JP3806151B2 - 第１物体の第２物体への結合方法 - Google Patents

第１物体の第２物体への結合方法 Download PDF

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Publication number
JP3806151B2
JP3806151B2 JP16108794A JP16108794A JP3806151B2 JP 3806151 B2 JP3806151 B2 JP 3806151B2 JP 16108794 A JP16108794 A JP 16108794A JP 16108794 A JP16108794 A JP 16108794A JP 3806151 B2 JP3806151 B2 JP 3806151B2
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Japan
Prior art keywords
objects
wafer
bonding
bond
polished
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JPH0788963A (ja
Inventor
ハイスマ ヤン
ヨセフス ヘンリ マリア ファン ドレ クルイス フランシスカス
アドリアヌス コルネルス マリア スピエリンフス ヘイスベルタス
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Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/731—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the intensive physical properties of the material of the parts to be joined
    • B29C66/7311—Thermal properties
    • B29C66/73117—Tg, i.e. glass transition temperature
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/731—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the intensive physical properties of the material of the parts to be joined
    • B29C66/7316—Surface properties
    • B29C66/73161—Roughness or rugosity
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/12—Bonding of a preformed macromolecular material to the same or other solid material such as metal, glass, leather, e.g. using adhesives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/71—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the composition of the plastics material of the parts to be joined
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/731—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the intensive physical properties of the material of the parts to be joined
    • B29C66/7311—Thermal properties
    • B29C66/73111—Thermal expansion coefficient
    • B29C66/73112—Thermal expansion coefficient of different thermal expansion coefficient, i.e. the thermal expansion coefficient of one of the parts to be joined being different from the thermal expansion coefficient of the other part
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/737—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined
    • B29C66/7377—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined amorphous, semi-crystalline or crystalline
