JP3819985B2 - Laser drawing device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
According to the present invention, while a laser beam is deflected in the main scanning direction with respect to the object to be drawn, the object to be drawn is moved in the sub-scanning direction, and the laser beam is modulated on the basis of raster data so that a desired drawing pattern is obtained. The present invention relates to a laser drawing apparatus that records on a drawing body.
[0002]
[Prior art]
The laser drawing apparatus as described above is generally used for drawing a fine pattern on the surface of an appropriate drawing object with a laser beam. For example, a circuit pattern may be drawn when a printed circuit board is manufactured using a lithographic technique. At this time, the drawing target may be, for example, a photomask photosensitive film or a photoresist layer on the board.
[0003]
In recent years, a series of processes from a circuit pattern design process of a circuit board to its drawing process have been integrated, and the laser drawing apparatus plays a part in such a drawing integrated system. That is, the drawing integrated system has a CAD (Computer Aided Design) station for designing circuit patterns and the like, and a CAM (Computer Aided Manufacturing) for editing image data (vector data) such as circuit patterns created by the CAD station. A station or the like is provided, and the laser drawing apparatus functions as a peripheral device of the drawing integrated system. In addition, a plurality of laser drawing apparatuses are usually provided in the drawing integrated system, and the drawing integrated system is also provided with an engineering workstation (EWS) in order to control the overall control of the laser drawing apparatuses.
[0004]
The drawing pattern vector data created by the CAD station or the drawing pattern vector data edited by the CAM station is temporarily stored in a hard disk device provided in the EWS, and the drawing pattern vector data is appropriately transferred from the EWS to the laser drawing device. . In the laser drawing apparatus, drawing pattern vector data is converted as drawing pattern raster data, and a desired drawing pattern is recorded based on the drawing pattern raster data. That is, in the laser drawing apparatus, a drawing object such as a photomask photosensitive film or a photoresist layer on the substrate is scanned along the main scanning direction with the laser beam and is sequentially moved in the sub-scanning direction. The laser beam is modulated in accordance with a clock pulse having a predetermined frequency based on the above-described drawing pattern raster data, whereby a desired drawing pattern is recorded on the drawing object.
[0005]
[Problems to be solved by the invention]
By the way, when the same drawing pattern is recorded on a plurality of drawing objects, each drawing object can be identified for the convenience of various subsequent processing steps and inspection steps. In addition, it is preferable to know various information about each drawing object, for example, information such as drawing date and time, drawing conditions, and the like. Individual drawing objects can be identified and their information recognized by recording the lot number and necessary information in the margin area of each drawing object after recording the drawing pattern. In order to record the number and necessary information, an additional recording facility separate from the drawing pattern recording step is required, and the cost of the drawing integrated system increases accordingly.
[0006]
Accordingly, an object of the present invention is to move the drawing object in the sub-scanning direction while deflecting the laser beam in the main scanning direction with respect to the drawing object, and to modulate the laser beam based on the raster data to obtain a desired drawing. A laser drawing apparatus configured to record a pattern on the drawing object so that variable information such as a lot number, drawing date and time, drawing conditions, etc. can be recorded on the drawing object when the drawing pattern is recorded. It is providing the laser drawing apparatus comprised in this.
[0007]
[Means for Solving the Problems]
The laser drawing apparatus according to the present invention moves the drawing object in the sub-scanning direction while deflecting the laser beam in the main scanning direction with respect to the drawing object, and modulates the laser beam based on the drawing pattern raster data. The drawing pattern is recorded on the drawing object. According to the present invention, in such a laser drawing apparatus, variable information providing means for appropriately assigning variable information raster data to drawing pattern raster data and recording variable information together with the drawing pattern is provided. Is done.
[0008]
In the laser drawing apparatus according to the present invention, preferably, the variable information providing means includes bitmap memory means, the drawing pattern raster data is temporarily developed and held in the bitmap memory means, and the variable information raster data is stored in the bitmap memory means. Is applied to the drawing pattern raster data which is expanded and held.
[0009]
Preferably, in the laser drawing apparatus according to the present invention, the variable information adding means further includes first vector data storage means for storing drawing pattern vector data corresponding to the drawing pattern raster data, and variable information raster data. Second vector data storage means for storing various registered encoded vector data to obtain, variable data corresponding to variable information raster data by calling predetermined registered encoded vector data from the second registered encoded vector data Third vector data storage means for storing variable information call vector data for generating information vector data, and raster conversion for converting drawing pattern vector data stored in the first vector data storage means as drawing pattern raster data Means. In this case, first, the drawing pattern raster data converted by the raster conversion means is developed and held in the bitmap memory means, and then the third pattern data based on the variable information call vector data stored in the third vector data storage means. The predetermined registered encoded vector data read out from the vector data storage means is converted as variable information raster data by the raster conversion means, and this variable information raster data is further written into the bitmap memory means to form the drawing pattern raster data. It is given to.
