JP3791862B2 - Polishing equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a polishing apparatus that polishes a surface of a lens, a lens mold, or the like with high accuracy, and more particularly, to a polishing apparatus that polishes a workpiece having a curved surface or a free curved surface in which irregularities are mixed on the surface.
[0002]
[Prior art]
Conventionally, a polishing apparatus (prior art 1) shown in FIG. 7 is widely known as a polishing apparatus for polishing a workpiece having a curved surface or a free-form surface having uneven surfaces on its surface. In FIG. 7, a workpiece 101 is affixed to a plate 102 and is rotated about an axis m of a workpiece axis (not shown). The surface 101a of the workpiece 101 is usually finished to an optical functional surface such as an aspherical surface. Above the workpiece 101, a polishing head 106 that follows a trajectory that forms a curved surface or a free-form surface by NC control or the like is disposed. At the lower end of the polishing head 106, a rotating shaft 104 that rotatably holds the spherical polishing tool 103 and a rotary pressurizing device 105 that rotates and pressurizes the rotating shaft 104 are provided. The polishing tool 103 is in contact with the surface 101a of the workpiece 101 in a small area, and performs polishing while following a trajectory that forms a curved surface or a free-form surface.
[0003]
On the other hand, a technique (conventional technique 2) described in JP-A-5-212680 is disclosed as “abrasive member and abrasive tool”. The prior art 2 will be described with reference to FIGS. In FIGS. 8 and 9, the abrasive member 203 is configured by closely attaching the alumina fine powder 202 to the outer surface of the rubber hollow donut 201 via an adhesive. The hollow portion 204 of the polishing member 203 has pressurized air (for example, 0.5 kg / cm ² ) And the donut shape is maintained. The air pressure of the pressurized air is determined as appropriate in relation to the contact pressure during processing. In order to use the polishing member 203, for example, as shown in FIG. 10 or FIG. 11, a boss 206 (or fitting cylinder 206a) having an uneven portion 205 on the outer periphery (or inner periphery) such as a gear is used as the polishing member. Press-fitted into the central hole 203a of 203 (or fitted into the outer side 203b), imparts rotational force or the like (may be slidable) to the support shaft 207, and has a convex surface 208 (see FIG. 12) and concave surface 209 (see FIG. 13) ). In this case, the polishing member 203 and the surface to be polished are in contact with each other over a wide area in proportion to the contact pressure, and are subjected to isobaric polishing.
[0004]
Furthermore, a technique (conventional technique 3) described in Japanese Patent Laid-Open No. 5-245767 is disclosed as a “polishing apparatus”. The prior art 3 will be described with reference to FIG. Reference numeral 301 denotes a lens to be processed, which rotates around a certain rotation axis. A polishing tool 304 has a mechanism that rotates about the tool center as a rotation axis. The polishing tool 304 is also provided with a mechanism for positioning in the normal direction of the lens surface at an arbitrary position of the lens 301 to be processed. Reference numeral 303 denotes an elastic body, which is deformed in the direction of the lens 301 to be processed by putting a fluid into the polishing tool 304. A polisher 302 made of foamed polyurethane or the like is attached to the surface of the elastic body 303 at a position shifted from the rotation axis of the polishing tool 304, that is, eccentrically attached. Therefore, the pressure of the fluid in the polishing tool is 0.1 to 5 kgf / cm. ² When set to, the lens 301 to be processed is pressurized by the polisher 302 with the same pressure. In this state, the polishing tool 304 is rotated at 20 to 1000 rpm and the lens to be processed 301 is rotated at 0.1 to 200 rpm, and cerium oxide, zirconium oxide, etc. are mixed and supplied to city water as 1-20% as abrasive grains. By controlling the processing time, the processing amount is controlled.
[0005]
[Problems to be solved by the invention]
However, the above prior art has the following problems. First, in the prior art 1, since it is premised that the polishing tool 103 is in contact with the processing surface 101a of the workpiece 101 with a small area, the polishing efficiency is very poor and a great amount of polishing time is required. In addition, since the polishing tool 103 comes into contact with a small area, it is difficult to selectively remove the polishing tool 103 from a minute convex portion of the processing surface 101a that appears as a cutter mark. Therefore, there is a problem that it is difficult to efficiently remove the cutter mark.
