JP3792273B2 - Spectrometer - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to a spectroscopic measurement apparatus, and in particular, when spectroscopically measuring a one-dimensional region on a sample, a spectroscopic image is formed on a photodetector in which a plurality of micro light receiving elements are two-dimensionally arranged, and positional information and The present invention relates to a spectroscopic measurement device that simultaneously measures information in a wavelength direction.
[0002]
[Prior art]
FIG. 19 is a configuration diagram of an optical system of a spectroscopic measurement apparatus including a photodetector 19 in which a plurality of minute light receiving elements are two-dimensionally arranged. In the figure, the light emitted from the light source 10 is reflected by the line region extending in the Y-axis direction of the sample 11 and guided to the slit 14. The light that has passed through the slit 14 is collimated by the lens 15, dispersed by the diffraction grating 16, and then projected onto the photodetector 19 via the secondary light removal filter 17 and the lens 18. At this time, the position information in the line region of the sample 11 is obtained in the position direction (y-axis direction) on the photodetector 19, and each point of the line region is in the wavelength direction (λ-axis direction) orthogonal to the position direction. Information on the spread of the wavelength is obtained.
[0003]
In order to obtain the spectral intensity distribution from this spectral image, the light intensity signals obtained by the light receiving elements arranged in the λ-axis direction are each set with a wavelength width Δλm with respect to a predetermined center wavelength λm and integrated within that wavelength width. Or averaged. Thereby, the spectral intensity distribution at a certain point in the line region is obtained. Subsequently, the spectral intensity distribution at each point in the line area is calculated, whereby the spectral intensity distribution of the one-dimensional area on the sample 11 is obtained. Further, a two-dimensional region is obtained by repeatedly obtaining a spectral image of a one-dimensional region while sequentially moving the moving table 13 on which the sample 11 is placed and the optical system including the light source 10 to the photodetector 19 sequentially in the X-axis direction. The spectral intensity distribution of can be measured.
[0004]
FIG. 20 shows an example of a spectral image obtained by the photodetector 19 when the optical path is ideal in the above configuration. Here, the ideal optical path is a case where all the conditions such as no displacement of the optical components such as the lenses 15 and 18 and the slit 14 and no aberration of the lenses 15 and 18 are satisfied. . As a spectral image corresponding to the sample A in the line region, a two-dimensional spectral image such as B ₁ is obtained. Here, in order to determine the spectral intensity distribution with respect to the position Y _a in the sample A reads the detection signals of the light receiving elements arranged in λ axial position y _a (light receiving elements along the broken line in the figure) Just put it out.
[Problems to be solved by the invention]
[0005]
However, in an actual spectroscopic measurement apparatus, image formation of the photodetector 19 is distorted or deformed due to a relative displacement of optical components, lens aberration, or the like. FIG. 21 is a diagram illustrating an example of a spectral image in which distortion occurs due to non-ideal optical path conditions. As shown in the figure, unlike the case of FIG. 20, the direction of the spread of the wavelength corresponding to a certain position in the sample A does not coincide with the λ-axis direction. Therefore, when there is such distortion or deformation, an accurate spectral intensity distribution cannot be obtained even if the detection signals of the light receiving elements arranged in the λ-axis direction are read. In addition, when the optical components are adjusted and the apparatus is disassembled and assembled, the state of distortion and deformation may change, so that the reliability and reproducibility of the measurement results are further reduced.
[0006]
By the way, the spectroscopic measurement in the two-dimensional region as described above can be applied to various uses such as defect inspection of industrial products. One of them is application to colorimeters such as color meters and color difference meters. In general, when performing colorimetry, a relative reflectance with respect to a color sample defined in the JIS standard or the like is obtained, and a color value is calculated based on the relative reflectance. Therefore, when realizing a colorimeter in a two-dimensional region, if relative distortion occurs in the y-axis direction and further in the λ-axis direction due to the optical system as described above, naturally, an accurate relative reflectance cannot be obtained. The correct color value cannot be calculated.