[0010]
In the laser drawing apparatus according to the present invention, each of the first, second and third vector data storage means described above can be a raster data storage area defined in a single memory.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Next, an embodiment of a laser drawing apparatus according to the present invention will be described in detail with reference to the accompanying drawings.
[0012]
FIG. 1 schematically shows a drawing laser apparatus according to the present invention as a perspective view so that the laser drawing apparatus can directly draw a circuit pattern on a photoresist layer on a substrate for manufacturing a printed circuit board. It is configured. The laser drawing apparatus includes a base 10 installed on a floor surface, and a pair of rails 12 are installed in parallel on the upper surface of the base 10. An X table 14 is mounted on the pair of rails 12, and the X table 14 is arranged along the sub-scanning direction along the pair of rails 12 with an appropriate drive motor such as a servo motor or a stepping motor not shown in FIG. It can move.
[0013]
On the X table 14, a drawing table 18 is installed via a θ table 16, and two fine adjustment drivers 20 are provided on each side facing each other. The rotation position at is finely adjusted. In FIG. 1, only two fine adjustment drivers 20 provided on one side are shown in order to avoid complication of illustration. When the X table 14 is moved along the sub-scanning direction, the drawing table 18 is also moved along with the θ table 16 in the sub-scanning direction.
[0014]
On the drawing table 18, a substrate to be drawn, that is, a substrate having a photoresist layer, is carried and placed by suitable conveying means such as a belt conveyor, and the substrate is fixed on the drawing table 18 by suitable clamping means. FIG. 1 shows a clamp member 22 that forms part of the clamping means.
[0015]
An argon laser generator 24 is installed as a laser light source on one side of the base 10, and the laser beam LB emitted from the argon laser generator 24 is deflected upward by a beam bender 26. On the other hand, a fixed table 28 supported by a suitable frame structure (not shown) is disposed above the drawing table 18, and various optical elements are installed on the fixed table 28, and laser beams are provided by these optical elements. LB is guided onto the drawing table 18 as a scanning laser beam. In the present embodiment, the argon laser generator 24 is a water-cooled type. For example, the output is 1.8 W, and the wavelength of the laser is 488 nm.
[0016]
The fixed table 28 is provided with a beam vendor 30, which receives the laser beam LB from the beam vendor 26 and directs it to the beam splitter 32. The laser beam LB is divided into two laser beams LB1 and LB2 by the beam splitter 32, one laser beam LB1 is directed to the beam separator 38 via the beam benders 34 and 36, and the other laser beam LB2 is the beam vendor 40. , 42 and 44 to the beam separator 46.
[0017]
The beam separator 38 divides the laser beam LB1 into, for example, eight parallel laser beams. Similarly, the beam separator 46 divides the laser beam LB2 into eight parallel laser beams. The parallel laser beam from the beam separator 38 is guided to the electronic shutter 52 by the beam vendors 48 and 50, and the parallel laser beam from the beam separator 46 is guided to the electronic shutter 58 by the beam vendors 54 and 56.
[0018]
Each of the electronic shutters 52 and 58 includes eight acoustooptic elements and drive circuits for the acoustooptic elements, and each acoustooptic element is assigned a corresponding laser beam among the eight laser beams. The eight laser beams that have passed through the electronic shutter 52 are incident on the light combiner 60, while the eight laser beams that have passed through the electronic shutter 58 are also incident on the light combiner 60 via the beam bender 62. The optical combiner 60 can be configured as a deflecting beam splitter, for example, and the eight laser beams that have passed through the electronic shutters 52 and 58 are combined into 16 laser beams by the optical combiner, that is, the polarizing beam splitter 60. The 16 laser beams are made incident on the polygon mirror 70 through the beam benders 64, 66 and 68, and are deflected along the main scanning direction by the respective rotary reflection surfaces.
[0019]
The 16 laser beams deflected along the main scanning direction by the rotary reflecting surfaces of the polygon mirror 70 are first passed through the fθ lens 72 and then directed to the drawing table 18 side by the turning mirror 74 and then the condenser lens. Through 76, the drawing table 18 is reached. In short, the object to be drawn placed on the drawing table 18 is scanned with 16 laser beams deflected in the main scanning direction by the rotary reflecting surfaces of the polygon mirror 70.
[0020]
As shown in FIG. 1, an XY coordinate system that is stationary with respect to the machine frame of the laser drawing apparatus is set on the moving plane of the drawing table 18, and the X axis of the XY coordinate system extends in the sub-scanning direction. The Y axis extends in the main scanning direction. During the drawing operation, the 16 scanning laser beams are deflected in the positive direction of the Y axis (ie, the main scanning direction), while the drawing table 18 is directed in the negative direction of the X axis (ie, the sub-scanning direction). Moved.