[0006]
Next, in the prior art 2, the polishing process of the polishing tool 203 in which an annular contact portion is formed on the work proceeds. However, since it is in an annular contact state, its area cannot be set large, and there is a limit to improving the polishing efficiency.
[0007]
Furthermore, in the prior art 3, the elastic body 303 having an internal pressure is deformed and the polisher 302 can be brought into close contact with the entire shape of the lens 301 to be processed. Since it is necessary to bend in order to increase the amount of deformation of the elastic body 303, it is difficult to accurately control the contact position between the lens 301 to be processed and the polisher 302. Therefore, there is a drawback that a shape error of the polished surface of the lens to be processed 301 is likely to occur.
[0008]
The present invention has been made in view of the above-described conventional problems, and an object of the invention according to claim 1, 2, or 3 is that it is possible to efficiently remove a cutter mark and set a high polishing efficiency, and a polisher. It is an object of the present invention to provide a polishing apparatus capable of accurately setting the position of a contact portion between a workpiece and a workpiece.
[0009]
[Means for Solving the Problems]
In order to solve the above problems, a polishing apparatus according to claim 1 is a polishing apparatus for polishing a workpiece by pressing a rotating polisher on the surface of the workpiece.
An elastic polisher;
Said Near the center of the back of the polisher Attached and rotatable A rotating shaft, and a polisher deformable member that can contact outward from the center of the back surface of the polisher; Said A pressing mechanism for pressing the polisher deforming member in the direction of the polisher; A controller for controlling a stop position or a pressing force of the pressing mechanism in accordance with a surface shape of the workpiece to which the surface of the polisher contacts; It comprises. The polishing apparatus according to a second aspect of the invention is the polishing apparatus according to the first aspect of the invention, wherein the polisher deforming member is a bag-like member sealed with gas, liquid or viscous fluid. Furthermore, the polishing apparatus according to a third aspect of the present invention is the polishing apparatus according to the first aspect, wherein the polisher deforming member is a coil-shaped or plate-shaped spring made of an elastic material.
[0010]
In other words, the polishing apparatus of the invention according to claim 1 is a polisher deformable member that can contact outward from the center of the back surface of the polisher so that the polisher adheres to the surface of the workpiece in accordance with the shape of the surface of the workpiece. The position of the workpiece is adjusted by a pressing mechanism, and the polisher is pressed against the surface of the workpiece while rotating the rotating shaft attached near the center of the back surface of the polisher to polish the workpiece.
Further, the polishing apparatus of the invention according to claim 2 is a gas or liquid that can be contacted outward from the center of the back surface of the polisher so that the polisher adheres to the surface of the workpiece in accordance with the shape of the surface of the workpiece. Alternatively, the position of the bag-like member sealed with viscous fluid is adjusted by the pressing mechanism, and the polisher is pressed against the surface of the workpiece while rotating the rotating shaft attached near the center of the back surface of the polisher to polish the workpiece. To do.
Further, the polishing apparatus of the invention according to claim 3 is made of an elastic material that can contact outward from the center of the back surface of the polisher so that the polisher adheres to the surface of the workpiece in accordance with the shape of the surface of the workpiece. The position of the coil-like or plate-like spring is adjusted by a pressing mechanism, and the polisher is pressed against the surface of the workpiece while rotating the rotating shaft attached near the center of the back surface of the polisher to polish the workpiece.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
(Embodiment 1)
1 to 4 show the first embodiment, FIG. 1 is a longitudinal sectional view in which a part of the polishing apparatus is mounted, FIG. 2 is an explanatory view showing a contact state between the polisher unit and the concave surface of the workpiece, and FIG. FIG. 4 is an explanatory view showing a contact state between the polisher unit and the convex surface of the workpiece. FIG. 4 is a state diagram showing the leaf spring attached to the polisher and its deformed state.
