JP3830483B2 - Optical configuration for reflection spectroscopy observation. - Google Patents

Description

  The present invention relates to a time-series conversion pulse spectroscopic measurement apparatus, and more particularly to an optical arrangement for observing its reflection spectral spectrum.

  In recent years, with the practical application of ultra-short pulse laser technology, the radiation technology and detection technology of pulsed coherent far-infrared radiation (especially in the terahertz band) have advanced dramatically. As a result, time-series conversion pulse spectroscopy using this pulsed far-infrared electromagnetic wave has become possible, and the development of a practical device for time-series conversion pulse spectroscopy has been pioneered in Japan.

  Time-series conversion pulse spectroscopy is a technique for measuring the time-dependent electric field strength of a pulsed electromagnetic wave and Fourier-transforming the time-dependent data (time-series data) so that each frequency component forming the pulse This is a spectroscopic method for obtaining electric field strength and phase. One of the features of this spectroscopic method is that the measurement wavelength region is a boundary region between light and radio waves, which has conventionally been difficult to measure. Therefore, elucidation of the properties of new materials and new phenomena is expected by this spectroscopy. In addition, only the electric field strength of electromagnetic waves can be obtained with conventional spectroscopy, but with this time-series conversion pulse spectroscopy, only the electric field strength (amplitude) of electromagnetic waves is directly measured because the time variation of the electric field strength of electromagnetic waves is directly measured. Not only that, it has the unique feature of being able to obtain its phase. Therefore, a phase shift spectrum can be obtained by comparing with the case where there is no sample. Since the phase shift is proportional to the wave vector, the dispersion relationship in the sample can be determined using this spectroscopy, and the dielectric constant of the dielectric material can also be obtained from this dispersion relationship (Japanese Patent Laid-Open No. 2005-249867). 2002-277394 gazette).

  FIG. 1 shows an example of a conventional time-series conversion pulse spectrometer.

  Reference numeral 1 denotes a light source that emits a femtosecond laser. The femtosecond laser light L1 emitted from the light source 1 is split by a beam splitter (dividing means) 2. One femtosecond laser is applied to the pulsed light emitting means 5 as excitation pulsed laser light (pump pulsed light) L2. At this time, the excitation pulse laser light L2 is modulated by the optical chopper 3 and then condensed by the objective lens 4. The pulsed light radiating means 5 is, for example, a photoconductive element, and when the excitation pulse laser beam L2 is irradiated, a current flows instantaneously and radiates a far-infrared electromagnetic wave pulse. The far-infrared electromagnetic wave pulse is guided by the parabolic mirrors 6 and 7 and irradiated to the measurement sample 8. The reflected or transmitted pulsed electromagnetic wave of the sample 8 (transmitted pulse electromagnetic wave in this example) is guided to the detection means 12 by the parabolic mirrors 9 and 10.

  The other laser light split by the beam splitter 2 is guided to the detection means 12 as a detection pulse laser light (sampling pulse light) L3. This detection means 12 is also a photoconductive element, for example, and is irradiated with the detection pulse laser beam L3 and becomes conductive only at that moment. Therefore, the electric field strength of the reflected or transmitted pulse electromagnetic wave from the sample 8 that reached that moment is obtained. It can be detected as a current. The time series signal of the electric field intensity of the reflected or transmitted pulsed electromagnetic wave from the sample 8 is transmitted to the detection pulse laser beam L3 for a predetermined time with respect to the excitation pulse laser beam L2 using the optical delay means 13 (or 14). It can be obtained by giving a delay time difference at intervals. In this example, in addition to the optical delay means 13 (or 14) for time series signal measurement, an optical delay means 14 (or 13) for time origin adjustment is also provided.