[0007]
The present invention has been made in order to solve the above-described problems, and its purpose is to accurately measure the spectral intensity distribution even when the optical path is not in an ideal state. Another object of the present invention is to provide a spectroscopic measurement apparatus suitable for the colorimeter.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, the present invention provides a spectroscopic measurement apparatus for spectroscopically measuring a one-dimensional region on a sample.
a) light detecting means in which a plurality of micro light receiving elements are two-dimensionally arranged;
b) a spectroscopic means for projecting a one-dimensional region image of the sample in one dimensional direction of the light detecting means and dispersing light in the other dimensional direction;
c) Spectral intensity distribution pattern in a two-dimensional spectroscopic image obtained by spectroscopic measurement of a reference sample having a known spectral intensity distribution and pattern in the linear region of the slit longitudinal direction prior to spectroscopic measurement of the sample to be measured First storage means for storing position information of the light receiving element corresponding to the position correction information;
d) Prior to spectroscopic measurement of the sample to be measured, a spectral intensity distribution obtained by spectroscopically measuring a reference sample having a known spectral intensity distribution different from the reference sample is stored as reference information. A second storage means;
e) distortion correction means for correcting the positional distortion of the detection signal by each light receiving element based on the position correction information read from the first storage means when performing spectroscopic measurement of the sample to be measured;
f) calculating means for calculating a relative reflectance distribution based on the spectral intensity distribution in which positional distortion is corrected by the distortion correcting means and the reference information read from the second storage means for the sample to be measured;
It is characterized by having.
[0009]
[Action]
By spectroscopically measuring a reference sample having a known spectral intensity distribution pattern, it is possible to grasp the state of distortion or deformation of the spectral image resulting from the non-ideal optical system including the spectroscopic means. Therefore, a reference sample having a known spectral intensity distribution and pattern in the line area in the longitudinal direction of the slit is subjected to spectroscopic measurement, and the wavelength distribution direction of the spectral intensity distribution pattern that is the measurement result or the direction of the one-dimensional area image of the sample is measured. The position information of the corresponding light receiving element is stored in advance in the first storage means as correction information. Then, at the time of sample measurement, the distortion correction means performs a correction process such as reading the detection signal of each light receiving element or rearranging the detection signal based on the correction information, thereby obtaining a spectral image with reduced distortion and deformation. create.
[0010]
On the other hand, in order to obtain reference information for obtaining the relative reflectance, a reference sample having a specific spectral intensity distribution different from the reference sample is spectroscopically measured, and the spectral intensity distribution is stored in the second storage means. deep. At the time of sample measurement, the computing means calculates a spectral intensity distribution based on the spectral image whose distortion has been corrected by the distortion correcting means, and then calculates a relative reflectance distribution with respect to the spectral intensity distribution of the reference information.
[0011]
【The invention's effect】
Therefore, according to the present invention, a spectral image in which the influence of the displacement of the optical component, the aberration of the lens, and the like is corrected can be obtained. Therefore, a precise and accurate spectral intensity distribution can be obtained even when measuring a sample having a complicated pattern. Can be measured. Even when the apparatus is adjusted, high accuracy can always be maintained by measuring the reference sample again and replacing the position correction information. Furthermore, according to the present invention, the relative reflectance distribution with respect to the spectral intensity distribution of the reference sample can be easily and accurately obtained, so that a spectroscopic measurement device suitable for application to a colorimeter can be obtained.
[0012]
【Example】
Hereinafter, an embodiment of a spectrometer according to the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of a two-dimensional colorimeter using a spectroscopic measurement apparatus according to the present invention, and FIG. 2 is a configuration diagram of a main part centering on a signal processing unit 20 in FIG. The optical system of FIG. 1 differs from FIG. 19 in that the reference sample 12 can be moved to the same position as the sample 11 by a movable arm (not shown) instead of the sample 11 to be measured. It is that you are.
[0013]
The output signal of the photodetector 19 is processed by the signal processing unit 20, and the measurement result is displayed or printed out by the output unit 21. In the signal processing unit 20, the detection signal from the photodetector 19 is converted into a digital signal by an analog / digital (A / D) converter 201 for each light receiving element, and supplied to the position correction processing unit 202. The position correction processing unit 202 corrects the distortion and deformation of the spectral image generated in the optical system by the correction process described later. The position correction processing unit 202 is connected to a position correction data memory 203 for storing position correction information. In the position correction data memory 203, position correction data obtained by spectroscopic measurement of the reference sample is written in advance.
[0014]
The spectral image signal corrected by the position correction processing unit 202 is supplied to the reflectance calculation unit 204. A reference data memory 205 for storing reference information is connected to the reflectance calculation unit 204. In this reference data memory 205, reference data based on a spectral intensity distribution obtained by spectroscopic measurement of a reference sample is written in advance. The reflectance calculation unit 204 obtains a spectral intensity distribution from the input spectral image, and calculates a relative reflectance distribution for each wavelength based on the result and reference data. The data post-processing unit 206 performs processing such as smoothing of the relative reflectance data as necessary, and the color value calculation unit 207 calculates a color value from the relative reflectance by performing a predetermined calculation. This result is output from the output unit 21.