[0012]
In FIG. 1, the polishing apparatus includes a polishing machine base 1 including a controller 24, a work holding unit 2 housed in the polishing machine base 1, and a polisher unit 3 disposed on the upper surface of the polishing machine base 1. Yes. The work holding unit 2 is rotatably attached to the polishing machine base 1 and is attached to the polishing machine base 1 to hold a work 4 as a workpiece to be polished, and to the polishing machine base 1, and is axially symmetric. And a rotating mechanism 6 that rotates the workpiece 4 about the axis of symmetry (the center axis A of the workpiece 4 shown in FIG. 2). The polisher unit 3 is located above the work holding unit 2 and is attached to the polishing machine base 1 so that it can be NC-driven in two horizontal and vertical directions. Detailed drawings and description of a mechanism for NC driving the polisher unit 3 in the horizontal direction and the vertical direction are omitted.
[0013]
In FIG. 2, the rotary shaft 7 is rotatably held in the vertical direction by bearings 9 and 10 via a cylindrical collar 8. The collar 8 and the rotation shaft 7 are configured to rotate together in the rotation direction by the key 7A and to slide in the vertical direction (longitudinal direction of the rotation shaft 7). A pulley 11 is attached to the rotary shaft 7, and the pulley 11 is linked to a pulley 13 of a motor 12 attached to a frame 25 of the polisher unit 3 via a belt 14. Driven by the rotation speed. An air cylinder 15 is disposed above the rotating shaft 7, and the lower surface of the coupling 16 fixed to the pressure shaft 15 a is connected to the upper surface of a flange 7 b formed on the upper portion of the rotating shaft 7 via a slide bearing 17. The pressure applied from the air cylinder 15 is transmitted to the rotary shaft 7.
[0014]
A disc-shaped polisher 18 made of an elastic polyurethane sheet is attached to the lower end of the rotating shaft 7 at the center of the back surface thereof, and rotates with the rotation of the rotating shaft. A cylindrical slide member 19 is fitted to the lower portion of the rotating shaft 7 so as to be movable up and down along the rotating shaft 7. The lower outer periphery 19a of the slide member 19 and the back surface outer periphery 18a of the polisher 18 are connected by a plurality of plate springs 20 as polisher deforming members that are elastically deformed. The plate springs 20 are formed at a plurality of arm-shaped plate spring portions 20 a extending radially from the lower outer peripheral portion 19 a of the cylindrical slide member 19, and at the end portions of the respective plate spring portions 20 a. And a fixing portion 20b fixed to the back surface outer periphery 18a (see FIG. 3A). With the configuration of the leaf spring 20, each part of the polisher 18 can be freely deformed and closely contacted with the surface 4a of the workpiece 4 even in the inclined portion of the surface 4a of the workpiece 4 (FIG. 3). (See (b)).
[0015]
Further, the upper end of the slide member 19 is pressed through a slide bearing 21 according to a stop position of an L-shaped pressing member 23 that is movable in the vertical direction. The pressing member 23 is attached to a slider 22b of a linear actuator 22 as a pressure mechanism. The position of the pressing member 23 is controlled by driving the slider 22b vertically by a DC servo motor 22a via a ball screw mechanism (not shown). Yes. The DC servo motor 22a is controlled by the controller 24.
[0016]
Next, a workpiece polishing method using the polishing apparatus having the above-described configuration will be described. The polisher unit 3 is moved so that the polisher 18 is positioned above the polishing position of the surface 4a of the predetermined workpiece 4. Next, the pressure shaft 15 a of the air cylinder 15 is lowered to lower the rotary shaft 7 via the coupling 16 and the thrust bearing 17. Then, the polisher 18 attached to the lower end of the rotating shaft 7 is brought into contact with the surface 4a of the workpiece 4 so that a predetermined polishing pressure is applied. At this time, the degree of close contact between the surface 18b of the polisher 18 and the surface 4a of the work 4 varies depending on the height difference of the uneven shape of the surface 4a of the work 4. When the surface 4a of the workpiece 4 in contact with the polisher 18 is concave (see FIG. 2), the center of the polisher 18 having elasticity is pressed by the rotating shaft 7 to be elastically deformed and easily brought into a close contact state.