[0021]
Therefore, the photoresist layer on the substrate is placed on the drawing table 18 as described above, and the surface of the photoresist layer on the substrate is deflected by each rotary reflecting surface of the polygon mirror 16. When scanning with one scanning laser beam at a time (in the main scanning direction), the eight acoustooptic elements of the electronic shutters 52 and 58 are clocked at a predetermined frequency based on the drawing pattern raster data as will be described in detail later. Actuated according to the pulse, the 16 scanning laser beams are modulated based on the drawing pattern raster data.
[0022]
On the other hand, while the 16 scanning laser beams are deflected along the main scanning direction, the drawing table 18 is sequentially moved along the sub-scanning direction by the X table 14, and the main scanning direction by the 16 scanning laser beams. When the deflection along is completed, the movement distance of the drawing table 18 is a distance corresponding to the width of the 16 scanning laser beams in the sub-scanning direction. Thus, by repeating the deflection along the main scanning direction by the 16 scanning laser beams, a predetermined predetermined drawing pattern, that is, a circuit pattern is sequentially recorded on the surface of the photoresist layer on the substrate.
[0023]
By the way, if the 16 scanning laser beams are deflected in the direction perpendicular to the sub-scanning direction, that is, the main scanning direction during the drawing operation, the drawing lines along the main scanning direction by the 16 scanning laser beams are sub-scanned. Inclined with respect to the direction. This is because, as described above, while the 16 scanning laser beams are deflected along the main scanning direction, the drawing table 18 is sequentially moved at a predetermined speed along the sub-scanning direction by the X table 14. Because. However, in reality, the deflection direction of the 16 scanning laser beams is tilted by a predetermined angle with respect to the X-axis direction in advance, so that the drawing pixels included in each of the drawing lines by the 16 scanning laser beams, That is, the drawing dots are arranged in the main scanning direction perpendicular to the sub-scanning direction.
[0024]
As shown in FIG. 1, small image pickup means such as a CCD camera 78 is provided on each of both ends of the condenser lens 76, and these CCD cameras 78 are fixed at predetermined positions with respect to a machine frame (not shown) of the laser drawing apparatus. Supported. The two CCD cameras 78 are used to accurately detect the relative position of the drawing object with respect to the drawing table 18 when the drawing object is placed on the drawing table 18 of the laser drawing apparatus.
[0025]
Referring to FIG. 2, there is shown a block diagram of a laser drawing apparatus according to the present invention. In the block diagram, reference numeral 80 indicates a system control circuit, and this system control circuit 80 is a micro processor such as a central processing unit (CPU). It can be configured as a microcomputer including a processor and a memory (ROM, RAM).
[0026]
The system control circuit 80 is connected to an image processing circuit 82, and the two CCD cameras 78 described above are connected to the image processing circuit 82. Further, for example, a CRT display device 84 is connected to the image processing circuit 82 as a display device, and a keyboard 86 and the like are connected as input means. Like the system control circuit 80, the image processing circuit 82 itself is configured as a microcomputer including a microprocessor such as a central processing unit (CPU) and a memory (ROM, RAM). It is assumed that a desired image processing program is installed. When the drawing object is placed on the drawing table 18 of the laser drawing apparatus, the positioning marks provided at the corners of the drawing object are captured by the two CCD cameras 78, and the images of the positioning marks are image-processed. By processing in the circuit 82, the relative position of the drawing object with respect to the drawing table 18 is accurately detected.
[0027]
As is apparent from FIG. 2, the system control circuit 80 controls the operation of the main scanning control circuit 88. The main scanning control circuit 88 is provided with the electronic shutters 52 and 58 described above. The main scanning control circuit 88 is provided with a synchronization circuit 89, and the electronic shutters 52 and 58 are driven by a control voltage signal output from the synchronization circuit 89, and the control voltage signal is output from the drawing data processing circuit 90. Created based on raster data.
[0028]
As shown in FIG. 2, in this embodiment, the drawing data processing circuit 90 is connected to an EWS (engineering workstation) 92 via a LAN interface circuit 91, and this EWS 92 constitutes a part of the drawing integrated system. It is. From the EWS 92, not only various drawing data but also various control command signals and the like are output to the laser drawing apparatus, and various control command signals and the like are also output from the laser drawing apparatus to the EWS 92.
[0029]
Referring to FIG. 3, a detailed block diagram of the drawing data processing circuit 90 is shown. As shown in the drawing, the drawing data processing circuit 90 is provided with a vector data memory 90A, and the vector data memory 90A is a LAN interface. The reception buffer memory 91 </ b> A provided in the circuit 91 is connected to the reception buffer memory 91 </ b> A and has a function of temporarily holding drawing data transmitted from the EWS 92. The drawing data temporarily held in the reception buffer memory 91A is then stored and held in the vector data memory 90A. As apparent from FIG. 3, the vector data memory 90A includes a first memory area, a second memory area, and a third memory area, and drawing data is stored in each memory area according to the type.