Each time-resolved data of the electric field intensity of the reflected or transmitted pulse electromagnetic wave of the sample 8 is processed by the signal processing means. That is, it is transmitted to the computer 17 via the lock-in amplifier 16 and is sequentially stored as time-series data, and the series of time-series data is subjected to Fourier transform processing by the computer 17 and converted to a frequency (frequency) space. Thus, the spectrum of the amplitude and phase of the electric field intensity of the reflected or transmitted pulse electromagnetic wave of the sample 8 is obtained.
JP 2003-131137 A JP 2003-121355 A JP 2003-83888 A JP 2003-75251 A JP 2003-14620 A JP 2002-277393 A JP 2002-277394 A JP 2002-257629 A JP 2002-243416 A JP 2002-98634 A JP 2001-141567 A JP 2001-66375 A JP 2001-21503 A JP 2001-275103 A Q. Wu and X.-C. Zhang, Appl. Phys. Lett. 67 (1995) 3523) M. Tani, S. Matsuura, K. Sakai, and S. Nakashima, Appl. Opt. 36 (1997) 7853 Sakai Kiyomi: Spectroscopic Studies, 50 (2001) 261 Seiji Kojima, Seiji Nishizawa, Mio Takeda: Spectroscopic Studies, 52 (2003) 69

  As described above, in the time-series conversion pulse spectrometer, the far-infrared wavelength region, which was difficult with conventional spectrometers, is not only included in the spectrum measurement band, but not only intensity dispersion but also phase dispersion is included in the measurement spectrum. It can be measured independently. Furthermore, time-resolved spectroscopic measurement that tracks a transient phenomenon in the picosecond range in real time is also possible. Because of such characteristics, the types and states (solid, liquid, gas, etc.) of the sample that can be measured or are measured by the time-series conversion pulse spectroscopic measurement device are diverse. However, each light beam constituting the light beam of the incident light to the sample and the reflected light from the sample is reflected by different parts in each component on the incident side optical path (that is, through different paths between the light beams) to the sample. After being guided and reflected by the sample, it is reflected by different parts of each component on the detection-side optical path and guided to the detection means side, but the optical axis perpendicular to the sample surface of the sample or perpendicular to the sample surface In the case of an optical arrangement that does not have symmetry with respect to the surface, there is a problem that a “time shift between light beams” due to the passage of light beams through different paths has occurred, preventing more accurate spectroscopic measurement. .

  Accordingly, the present invention has been made in view of the above circumstances, and in the case of an optical arrangement having no symmetry with respect to the optical axis perpendicular to the specimen surface or the perpendicular plane in the time series conversion pulse spectroscopic measurement. An object of the present invention is to provide a time-series conversion pulse spectroscopic measurement apparatus capable of performing spectroscopic measurement with higher accuracy by avoiding “time shift between light beams” caused by passage of light beams through different paths.

In order to achieve the above object, the present invention employs the following configuration.
The time-series conversion pulse spectroscopic measurement device according to claim 1 comprises: a light emitting means; a detecting means for detecting a time series signal of an electric field intensity of reflected light from a sample irradiated with light from the light emitting means; A sample holding unit for holding the sample, and a sample part entrance / exit optical system for guiding the light from the light emitting means side to the sample and guiding the reflected light from the sample by the irradiation to the detecting means side, In the provided time-series conversion pulse spectroscopic measurement device, the sample holder and the sample portion entrance / exit optical system are provided in an attached optical unit that can be attached to and detached from the device, and receive light from the light emitting means. At least one optical element (incident side adjacent optical element) to be sent into the attached optical unit, and at least one optical element (detection side adjacent optical element) to receive the light emitted from the attached optical unit and send it to the detection means And In the attached optical unit, an incident-side sample portion farthest optical element that directly receives light from the incident-side adjacent optical element and sends it to the sample side, and light from the sample side directly to the detection-side adjacent optical element provided a detection-side sample unit farthest optical element sent by the sample unit input and output optical system is configured to have a 180 ° rotationally symmetrical optical arrangement with respect to an axis perpendicular to the sample surface of the sample, the incident-side The FOV value of the sample portion farthest optical element matches the FOV value of the incident side adjacent optical element, and the FOV value of the detection side farthest optical element and the FOV of the detection side adjacent optical element It is characterized by the fact that the values match .

