JP3849248B2 - Imaging device - Google Patents

Imaging device Download PDF

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Publication number
JP3849248B2
JP3849248B2 JP26314897A JP26314897A JP3849248B2 JP 3849248 B2 JP3849248 B2 JP 3849248B2 JP 26314897 A JP26314897 A JP 26314897A JP 26314897 A JP26314897 A JP 26314897A JP 3849248 B2 JP3849248 B2 JP 3849248B2
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JP
Japan
Prior art keywords
conductor
layer
imaging device
wiring group
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP26314897A
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Japanese (ja)
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JPH11103038A (en
Inventor
敦志 荻野
進 橋本
大介 森本
繁孝 春日
繁 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP26314897A priority Critical patent/JP3849248B2/en
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Publication of JP3849248B2 publication Critical patent/JP3849248B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は、デスクトップ型またはノート型パソコンや携帯電話などに搭載可能な軽量、かつ小型、薄型化された撮像装置、特に固体撮像素子、固体撮像素子を駆動する駆動回路、固体撮像素子からの信号を処理する信号処理回路、これらを制御する制御回路およびレンズ、絞り等の光学系と一体化した撮像装置に関する。
【0002】
【従来の技術】
近年、カメラ一体型ビデオに代表されるように固体撮像素子を内蔵する撮像装置が民生分野をはじめ、監視用、放送用、医療用またはテレビ会議、テレビ電話等のマルチメディアの分野においても広く採用されてきており、その忠実な色彩の再現性や微細なディテールの表現など高画質に関する要求とともに持ち運びに便利な小型化、薄型化、軽量化等に関する要求が高まってきている。このような要求に応えるために固体撮像素子およびその周辺回路を含んで撮像装置を小型化・薄型化する技術開発が盛んに行われてきている。
【0003】
図6は従来の撮像装置の構造を示すものであり、図に示すように、セラミックまたはプラスチックよりなる容器1の内部には固体撮像素子2(以下CCDチップという)とそのCCDチップ2に近接して垂直転送部駆動用ドライバ(以下、VDrと呼ぶ)、CDS、DSP等の半導体チップよりなる周辺回路素子3が搭載された絶縁基板4が収納されている。
【0004】
CCDチップ2と周辺回路素子3とは絶縁基板4上に形成されている配線を介していずれも金線等のワイヤリード5によって相互に電気接続され、また絶縁基板4の周縁部に設けられている電極パッド6は容器1の外周部のピンリード7の容器1内面に露出する端子8に同じくワイヤリード5によってボンディングされている。
【0005】
このように構成された容器1はその上面をフェースプレート9によって封着することにより、その内部は不活性ガスが充填された状態で気密封止されている。なお、10はCCDチップ2の上面に位置するフェースプレート9の開口部に取り付けられている透光性のガラス板である。
【0006】
図7は絶縁基板4の構成を示すものであり、絶縁基板4上には周辺回路素子3を搭載するためのダイボンディング用パッド11、周辺回路素子3の信号パッド12からワイヤリード5によりボンディングされるための接続パッド13およびこの接続パッド13と絶縁基板4の周縁部に設けられている電極パッド6とをつなぐアルミ配線による信号ラインである導体配線群14等が形成されている。このダイボンディング用パッド11の上に周辺回路素子3をダイボンド実装し、その信号パッド12と絶縁基板上の接続パッド13を金線等のワイヤリード5によって接続している。
【0007】
【発明が解決しようとする課題】
しかしながら上記の撮像装置の構成では、電源ラインや信号ラインに配線相互間の干渉ノイズや外部からのノイズが乗り易く、このようなノイズは撮像装置からの出力画像に干渉ノイズとして現れ、画質を大きく劣化させてしまう。このノイズを防止するため、従来はプリント基板の接地層を多くしたり電源ラインにコンデンサを付加したり、信号ラインにフィルタを付加したりすることにより対策してきたが十分なノイズの除去はできていなかった。
【0008】
本発明はこのような課題を解決するものであり、効果的なノイズ軽減を図ることができる撮像装置を提供することを目的とする。
【0009】
【課題を解決するための手段】
