
4 is a cross-sectional view of the portion shown in FIG.
5 is a bottom view of the portion shown in FIG. 3 with the substrate removed. FIG.
6 is a left side view of the portion shown in FIG. 3. FIG.
7 is an enlarged cross-sectional view of the vicinity of the contact in the electrical connection device shown in FIG. 1. FIG.
8 is an enlarged cross-sectional view in the vicinity of a contact for explaining the operation of the electrical connecting apparatus shown in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Electrical connection apparatus 12 Test object 14 Board | substrate 18 Electrode part 22 of test object 22 Conductive part 24 of board | substrate 24 Guide 26 Elastic board 28 Electrical insulation board 30 Contactor 32 Guide opening 34 Elastic board hole 38 Electrical insulation Plate long hole 40 Contact deforming portion 42 Contact needle tip 44 Contact needle rear portion 46 Guide pin 48 Guide hole

Claims

An apparatus for electrically connecting a conductive portion formed on one surface of a substrate and an electrode portion of an object to be inspected, which is disposed on one side of the elastic plate and superimposed on the elastic plate An electrical insulating plate, a plurality of contacts disposed on the elastic plate and the electrical insulating plate, and a frame-shaped guide, each contact having a curved outer surface; A needle tip portion that continues to one end of the deformable portion and penetrates the elastic plate, and a needle rear portion that continues to the other end of the deformable portion and terminates in the electrical insulating plate,
The guide has a receiving portion formed by a step portion that receives an edge portion of the elastic plate and the electric insulating plate, and the surface on the other side of the elastic plate is a region excluding the edge portion of the surface. The elastic plate and the electrical insulating plate are arranged to be exposed to the opening of the guide over the entire surface, and are positioned on the guide by a guide pin protruding through the housing portion of the guide, and the guide opening of the elastic plate An electrical connection device in which a needle tip portion of the contact penetrates the elastic plate in a region exposed to the surface.

The elastic plate has a first hole through which a needle tip of the contact penetrates, and the electrical insulating plate has a second hole in which a needle rear part of the contact is received. Electrical connection device.

The electrical connection device according to claim 2, wherein the contact has a rear end in contact with a wall forming the second hole of the electrical insulating plate.

The said guide guides the said to-be-inspected object to the needle | hook tip of the said contactor, The said elastic board and the said electrical insulation board are any one of Claim 1 to 3 arrange | positioned in the said guide. Electrical connection device.

The needle rear portion of the contact extends in the electrical insulating plate, and the needle tip portion of the contact contacts at least a portion opposite to the direction in which the needle rear portion extends with the elastic plate. 5. The electrical connection device according to any one of 1 to 4.

The needle rear portion of the contact extends in the electrical insulating plate, and the needle tip of the contact is an arc surface curved in a direction in which the needle rear portion extends. The electrical connection device according to Item 1.

7. The contact according to claim 1, wherein the contact is divided into a first contact group in which the needle rear part extends to one side and a second contact group in which the needle rear part extends to the other side. The electrical connection device according to Item 1.