[0030]
The drawing data transmitted from the EWS 92 includes drawing pattern vector data, various registered encoded vector data, and variable information call data. The drawing pattern vector data is a drawing pattern to be recorded on the drawing object, that is, a circuit pattern, and is stored in a predetermined memory area, for example, a first memory area of the vector data memory 90A. The registered encoded vector data consists of various characters (for example, alphabets), numbers, symbols, and the like, and is stored in a predetermined memory area, for example, the second memory area of the vector data memory 90A. The variable information call data is used to generate variable information vector data by calling predetermined registered encoded vector data from the second memory area of the vector data memory 90A, and is stored in the third memory area of the vector data memory 90A. It is what is done.
[0031]
As shown in FIG. 3, the drawing data processing circuit 90 is also provided with a raster conversion circuit 90B. The raster conversion circuit 90B receives drawing pattern vector data read from the first memory area of the vector data memory 90A. Converted to drawing pattern raster data. The raster conversion circuit 90B also has a function of converting variable information vector data generated by being called from the second memory area of the vector data memory 90A into variable information raster data based on the variable information call data.
[0032]
When the drawing pattern vector data read from the first memory area of the vector data memory 90A is converted as drawing pattern raster data, not all of the drawing pattern vector data is converted at once. The whole is divided into a predetermined width along the main scanning direction, and the vector data portion for each division unit is sequentially converted into raster data. Similarly, the variable information vector data generated by calling from the second memory area of the vector data memory 90A based on the variable information call data is also divided with the same width as that of the drawing pattern vector data. The vector data portion is sequentially converted into raster data.
[0033]
The above-mentioned division unit is generally called a partition in this field, and the capacity of raster data obtained when vector data contained in the partition is converted into raster data corresponds to, for example, 512 main scanning direction lines. It will be a thing. As described above, in the present embodiment, drawing scanning along the main scanning direction is performed with 16 laser beams at a time, so that the raster scanning can be performed 32 times with respect to the raster data capacity.
[0034]
Referring to FIG. 4, the drawing pattern vector data developed in the first memory area of the vector data memory 90A is schematically shown. In the figure, the hatched area is an area corresponding to a drawing pattern, that is, a circuit pattern, and the broken line indicates a partition unit or partition obtained by dividing the drawing pattern vector data along the main scanning direction (Y axis). For convenience, reference numerals P1 to P14 are assigned. In short, the drawing pattern vector data is sequentially converted into raster data in the order of partitions P1 to P14.
[0035]
Referring to FIG. 5, the variable information vector data generated by calling from the second memory area of the vector data memory 90A based on the variable information call data is expanded in the third memory area of the vector data memory 90A. Is schematically illustrated. In the figure, as a specific example of variable information vector data, a lot number “3TSZ96080-0000” and a date “DATE DEC. 8, 1997” are shown. The broken lines indicate the partition units or partitions obtained by dividing the variable information vector data along the main scanning direction (Y axis) as in the case of FIG. 4, and these partitions are also given reference numerals P1 to P14 for convenience. . In short, the variable information vector data is sequentially converted into raster data in the order of the partitions P1 to P14.
[0036]
As described above, the portion of the drawing pattern raster data converted for each partition is alternately distributed and written in the first bitmap memory 90D and the second bitmap memory 90E via the switch circuit 90C. The portion of the variable information raster data converted for each partition is also distributed and written alternately in the first bitmap memory 90D and the second bitmap memory 90E, whereby the variable information raster data is given to the drawing pattern raster data. Will be. The raster data written alternately in the first bitmap memory 90D and the second bitmap memory 90E are alternately read out via the switch circuit 90F and output to the synchronization circuit 89.
[0037]
More specifically, for example, when the raster conversion circuit 90B is connected to the first bitmap memory 90D side via the switch circuit 90C, the vector data corresponding to the partition P1 shown in FIG. The raster data is converted into raster data, and the raster data is written into the first bitmap memory 90D via the switch circuit 90C. Subsequently, the vector data corresponding to the partition P1 shown in FIG. 5 is converted into raster data by the raster conversion circuit 90B. The raster data is also written into the first bitmap memory 90D via the switch circuit 90C.
[0038]
Next, when the raster conversion circuit 90B is connected to the second bitmap memory 90E side by switching the switch circuit 90C, the vector data corresponding to the partition P2 shown in FIG. 4 is converted into raster data by the raster conversion circuit 90B. The raster data is written into the second bitmap memory 90E via the switch circuit 90C, and then the vector data corresponding to the partition P2 shown in FIG. 5 is converted into raster data by the raster conversion circuit 90B, and the raster data is also switched to the switch circuit. The data is written into the second bitmap memory 90E via 90C.
