JP3722564B2 - 検査装置 - Google Patents

検査装置 Download PDF

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Publication number
JP3722564B2
JP3722564B2 JP25937796A JP25937796A JP3722564B2 JP 3722564 B2 JP3722564 B2 JP 3722564B2 JP 25937796 A JP25937796 A JP 25937796A JP 25937796 A JP25937796 A JP 25937796A JP 3722564 B2 JP3722564 B2 JP 3722564B2
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JP
Japan
Prior art keywords
inspection
defect
inspection object
semiconductor wafer
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP25937796A
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English (en)
Japanese (ja)
Other versions
JPH10103916A5 (enExample
JPH10103916A (ja
Inventor
桂司 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP25937796A priority Critical patent/JP3722564B2/ja
Publication of JPH10103916A publication Critical patent/JPH10103916A/ja
Publication of JPH10103916A5 publication Critical patent/JPH10103916A5/ja
Application granted granted Critical
Publication of JP3722564B2 publication Critical patent/JP3722564B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP25937796A 1996-09-30 1996-09-30 検査装置 Expired - Fee Related JP3722564B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25937796A JP3722564B2 (ja) 1996-09-30 1996-09-30 検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25937796A JP3722564B2 (ja) 1996-09-30 1996-09-30 検査装置

Publications (3)

Publication Number Publication Date
JPH10103916A JPH10103916A (ja) 1998-04-24
JPH10103916A5 JPH10103916A5 (enExample) 2004-10-07
JP3722564B2 true JP3722564B2 (ja) 2005-11-30

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ID=17333289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25937796A Expired - Fee Related JP3722564B2 (ja) 1996-09-30 1996-09-30 検査装置

Country Status (1)

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JP (1) JP3722564B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102253044A (zh) * 2010-12-21 2011-11-23 吴江市博众精工科技有限公司 一种量测机

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106643476B (zh) * 2016-12-29 2021-01-08 深圳市维度科技有限公司 参考镜偏摆装置
CN108257137A (zh) * 2017-11-27 2018-07-06 南京浩梁景信息科技有限公司 一种基于视觉光斑自动判读的角度测量方法及系统

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102253044A (zh) * 2010-12-21 2011-11-23 吴江市博众精工科技有限公司 一种量测机
CN102253044B (zh) * 2010-12-21 2013-06-05 吴江市博众精工科技有限公司 一种量测机

Also Published As

Publication number Publication date
JPH10103916A (ja) 1998-04-24

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