上記目的を達成するために本発明は、撮像装置において絶縁性基板よりなる回路基板の主面に形成された導電体層と、その導電体層の全面を覆って形成された絶縁層と、その絶縁層の上面において導電体層の全てを覆うように形成された導体配線群とを有してなるものである。
【0010】
【発明の実施の形態】
本発明の請求項1に記載の発明は、固体撮像素子と、その固体撮像素子を駆動するための駆動回路素子と、前記固体撮像素子から出力される映像信号を処理するための映像信号処理回路素子とを搭載してなる回路基板を収納容器の凹部に載置した撮像装置であって、回路基板が絶縁基板であり、その主面に形成されかつ接地されている導電体層と、その導電体層の全面を覆って形成された絶縁層と、その絶縁層の上面に形成された導体配線群とを有してなるものであり、導体配線群が接地された大きな面積を有する導電体層によって覆われているためにノイズを効率よく軽減することができる。
【0011】
本発明の請求項2に記載の発明は、固体撮像素子と、その固体撮像素子を駆動するための駆動回路素子と、前記固体撮像素子から出力される映像信号を処理するための映像信号処理回路素子とを搭載してなる回路基板を収納容器の凹部に載置した撮像装置であって、回路基板が絶縁基板であり、その主面に形成されかつ接地されている第1の導電体層と、その第1の導電体層の全面を覆って形成された第1の絶縁層と、その第1の絶縁層の上面に形成された導体配線群と、その導体配線群を覆って形成された第2の絶縁層と、その第2の絶縁層の上面にあって導体配線群を覆うように形成されかつ接地されている第2の導電体層とを有してなるものであり、導体配線群が第1の導電体層と第2の導電体層とによってその両面から覆われているために、ノイズ軽減効果を向上させることができる。
【0012】
本発明の請求項3に記載の発明は、請求項2に記載の撮像装置において前記第1の導電体層前記第2の導電体層とが少なくとも1カ所において電気的に接続されているものであり、ノイズ軽減効果の信頼性を向上できる。
【0013】
つぎに本発明の一実施の形態について図面を参照しながら説明する。
(実施の形態1)
図1は本発明の第1の実施の形態における撮像装置の構造を示すものであり、その断面図における基本的な構造は図6において説明した従来の撮像装置とほぼ同様であり、1はセラミックまたはプラスチックよりなる容器、2はCCDチップ、3はVDr、CDS、DSP等の半導体チップよりなる周辺回路素子、4はガラスやセラミック基板よりなる絶縁基板である。
【0014】
CCDチップ2と周辺回路素子3とは絶縁基板4上に形成されている配線(図示せず)を介していずれも金線等のワイヤリード5によって相互に電気接続され、また絶縁基板4の周縁部に設けられている電極パッド6は容器1の外周部のピンリード7の容器1の内面に露出する端子8に同じくワイヤリード5によってボンディングされている。
【0015】
また容器1はその上面を透光性のガラス10を備えたフェースプレート9によって封着することにより、その内部は不活性ガスが充填された状態で気密封止されている。
【0016】
図2は図1に示す絶縁基板4の平面図であり、周辺回路素子3は絶縁基板4の上面に設けられているダイボンディングパッド11上にダイボンディングされており、その端子12は絶縁基板4の上面に形成されているアルミニウム膜等よりなる導体配線群14の接続パッド13に金線5等によりワイヤボンディングされている。15は本発明が特徴とするノイズ軽減用の接地配線となる導電体層である。
【0017】
このような配線構造における本発明の特徴をさらに図3を用いて説明する。図3は図2に示す本発明の第1の実施の形態における撮像装置の回路基板の一部分を拡大して示した断面図である。図に示すように絶縁基板4の上面に図2の平面図に見られる導体配線群14の下面にアルミニウム等の導電体層15が設けられ、その上面にシリコン酸化物よりなる絶縁層16を介してアルミニウム等よりなる導体配線群14が形成されている。導電体層15はその端子が接地されており、したがって信号線となる導体配線群14の下面に導電体層15が形成されているために、導体配線群14を外部ノイズから保護することが可能となる。
【0018】
(実施の形態2)
つぎに図4は本発明の第2の実施の形態における撮像装置に用いられている回路基板の断面の一部を拡大して示したものであり、本実施の形態が第1の実施の形態の構造と異なる点は導体配線群14を第1の導電体層15および第2の導電体層25の2つの接地導体で挟持した点である。すなわち図に見られるように第1の実施の形態において得られた回路基板の導体配線群14の上面にシリコン酸化物よりなる第2の絶縁層26を設けたのち、その第2の絶縁層26の上面に導体配線群14の全体を覆うように第2の導電体層25を形成したものである。この第1の導電体層15および第2の導電体層25はいずれもその端子が接地された接地導体となっている。したがって信号線となる導体配線群14の下面と上面を第1の導電体層15および第2の導電体層25とによって両面から完全に覆っているために、導体配線群14を配線相互間の干渉ノイズや外部ノイズから効率よく保護することが可能となる。
【0019】
(実施の形態3)
つぎに図5は本発明の第3の実施の形態における撮像装置に用いられている回路基板の断面の一部を拡大して示したものであり、本実施の形態が第2の実施の形態の構造と異なる点は導体配線群14を挟持する第1の導電体層15と第2の導電体層25とを導体配線群14の線間の少なくとも1カ所の接続孔31で接続した点である。すなわち図5に見られるように、実施の形態2における工程の第2の導電体層25の形成の前工程において導体配線群14の線間の少なくとも1カ所の第2の絶縁層26および第1の絶縁層16をエッチングすることにより接続孔31を形成したのち、第2の導電体層25を蒸着またはスパッタリングにより形成すると同時に接続孔31の内部にも第2の導電体層25を埋め込み、第1の導電体層15と接続する。このように信号線となる導体配線群14の下面と上面をそれぞれ絶縁層を介して第1の導電体層15および第2の導電体層25とによって両面から覆うと同時に導体配線群14の少なくとも1カ所の線間においてこれら接地導体を接続しているために、導体配線群13を高い信頼性において外部ノイズから保護することが可能となる