The time-series conversion pulse spectroscopic measurement device according to claim 2 comprises: a light emitting means; a detecting means for detecting a time series signal of an electric field intensity of reflected light from a sample irradiated with light from the light emitting means; A sample holding unit for holding the sample, and a sample part entrance / exit optical system for guiding the light from the light emitting means side to the sample and guiding the reflected light from the sample by the irradiation to the detecting means side, In the provided time-series conversion pulse spectroscopic measurement device, the sample holder and the sample portion entrance / exit optical system are provided in an attached optical unit that can be attached to and detached from the device, and receive light from the light emitting means. At least one optical element (incident side adjacent optical element) to be sent into the attached optical unit, and at least one optical element (detection side adjacent optical element) to receive the light emitted from the attached optical unit and send it to the detection means And In the attached optical unit, an incident-side sample portion farthest optical element that directly receives light from the incident-side adjacent optical element and sends it to the sample side, and light from the sample side directly to the detection-side adjacent optical element a detection-side sample unit farthest optical element sending is provided, the sample unit input and output optical system is configured to have a optical arrangement of plane symmetry with respect to a plane perpendicular to the sample surface of the sample, the incident-side sample unit The FOV value of the farthest optical element matches the FOV value of the incident side adjacent optical element, and the FOV value of the detection side sample part farthest optical element and the FOV value of the detection side adjacent optical element And are consistent with each other.

Here, the “sample part entrance / exit optical system” according to claim 1 or 2 requires replacement / adjustment of the optical system and / or change / adjustment of the optical arrangement when changing the type or state of the sample. An optical system including optical elements arranged in front of and behind the sample (or sample holder) in the optical path, the optical system disposed between the light emitting means and the detecting means in the attached optical unit. Refers to the optical system provided in

In addition, “ incident light beam from the light emitting means side to the sample portion entrance / exit optical system” means that the light beam from the light emitting means side on the incident side optical path among the plurality of optical elements of the sample portion entrance / exit optical system. To the optical element farthest from the sample (hereinafter referred to as “incident side sample portion farthest optical element”), the optical element adjacent to the optical element on the optical path (hereinafter referred to as “incident side adjacent optical element”). And a light beam incident through an optical element arranged outside the attached optical unit . Here, the incident side optical path refers to an optical path from the sample or the sample holder to the light emitting means side. The incident side adjacent optical element is, for example, a reflection mirror.

Further, the “ emitted light beam from the sample part entrance / exit optical system to the detection means side” means an optical element farthest from the sample on the detection side optical path among the plurality of optical elements of the sample part entrance / exit optical system (hereinafter referred to as the “exit beam”). , referred to as "detection-side sample unit farthest optical element".) to the detecting means side from the optical element on the optical path adjacent the optical element (hereinafter, referred to as "detection side adjacent optical elements".) comes a A light beam emitted through an optical element arranged outside the optical unit . Here, the detection side optical path refers to the optical path from the sample or the sample holder to the detection means side. The detection side adjacent optical element is, for example, a reflection mirror.

Further, “ having optical matching with respect to the incident light beam” means that the FOV (Field of view) value of the farthest optical element on the incident side and the FOV value of the adjacent optical element on the incident side coincide with each other. means. “ Having optical alignment with respect to the emitted light beam” means that the FOV value of the detection-side sample portion farthest optical element matches the FOV value of the detection-side adjacent optical element. It is preferable that the optical alignment is also provided between the optical elements of the sample portion entrance / exit optical system.

The time-series conversion pulse spectroscopic measurement device according to claim 1 is further provided in an attached optical unit in which the sample holding unit and the sample unit entrance / exit optical system can be attached to and detached from the time-series conversion pulse spectroscopic measurement device. It is characterized by.