[0017]
On the other hand, when the surface 4a of the workpiece 4 with which the polisher 18 contacts is convex, a gap is generated between the outer periphery of the polisher surface 18b and the surface 4a of the workpiece 4 as shown in FIG. The pressing member 23 is lowered and brought into contact with the slide member 19 via the slide bearing 21 and stopped at a predetermined position. At this time, the polisher 18 is elastically deformed from the outer periphery via the leaf spring 20 in accordance with the lowering of the slide member 19, and deforms along the convex shape of the surface 4 a of the workpiece 4. Since the leaf spring 20 is deformed from the state where the polisher 18 and the surface 4a of the work 4 are in close contact with each other, the applied pressure does not increase locally, and a uniformly distributed pressurizing action can be obtained. In order to bring the polisher 18 into close contact with the surface 4 a of the workpiece 4, the linear actuator 22 is lowered by a distance corresponding to the height difference d of the outer peripheral portion of the polisher 10 with reference to the center position of the polisher 10.
[0018]
In this way, the linear actuator 22 is controlled in accordance with the shape of the surface 4a of the work 4 so that the polisher 18 is always in close contact with the surface 4a of the work 4 and a predetermined polishing pressure is applied by the air cylinder 15 to 12, the polisher unit 3 is NC-driven while feeding the surface 4 a of the rotating work 4, and polishing is performed.
[0019]
As described above, the stop position of the linear actuator 22 is stored in advance in the controller 24 in accordance with the height difference of the concavo-convex shape of the surface 4 a of the work 4, and the polisher 18 is in any position on the surface 4 a of the work 4. Control can be performed so that the surface 4a of the workpiece 4 is uniformly pressed in a close contact state. Therefore, it is possible to always polish using the entire surface of the polisher 18. Further, the contact position between the polisher 18 and the surface 4 a of the work 4 is set with reference to the rotating shaft 7.
[0020]
According to the present embodiment, since polishing can always be performed using the entire surface of the polisher, efficient polishing can be advanced, and the polishing time can be shortened. Further, since the contact position between the polisher 18 and the surface 4a of the workpiece 4 is set with reference to the rotating shaft 7, the accuracy of the polishing position can be improved, and the shape accuracy of the polishing surface can be improved.
[0021]
In the present embodiment, the material of the polisher 18 is polyurethane, but the material is not limited to this and may be any material that can be elastically deformed. For example, rubber or a material containing rubber as a main component, or a resin material that is easily elastically deformed such as polystyrene may be used. Further, the shape of the polisher 18 is not limited to a disk shape, and may be warped and deformed according to the uneven shape of the workpiece surface, and may be a shape having a notch or a polygon. Furthermore, although the case where the workpiece is a rotating body has been described in the present embodiment, even if the workpiece is a free-form surface having no rotational symmetry axis, the same processing can be obtained and polishing can be performed.
[0022]
If an elastic member such as polyurethane is interposed between the leaf spring 20 and the polisher back surface 18a, the pressing force applied to the polisher as the slide member 19 descends can be more evenly distributed to bring the polisher into close contact with the work surface. Will be able to. Further, instead of the leaf spring 20, a plurality of coiled springs may be provided between the slide member 19 and the polisher back surface 18a. As a result, the coiled spring acts as a deforming member, and the polisher 18 can be deformed from the outer peripheral portion along the work surface according to the lowered position of the pressing member 23.
[0023]
(Embodiment 2)
FIG. 5 shows the second embodiment, and is an explanatory view showing a contact state between the polisher unit and the convex surface of the workpiece. The polishing apparatus according to the present embodiment replaces the leaf spring 20 according to the first embodiment with an air bag 31 as a bag-shaped member in which air is sealed so that the outer periphery of the polisher 18 extends along the surface 4 a of the workpiece 4. The only difference from the first embodiment is that it is deformed. Therefore, only the parts different from the first embodiment will be described, and the same members will be denoted by the same reference numerals and description thereof will be omitted.
[0024]
In FIG. 5, a donut-shaped air bag 31 in which air is sealed is disposed on the upper surface of the outer periphery 18a of the back surface of the polisher 18, and the air bag 31 has an outer diameter and a lower surface formed in a cup shape. It is housed and fixed in the recess 32a of 32. The slide member 32 is fitted to the rotary shaft 7 so as to be movable up and down, and the upper end thereof is pressed via the slide bearing 21 according to the stop position of the L-shaped pressing member 23 that is movable in the vertical direction. It has become. Other configurations are the same as those of the polishing apparatus of the first embodiment.