[0015]
Next, the processing operation in the apparatus of FIGS. 1 and 2 will be described in detail with reference to the drawings in the order of position correction processing and relative reflectance calculation processing.
[0016]
[Example of position correction processing]
First, an embodiment of the position correction process will be described with reference to FIGS.
(i) Generation processing of position correction data Prior to measurement of the sample 11, spectroscopic measurement of the reference sample is performed in order to generate position correction data which is basic information for performing position correction. As the reference sample, for example, a sample having a minute pattern having a size about the required position resolution at the position Y _k (k = 1 to m) in the line region is used. FIG. 3 is a diagram illustrating an example of the reference sample A and the spectral image B thereof. When the optical path is ideal, the m curves C _k should be straight lines extending in the λ-axis direction, and therefore the state of the curve reflects distortion and deformation. Therefore, the correspondence between the wavelength direction and the light receiving element for the m patterns of the reference sample is obtained based on this curve. This correspondence is stored in advance in the position correction data memory 203 as position correction data, and the detection signals of the respective light receiving elements are rearranged based on this correspondence when the sample 11 is measured.
[0017]
A specific processing method for obtaining the correspondence between the wavelength direction and the position of the light receiving element will be described below with reference to FIG. In the spectral image B for m minute patterns existing at the position Y _k (k = 1 to m) in the reference sample A, a vertical line of light receiving elements (in FIG. 4) at the position of λ _i (i = 1 to n). The detected value of the hatched portion in the spectral image is read, and the position of the light receiving element where the peak value of the light intensity appears is stored as p _ki (k = 1 to m). For example, when the detection value of the light receiving elements in the vertical line at the position of λ _i shows a peak at the position on the y axis as indicated by P in FIG. 4, the position of this peak (for example, the light receiving element in the y axis direction). The number assigned to identify the position) is sequentially stored in the position correction data memory 203 as p _ki .
[0018]
By repeating this operation from i = 1 to the number n of light receiving elements in the λ-axis direction, the position Y _k (k = ₁ to m) in the reference sample A and the position p _{ki of the} light receiving element along the curve C _k. Correspondence with (i = 1 to n) is obtained. In other words, in order to obtain the spectral intensity distribution of the position Y _k is, p _k1, p _k2, ..., in the order of p _kn, so that may be read the signal value of the light receiving elements located therein. In this way, the correspondence between the position Y _k in the sample and the position p _{ki of the} light receiving element indicating the wavelength spreading direction with respect to the position is obtained as position correction data.
[0019]
Note that when the relative positional relationship of the optical components is changed or the optical components themselves are replaced, the state of distortion or deformation of the spectral image may change. It is preferable that the position correction data is rewritten by automatically performing spectroscopic measurement of the reference sample when placed on the surface and performing an appropriate key operation from the outside. Further, the reference sample may be incorporated into the apparatus itself in the same manner as the reference sample.
[0020]
(ii) Correction processing at the time of sample measurement The position correction processing unit 202 is provided with an image memory for storing A / D converted signal values of all light receiving elements. When the output signal of the A / D converter 201 is written into the image memory, a write address based on the position correction data stored in the position correction data memory 203 is generated. At this time, as shown in FIG. 5, for the position Y _j existing between the position Y _k and the position Y _{k + 1} , the curves C _k and C _{k + 1} stored in the position correction data memory 203 are used. The position correction data related to and are read out, and the curve C _j (the dashed curve in FIG. 5) is estimated by calculating the weighted average of both, and the write address is obtained. As a result, the spectral image for any position in the line region of the sample 11 is written at an appropriate position in the image memory along the direction in which the wavelength spreads. That is, a spectral image in which distortion and deformation are corrected is obtained in the image memory.
[0021]
When reading detection signals from a plurality of light receiving elements constituting the photodetector 19, a light receiving element to be read is selected based on the position correction data, and the image memory is written in a predetermined address order. Similar results are obtained.
[0022]
Further, the spectral image with distortion obtained in the photodetector 19 is temporarily written in the first image memory, and position correction is performed when the spectral image is transferred from the first image memory to the second image memory. good. In this case, a spectral image with distortion is obtained in the first image memory, and a spectral image with distortion corrected is obtained in the second image memory.