    • B29C66/73771—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined amorphous, semi-crystalline or crystalline the to-be-joined area of at least one of the parts to be joined being amorphous
    • B29C66/73772—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined amorphous, semi-crystalline or crystalline the to-be-joined area of at least one of the parts to be joined being amorphous the to-be-joined areas of both parts to be joined being amorphous
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/737—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined
    • B29C66/7377—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined amorphous, semi-crystalline or crystalline
    • B29C66/73773—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined amorphous, semi-crystalline or crystalline the to-be-joined area of at least one of the parts to be joined being semi-crystalline
    • B29C66/73774—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined amorphous, semi-crystalline or crystalline the to-be-joined area of at least one of the parts to be joined being semi-crystalline the to-be-joined areas of both parts to be joined being semi-crystalline
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/737—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined
    • B29C66/7377—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined amorphous, semi-crystalline or crystalline
    • B29C66/73775—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined amorphous, semi-crystalline or crystalline the to-be-joined area of at least one of the parts to be joined being crystalline
    • B29C66/73776—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined amorphous, semi-crystalline or crystalline the to-be-joined area of at least one of the parts to be joined being crystalline the to-be-joined areas of both parts to be joined being crystalline
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/739—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/7392—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic
    • B29C66/73921—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic characterised by the materials of both parts being thermoplastics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
    • B29K2995/0037—Other properties
    • B29K2995/0072—Roughness, e.g. anti-slip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor

Description

【０００１】
【産業上の利用分野】
本発明は、有機物質を有する第１物体を第２物体に結合する方法に関する。
【０００２】
【従来の技術】
かかる方法は、通常の実験からよく知られており、二つの物体のうち少なくとも一つの物体の表面に接着剤を塗布し、次いで、この表面を他の物体の相補表面に接触させ、それにより二つの表面の間に化学結合を形成する手段を含みうる。この目的のため、適当な接着剤はいろいろあり、糊、パテ、セメント、樹脂及びグルーがあり、これらのすべては広い範囲の化学的、機械的、熱的、電気的及び光学的性質を有することは証明されている。
【０００３】
【発明が解決しようとする課題】
これらの従来の方法には、異物（例えば接着剤）が二つの物体の結合表面の間に永遠に存在するという欠点がある。従って、精密装置における物体の結合の場合には、用いられる接着剤の特性に対して厳重な要求が課せられる。例えば、接着剤の熱膨脹率を、結合される物体の熱膨脹率と注意深く釣り合わせない場合、結合された物体に大きい又は急な温度上の変化が与えられると、熱膨脹の差から生じた機械的応力によって、それらの結合表面が部分的又は全体的に分離する場合がある。あるいはまた、超高真空の雰囲気下で結合物体を扱う場合は、充分に低い蒸気圧を有する接着剤を使用して脱ガスを最少にする必要がある。更に、二つの物体の間に極めて正確な相互位置決めが要求される場合、例えば、集積回路又は精密光学器具を製造する場合には、特に、界面接着剤は通常均質ではないから、接着剤そのものの厚さを考慮すべきである。
【０００４】
これらの理由から、特殊用途のための特定接着剤を高費用で開発する必要がしばしばある。かかる接着剤はしばしば有毒で引火性なので、それの適用及び廃棄の双方に注意しなければいけない。更に、多くのかかる接着剤は、有機物質の表面を著しく劣化させるおそれがある溶媒を含む。
【０００５】
従来の方法には、他に、二つの物体の間の結合がしばしば迅速に生じないという欠点がある。物体は、むしろ長時間固定接触させて、接着剤を充分に硬化させ物体間の界面化学結合を形成させる必要がある。この時間は、数時間までになって、迅速で連続的な大量生産技術によって物体を結合することを阻害する場合がある。更に、生産工程において接着剤を使用するには、特定の予防処置をして接着剤による生成物及び機械類の汚染を防止する必要がある。
【０００６】
本発明の目的は、二つの物体間の界面に接着剤を使う必要なしに、少なくとも一つの物体が有機物質を有するこれら二つの物体を迅速に結合する方法を提供することである。
【０００７】
【課題を解決する手段】
本発明において、この目的は、二つの物体に光学的に平滑な相補表面を作り、次いで、これらの表面を互いに直接接触させて置き、結果として二つの物体の原子間に自発的原子結合を形成することを特徴とする方法により達成される。
【０００８】
有機物質を含む物体間の自発的原子結合の形成は驚くべき結果である。自発的原子結合（また、直接結合という）が多様な無機物質間に形成されることは知られているが、次の多くの理由で、有機物質に対してこのように推定することは自明でない。第１番目に、直接結合は、結合される二つの接触表面間のファンデルワールス力によるだけでなく、化学的ＯＨ結合の形成によっても達成される。しかし、多くの場合強い親水性である無機物質と対照的に、有機物質はしばしば弱い親水性にすぎないか、又は疎水性である。この特性のため、ＯＨ結合の形成が阻止される。第２番目に、光学平滑表面を備え、その他直接結合に適切である無機物質の物体の場合、かかる物体を、有機物質（例えば、プラスチック又はゴム）を有する容器の中に保管すると、物体は直接結合に不適切になることが知られている。結合される物質の表面から微量の有機物質を完全に除去した場合のみ、自発的原子結合を再び達成することができる。ハイスマ等の論文〔Ｊａｐ．Ｊ．Ａｐｐｌ．Ｐｈｙｓ．２８（８），１４２６−１４４３頁（１９８９）、特に１４２９〜１４３０頁〕には、直接結合される物体の表面から有機物質を完成に除去する精巧な方法が記載されている。第３番目に、無機物質の直接結合のためには、結合される表面の二乗平均（ＲＭＳ）粗さの平均が２ｎｍより小さい、好ましくは０．５ｎｍ程度であることが必要である。二乗平均粗さの平均が２ｎｍより小さい表面を、本明細書で「光学平滑表面」と称する。光学的平滑性のかかる程度を有機物質の表面で達成できるかどうかは定かではない。
【０００９】
欧州特許出願公開ＥＰ−Ａ−３８３３９１号には、直接結合に基づく二つの物体の結合法が記載されている。これら二つの物体の相補表面に光学平滑仕上加工を施し、次いで表面を互いに平行でないように相互に局部的に接触させ、このようにしてその後、物体を動かして平行に接触させ、接触表面の界面に原子結合を形成させる。しかし、この欧州特許出願公開明細書には、有機物質を有する物体に適用できる技術に対する記載も示唆も全くない。
【００１０】
欧州特許ＥＰ−Ｂ−２０９１７３号には、半導体本体上に設けた電気絶縁層へ支持体を直接結合することを含む半導体装置の製造方法が記載されている。しかし、この特許文献にも、電気絶縁層が有機物質を有することに対する記載も示唆もなく、この文献に述べられている電気絶縁物質は酸化シリコンのような無機物質である。
【００１１】