[0025]
Next, the operation of the workpiece polishing method using the polishing apparatus having the above configuration will be described. When the surface 4a of the workpiece 4 has a convex shape, the pressing member 23 is lowered, and the slide member 26 is pushed down according to the position, whereby the airbag 31 is deformed between the slide member 32 and the polisher back surface outer periphery 18a. Since the air bag 31 has a bag shape in which air is sealed, the back surface of the polisher is deformed by pressing the back surface of the polisher with equal pressure along the shape of the front surface 4a of the workpiece 4. Accordingly, the polisher surface 18b can be brought into close contact with the surface 4a of the work 4 as in the first embodiment. However, in the second embodiment, the uniform pressure action of the airbag 25 causes the surface of the work 4 from the polisher 18 to work. It becomes possible to apply the polishing pressure acting on 4a more evenly. As in the first embodiment, when the surface 4a of the workpiece 4 is concave, the pressing member 23 is raised so that the pressure of the polisher 18 is only the pressure of the cylinder 15.
[0026]
According to the present embodiment, since polishing can always be performed using the entire surface of the polisher, efficient polishing can be advanced, and the polishing time can be shortened. Further, the uniform pressure action of the air bag 25 allows the polishing pressure acting on the work surface from the polisher 18 to be applied more evenly, thereby further improving the shape accuracy of the polishing surface.
[0027]
In the present embodiment, air is sealed in the airbag 25, but the same action can be produced by sealing other gas, liquid, or viscous fluid instead. For example, it is conceivable to use water as the liquid and water glass as the viscous fluid.
[0028]
(Embodiment 3)
FIG. 6 is an explanatory view showing the contact state between the polisher unit and the convex surface of the work according to the third embodiment. The polishing apparatus according to the present embodiment controls the pressing force applied to the airbag 31 according to the second embodiment so that the outer periphery of the polisher 18 is deformed along the surface 4 a of the workpiece 4. Therefore, only a different part from Embodiment 2 is demonstrated, the same code | symbol is attached | subjected to the same member and description is abbreviate | omitted.
[0029]
In FIG. 6, the L-shaped pressing member 41 is connected to the pressure shaft 43 a of the air cylinder 43 fixed to the frame 25 of the polisher unit 3, and presses the slide member 42 downward via the thrust bearing 21. It is configured to be able to. The slide member 42 is configured to rotate integrally with the rotation shaft by the key 7 </ b> C and to be movable in the vertical direction with respect to the rotation shaft 7. The air pressure supplied to the air cylinder 43 is set by a variable regulator 44 and can be freely controlled by the controller 24.
[0030]
The polisher 18 has a rotary shaft tip receiver 45 fitted in a frame portion 18c erected at the center of the back surface thereof. The rotary shaft tip receiver 45 is made of sapphire and has a concave spherical surface portion 45a formed on the upper surface. The reason for using sapphire is to prevent wear, but other materials may be used as long as they are hard materials. The spherical portion 45 a of the rotary shaft tip receiver 45 accommodates a convex spherical tip portion 7 d of the rotary shaft 7, and this rotary shaft 7 transmits a pressing force to the polisher 18, and the polisher 18 is used for the work 4. Even if it deforms along the surface 4a, it is a separate body from the polisher 18 and therefore does not hinder the deformation. Other configurations are the same as those of the second embodiment.
[0031]
Next, the operation of the workpiece polishing method using the polishing apparatus having the above configuration will be described. When the surface 4a of the workpiece 4 has a convex shape, the close contact action of the outer peripheral part due to the deformation of the polisher 18 is based on the height difference d of the outer peripheral part of the polisher with respect to the center position of the polisher. The pressure force transmitted from the pressure to the pressing member 41 is regulated by the regulator. 44 And can be controlled. In this case, the relationship between the air pressure value supplied to the air cylinder 29 and the amount of deformation of the polisher 18 or the contact state between the polisher 18 and the surface 4a of the workpiece 4 is grasped in advance, and is matched to the shape of the surface 4a of the workpiece 4. A control program for the controller 24 may be set. Further, since the rotary shaft 7 and the polisher 18 are positioned in contact with each other on the spherical surface, even if the polisher 18 is deformed along the surface 4a of the workpiece 4, the vicinity of the contact portion is not easily subjected to deformation resistance, and the deformation Will not be disturbed. Accordingly, the polisher 18 comes closer to the surface 4a of the workpiece 4. In addition, when the surface 4a of the workpiece 4 has a concave shape, it is the same as in the second embodiment.