[0023]
[Another embodiment of position correction processing]
Next, another embodiment of the position correction process will be described. In the position correction data creation process according to the above embodiment, the position correction data memory 203 stores the position information of all the light receiving elements on the curve C _{k with} respect to the λ-axis direction, so that a large capacity memory is required. FIG. 6 is a diagram for explaining a process of creating position correction data that can reduce the memory capacity. In the present embodiment, the position p _ki of the light receiving element corresponding to the curve C _k is not obtained sequentially from i = 1 to i = n in the λ axis direction, but is obtained at predetermined intervals of the number of light receiving elements in the λ axis direction. To remember.
[0024]
That is, the position of the light receiving element where the peak of the light intensity appears is stored as p _ki (k = 1 to m) only for the vertical row in the shaded area in FIG. Therefore, in the above embodiment, the position correction data is obtained by repeating the operation n times equal to the number of light receiving elements in the λ axis direction, whereas in this embodiment, the number of the repeated operations can be greatly reduced. Thus, the capacity of the position correction data memory 203 can be reduced accordingly.
[0025]
With respect to the wavelength region skipped in the λ-axis direction, a curve is formulated by calculation such as polynomial approximation or interpolation during correction processing, and the address of the image memory or the position of the light receiving element to be read is determined based on this.
[0026]
[Modification of position correction processing]
Further, it is also possible to obtain position correction data using a reference sample different from the above embodiment. FIG. 7 is a diagram illustrating an example of the reference sample A having a single minute pattern in the line region and the spectral image B thereof. The position p of the light receiving element corresponding to the curve C is obtained while moving the minute pattern in the reference sample with a step width of about the necessary resolution in the Y-axis direction. At this time, with respect to the λ-axis direction, the positions of all corresponding light receiving elements may be stored, or the positions of the corresponding light receiving elements may be stored at predetermined intervals.
[0027]
It is possible to correct not only the distortion and deformation in the y-axis direction as described above, but also the distortion in the λ-axis direction using the same method. In that case, for example, a reference sample having an emission line spectrum having a sharp peak in a specific wavelength range is used. Then, one or more spectral curves extending in the y-axis direction on the spectral image are obtained, and the correction data in the wavelength direction is created by obtaining the position of the light receiving element along the curve. Of course, it is also possible to correct the distortion in the position direction and the wavelength direction at the same time.
[0028]
[Example of relative reflectance calculation processing]
Now, the processing operation of the relative reflectance calculation will be described.
(i) Reference Data Creation Processing Prior to measurement of the sample 11, reference data serving as a reference for obtaining the relative reflectance is created and stored in the reference data memory 205. First, when measurement of the reference sample 12 is instructed by the key operation of the measurer, the movable table 13 on which the sample 11 is placed is retracted in the Z direction, and the reference sample 12 supported by the arm is the original of the sample 11. Moved to position. Then, the spectroscopic measurement of the reference sample 12 is performed.
[0029]
In the colorimeter, a predetermined standard white plate having no color unevenness is usually used as the reference sample 12. By spectroscopic measurement, first, a spectroscopic image of the reference sample 12 in which distortion and deformation of the optical system are corrected is obtained. Then, the spectral intensity distribution is calculated from the spectral image in the two-dimensional region of the reference sample 12 and stored in the reference data memory 205. Accordingly, the reference data memory 205 stores the spectral intensity distribution in which the distortion of the optical system is corrected. The reference sample 12 is exchanged for an appropriate one according to the purpose of measurement, and the data in the reference data memory 205 is newly rewritten. For example, when it is desired to obtain a color difference from a specific color, a sample having a predetermined color such as blue or red is used as the reference sample 12.
[0030]
(ii) Processing Sample 11 at Sample Measurement The sample 11 is returned to the original predetermined position, and the spectral intensity distribution in the one-dimensional region irradiated by the light source 10 is measured. By measuring the spectral intensity distribution while the movable table 13 and the optical system including the slit 14 to the light detector 19 are relatively moved stepwise in the X-axis direction, the reflectance calculation unit 204 performs two measurements on the sample 11. A spectral intensity distribution in the dimension region is obtained. Since the spectral distribution intensity is based on the spectral image corrected by the position correction processing unit 202, the spectral intensity distribution of the sample 11 in which the distortion of the optical system is corrected is stored in the memory in the reflectance calculation unit 204. Is memorized.