【0020】
【発明の効果】
上記各実施の形態より明らかなように本発明は、回路基板の主面に形成された導電体層と、その導電体層の全面を覆って形成された絶縁層と、その絶縁層の上面に形成された導体配線群とを有するものであり、各半導体素子より外部回路へ接続する信号配線(導体配線群)を電極面積の大なる接地導体(導電体層)によりシールドすることにより各種ノイズを著しく軽減することができ、したがって良好な画像出力が得られる高い性能を有した撮像装置を実現することが可能となった。
【図面の簡単な説明】
【図1】本発明の一実施の形態における撮像装置の断面図
【図2】同第1の実施の形態における撮像装置の回路基板の平面図
【図3】図2のA−A’線における拡大断面図
【図4】本発明の第2の実施の形態における撮像装置に用いられている回路基板のA−A’線における拡大断面図
【図5】同第3の実施の形態における撮像装置に用いられている回路基板のA−A’線における拡大断面図
【図6】従来の撮像装置の断面図
【図7】従来の撮像装置における回路基板の平面図
【符号の説明】
1 容器(収納容器)
2 CCDチップ(固体撮像素子)
3 周辺回路素子(駆動回路素子、映像処理回路素子)
4 絶縁基板(回路基板)
14 導体配線群
15 導電体層
16 絶縁層
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a light-weight, small, and thin imaging device that can be mounted on a desktop or laptop computer, a mobile phone, and the like, particularly a solid-state imaging device, a drive circuit that drives the solid-state imaging device, and a signal from the solid-state imaging device The present invention relates to an image pickup apparatus integrated with an optical system such as a lens and a diaphragm.
[0002]
[Prior art]
In recent years, imaging devices with built-in solid-state imaging devices, as represented by camera-integrated video, have been widely adopted not only in the consumer field, but also in multimedia fields such as surveillance, broadcasting, medical or videoconferencing, videophones, etc. In addition to the demands for high image quality such as faithful color reproducibility and fine detail expression, there are increasing demands for miniaturization, thickness reduction, weight reduction, etc. that are convenient to carry. In order to meet such a demand, technology development for reducing the size and thickness of an imaging device including a solid-state imaging device and its peripheral circuits has been actively conducted.
[0003]
FIG. 6 shows the structure of a conventional image pickup apparatus. As shown in the figure, a solid-state image pickup device 2 (hereinafter referred to as a CCD chip) and a CCD chip 2 are located in a container 1 made of ceramic or plastic. An insulating substrate 4 on which a peripheral circuit element 3 made of a semiconductor chip such as a vertical transfer unit driving driver (hereinafter referred to as VDr), a CDS, or a DSP is mounted is accommodated.