[0039]
During the writing of raster data to the second bitmap memory 90E, the first bitmap memory 90D is connected to the synchronization circuit 89 by the switch circuit 90F, and the raster data is sequentially read from the first bitmap memory 90D. And output to the synchronization circuit 89. When the reading of raster data from the first bitmap memory 90D is completed and the writing of raster data to the second bitmap memory 90E is completed, the connection of the switch circuits 90C and 90F is switched, and the first bitmap memory 90D is switched. In FIG. 4, raster data obtained from the partition P3 shown in FIG. 4 and vector data obtained from the partition P3 shown in FIG. 5 are sequentially written in the first bitmap memory 90D, while the raster data is read from the second bitmap memory 90E. Is done.
[0040]
Referring to FIG. 6, there is schematically shown raster data written and developed alternately in the first bitmap memory 90D and the second bitmap memory 90E. As is clear from the figure, the raster data obtained from each partition shown in FIG. 4 is given vector data obtained from each partition P2 shown in FIG. 5 to the first and second bitmap memories 90D and 90E. The raster data is expanded in a combined form.
[0041]
As described above, in the present embodiment, the capacity of raster data obtained when vector data included in each partition is converted into raster data is equivalent to, for example, 512 lines in the main scanning direction. Therefore, it goes without saying that each of the first and second bitmap memories 90D and 90E is configured to be able to hold raster data having such a capacity.
[0042]
In the present embodiment, drawing scanning along the main scanning direction is performed with 16 laser beams at a time, so that the raster data is read from each of the first and second bitmap memories 90D and 90E. The raster data read in 16 bits along the direction (Y-axis) is input to the synchronization circuit 89 via the switch circuit 90F. At this time, the synchronization circuit 89 receives the data from the system control circuit 80. An output clock pulse of a predetermined frequency is also input, so that a control voltage signal is sent from the synchronization circuit 89 to the respective drive circuits of the acousto-optic elements included in the electronic shutters 52 and 58 based on the corresponding raster data. Is output.
[0043]
More specifically, when each of the control voltage signals output from the synchronization circuit 89 is input to each of the acousto-optic device drive circuits included in the electronic shutter 52, a high-frequency drive voltage is applied from each acousto-optic device drive circuit. The output is applied to the optical element. The voltage level of the control voltage signal output to each acoustooptic device drive circuit is changed based on the corresponding raster data, and accordingly, the output is output from each acoustooptic device drive circuit to the corresponding acoustooptic device. The level of the high-frequency driving voltage is also changed, thereby changing the diffraction direction of the laser beam passing through each acoustooptic element. That is, when the raster data pixel is a colored pixel (ie, “1” as digital pixel data), the laser beam is diffracted toward the light combiner 60, and the raster data pixel is a non-colored pixel (ie, When the digital pixel data is “0”), the laser beam is diffracted so as to be out of the light combiner 60.
[0044]
Similarly, a control voltage signal output from the synchronization circuit 89 is also input to each of the acoustooptic device driving circuits included in the electronic shutter 58, and at this time, a high frequency driving voltage is applied from each acoustooptic device driving circuit to the corresponding acoustooptic device. The level of the high frequency driving voltage is changed based on the corresponding raster data. In the case of the electronic shutter 58, when the raster data pixel is a coloring pixel (that is, “1” as digital pixel data), the laser beam is diffracted toward the beam vendor 62, and the raster data pixel is When the pixel is a non-colored pixel (that is, “0” as digital pixel data), the laser beam is diffracted so as to be out of the beam vendor 62.
[0045]
In short, only when the raster data pixel is a color pixel, the corresponding laser beam is directed to the polygon mirror 70, and a dot is recorded as a color pixel on the drawing object on the drawing table 18. Therefore, by modulating each laser beam with the electronic shutters 52 and 58 based on the corresponding raster data as described above, the drawing object on the drawing table 18 has a lot number, date, etc. along with a pattern based on the raster data. The variable information is also recorded.
[0046]
Although not particularly shown in the block diagram of FIG. 3, the writing of vector data to the reception buffer memory 91A and the reading of vector data therefrom and the writing of vector data to the vector data memory 90A and the vector data therefrom are carried out. Is read based on a write clock pulse and a read clock pulse output from the system control circuit 80 to the reception buffer memory 91A and the vector data memory 90A, respectively. Similarly, the writing of raster data to the first and second bitmap memories 90D and 90E and the reading of raster data therefrom are also performed by the system control circuit 80 to the first and second bitmap memories 90D and 90E, respectively. This is performed based on the output write clock pulse and read clock pulse. The system control circuit 80 also controls the timing of the raster conversion circuit 90B and the switch circuits 90C and 90F.
