JP3781048B2 - シート状プローブおよびその応用 - Google Patents

シート状プローブおよびその応用 Download PDF

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Publication number
JP3781048B2
JP3781048B2 JP2004362951A JP2004362951A JP3781048B2 JP 3781048 B2 JP3781048 B2 JP 3781048B2 JP 2004362951 A JP2004362951 A JP 2004362951A JP 2004362951 A JP2004362951 A JP 2004362951A JP 3781048 B2 JP3781048 B2 JP 3781048B2
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JP
Japan
Prior art keywords
sheet
electrode
wafer
probe
frame plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004362951A
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English (en)
Japanese (ja)
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JP2005128028A5 (enExample
JP2005128028A (ja
Inventor
和夫 井上
克己 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
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Publication date
Application filed by JSR Corp filed Critical JSR Corp
Priority to JP2004362951A priority Critical patent/JP3781048B2/ja
Publication of JP2005128028A publication Critical patent/JP2005128028A/ja
Publication of JP2005128028A5 publication Critical patent/JP2005128028A5/ja
Application granted granted Critical
Publication of JP3781048B2 publication Critical patent/JP3781048B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2004362951A 2003-05-13 2004-12-15 シート状プローブおよびその応用 Expired - Fee Related JP3781048B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004362951A JP3781048B2 (ja) 2003-05-13 2004-12-15 シート状プローブおよびその応用

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003134450 2003-05-13
JP2004362951A JP3781048B2 (ja) 2003-05-13 2004-12-15 シート状プローブおよびその応用

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2004131764A Division JP3649245B2 (ja) 2003-05-13 2004-04-27 シート状プローブの製造方法

Publications (3)

Publication Number Publication Date
JP2005128028A JP2005128028A (ja) 2005-05-19
JP2005128028A5 JP2005128028A5 (enExample) 2005-09-29
JP3781048B2 true JP3781048B2 (ja) 2006-05-31

Family

ID=34655468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004362951A Expired - Fee Related JP3781048B2 (ja) 2003-05-13 2004-12-15 シート状プローブおよびその応用

Country Status (1)

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JP (1) JP3781048B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200619635A (en) * 2004-11-11 2006-06-16 Jsr Corp Sheet-like probe, its manufacturing method, and its application
TW200624817A (en) * 2004-11-11 2006-07-16 Jsr Corp Sheet-form probe, probe card, and wafer inspection method

Also Published As

Publication number Publication date
JP2005128028A (ja) 2005-05-19

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