The time-series conversion pulse spectroscopic measurement apparatus according to claim 3 is characterized in that the sample portion entrance / exit optical system includes an optical system having a Cassegrain type optical arrangement before and after the sample on an optical path.

Here, “an optical system having a Cassegrain-type optical arrangement” described in claim 3 is an ideal Cassegrain-type that uses a concave parabolic mirror as a primary mirror and a convex hyperboloidal mirror as a secondary mirror. All of them are provided with a concave primary mirror and a convex secondary mirror. In addition, the present invention is not limited to an optical system having such a Cassegrain type optical arrangement, but includes modifications or improvements of the Cassegrain type optical arrangement. Therefore, for example, a Schmidt-Cassegrain type with a correction plate added to the Cassegrain type is included.

According to the time-series conversion pulse spectroscopic measurement device according to claim 1, since the optical arrangement is 180 ° rotationally symmetric with respect to the axis perpendicular to the sample surface of the sample, The “time shift” can be eliminated, and the time resolution of spectroscopic measurement is improved. In particular, the time-series conversion pulse spectroscopic measurement device detects a time-series signal of the electric field intensity of the reflected light, so that it is extremely possible to eliminate the “time shift” of the light beam due to the asymmetry of the optical arrangement. It is advantageous. In addition, since it is configured to optically match the incident light beam and the outgoing light beam, the light sent from the light emitting means side to the sample part incident / exit optical system can be received by the sample part incident / exit optical system without loss, The light reflected from the sample is also sent out from the sample portion entrance / exit optical system to the detection means without loss.

According to the time-series conversion pulse spectroscopic measurement apparatus according to claim 2, since the optical arrangement is plane-symmetric with respect to a surface perpendicular to the sample surface of the sample, the “time shift” of the light beam caused by the asymmetry of the optical arrangement. The time resolution of spectroscopic measurement is improved. In particular, the time-series conversion pulse spectroscopic measurement device detects a time-series signal of the electric field intensity of the reflected light, so that it is extremely possible to eliminate the “time shift” of the light beam due to the asymmetry of the optical arrangement. It is advantageous. In the case of the “optical arrangement rotationally symmetrical by 180 ° with respect to an axis perpendicular to the sample surface of the sample” according to claim 1, the figure formed by each image point on the image plane is a figure formed by each object point on the object plane In the case of claim 2, there is a difference that it is upside down, but in either case, the two figures are similar, and the luminous flux due to the asymmetry of the optical arrangement The point that contributes to the elimination of “time lag” is the same. In addition, since it is configured to optically match the incident light beam and the outgoing light beam, the light sent from the light emitting means side to the sample part incident / exit optical system can be received by the sample part incident / exit optical system without loss, The light reflected from the sample is also sent out from the sample portion entrance / exit optical system to the detection means without loss.

According to the time-series conversion pulse spectroscopic measurement device according to claim 1 or 2 , each attached optical unit has an optical system or an optical arrangement suitable for the type and state (solid, liquid, gas, etc.) of the sample. With the configuration, it is possible to easily perform spectroscopic measurement of various samples and their states in a short time. In addition, since the incident light beam and the outgoing light beam are optically matched, it is possible to prevent the loss of light at the connecting portion between the attached optical unit and the apparatus even by replacing the attached optical unit.

According to the time-series conversion pulse spectroscopic measurement device of the third aspect , since the focal point is obtained by turning the axis , the entire length can be remarkably shortened with respect to the focal length. In addition, there is an effect that various aberrations can be easily reduced.

  FIG. 2 shows a schematic configuration of an embodiment of an optical arrangement for observing a time-series conversion pulse spectroscopic measurement apparatus according to the present invention and a reflection spectroscopic spectrum in the apparatus. The same components as those in FIG. 1 are denoted by the same reference numerals and the description thereof is omitted.