[0047]
Referring back to FIG. 2 again, the main scanning control circuit 88 is further provided with a Y scale sensor 94 and a signal processing circuit 96. The Y scale sensor 94 detects an optical signal from the Y linear scale and measures the deflection distance along the main scanning direction (Y axis) of the 16 scanning laser beams, and is well known per se. The output signal from the Y scale sensor 94 is appropriately processed by the signal processing circuit 96 and then taken into the system control circuit 80, and a clock pulse to be output from the system control circuit 80 to the synchronization circuit 89 is created based on the output signal. Will be.
[0048]
As is apparent from FIG. 2, the system control circuit 80 further controls the operation of the sub-scanning control circuit 98, and the sub-scanning control circuit 98 is provided with a drive circuit 100. The drive of the servo motor 102 is controlled. The servo motor 102 is for driving the X table 14 at a predetermined speed along the sub-scanning direction (X axis), and thereby the object to be drawn on the drawing table 18 is moved in the sub-scanning direction. At the time of drawing operation, a clock pulse having a predetermined frequency is output from the system control circuit 80 to the drive circuit 100, and a drive pulse is output from the drive circuit 100 to the servo motor 102 based on this clock pulse.
[0049]
As shown in FIG. 2, the sub-scanning control circuit 98 is further provided with an X scale sensor 104 and a signal processing circuit 106. The X scale sensor 104 detects an optical signal from an X linear scale (not shown) and measures the movement distance along the sub-scanning direction (X axis) of the drawing table 18 (that is, the drawing object on the drawing table 18). Yes, it is well known. An output signal from the X scale sensor 104 is appropriately processed by the signal processing circuit 106 and then taken into the system control circuit 80, and a clock pulse to be output from the system control circuit 80 to the drive circuit 100 based on the output signal. Will be created.
[0050]
As already described, various command control signals are exchanged between the laser drawing apparatus and the EWS 92. For example, when the drawing operation preparation is completed from the system control circuit 80 of the laser drawing apparatus, a drawing operation preparation completion signal is output to the EWS 92, and a drawing start command signal or a drawing end command signal is sent from the EWS 92 to the system control circuit. Based on these command control signals, the system control circuit 80 controls the start and end of the drawing operation of the laser drawing apparatus.
[0051]
Next, a drawing operation control routine executed by the EWS 92 will be described with reference to the flowchart shown in FIG.
[0052]
In step 701, it is determined whether or not the registered encoded vector data is transmitted from the EWS 92 to the laser drawing apparatus. The registered encoded vector data consists of various characters (for example, alphabets), numbers, and symbols as described above. These registered encoded vector data are created in advance on the EWS 92 side and stored in, for example, a hard disk device or the like. It is what has been. The registered encoded vector data is transmitted to the laser drawing apparatus by the operation of the EWS 92 by the operator.
[0053]
In step 701, when it is confirmed that registered encoded vector data is transmitted to the laser drawing apparatus, the process proceeds to step 702, where it is determined whether information necessary for executing the drawing operation has been input. For example, it is determined whether or not the input of information such as whether the type of the drawing pattern to be recorded has been selected or the numerical value of the number of drawing has been set is completed. In the present embodiment, the numerical value of the number of drawing (that is, the number of drawing operations) is set to “1000”, for example.
[0054]
When the input of information necessary for executing the drawing operation is confirmed in step 702, the process proceeds to step 703, where the desired drawing pattern vector data is sent from the EWS 92 (ie, vector data corresponding to the drawing pattern selected in step 702). Is transmitted to the laser drawing apparatus. In the EWS 92, various types of drawing pattern vector data are stored in the hard disk described above, and these drawing pattern vector data are created by a CAD station or edited by a CAM station, and these stations are used as necessary. It was obtained from
[0055]
When the transmission of the desired drawing pattern vector data to the laser drawing apparatus is confirmed in step 703, the process proceeds to step 704, where it is determined whether or not the creation of variable information call data is completed. In the present embodiment, for example, as described above, the variable information call data is a combination of the lot number “3TSZ96080-0000” and the date “DATE DEC. 8, 1997”.
[0056]
When it is confirmed in step 704 that the creation of variable information call data has been completed, the process proceeds to step 705, where it is determined whether variable information call data has been transmitted from the EWS 92 to the laser drawing apparatus. When transmission of the variable information vector data to the laser drawing apparatus is confirmed, the process proceeds to step 706, where it is determined whether or not a drawing operation preparation completion signal is output from the laser drawing apparatus. The drawing operation preparation completion signal is output to the EWS 92 side when the laser drawing apparatus side is ready to perform the drawing operation.