[0004]
The CCD chip 2 and the peripheral circuit element 3 are both electrically connected to each other by a wire lead 5 such as a gold wire through a wiring formed on the insulating substrate 4, and provided at the peripheral portion of the insulating substrate 4. The electrode pad 6 is bonded to the terminal 8 exposed on the inner surface of the container 1 of the pin lead 7 on the outer periphery of the container 1 by the wire lead 5.
[0005]
The container 1 configured as described above is hermetically sealed with the inside filled with an inert gas by sealing the upper surface of the container 1 with the face plate 9. Reference numeral 10 denotes a translucent glass plate attached to the opening of the face plate 9 located on the upper surface of the CCD chip 2.
[0006]
FIG. 7 shows a configuration of the insulating substrate 4. The die bonding pad 11 for mounting the peripheral circuit element 3 and the signal pad 12 of the peripheral circuit element 3 are bonded to the insulating substrate 4 by the wire leads 5. A connection pad 13 for this purpose, and a conductor wiring group 14 that is a signal line made of aluminum wiring that connects the connection pad 13 and the electrode pad 6 provided on the peripheral edge of the insulating substrate 4 are formed. The peripheral circuit element 3 is mounted on the die bonding pad 11 by die bonding, and the signal pad 12 and the connection pad 13 on the insulating substrate are connected by a wire lead 5 such as a gold wire.
[0007]
[Problems to be solved by the invention]
However, in the configuration of the imaging device described above, interference noise between wirings and noise from outside can easily ride on the power supply line and the signal line, and such noise appears as interference noise in the output image from the imaging device, and the image quality is greatly increased. It will deteriorate. In order to prevent this noise, measures have been taken in the past by increasing the ground layer of the printed circuit board, adding a capacitor to the power supply line, and adding a filter to the signal line, but sufficient noise removal has been achieved. There wasn't.
[0008]
The present invention solves such a problem, and an object thereof is to provide an imaging apparatus capable of effectively reducing noise.
[0009]
[Means for Solving the Problems]
To achieve the above object, the present invention provides a conductive layer formed on a main surface of a circuit board made of an insulating substrate in an imaging device, an insulating layer formed so as to cover the entire surface of the conductive layer, And a conductor wiring group formed so as to cover the entire conductor layer on the upper surface of the insulating layer.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
According to the first aspect of the present invention, there is provided a solid-state imaging device, a driving circuit element for driving the solid-state imaging device, and a video signal processing circuit for processing a video signal output from the solid-state imaging device. An imaging device in which a circuit board on which an element is mounted is placed in a recess of a storage container, the circuit board being an insulating board, a conductor layer formed on the main surface and grounded, and the conductive layer A conductor layer having an insulating layer formed to cover the entire surface of the body layer and a conductor wiring group formed on the upper surface of the insulating layer, and having a large area in which the conductor wiring group is grounded Therefore, noise can be reduced efficiently.
[0011]
According to a second aspect of the present invention, there is provided a solid-state image sensor, a drive circuit element for driving the solid-state image sensor, and a video signal processing circuit for processing a video signal output from the solid-state image sensor. An imaging device having a circuit board on which an element is mounted placed in a recess of a storage container, wherein the circuit board is an insulating substrate, and is formed on a main surface of the first conductor layer and grounded A first insulating layer formed over the entire surface of the first conductor layer , a conductor wiring group formed on the upper surface of the first insulating layer , and a conductor wiring group formed over the conductor wiring group. A second insulating layer; and a second conductor layer formed on the upper surface of the second insulating layer so as to cover the conductor wiring group and grounded. A group is covered from both sides by a first conductor layer and a second conductor layer In order, it is possible to improve the noise reduction effect.
[0012]
According to a third aspect of the present invention, in the imaging device according to the second aspect, the first conductor layer and the second conductor layer are electrically connected at least at one place. Therefore, the reliability of the noise reduction effect can be improved.
[0013]
Next, an embodiment of the present invention will be described with reference to the drawings.