This time-series conversion pulse spectroscopic measurement apparatus includes a pulse laser light source 1 and a dividing unit 2 that divides the pulse laser light L1 from the pulse laser light source 1 into an excitation pulse laser light L2 and a detection pulse laser light L3. Pulsed light emitting means (light emitting means) 5 that emits pulsed light including wavelengths in the far-infrared wavelength region by irradiation with the excitation pulse laser L2, and a sample 8 irradiated with pulsed light from the pulsed light emitting means 5 Detecting means 12 for detecting a time-series signal of the electric field intensity of the reflected pulsed light from the sample, a sample holding part 31 for holding the sample 8, and sample part incident optics for guiding the pulsed light from the pulsed light emitting means side to the sample A time-series conversion pulse component comprising: a system 32, 33, 34; and a sample part emission optical system 35, 36, 37 for guiding the pulse light reflected from the sample by this irradiation to the detection means side. The measuring device, the sample unit input and output optics 32,33,34,35,36,37 has a 180 ° rotational symmetrical optical arrangement with respect to an axis perpendicular 40 to the sample surface of the sample 8, and the light Incident luminous flux to the sample part entrance / exit optical system 32, 33, 34, 35, 36, 37 from the radiation means side and exit from the sample part entrance / exit optical system 32, 33, 34, 35, 36, 37 to the detection means side The optical flux is optically matched. In particular, in this embodiment, the sample holder 31 for holding the sample 8 and the sample portion entrance / exit optical systems 32, 33, 34, 35, 36, and 37 are attached optics that can be attached to and detached from the time-series conversion pulse spectrometer. This is a case where the unit 30 is provided. Further, the optical arrangement of the sample portion entrance / exit optical systems 32, 33, 34, 35, 36, and 37 is relative to a surface perpendicular to the sample surface of the sample 8, that is, a surface that includes the axis 40 and is perpendicular to the paper surface. It is also plane symmetric.

  In the time-series conversion pulse spectroscopic measurement apparatus of the present invention having the above-described configuration, spectroscopic measurement of a sample is performed as follows.

That is, the pulse laser beam L1 emitted from the light source 1 is split by the splitting unit 2 into an excitation pulse laser beam (pump pulse beam) L2 and a detection pulse laser beam (sampling pulse beam) L3. The excitation pulse laser beam L2 is applied to the pulsed light emission means 5 through the lens 4. By this irradiation, the pulsed light radiation means 5 emits a far-infrared electromagnetic wave pulse. The far-infrared electromagnetic wave pulse is sequentially reflected by the reflection mirror 26 and the reflection mirror (incident-side adjacent optical element) 27, and the incident-side light sample portion farthest optical element (in this case, the reflection mirror) in the attached optical unit 30. 32 and further condensed through the optical elements 33 and 34 of the sample portion incidence optical system to irradiate the sample 8. The reflected pulse electromagnetic wave reflected from the sample 8 including the optical information of the sample 8 is reflected by the optical elements 35 and 36 of the sample part emission optical system, and further reflected by the detection-side sample part farthest optical element 37 and attached optics. The light is guided to the reflection mirror ( detection side adjacent optical element) 28 and the reflection mirror 29 outside the unit 30, and further guided to the detection means 12. On the other hand, the detection pulse laser beam L3 divided by the dividing means 2 is irradiated to the detecting means 12, and the detecting means 12 is made conductive only at that moment. As a result, the electric field strength of the reflected pulse electromagnetic wave from the sample 8 that has reached that moment can be detected as a current. Here, a time series of the electric field intensity of the reflected pulse electromagnetic wave from the sample 8 is provided by applying a delay time difference at predetermined time intervals to the detection pulse laser light L3 by the reflector 42 with respect to the excitation pulse laser light L2. A signal can be obtained. Here, the reflection mirrors 27 and 28 are aspherical mirrors (in this case, in particular, elliptical mirrors), and the reflection mirrors 26 and 29 are plane mirrors. The optical elements 32, 33, 36 and 37 are plane mirrors, and the optical elements 34 and 35 are aspherical mirrors (in this case, in particular, elliptical mirrors).