[0031]
The reflectance calculation unit 204 calculates a relative reflectance distribution from the spectral intensity distribution of the sample 11 and the reference data corresponding to each position and each wavelength of the spectral intensity distribution. At this time, if the light amount of the light source 10 is different between when the reference sample 12 is measured and when the sample 11 is measured, an error in relative reflectance occurs. Therefore, the value obtained by converting the light amount of the light source 10 measured by the light amount monitor 22 at the time of measuring the reference sample 12 into a digital signal by the A / D converter 201 is stored in the memory in the reflectance calculation unit 204 to measure the sample 11. The reflectance is corrected based on the difference from the light quantity measured at times.
[0032]
Next, another embodiment of the optical system of the spectroscopic measurement apparatus as in the present invention will be described below.
[0033]
[Modification of Light Source 10]
8 to 10 are diagrams showing an example of the configuration and structure of the light source 10. FIG. 8 shows an example using line illumination. The irradiation light of the light source 10 is guided to the line-shaped emission part 101 by the optical fiber 102 and irradiated onto the surface of the sample 11. If such line illumination is used, a one-dimensional region on the surface of the sample 11 can be uniformly irradiated.
[0034]
FIG. 9 shows an example in which two line lights as shown in FIG. 8 are used. Each of the line-shaped emission portions 101a and 101b irradiates a one-dimensional region on the surface of the sample 11 from two directions with an angle of α = 45 °. According to this, it is possible to realize a light source that is not easily shadowed.
[0035]
FIG. 10 shows an example in which the transmitted light is measured by irradiating light from the back side of the sample 11. The moving table 13 on which the sample 11 is placed is provided with a window portion in the light irradiation range, and the sample 11 is irradiated with light through this window portion.
[0036]
In addition, it is also possible to spectroscopically measure the fluorescence emitted from the sample 11 using excitation light such as a xenon lamp as the light source 10.
[0037]
[Modified example of light intensity monitor 22]
11 to 14 are diagrams showing an example of the configuration and installation of the light quantity monitor 22. FIG. 11 shows an example in which an optical fiber 102 for guiding light from the light source 10 is branched and a part of the light is irradiated to the light quantity monitor 22. FIG. 12 shows an example in which a half mirror 23 is installed on the optical path of the reflected light from the sample 11 and a part of the reflected light is guided toward the light amount monitor 22. FIG. 13 shows an example in which a light amount monitor 22 is attached in the vicinity of the sample 11 on the moving table 13. FIG. 14 shows an example in which the light quantity monitor 22 is incorporated in the lamp house of the light source 10. In either case, an error such as reflectance can be corrected by detecting the light amount variation of the light source 10 or the light amount change due to the change with time by the light amount monitor 22 and performing the signal processing as described above.
[0038]
[Example of confirming position of sample 11]
15 to 16 are diagrams showing the configuration of an apparatus for confirming the position of the measurement location on the sample 11. FIG. 15 is a diagram showing an example using the video camera 25. A half mirror 24 or a movable mirror (movable between a solid line position and a broken line position in the figure) is installed on the optical path of the reflected light from the sample 11, and the sample image reflected by the mirror 24 is displayed. The video camera 25 monitors. Thereby, it is possible to adjust the movable table 13 while confirming the measurement position on the monitor screen.
[0039]
FIG. 16 shows an example in which a light emitting unit 26 is provided so that a region on the sample 11 irradiated by the light source 10 can be visually confirmed. As the light emitting element of the light emitting unit 26, a visible light emitting diode, a laser diode having a minute power of visible light, or the like is used. When the position of the sample 11 is confirmed, the arm 27 to which the light emitting unit 26 is attached is pulled out to a predetermined position, and the sample 11 is irradiated with spot light. The arm 27 is adjusted in advance so that the position of the spot light is an area to be actually measured. Moreover, it is more preferable that the light emitting unit 26 has a line shape in which a plurality of light emitting elements are arranged so as to irradiate the entire one-dimensional region to be measured.
[0040]
Furthermore, in the configuration of FIG. 1, when confirming the position of the measurement location, the slit 14 is moved backward or moved to a position where the reflected light from the sample 11 is not blocked by the slit 14, and the diffraction grating 16 is rotated to remove the light from the sample 11. A configuration in which the zero-order light of the reflected light is incident on the photodetector 19 may be adopted. At this time, since the sample image is directly projected onto the photodetector 19, the position of the sample 11 can be adjusted using the image obtained by the photodetector 19. In this case, instead of rotating the diffraction grating 16, a mirror may be movably installed at the position of the diffraction grating 16, and the sample image may be projected onto the photodetector 19.