[0032]
According to the present embodiment, since the pressing force applied to the pressing member 27 is controlled by the controller 24 and the polishing can be performed while the polisher 18 is in close contact with the entire surface, the same effect as in the first embodiment can be realized. Can be obtained. Further, as a specific effect of the present embodiment, when the polisher 18 is deformed along the shape of the work surface, there is little resistance from the connecting portion between the rotating shaft 7 and the polisher 18, so that the close contact state is improved. The shape accuracy of the polished surface can be further improved.
[0033]
The technical idea of the following configuration is derived from the specific embodiment described above.
(Appendix)
(1) In a polishing apparatus for polishing a workpiece by pressing a rotating polisher on the surface of the workpiece,
An elastic polisher, a rotatable rotating shaft attached near the center of the back surface of the polisher, a polisher deforming member that can contact outward from the center of the back surface of the polisher, and the polisher deforming member in the direction of the polisher A polishing apparatus comprising a pressing mechanism for pressing.
(2) The polishing apparatus according to (1), wherein the polisher is an elastic sheet.
(3) The polishing apparatus according to (1) or (2), wherein the polisher deforming member is a bag-like member in which gas, liquid, or viscous fluid is sealed.
(4) The polishing apparatus according to (1) or (2), wherein the polisher deforming member is a coil-like or plate-like spring made of an elastic material.
(5) The pressing mechanism includes a slide member that is movable in the vertical direction along the rotation axis, and a pressure mechanism that drives the slide member in the vertical direction. The polishing apparatus according to 2), (3) or (4).
(6) The apparatus further includes a controller that controls the stop position or the pressing force of the pressing mechanism so that the surface of the polisher is in close contact with the surface of the workpiece in accordance with the shape of the surface of the workpiece. The polishing apparatus according to (1), (2), (3), (4) or (5), characterized in that
[0034]
According to the polishing apparatus of appendix (1), the position of the surface of the polisher and the workpiece to be polished is defined by the rotating shaft attached in the vicinity of the center of the back surface, and an accurate position can be set. Furthermore, when the workpiece is concave, the polisher can be elastically deformed to adhere to the entire surface of the workpiece, and when the workpiece is convex, it contacts outside from the center of the back surface of the polisher. The polisher is pressed from the back surface by the polisher deforming member and is elastically deformed, so that the entire surface can be in close contact with the surface of the workpiece. As described above, even when the surface shape of the workpiece is an uneven surface shape, the polisher can be brought into close contact with each other and the position of the contact portion can be accurately set.
According to the polishing apparatus of appendix (2), since the polisher is an elastic sheet, the sheet can be warped and deformed with respect to the center, and the work surface can be easily fitted to the uneven shape.
According to the polishing apparatus of appendix (3), since the polisher deforming member is a bag-shaped member sealed with gas, liquid, or viscous fluid, the bag-shaped member is easily deformed and is in close contact with the back surface of the polisher. The pressing force from the mechanism can be transmitted to the entire surface of the polisher, and the polisher can be warped and deformed.
According to the polishing apparatus of appendix (4), since the polisher deforming member is composed of a coil-like or plate-like spring made of an elastic material, the amount of deformation of the spring according to the height difference of the irregularities on the surface of the workpiece By providing the pressure by the pressing mechanism, the contact state of the polisher can be appropriately set.
According to the polishing apparatus of appendix (5), by applying the pressure action of the pressure mechanism driven in the vertical direction to the slide member moving in the vertical direction along the rotation axis, the polisher centering on the rotation axis is warped and deformed. Can be produced.
According to the polishing apparatus of appendix (6), the controller deforms the warp of the polisher by the polisher deforming member by controlling the stop position or the pressing force of the pressing mechanism according to the height difference of the surface of the workpiece on which the rotation shaft is located. Since the deformation can be freely controlled according to the uneven shape of the surface of the workpiece, the surface of the polisher can be brought into close contact with the surface of the workpiece.