  In the embodiment shown in FIG. 2, the “incident light beam from the light emitting means side to the sample portion entrance / exit optical system” according to claim 1 or 2 is reflected by the incident side adjacent optical element 27. This refers to a light beam (typically representative rays A, B, and C) incident on the incident-side sample portion farthest optical element 32. Similarly, “the light beam emitted from the sample portion entrance / exit optical system toward the detection means” is a light beam reflected by the detection-side sample portion farthest optical element 37 and emitted to the detection-side adjacent optical element 28 (schematic model). Representative light rays A ′, B ′, C ′).

  In the embodiment shown in FIG. 2, “having optical alignment with respect to the incident light beam” according to claim 1 or 2 refers to an FOV (Field of view) of the farthest optical element 32 on the incident side sample portion. Means that the value of the FOV of the incident side adjacent optical element 27 coincides. Similarly, “having optical alignment with respect to the emitted light beam” means the value of the FOV of the farthest optical element 37 on the detection side. Means that the FOV value of the detection-side adjacent optical element 28 matches.

The optical paths of the representative three rays shown in the figure will be described. For example, light rays emitted from the light emitting means 5 and sequentially reflected at the point 26a of the reflection mirror 26 and the point 27a of the reflection mirror 27 enter the sample portion entrance / exit optical system, and first, the incident side sample portion farthest optical element 32. After being reflected at the point 32a of the optical element 33 and further reflected at the point 33a of the optical element 33 and the point 34a of the optical element 34, the sample 8 is irradiated and reflected, and is reflected at the point 35a of the optical element 35 and the point 36a of the optical element 36. After being reflected and further reflected at the point 37a of the detection-side sample portion farthest optical element 37, it exits the sample portion entrance / exit optical system, and is sequentially reflected at the point 28a of the reflecting mirror 28 and the point 29a of the reflecting mirror 29. Then, it goes to the detection means 12. Similarly, the other two pass through the optical paths 26b,..., 29b, or 26c,. Here, the sample part entrance / exit optical system of the present embodiment is an optical arrangement having symmetry with respect to an axis perpendicular to the sample surface of the sample or a surface perpendicular to the sample surface. A “time shift” between these three rays due to the passage of the rays through different paths is avoided. Therefore, spectroscopic measurement with high time resolution can be performed as compared with a conventional time-series conversion pulse spectroscopic measurement apparatus that does not consider the symmetry of the optical arrangement.

In the illustrated embodiment, the sample portion entrance / exit optical systems 32, 33, 34, 35, 36, and 37 have an optical arrangement in which the axis is folded to focus on the sample. The length of the optical unit is shortened, and the miniaturization of the optical unit is realized. It goes without saying that the sample portion entrance / exit optical system or optical unit can be further miniaturized as compared with the case of this embodiment by adopting another axial folding configuration.

  In addition, since the sample part entrance / exit optical system is arranged symmetrically, the optical element is likely to undergo symmetrical deformation due to the surrounding environment such as temperature and humidity, so the influence of these micro deformations in the measurement There is also an advantage that it is difficult to receive.

  FIG. 3 shows a schematic configuration of another embodiment of an optical arrangement for reflection spectral spectrum observation in the time-series conversion pulse spectroscopic measurement apparatus according to the present invention. The same components as those in FIGS. 1 and 2 are denoted by the same reference numerals, and the description thereof is omitted.