[0057]
When the output of the drawing operation preparation completion signal from the laser drawing apparatus is confirmed in step 706, the process proceeds to step 707, where a drawing start command signal is output from the EWS 92 to the laser drawing apparatus. Next, in step 708, it is determined whether or not the drawing number value input in step 702 (that is, 1000) has been reached. At this stage, since the numerical value of the number of drawing is “1”, the process returns from step 708 to step 704, where it is determined again whether or not the creation of variable information call data is completed. The serial number included in the lot number in the variable information call data created at this time is changed so as to be counted up by “1”. That is, the serial number of the lot number is “3TSZ96080-0001”. The date of the variable information call data is the same as the previous time.
[0058]
The routine consisting of steps 705 through 708 is then repeated in a similar manner. In short, such a routine is repeated until the number of drawn images reaches “1000” in step 708, and the serial number included in the lot number of the variable information call data is counted up by “1” sequentially. Changed to Note that when the number of drawn images reaches “1000” in step 708, the serial number of the lot number is “3TSZ96080-1000”.
[0059]
If it is confirmed in step 708 that the numerical value of the number of drawn images has reached “1000”, the process proceeds to step 709, where after the drawing end command signal is output from the EWS 92 to the laser drawing apparatus, this drawing operation control routine is executed. finish.
[0060]
Next, a drawing operation routine executed by the laser drawing apparatus will be described with reference to a flowchart shown in FIG.
[0061]
In step 801, it is determined whether registered encoded vector data has been received from EWS 92. When reception of the registered encoded vector data is confirmed, the process proceeds to step 802, where writing of the registered encoded vector data to the second memory area of the vector data memory 90A is started. More specifically, the system control circuit 80 outputs a write clock pulse to the reception buffer memory 91A, and the registered encoded vector data is once written and held in the reception buffer memory 91A. On the other hand, a read clock pulse is also output from the system control circuit 80 to the reception buffer memory 91A, and the registered encoded vector data is read from the reception buffer memory 91A. Thus, a write clock pulse is output, whereby the registered encoded vector data is written and stored in the second memory area of the vector data memory 90A.
[0062]
In step 803, it is determined whether drawing pattern vector data has been received from the EWS 92. If the reception of the drawing pattern vector data is confirmed, the process proceeds to step 804, where writing of the drawing pattern vector data to the first memory area of the vector data memory 90A is started. More specifically, a write clock pulse is output from the stem control circuit 80 to the reception buffer memory 91A, and the drawing pattern vector data is once written and held in the reception buffer memory 91A. On the other hand, the read clock pulse is also output from the system control circuit 80 to the reception buffer memory 91A, and the drawing pattern vector data is read from the reception buffer memory 91A. At this time, the system control circuit 80 supplies the vector data memory 90A to the vector data memory 90A. A write clock pulse is output, whereby the drawing pattern vector data is written and stored in the first memory area of the vector data memory 90A (FIG. 4).
[0063]
In step 805, it is determined whether variable information call data has been received from the EWS 92. If reception of the variable information call data is confirmed, the process proceeds to step 806, where variable information vector data is generated based on the variable information call data, and is expanded and stored in the third memory area of the vector data memory 90A.
[0064]
More specifically, a write clock pulse is output from the stem control circuit 80 to the reception buffer memory 91A, and the variable information call data is once written and held in the reception buffer memory 91A. On the other hand, the system control circuit 80 also outputs a read clock pulse to the reception buffer memory 91A, and the variable information call data is read from the reception buffer memory 91A. The variable information call data read from the reception buffer memory 91A is addressed to the second memory area (holding the registered encoded vector data) of the vector data memory 90A, so that the variable information call data is transferred from the second memory area. In response, the registered encoded vector data is called to generate variable information vector data, and the variable information vector data is expanded and stored in the third memory area of the vector data memory 90A (FIG. 5).
[0065]
In step 807, a drawing operation preparation completion signal is transmitted to the EWS 92. Next, at step 808, it is determined whether a drawing start command signal is received from the EWS 92. If the reception of the drawing start command signal is confirmed, the process proceeds to step 809, where the drawing operation is started.
[0066]
As described above, at the start of the drawing operation, the drawing pattern vector data portion of the partition P1 (FIG. 4) is first converted from the first memory area of the vector data memory 90A as the drawing pattern raster data portion by the raster conversion circuit 90B. Then, for example, it is written in the first bitmap memory 90D. Subsequently, the variable information vector data portion of the partition P1 (FIG. 5) is converted from the third memory area of the vector data memory 90A as the variable information raster data portion by the raster conversion circuit 90B, and written into the first bitmap memory 90D. Thus, the variable information raster data portion is added to the drawing pattern vector data portion. In short, raster data including a drawing pattern vector data portion and a variable information raster data portion are alternately developed in the first and second bitmap memories 90D and 90E in a manner as shown in FIG. On the other hand, raster data is alternately read out from the first and second bitmap memories 90D and 90E 16 bits at a time and output to the synchronization circuit 89, and the 16 scanning laser beams are used in the manner already described. Drawing is performed.