本発明は、少なくとも一つの物体が有機物質を有する二つの物体の直接結合が自発的に行われることを特徴とする。研磨技術を用いて、例えば、二つの物体に、ＲＭＳ粗さが２ｎｍより小さい光学平滑表面を設けることができることが確かめられた。原子結合を形成するためには、二つの物体を緊締する必要なしに物体の光学平滑表面を互いに接触させておくことだけで足りるか、または、相互に瞬間的にゆるく加圧しておくだけで足りる。これらの条件下で、直接結合は数秒以内に形成される。一つの物体が光学的に透明である場合、物体の間の薄い空気膜を除いて、安定的に伸長する表面部分が一緒に引張られて強く結合して接触するので、直接結合の形成法が実際に見られる。このように形成された結合の結合エネルギーを標準ナイフエッジリフト法（ｋｎｉｆｅ−ｅｄｇｅ ｌｉｆｔｉｎｇ ｔｅｃｈｎｉｑｕｅ）により測定することができ、その結果、測定値は、無機物質間に形成された直接結合の結合エネルギー測定値と一致する。
複数個の多様な物質を本発明の方法により結合することができる。例えば、互いに結合される第１物体及び第２物体は、非晶質、単結晶質又は多結晶質としうる有機物質を含有するか、又は全体的にそれだけから成ることができる。更に、第２物体は、半導体物質、ガラス、金属又は透明な導電体を含むか、又は全体的にそれだけから成ることができる。本発明において使用できる有機物質の例としては、ポリメチルメタクリレート、ポリイミド及びテフロンなどがある。
【００１２】
結合される物体に光学平滑表面を作る好ましい手段としては、研磨がある。この目的のために特に適当な範囲の研磨用製品は、モンサント社により商標ＳｙｔｏｎTMで市販されており、これには、例えば、ｐＨが１０〜１１の範囲である水酸化ナトリウム水溶液中のＳｉＯ2 微小粒子（微小粒子の平均大きさは約３０ｎｍである）の懸濁液が含まれる。かかる研磨処理の時間は、結合する物体の初期の表面状態に応じて、数分から数時間の範囲にすることができ、この時間には循環的な磨き、洗浄及び乾燥工程を含めることができる。又、結合される表面を予め磨き、次いで研磨技術を使用してこれら表面に最終の光学平滑仕上げを行なうことができる。結合される表面は光学的に平滑で、相補的な形態にする必要があるが、平らな形状である必要はない。例えば、本発明の方法を用いて、第１レンズの凸面を、曲率半径が同じである第２レンズの相補凹面に結合することにより、色消し二重レンズを製造することができる。
【００１３】
二つの物体の相補的な光学平滑表面の間に原子結合を形成した後、表面の接触部分を加熱処理することにより、結合の強度を増加することができる。この方法により得られた結合エネルギーの増大量は、加熱工程上の特定期間及び温度に応じて、２倍又はそれ以上になりうる。
【００１４】
【実施例】
本発明を次の実施例により説明する。
実施例１
本発明を達成する際行った実験において、それぞれが直径１００ｍｍ及び厚さ３ｍｍであるポリメチルメトクリレート（ＰＭＭＡ）のウェファ２枚に、ＮａＯＨ溶液中にＳｉＯ2 の微小粒子を入れて成るコロイド懸濁液を用いて、数分間研磨処理を行なった。平均微小粒子の大きさは約３０ｎｍとし、溶液のｐＨは１０．３とした。研磨に次いで、ウェファを脱イオン水で洗浄してから、乾燥させた。
これにより得られたウェファの平らな表面を互いに接触させて置いた場合、直接結合がそれらの界面に自発的に生じたことを確かめた。この結合の結合エネルギーは０．０１Ｊ／ｍ2 であった。
【００１５】
次の実験において、第２のこのような対の直接結合したＰＭＭＡウェファを、（ＰＭＭＡのガラス転移温度である）１０５℃の温度で１時間アニールした。次に、直接結合の結合エネルギーを室温で測定した結果、この結合エネルギーは、０．１８Ｊ／ｍ2 であった。従って、このアニール処理により直接結合が強化された。
第３のこのような対の直接結合ＰＭＭＡウェファを１２０℃の温度で１時間アニールし、直接結合の結合エネルギーを室温で測定した結果、この結合エネルギーは１．２Ｊ／ｍ2 であった。従って、このように比較的に高い温度でのアニール処理は、直接結合の強度を前段に記載した処理より更に強くさせた。
【００１６】
実施例２
大きさが２０×２０×３ｍｍ3 であるポリイミド角形ブロックを平坦面ガラスの磨きホルダーに、露出した２０×２０ｍｍ2 の表面が磨きホルダーの平坦面に対して平行になるように接着した。次に、ブロックのこの表面を、ＫＯＨ溶液中にＳｉＯ2 の微小粒子を入れて成るコロイド懸濁液を用いて研磨してから、ポリイミドブロックを有する磨きホルダーを脱イオン水で洗浄して、乾燥させた。
１０×５×０．５ｍｍ3 の大きさのＳｉウェファを、ハイスムらの前記の文献の４．２節に記載されているウェファ浄化法を用いて製造した。次いで、このウェファを、その５×１０ｍｍ2 面を下向きにして、ポリイミドブロックの研磨面上に、しばらく温和に加圧した。直接結合が直ちにポリイミドとＳｉとの界面に生じた。
【００１７】
実施例３
清浄としたＳｉウェファの一面にテフロン薄膜をスピンコーティングした。ハイスマ等の前記の文献の４．２節に記載されたウェファ浄化法を用いて、溶融シリカウェファを製造した。次いで、この後者のウェファを、その面を下向きにして、テフロン層の上に置いてから、それに対してしばらく温和に加圧した。テフロンと溶融シリカとの界面に直接結合が直ちに生じた。
【００１８】
実施例４