The sample portion entrance / exit optical systems 51-59 in this time-series conversion pulse spectroscopic measurement apparatus include optical systems 54, 55, 56 having a Cassegrain type optical arrangement before and after the sample 8 on the optical path. The sample portion entrance / exit optical system 51-59 is rotationally symmetric by 180 ° with respect to the axis 80 perpendicular to the sample surface of the sample 8, and includes a surface perpendicular to the sample surface of the sample 8 and the axis 80. The optical arrangement is plane-symmetric with respect to a plane perpendicular to the plane. Here, the optical elements 54 and 56 are primary mirrors having concave aspheric surfaces, and the optical element 55 is a secondary mirror having convex aspheric surfaces. Optical elements 51-53 and 55-59 are plane mirrors. In this embodiment, the incident-side sample portion farthest optical element is an optical element indicated by reference numeral 51, and the detection-side sample portion farthest optical element is an optical element indicated by reference numeral 59.

  FIG. 4 shows a schematic configuration of another embodiment of an optical arrangement for reflection spectral spectrum observation in the time-series conversion pulse spectroscopic measurement apparatus according to the present invention. The same components as those in FIGS. 1 to 3 are denoted by the same reference numerals and the description thereof is omitted.

The sample portion entrance / exit optical system 81-88 in the present embodiment also realizes miniaturization of the optical unit as an optical arrangement for turning the axis and focusing on the sample. Since the sample portion entrance / exit optical system 81-88 of this embodiment is also an optical arrangement having symmetry with respect to an axis perpendicular to the sample surface or a surface perpendicular to the sample surface, the light beam in the case of an optical arrangement without symmetry is used. A “time shift” between these three rays due to the passage of different paths is avoided.

Further, the present embodiment is characterized by the optical arrangement of the optical systems 76 and 77 for receiving the light emitted from the light emitting means 5 and guiding the light into the optical unit, and the outside of the sample portion entrance / exit optical system 81-88. The optical arrangement of the optical systems 78 and 79 for guiding the light radiated to the detection means 12 is the axis 90 perpendicular to the sample surface and the farthest optical element on the incident side sample part 81 and the farthest detection side sample part. This is a configuration that is point-symmetric with respect to an intersection point P with a line connecting the centers of the optical elements 88. That is, it is an optical system arranged between the light emitting means and the detecting means and not the sample portion entrance / exit optical system (that is, when changing the type or state of the sample, the optical system is exchanged and adjusted and / or optical With respect to the optical system that does not require any change or adjustment of the arrangement, it has point symmetry with respect to the intersection point P. In FIG. 2, this symmetry is an optical arrangement in which the optical systems 26, 27, 28, and 29 outside the sample portion entrance / exit optical system have symmetry with respect to an axis perpendicular to the sample surface or a perpendicular surface. It is different from Therefore, in the present embodiment, the sample portion entrance / exit optical system has 180 ° rotational symmetry or plane symmetry, and is disposed outside the sample portion entrance / exit optical system (between the light emitting means and the detection means). The optical system which is an optical system and is not a sample part entrance / exit optical system) has a point symmetry. In this embodiment shown in FIG. 4, all of the optical systems outside the sample portion entrance / exit optical system are configured to have point symmetry with respect to the intersection point P. Of the optical systems outside the sample portion entrance / exit optical system, A configuration in which a part of the optical system closer to the sample has point symmetry may be used.

  The optical system outside the sample portion entrance / exit optical system having the point symmetry of this embodiment can also be applied to the optical system outside the sample portion entrance / exit optical system of the embodiments of FIGS. 2 and 3 and other embodiments. . In addition, the sample portion entrance / exit optical system of the embodiment of FIGS. 2 and 3 and other embodiments can be applied to the sample portion entrance / exit optical system of the present embodiment.

  As described above, any combination of the symmetry of the sample entrance / exit optical system and the symmetry of the optical system outside the sample part can be used, and these can be attributed to the passage of light beams through different paths in the case of an optical arrangement without symmetry. Spectral measurement with higher time resolution than conventional time-series conversion pulse spectrometers that do not take into account the symmetry of the optical arrangement. Is possible.