[0035]
【The invention's effect】
According to the polishing apparatus of the invention according to claim 1, 2, or 3, the polisher can be contacted outward from the center of the back surface of the polisher so that the polisher adheres to the surface of the workpiece in accordance with the shape of the surface of the workpiece. The position of the polisher deformable member is adjusted by the pressing mechanism, and the polisher is pressed against the surface of the work piece while rotating the rotating shaft attached near the center of the back surface of the polisher, and the work piece is polished, thereby cutting the work piece. The mark can be efficiently removed and the high polishing efficiency can be set, and the position of the contact portion between the polisher and the workpiece can be set accurately.
According to the polishing apparatus of the second aspect of the invention, in addition to the above effect, the polisher contacts the outside from the center of the back surface of the polisher so that the polisher adheres to the surface of the workpiece in accordance with the shape of the surface of the workpiece. The position of a bag-like member sealed with possible gas, liquid or viscous fluid is adjusted by a pressing mechanism, and the polisher is pressed against the surface of the workpiece while rotating the rotating shaft attached near the center of the back surface of the polisher. By polishing the workpiece, it becomes possible to apply the polishing pressure acting on the workpiece surface from the polisher more evenly by the uniform pressure action of the bag-like member, and to improve the shape accuracy of the polishing surface. it can.
According to the polishing apparatus of the third aspect of the invention, in addition to the above effect, the polisher contacts the outside of the center of the back surface of the polisher so that the polisher adheres to the surface of the workpiece in accordance with the shape of the surface of the workpiece. The position of a coiled or plate spring made of possible elastic material is adjusted by a pressing mechanism, and the polisher is pressed against the surface of the workpiece while rotating the rotating shaft attached near the center of the back surface of the polisher. By polishing the object, the contact position between the polisher and the surface of the workpiece is set based on the rotation axis, so that the accuracy of the polishing position is improved and the shape accuracy of the polishing surface can be improved.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of a part of a polishing apparatus according to a first embodiment.
FIG. 2 is an explanatory view showing a contact state between the polisher unit of Embodiment 1 and a concave surface of a workpiece.
FIG. 3 is a state diagram showing a leaf spring attached to the polisher of the first embodiment and its deformed state.
4 is an explanatory view showing a contact state between the polisher unit of the first embodiment and a convex surface of a workpiece. FIG.
5 is an explanatory view showing a contact state between a polisher unit and a convex surface of a workpiece according to Embodiment 2. FIG.
6 is an explanatory view showing a contact state between a polisher unit and a convex surface of a workpiece according to Embodiment 3. FIG.
FIG. 7 is a configuration diagram of a polishing apparatus according to prior art 1;
8 is a plan view of a polishing member of prior art 2. FIG.
FIG. 9 is a front sectional view of a polishing member according to prior art 2.
FIG. 10 is a view in which a polishing member of prior art 2 is attached to a support shaft.
FIG. 11 is a view in which a polishing member of prior art 2 is attached to a support shaft.
12 is a diagram for polishing a convex surface of Conventional Technique 2. FIG.
FIG. 13 is a diagram for polishing a concave surface of Conventional Technique 2;
14 is a cross-sectional view of a polishing apparatus according to prior art 3. FIG.
[Explanation of symbols]
4 Work
4a Surface
7 Rotating shaft
18 Polisher
20 leaf spring
22 Linear actuator
23 Pressing member

Claims (3)

In a polishing apparatus for polishing a workpiece by pressing a rotating polisher on the surface of the workpiece,
An elastic polisher;
A rotatable rotary shaft which is attached near the center of the back surface of the polisher,
A polisher deformable member that can contact outward from the center of the back surface of the polisher;
A pressing mechanism for pressing the polisher deformable member in the direction of the polisher in accordance with the surface shape of the workpiece surface of the polisher is in contact, and a controller for controlling the stop position or the pressing force of the pressing mechanism ,
A polishing apparatus comprising:  The polishing apparatus according to claim 1, wherein the polisher deforming member is a bag-like member in which a gas, a liquid, or a viscous fluid is sealed.  The polishing apparatus according to claim 1, wherein the polisher deforming member is a coil-shaped or plate-shaped spring made of an elastic material.

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