[0041]
[Modified example of moving table 13]
FIGS. 17 to 18 are views showing an example of the movable table 13 for measuring the sample 11 having a large area. FIG. 17 shows an example of the movable table 13 that enables measurement of the sample 11 having a two-dimensionally large area. The one-dimensional region irradiated by the light source 10 is a part of the sample in the Y-axis direction. At the time of sample measurement, as shown in the figure, the one-dimensional region is measured while moving the sample 11 in the X-axis direction and the Y-axis direction. Thus, measurement of the entire sample 11 is executed. Alternatively, the measurement may be performed by fixing the sample 11 and moving the optical system.
[0042]
FIG. 18 shows an example of the movable table 13 for measuring the ribbon-like elongated sample 11. A one-dimensional region is measured while the sample 11 is fed stepwise from the feed reel 28 to the take-up reel 29. By using such a moving table 13, the spectroscopic measurement or colorimetry of a sample having a large area can be performed efficiently.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a two-dimensional colorimeter using an embodiment of a spectroscopic measurement apparatus according to the present invention.
FIG. 2 is a configuration diagram of a main part of a signal processing unit in FIG.
FIG. 3 is a diagram for explaining an example of position correction processing;
FIG. 4 is a diagram for explaining position correction data creation processing;
FIG. 5 is a diagram for explaining a position correction processing operation during sample measurement.
FIG. 6 is a diagram for explaining another embodiment of the position correction process.
FIG. 7 is a diagram for explaining another example of position correction data creation processing;
FIG. 8 is a diagram showing a configuration of a light source according to another embodiment.
FIG. 9 is a diagram showing a configuration of a light source according to another embodiment.
FIG. 10 is a diagram showing a configuration of a light source according to another embodiment.
FIG. 11 is a diagram showing an example of the configuration of a light amount monitor.
FIG. 12 is a diagram showing a light amount monitor according to another embodiment.
FIG. 13 is a diagram showing a light amount monitor according to another embodiment.
FIG. 14 is a diagram showing a light amount monitor according to another embodiment.
FIG. 15 is a diagram showing an example of a sample position confirmation method.
FIG. 16 is a diagram showing a sample position confirmation method according to another embodiment.
FIG. 17 is a configuration diagram of a sample moving table according to another embodiment.
FIG. 18 is a configuration diagram of a sample moving table according to another embodiment.
FIG. 19 is a block configuration diagram of an optical system of a spectroscopic measurement apparatus.
FIG. 20 is a diagram showing a spectral image by an ideal optical system.
FIG. 21 is a diagram showing a spectral image by a non-ideal optical system.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Light source 11 ... Sample 12 ... Reference sample 13 ... Moving stage 14 ... Slit 16 ... Diffraction grating 19 ... Photo detector 20 ... Signal processing unit 202 ... Position correction processing unit 203 ... Position correction data memory 204 ... Reflectance calculation unit 205 ... Reference data memory 22 ... Light intensity monitor

Claims (1)

In a spectroscopic measurement device for spectroscopic measurement of a one-dimensional region on a sample,
a) light detecting means in which a plurality of micro light receiving elements are two-dimensionally arranged;
b) a spectroscopic means for projecting a one-dimensional region image of the sample in one dimensional direction of the light detecting means and dispersing light in the other dimensional direction;
c) Spectral intensity distribution pattern in a two-dimensional spectroscopic image obtained by spectroscopic measurement of a reference sample having a known spectral intensity distribution and pattern in the line area in the slit longitudinal direction prior to spectroscopic measurement of the sample to be measured First storage means for storing the position information of the light receiving element corresponding to the position correction information;
d) Prior to the spectroscopic measurement of the sample to be measured, a spectral intensity distribution obtained by spectroscopically measuring a reference sample having a known spectral intensity distribution different from the reference sample is stored as reference information. A second storage means;
e) distortion correction means for correcting the positional distortion of the detection signal by each light receiving element based on the position correction information read from the first storage means when performing spectroscopic measurement of the sample to be measured;
f) a computing means for calculating a relative reflectance distribution based on the spectral intensity distribution in which positional distortion is corrected by the distortion correcting means and the reference information read from the second storage means for the sample to be measured;
A spectroscopic measurement device comprising:

Images