It is a schematic block diagram of the conventional time series conversion pulse spectroscopy apparatus. It is a schematic block diagram of one Embodiment of the time series conversion pulse spectroscopy apparatus of this invention. It is a schematic block diagram of other embodiment of the sample part entrance / exit optical system of the time series conversion pulse spectroscopy apparatus of this invention. It is a schematic block diagram of other embodiment of the time series conversion pulse spectroscopy apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Pulse laser light source 2 Dividing means 8 Sample 12 Detection means 20 Time series conversion pulse spectroscopy measuring device 27 Incident side adjacent optical element 28 Detection side adjacent optical element 30 Attached optical unit 31 Sample holding part 32-37 Sample part entrance / exit optical system 40 Axis perpendicular to the sample surface 41, 42 Optical delay means 51-59 Specimen part entrance / exit optical system
54, 56 Primary mirror 55 Secondary mirror 60 Axis perpendicular to the sample surface 77 Incident side adjacent optical element 78 Detection side adjacent optical element 81-88 Specimen part entrance / exit optical system
90 Axis perpendicular to sample surface

Claims (3)

Light emitting means;
Detecting means for detecting a time-series signal of the electric field intensity of the reflected light from the sample irradiated with light from the light emitting means;
A sample holder for holding the sample;
A time-series conversion pulse spectroscopic measurement apparatus comprising: a sample portion entrance / exit optical system that guides light from the light emitting means side to the sample and guides reflected light from the sample to the detection means side by the irradiation In
The sample holder and the sample part entrance / exit optical system are provided in an attached optical unit that can be attached to and detached from the apparatus,
At least one optical element (incident side adjacent optical element) that receives light from the light emitting means and sends it into the attached optical unit, and at least one that receives light emitted from the attached optical unit and sends it to the detection means Optical elements (adjacent optical elements on the detection side)
In the attached optical unit, an incident-side sample portion farthest optical element that directly receives light from the incident-side adjacent optical element and sends it to the sample side, and light from the sample side directly to the detection-side adjacent optical element A detection-side sample part farthest optical element to be sent,
The sample unit input and output optical system is configured to have a 180 ° rotationally symmetrical optical arrangement with respect to an axis perpendicular to the sample surface of the sample, the value and the incident side of the FOV of the incident-side sample portion farthest optical element Time-series conversion characterized in that the FOV value of an adjacent optical element matches, and the FOV value of the farthest detection-side sample element optical element matches the FOV value of the detection-side adjacent optical element Pulse spectroscopic measurement device. Light emitting means;
Detecting means for detecting a time-series signal of the electric field intensity of the reflected light from the sample irradiated with light from the light emitting means;
A sample holder for holding the sample;
A time-series conversion pulse spectroscopic measurement apparatus comprising: a sample portion entrance / exit optical system that guides light from the light emitting means side to the sample and guides reflected light from the sample to the detection means side by the irradiation In
The sample holder and the sample part entrance / exit optical system are provided in an attached optical unit that can be attached to and detached from the apparatus,
At least one optical element (incident side adjacent optical element) that receives light from the light emitting means and sends it into the attached optical unit, and at least one that receives light emitted from the attached optical unit and sends it to the detection means Optical elements (adjacent optical elements on the detection side)
In the attached optical unit, an incident-side sample portion farthest optical element that directly receives light from the incident-side adjacent optical element and sends it to the sample side, and light from the sample side directly to the detection-side adjacent optical element A detection-side sample part farthest optical element to be sent,
The sample unit input and output optical system is configured to have a optical arrangement of plane symmetry with respect to a plane perpendicular to the sample surface of the sample, the incident-side adjacent optical value of FOV of the incident-side sample portion farthest optical element Time-series conversion pulse spectroscopy , wherein the FOV value of the element coincides, and the FOV value of the farthest detection-side sample element optical element coincides with the FOV value of the detection-side adjacent optical element Measuring device. 3. The time-series conversion pulse spectroscopy according to claim 1, wherein the sample portion entrance / exit optical system includes an optical system having a Cassegrain type optical arrangement before and after the sample on an optical path. Measuring device.

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