(Embodiment 1)
FIG. 1 shows the structure of the image pickup apparatus according to the first embodiment of the present invention. The basic structure in the cross-sectional view is substantially the same as that of the conventional image pickup apparatus described in FIG. Alternatively, a plastic container, 2 is a CCD chip, 3 is a peripheral circuit element made of a semiconductor chip such as VDr, CDS, or DSP, and 4 is an insulating substrate made of glass or a ceramic substrate.
[0014]
The CCD chip 2 and the peripheral circuit element 3 are both electrically connected to each other by a wire lead 5 such as a gold wire through a wiring (not shown) formed on the insulating substrate 4, and the peripheral edge of the insulating substrate 4. The electrode pad 6 provided in the portion is bonded to the terminal 8 exposed on the inner surface of the container 1 of the pin lead 7 on the outer periphery of the container 1 by the wire lead 5.
[0015]
Further, the upper surface of the container 1 is sealed with a face plate 9 provided with a light-transmitting glass 10, so that the inside thereof is hermetically sealed in a state filled with an inert gas.
[0016]
FIG. 2 is a plan view of the insulating substrate 4 shown in FIG. 1. The peripheral circuit element 3 is die-bonded on a die bonding pad 11 provided on the upper surface of the insulating substrate 4, and its terminal 12 is the insulating substrate 4. Wire bonding is performed to the connection pad 13 of the conductor wiring group 14 made of an aluminum film or the like formed on the upper surface of the metal wire 5 by a gold wire 5 or the like. Reference numeral 15 denotes a conductor layer serving as a ground wiring for noise reduction, which is a feature of the present invention.
[0017]
The characteristics of the present invention in such a wiring structure will be further described with reference to FIG. FIG. 3 is an enlarged cross-sectional view showing a part of the circuit board of the imaging apparatus according to the first embodiment of the present invention shown in FIG. As shown in the figure, a conductor layer 15 such as aluminum is provided on the lower surface of the conductor wiring group 14 shown in the plan view of FIG. 2 on the upper surface of the insulating substrate 4, and an insulating layer 16 made of silicon oxide is provided on the upper surface thereof. Thus, a conductor wiring group 14 made of aluminum or the like is formed. Since the conductor layer 15 has a terminal grounded, and thus the conductor layer 15 is formed on the lower surface of the conductor wiring group 14 serving as a signal line, the conductor wiring group 14 can be protected from external noise. It becomes.
[0018]
(Embodiment 2)
Next, FIG. 4 is an enlarged view of a part of a cross section of a circuit board used in the image pickup apparatus according to the second embodiment of the present invention. This embodiment is the first embodiment. The difference from this structure is that the conductor wiring group 14 is sandwiched between two ground conductors of the first conductor layer 15 and the second conductor layer 25. That is, as shown in the figure, after the second insulating layer 26 made of silicon oxide is provided on the upper surface of the conductor wiring group 14 of the circuit board obtained in the first embodiment, the second insulating layer 26 is provided. A second conductor layer 25 is formed on the upper surface of the conductor layer so as to cover the entire conductor wiring group. Both the first conductor layer 15 and the second conductor layer 25 are ground conductors whose terminals are grounded. Therefore, since the lower surface and the upper surface of the conductor wiring group 14 to be signal lines are completely covered from both surfaces by the first conductor layer 15 and the second conductor layer 25, the conductor wiring group 14 is arranged between the wirings. It is possible to efficiently protect from interference noise and external noise.
[0019]
(Embodiment 3)
Next, FIG. 5 is an enlarged view of a part of a cross section of a circuit board used in an imaging apparatus according to the third embodiment of the present invention. This embodiment is a second embodiment. The difference from this structure is that the first conductor layer 15 and the second conductor layer 25 sandwiching the conductor wiring group 14 are connected by at least one connection hole 31 between the lines of the conductor wiring group 14. is there. That is, as seen in FIG. 5, in the step before the formation of the second conductor layer 25 in the step of the second embodiment, at least one second insulating layer 26 and the first insulating layer 26 between the lines of the conductor wiring group 14 are formed. After forming the connection hole 31 by etching the insulating layer 16, the second conductor layer 25 is formed by vapor deposition or sputtering, and at the same time, the second conductor layer 25 is embedded in the connection hole 31. 1 conductor layer 15. In this way, the lower surface and the upper surface of the conductor wiring group 14 to be signal lines are respectively covered from both surfaces by the first conductor layer 15 and the second conductor layer 25 via the insulating layer, and at least the conductor wiring group 14 Since these ground conductors are connected between one line, the conductor wiring group 13 can be protected from external noise with high reliability.