大きさが５０×５０×１ｍｍ3 である平坦なタンタル板をＳｙｔｏｎTMＨＴ５０を用いて周期的に全体で３時間研磨した後、脱イオン水で洗浄し、乾燥させた。直径１００ｍｍ及び厚さ３ｍｍである円形ＰＭＭＡウェファを、実施例１に記載したように磨き、洗浄し、乾燥させた。次いで、タンタル板及びウェファのそれぞれの研磨面を接触させた結果、それらの界面に直接結合が生じた。
【００１９】
実施例５
環状体の単結晶質フェロックスキューブ（商品名）（Ｍｎ−Ｚｎフェライト）の一つの環状面を研磨してＲＭＳ粗さが約１ｎｍとなるようにし、脱イオン水で洗浄し、乾燥させ、オゾンで清浄にした。環状体の外径は３５ｍｍ、内径は１０ｍｍ及び厚さは１ｍｍとした。
実施例１に記載したように、直径１００ｍｍ及び厚さ３ｍｍであるＰＭＭＡウェファを研磨し、洗浄し、乾燥させた。次に、ＰＭＭＡウェファ及び環状体のフェロックスキューブのそれぞれの研磨された面を接触させた結果、それらの界面に直接結合が生じた。
【００２０】
実施例６
環状体の多結晶質である永久磁石Ｂａフェライトの一つの環状面を研磨してＲＭＳ粗さが約２ｎｍとなるようにし、脱イオン水で洗浄し、乾燥させ、オゾンで清浄にした。環状体の外径は３０ｍｍ、内径は１５ｍｍ及び厚さは３ｍｍとした。
実施例１に記載したように、直径１００ｍｍ及び厚さ３ｍｍであるＰＭＭＡウェファを研磨し、洗浄し、乾燥させた。次に、ＰＭＭＡウェファ及び環状体のフェライトのそれぞれの研磨面を接触させた結果、それらの界面に直接結合が生じた。
【００２１】
実施例７
直径１００ｍｍ及び公称厚さ５２５μｍである平坦なＳｉウェファを研磨しＲＭＳ粗さが約０．５ｎｍとなるようにし、実施例２のＳｉウェファに対して記載した方法で清浄にした。実施例１に記載し、製造したようなＰＭＭＡウェファの研磨した表面の上に平坦なＳｉウェファを置いた結果、ＳｉとＰＭＭＡとの界面に直接結合がすみやかに生じた。
【００２２】
実施例８
直径１００ｍｍ及び公称厚さ５２５μｍである平坦な溶融シリカウェファを研磨してＲＭＳ粗さが約０．５ｎｍとなるようにし、実施例３に溶融シリカに対して記載した方法と同じ方法で清浄にした。実施例１に記載し、製造したようなＰＭＭＡウェファの磨かれた表面の上に平坦な溶融シリカウェファを置いた結果、溶融シリカとＰＭＭＡとの界面に直接結合が生じた。
【００２３】
実施例９
本発明の方法は、Ｓｉにおける既知のピエゾ抵抗効果を利用する、感度の良い機械変形センサの製造に次のように使用することができる。
（ａ） 集積回路技術を用いて、例えば、単結晶Ｓｉのウェファの上部に絶縁した多結晶の抵抗回路網を形成することができる。
（ｂ） 次に、上記ウェファの厚さを、例えば 研削及びこれに続く研磨／エッチング処理により減少させる。最終ウェファの厚さは、十分な可撓性が確保されるように、１００μｍより薄くするのが好ましい。
（ｃ） 次に、本発明の方法により、可撓性有機物質（例えば、重合体）の薄膜の平滑表面にウェファを直接結合させた。生じた直接結合による親密性のために、有機膜に生じるいかなる機械的な変形も、Ｓｉウェファ及びその上に設けられている抵抗回路網によっても感知される。使用した特定の有機膜の組成及び厚さは、完成品のセンサの可撓性（感度）条件に応じて選定することができる。
（ｄ） 得られたウェファ／有機物質のサンドイッチ構造体を、（所望に応じ）小型の“チップ”に切断し、このようにして小形センサ素子を製造することができる。
（ｅ） 次に、かかるセンサー素子を、例えば、二つの支持柱の間のギャップに亙ってまたがせたり、これを捩り軸の表面に取付けたりすること等により、試験体の上に適切に取付けた。この場合、試験体のわずかな機械的変形（例えば、並進又は回転移動、振動、延伸など）が、センサ素子に伝達されて、ピエゾ抵抗効果を介して、Ｓｉウェファの上部の上にある抵抗回路網に電気抵抗変化を誘発する。これらの抵抗変化を、抵抗回路網の上の適切な位置に取付けられている細い接触リード線を介して監視することができる。

Claims (9)

  1. 有機物質を有する第１物体を第２物体に結合するに当り、両物体に相補的な光学平滑表面を設け、次にこれらの表面を互いに接触させ、その結果として自発的原子結合を二つの物体の原子間に形成することを特徴とする第１物体の第２物体への結合方法。
  2. 有機物質が重合体を有することを特徴とする請求項１記載の結合方法。
  3. 有機物質をポリメチルメタクリレート、ポリイミド及びテフロン（登録商標）からなる群から選定することを特徴とする請求項２記載の結合方法。
  4. 第２物体が有機物質を有することを特徴とする請求項１〜３のいずれか一つの項に記載の結合方法。
  5. 第２物体が半導体材料を有することを特徴とする請求項１〜３のいずれか一つの項に記載の結合方法。
  6. 第２物体がガラスを有することを特徴とする請求項１〜３のいずれか一つの項に記載の結合方法。
  7. 第２物体が導電体を有することを特徴とする請求項１〜３のいずれか一つの項に記載の結合方法。
  8. 相補的な光学平滑表面を、研磨処理を有する操作により設けることを特徴とする請求項１〜７のいずれか一つの項に記載の結合方法。
  9. 原子結合の形成後、相補的な光学平滑表面の接触部分を加熱処理することを特徴とする請求項１〜８のいずれか一つの項に記載の結合方法。
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