[0067]
In step 810, it is determined whether the drawing operation has been completed. That is, it is determined whether all vector data from the first and third memory areas of the vector data memory 90A are read and drawing based on the vector data is completed. When the end of the drawing operation is confirmed, the process proceeds to step 811 where it is determined whether or not a drawing end command signal is received from the EWS 92. If the drawing end command signal has not been received, the process returns to step 805, where it is again determined whether variable information call data has been received from the EWS 92. As described in the drawing operation control routine of FIG. 7, the serial number of the lot number of the variable information call data at this time is counted up by “1”. When reception of the variable information call data is confirmed, the same routine is repeated, and this repetition is continued until a drawing end command signal is received from the EWS 92. When it is confirmed in step 811 that the drawing end command signal has been received, the drawing operation routine is ended.
[0068]
In the above-described embodiment, the next variable information call data is transmitted from the EWS 92 to the laser drawing device during the operation of the drawing pattern for each drawing object. However, all the variable information call data are first sent. It is also possible to transmit the information to the reception buffer memory 91A all at once and sequentially read the variable information call data therefrom.
[0069]
【The invention's effect】
As can be seen from the above description, the laser drawing apparatus according to the present invention can simultaneously record variable information on the drawing object when the drawing pattern is recorded on each drawing object. Special equipment for recording variable information on the drawing body is not required, and the laser drawing apparatus can be provided at a low cost.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view showing a laser drawing apparatus according to the present invention.
FIG. 2 is a block diagram of the laser drawing apparatus shown in FIG.
3 is a detailed block diagram of a drawing data processing circuit shown in FIG. 2. FIG.
4 is a schematic diagram schematically showing drawing pattern vector data developed in a first memory area of the vector data memory shown in FIG. 3. FIG.
5 is a schematic diagram schematically showing variable information vector data developed in a third memory area of the vector data memory shown in FIG. 3. FIG.
6 is a schematic diagram schematically showing raster data expanded alternately in the first and second bitmap memories shown in FIG. 3. FIG.
FIG. 7 is a flowchart showing a drawing operation control routine executed in an engineering workstation (EWS).
FIG. 8 is a flowchart showing a drawing operation routine executed by the laser drawing apparatus according to the present invention.
[Explanation of symbols]
14 X table
18 Drawing table
24 Argon laser generator
52/58 Electronic shutter
70 polygon mirror
74 Turning mirror
76 condenser lens
78 CCD camera
80 System control circuit
82 Image processing circuit
88 Main scan control circuit
89 Synchronous circuit
91 LAN interface circuit
92 Engineering workstation (EWS)
98 Sub-scanning control circuit

Claims (6)

While the laser beam is deflected in the main scanning direction with respect to the object to be drawn, the object to be drawn is moved in the sub-scanning direction, and the laser beam is modulated based on the drawing pattern raster data so that a desired drawing pattern is drawn. In a laser drawing device that records on the body,
Variable information providing means for appropriately assigning variable information raster data to the drawing pattern raster data and recording variable information together with the drawing pattern is provided, and the variable information providing means is connected to the drawing object by the laser beam. A laser drawing apparatus , wherein the variable information is also recorded thereon .   2. The laser drawing apparatus according to claim 1, wherein the variable information providing unit includes a bitmap memory unit, the drawing pattern raster data is temporarily developed and held in the bitmap memory unit, and the variable information raster data is stored in the bitmap drawing unit. A laser drawing apparatus characterized in that it is given to drawing pattern raster data developed and held in the bitmap memory means.   3. The laser drawing apparatus according to claim 2, wherein the variable information providing means further includes first vector data storage means for storing drawing pattern vector data corresponding to the drawing pattern raster data, and obtaining the variable information raster data. Second vector data storage means for storing various registered encoded vector data, and variable information corresponding to the variable information raster data by reading predetermined registered encoded vector data from the second registered encoded vector data Third vector data storage means for storing variable information call vector data for generating vector data, and the drawing pattern vector data stored in the first vector data storage means are converted as the drawing pattern raster data. Raster conversion means, and the drawing converted by the raster conversion means After the pattern raster data is expanded and held in the bitmap memory means, the pattern raster data is called from the third vector data storage means based on the variable information call vector data stored in the third vector data storage means. Predetermined registered encoded vector data is converted as the variable information raster data by the raster conversion means, and the variable information raster data is further written into the bitmap memory means and given to the drawing pattern raster data. A laser drawing apparatus.   4. The laser drawing apparatus according to claim 3, wherein each of the first, second, and third vector data storage means is a raster data storage area defined in a single memory. apparatus. The laser drawing apparatus according to claim 1, wherein the variable information providing unit provides the variable information that changes according to the number of drawing operations. The laser drawing apparatus according to claim 1, wherein the variable information providing unit provides the variable information that does not change according to the number of drawing operations.

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