【The invention's effect】
As is clear from the above embodiments, the present invention provides a conductor layer formed on the main surface of the circuit board, an insulating layer formed over the entire surface of the conductor layer, and an upper surface of the insulating layer. The conductor wiring group is formed, and the signal wiring (conductor wiring group) connected from each semiconductor element to the external circuit is shielded by a ground conductor (conductor layer) having a large electrode area, thereby causing various noises. Accordingly, it has become possible to realize an imaging apparatus having high performance capable of remarkably reducing and thus obtaining a good image output.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of an imaging device according to an embodiment of the present invention. FIG. 2 is a plan view of a circuit board of the imaging device according to the first embodiment. FIG. 4 is an enlarged cross-sectional view taken along line AA ′ of the circuit board used in the image pickup apparatus according to the second embodiment of the present invention. FIG. 5 is an image pickup apparatus according to the third embodiment. FIG. 6 is a cross-sectional view of a conventional image pickup apparatus. FIG. 7 is a plan view of a circuit board in the conventional image pickup apparatus.
1 container (storage container)
2 CCD chip (solid-state image sensor)
3 Peripheral circuit elements (drive circuit elements, video processing circuit elements)
4 Insulating substrate (circuit board)
14 Conductor group 15 Conductor layer 16 Insulating layer

Claims (3)

固体撮像素子と、その固体撮像素子を駆動するための駆動回路素子と、前記固体撮像素子から出力される映像信号を処理するための映像信号処理回路素子とを搭載してなる回路基板を収納容器の凹部に載置した撮像装置であって、前記回路基板が絶縁基板であり、その主面に形成されかつ接地されている導電体層と、その導電体層の全面を覆って形成された絶縁層と、その絶縁層の上面に形成された導体配線群とを有してなる撮像装置。  A circuit board including a solid-state image sensor, a drive circuit element for driving the solid-state image sensor, and a video signal processing circuit element for processing a video signal output from the solid-state image sensor The circuit board is an insulating substrate, the conductor layer is formed on the main surface and grounded, and the insulating layer is formed so as to cover the entire surface of the conductor layer. An imaging device having a layer and a conductor wiring group formed on the upper surface of the insulating layer. 固体撮像素子と、その固体撮像素子を駆動するための駆動回路素子と、前記固体撮像素子から出力される映像信号を処理するための映像信号処理回路素子とを搭載してなる回路基板を収納容器の凹部に載置した撮像装置であって、前記回路基板が絶縁基板であり、その主面に形成されかつ接地されている第1の導電体層と、その第1の導電体層の全面を覆って形成された第1の絶縁層と、その第1の絶縁層の上面に形成された導体配線群と、その導体配線群を覆って形成された第2の絶縁層と、その第2の絶縁層の上面にあって前記導体配線群を覆うように形成されかつ接地されている第2の導電体層とを有してなる撮像装置。A circuit board including a solid-state image sensor, a drive circuit element for driving the solid-state image sensor, and a video signal processing circuit element for processing a video signal output from the solid-state image sensor An imaging device mounted on a concave portion of the first conductive layer, wherein the circuit board is an insulating substrate, the first conductive layer formed on the main surface and grounded, and the entire surface of the first conductive layer A first insulating layer formed so as to cover; a conductor wiring group formed on an upper surface of the first insulating layer ; a second insulating layer formed covering the conductor wiring group; and a second An imaging device comprising: a second conductor layer formed on an upper surface of an insulating layer so as to cover the conductor wiring group and grounded. 前記第1の導電体層と前記第2の導電体層とが少なくとも1箇所において電気的に接続されている請求項2記載の撮像装置。  The imaging device according to claim 2, wherein the first conductor layer and the second conductor layer are electrically connected at least at one place.
JP26314897A 1997-09-29 1997-09-29 Imaging device Expired - Fee Related JP3849248B2 (en)

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JP2991039B2 (en) * 1994-06-16 1999-12-20 三菱電機株式会社 Contact image sensor
JPH09129912A (en) * 1995-10-27 1997-05-16 Sharp Corp Light receiving unit and manufacture thereof
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